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21. 发明公开

EP2167921A4 REFERENCING OF THE BEATING SPECTRA OF FREQUENCY COMBS 审中-公开
标题翻译： REFERENCING频率梳的节拍谱
公开(公告)号：EP2167921A4
公开(公告)日：2013-12-04
申请号：EP08772853
申请日：2008-06-26
申请人： UNIV LAVAL
发明人： GIACCARI PHILIPPE , GENEST JEROME , TREMBLAY PIERRE , SAUCIER PHILIPPE , DESCHENES JEAN-DANIEL
IPC分类号： G01D3/02 , G01J3/45 , G01J3/457 , G01J9/04 , G01N21/25 , G01N37/00 , G01S7/487
CPC分类号： G01J3/45 , G01J3/453 , G01J3/457 , G01J9/04

22. 发明公开

EP2488917A1 ANORDNUNG ZUM ERZEUGEN EINES SIGNALS MIT EINSTELLBARER ZEIT- ODER PHASENLAGE 有权
标题翻译：安排产生THz信号可调时间或相位
公开(公告)号：EP2488917A1
公开(公告)日：2012-08-22
申请号：EP11704940.3
申请日：2011-02-11
申请人： Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V.
发明人： SARTORIUS, Bernd , ROEHLE, Helmut , STANZE, Dennis
IPC分类号： G02F2/00 , G01N21/35 , G01B9/02 , G01J9/04 , H04B10/142
CPC分类号： H04B10/548 , G01N21/3581 , G02F2/002 , G02F2201/02 , G02F2203/13 , G02F2203/50 , G02F2203/58 , H04B10/07 , H04B10/40
摘要： The invention relates to a system for producing a signal having a variably adjustable time position or phase position, comprising at least one light source for producing a first light component (2) having a first wavelength and a second light component (2') having a second wavelength deviating from the first wavelength and a phase modulator (5) for varying a phase of the first light component (2), wherein the system is designed to produce a beat note signal by superposing the two light components (2, 2') and has a common optical fiber (4) for coupling in both light components (2, 2'), wherein furthermore the phase modulator (5) is arranged at an end or in the course of said optical fiber (4) and is transparent to both light components (2, 2') and is designed to vary the phase of the first light component (2) selectively independently of a phase of the second light component (2') or more intensely than the phase of the second light component (2'). The invention further relates to a use of such a system.

23. 发明公开

EP1451524A4 PHASE-SHIFTING INTERFEROMETRY METHOD AND SYSTEM 有权
标题翻译： PHASENVERSCHIEBUNGSINTERFEROMETRIEVERFAHREN UND-SYSTEM
公开(公告)号：EP1451524A4
公开(公告)日：2007-10-31
申请号：EP02790004
申请日：2002-12-04
申请人： ZYGO CORP
发明人： DECK LESLIE L
IPC分类号： G01B9/02 , G01B11/02 , G01B11/06 , G01B11/24 , G01J3/45 , G01J9/02 , G01J9/04 , G01M11/00 , G01N21/19 , G01N21/21 , G01N21/45 , G01N21/958
CPC分类号： G01B11/06 , G01B9/02004 , G01B9/0201 , G01B9/02021 , G01B9/02028 , G01B9/02057 , G01B9/02081 , G01B11/2441 , G01B2290/45 , G01B2290/70
摘要： An interferometry method including: i) forming an optical interference image by combining different portions of an optical wave front (140) reflected from multiple surfaces (109); ii) recording (170) an interference signal at different locations of the optical interference image in response to varying a property of the optical wave front that causes pairs of the multiple surfaces that have different optical path separations to contribute differently to the interference signal; iii) transforming (180) the interference signal for at least one of the locations to produce a spectrum having a peak at a spectral coordinate corresponding to each pair of the multiple surfaces; and iv) identifying (190) the spectral coordinate of the peak corresponding to a selected pair of the multiple surfaces.
摘要翻译：一种干涉测量方法，包括：i）通过组合从多个表面（109）反射的光学波前（140）的不同部分来形成光学干涉图像; ii）响应于改变导致具有不同光路间隔的多个表面对的干扰信号不同地贡献的光波前的性质，在光干涉图像的不同位置记录（170）干扰信号; iii）对至少一个所述位置变换（180）所述干涉信号以产生在对应于所述多个表面中的每一对的谱坐标处具有峰值的谱; 和iv）识别（190）对应于选定的多个表面对的峰的光谱坐标。

24. 发明授权

EP1193483B1 Method and system for optical heterodyne detection of an optical signal 有权
标题翻译：方法和系统，用于光外差检测的光信号的
公开(公告)号：EP1193483B1
公开(公告)日：2006-11-22
申请号：EP01117550.2
申请日：2001-07-20
申请人： Agilent Technologies, Inc. (a Delaware corporation)
发明人： Sorin, Wayne V. , Szfraniec, Bogdan , Baney, Douglas M.
IPC分类号： G01J9/04
CPC分类号： H04B10/60 , G01J9/04 , H04B10/64

25. 发明公开

EP1303736A4 SYSTEMS AND METHODS FOR QUANTIFYING NONLINEARITIES IN INTERFEROMETRY SYSTEMS 有权
标题翻译：西班牙语系统中的系统维多利亚电力公司
公开(公告)号：EP1303736A4
公开(公告)日：2006-10-04
申请号：EP00993117
申请日：2000-11-17
申请人： ZYGO CORP
发明人： HILL HENRY A
IPC分类号： G01B9/02 , G01J9/02 , G01J9/04 , G01N21/45 , G03F7/20 , H01L21/027
CPC分类号： G01B9/02007 , G01B9/02002 , G01B9/02027 , G01B9/02045 , G01B9/02059 , G01B9/02084 , G01B2290/15 , G01B2290/45 , G01B2290/70 , G01N21/45 , G03F7/70775
摘要： The invention features interference signals for each of multiple Doppler shifts to thereby resolve nonlinearities, e.g., cyclic errors (90, 91, 92, 95), that may otherwise overlap spectrally with a dominant interference signal, and also interpolates the contributions of the nonlinearities to measurements at different doppler shifts. The time varying interference signal or the phase extracted from interference signal is Fourier transformed and at least some of the nonlinearities are associated with peaks in the square modulus of the Fourier transformed signal. The amplitude and phase of the Fourier transform at the frequency of each peak are used to quantify the nonlinearities. The quantified nonlinearities are used to correct optical pathlength measurements by the system.
摘要翻译：本发明的特征在于干涉测量系统和方法，其量化由干涉测量系统产生的干扰信号中的非线性，例如循环误差。系统和方法分析多个多普勒频移中的每一个的干扰信号，从而解析否则可能与主要干扰信号频谱重叠的非线性，以及将非线性的贡献内插到不同多普勒频移处的测量。由时变干扰信号提取的时变干扰信号或相位被傅里叶变换，并且至少一些非线性与傅立叶变换信号的平方（即功率谱）的峰值相关。在每个这样的峰值的频率处的傅里叶变换的幅度和相位用于量化相关联的非线性。量化的非线性被用于校正系统的光程长度测量。一个或多个量化非线性的大小的变化也可以用于识别干涉测量系统的分量的劣化。

26. 发明公开

EP1669730A2 Heterodyne-based optical spectrum analysis using data clock sampling 审中-公开
标题翻译： Auf Heterodyntechnik basierende optische Spektralanalyse mit auf Datentakt basierendem Abtasten
公开(公告)号：EP1669730A2
公开(公告)日：2006-06-14
申请号：EP05008566.1
申请日：2005-04-19
申请人： Agilent Technologies Inc. (a Delaware Corporation)
发明人： MCAlexander, William Ian , Szafraniec, Bogdan
IPC分类号： G01J9/04
CPC分类号： G01J9/04
摘要： A complex spectrum related to a carrier signal (40) that is modulated (26) with random data is measured as a function of the data clock so that the randomness that is contributed by the modulation of random data can be ignored. In one embodiment, the complex spectrum that is expressed in terms of both spectral amplitude and spectral phase is sampled (76) only at the carrier frequency and at the frequencies that are away from the carrier signal by integral multiples of the clock frequency. This sampling approach reduces the complex spectrum to only those data points that are needed to characterize the average pulse shape of the modulated carrier signal.
摘要翻译：测量与随机数据被调制（26）的载波信号（40）有关的复谱作为数据时钟的函数，从而可以忽略由随机数据的调制贡献的随机性。在一个实施例中，仅在时钟频率的整数倍的载波频率和远离载波信号的频率上对以频谱幅度和频谱相位表示的复谱进行采样（76）。该采样方法将复谱减少到只需要表征调制载波信号的平均脉冲形状的那些数据点。

27. 发明公开

EP1298422A3 Heterodyne based optical spectrum analysis with reduced data acquisition requirement 有权
标题翻译：具有降低的数据收集需要基于外差光学频谱分析
公开(公告)号：EP1298422A3
公开(公告)日：2004-12-01
申请号：EP02016648.4
申请日：2002-07-25
申请人： Agilent Technologies, Inc.
发明人： Pering, Richard D. , Baney, Douglas M.
IPC分类号： G01J9/04
CPC分类号： G01J9/04
摘要： Heterodyne based optical spectrum analysis (OSA) involves mixing an input signal (402) with a swept local oscillator signal (406) to generate a heterodyne beat signal and then stretching the heterodyne beat signal before the signal is sampled. A system for optical spectrum analysis includes a local oscillator source (405), an optical coupler (410), a heterodyne receiver (412), and a processor (416). A circuit for stretching the heterodyne beat signal is included in the heterodyne receiver and may include a diode (674) in series with a capacitor (676) and a resistor (678) or a diode (874) in series with a capacitor (876) and a switch (880). Stretching the heterodyne beat signal involves extending the duration of the signal so that the signal can be detected with fewer samples per unit of time than an unstretched signal. Another embodiment of an OSA includes a first data acquisition unit for obtaining low resolution data and a second data acquisition unit for obtaining high resolution data.

28. 发明公开

EP1193483A3 Method and system for optical heterodyne detection of an optical signal 有权
标题翻译：方法和系统，用于光外差检测的光信号的
公开(公告)号：EP1193483A3
公开(公告)日：2004-04-28
申请号：EP01117550.2
申请日：2001-07-20
申请人： Agilent Technologies, Inc. (a Delaware corporation)
发明人： Sorin, Wayne V. , Szfraniec, Bogdan , Baney, Douglas M.
IPC分类号： G01J9/04
CPC分类号： H04B10/60 , G01J9/04 , H04B10/64
摘要： An optical heterodyne detection system in accordance with an embodiment of the invention includes two optical receivers (232 and 242) for separately measuring the power of an input signal (202) and a local oscillator signal (206) before the signals are combined. The measurements of the input signal and the local oscillator signal are then utilized by a processor (216) to enhance the heterodyne signal to noise ratio by removing the intensity noise contributed by the input signal and the local oscillator signal. By measuring portions of the input signal power and the local oscillator signal power and then subtracting out the scaled quantities from the photocurrent measurement during signal processing, the signal to noise of the heterodyne signal is improved beyond that which is accomplished by known balanced receivers.

29. 发明公开

EP1231455A2 Method and system for optical spectrum analysis with a depolarized local oscillator signal 审中-公开
标题翻译：用于光学频谱分析方法和装置，使用一个去极化所述本地振荡器信号
公开(公告)号：EP1231455A2
公开(公告)日：2002-08-14
申请号：EP01121998.7
申请日：2001-09-13
申请人： Agilent Technologies, Inc. (a Delaware corporation)
发明人： Szafraniec, Bogdan
IPC分类号： G01J9/04
CPC分类号： G01J9/04
摘要： An optical spectrum analyzer involves a swept local oscillator signal (306) that is depolarized before the swept local oscillator signal is combined with an input signal (302). An embodiment of a system for optical spectrum analysis includes a depolarizer (307), an optical coupler (310), and a heterodyne receiver (312). The depolarizer has an input to receive a swept local oscillator signal and an output for outputting a depolarized swept local oscillator signal. The optical coupler has a first input and a second input, the first input receiving an input signal, the second input being optically connected to the depolarizer to receive the depolarized swept local oscillator signal. The optical coupler also has an output for outputting a combined optical signal that includes the input signal and the depolarized swept local oscillator signal. The heterodyne receiver has an input for receiving the combined optical signal from the optical coupler and an output for outputting an electrical signal representative of the combined optical signal.
摘要翻译：光谱分析仪涉及扫频本地振荡器信号（306）之前，扫掠本地振荡器信号在输入信号（302）与组合并被去极化。用于光学频谱分析的系统的实施例包括光耦合器（310）和一个外差式接收机（312）的一个去偏振器（307）。消偏振器具有输入，用于接收扫掠的本地振荡器信号，并且输出用于输出铃声消偏振席卷本地振荡器信号。光耦合器具有第一输入和第二输入，所述第一输入处接收输入信号，所述第二输入被光学地连接至所述解偏光器以接收所述消偏振席卷本地振荡器信号。因此，光学耦合器具有输出用于输出铃声的组合光信号没有包括所述输入信号和所述去极化扫频本地振荡器信号。外差接收器具有输入用于从光耦合器和输出接收组合的光信号输出用于启动电代表组合光信号的信号。

30. 发明授权

EP0567701B1 Inspection method and apparatus 失效
标题翻译：用于检查的方法和装置
公开(公告)号：EP0567701B1
公开(公告)日：1998-01-14
申请号：EP92305510.7
申请日：1992-06-16
申请人： CANON KABUSHIKI KAISHA
发明人： Tsuji, Toshihiko, c/o Canon Kabushiki Kaisha , Nose, Noriyuki, c/o Canon Kabushiki Kaisha , Yoshii, Minoru, c/o Canon Kabushiki Kaisha , Miyazaki, Kyoichi, c/o Canon Kabushiki Kaisha , Takeuchi, Seiji, c/o Canon Kabushiki Kaisha
IPC分类号： G01N21/88 , G01J9/04
CPC分类号： G03F7/70616 , G01J9/04 , G01J2009/0261 , G01N21/88 , G01N21/8806 , G01N21/94 , G03F7/7065 , G03F7/70916

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