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1. 发明公开

EP1001301A2 Optical element with alignment mark, and optical system having such optical element 有权
标题翻译： Optisches Element mit Justiermarke und optisches System mit einem solchen Element
公开(公告)号：EP1001301A2
公开(公告)日：2000-05-17
申请号：EP99308877.2
申请日：1999-11-08
申请人： CANON KABUSHIKI KAISHA
发明人： Tsuji, Toshihiko, c/o Canon Kabushiki Kaisha
IPC分类号： G02B27/32
CPC分类号： G02B27/62 , G02B5/1876 , G02B7/00
摘要： A diffractive optical element having a design wavelength λ, includes a diffractive surface for diffracting predetermined light corresponding to the design wavelength, and a mark shaped so that, with regard to the predetermined light, a phase difference corresponding to a multiple, by an integer, of the design wavelength λ is produced between (i) a light ray, of the predetermined light, as transmitted through or reflected by the mark and (ii) a light ray, of the predetermined light, as transmitted through or reflected by a portion adjacent to the mark, and that, with regard to second light of a second wavelength λ' different from the design wavelength λ, no phase difference corresponding to a multiple, by an integer, of the second wavelength λ' is produced between (a) a light ray, of the second light, as transmitted through or reflected by the mark and (b) a light ray, of the second light, as transmitted through or reflected by a portion adjacent to the mark.
摘要翻译：具有设计波长λ的衍射光学元件包括用于衍射与设计波长相对应的预定光的衍射面，以及对于预定光，相对于多个的整数的相位差，的设计波长λ之间产生，（i）通过标记透过或反射的预定光的光线和（ii）预定光的光线，通过相邻部分透射或反射的预定光线并且对于与设计波长λ不同的第二波长λ'的第二光，在（a）a和b之间不产生对应于第二波长λ'的整数的倍数的相位差通过第二光透射或反射的第二光的光线，以及（b）第二光的光线，透过或反射与标记相邻的部分。

2. 发明授权

EP0526982B1 Fine structure evaluation apparatus and method 失效
标题翻译：装置和方法用于评估精细结构
公开(公告)号：EP0526982B1
公开(公告)日：1996-08-28
申请号：EP92306053.7
申请日：1992-06-30
申请人： CANON KABUSHIKI KAISHA
发明人： Tsuji, Toshihiko, c/o Canon Kabushiki Kaisha , Saito, Kenji, c/o Canon Kabushiki Kaisha
IPC分类号： G01B11/02
CPC分类号： G01N21/9501 , G01B11/028 , G01N21/95607 , G01N21/95623 , G01N2021/95676

3. 发明公开

EP0598582A2 Method and apparatus for inspecting surfaces for foreign matter 失效
标题翻译： Verfahren und Vorrichtung zum Nachweis vonFremdkörpernaufOberflächen。
公开(公告)号：EP0598582A2
公开(公告)日：1994-05-25
申请号：EP93309113.4
申请日：1993-11-15
申请人： CANON KABUSHIKI KAISHA
发明人： Yoshii, Minoru, c/o Canon Kabushiki Kaisha , Nose, Noriyuki, c/o Canon Kabushiki Kaisha , Mori, Tetsuzo, c/o Canon Kabushiki Kaisha , Miyazaki, Kyoichi, c/o Canon Kabushiki Kaisha , Tsuji, Toshihiko, c/o Canon Kabushiki Kaisha , Takeuchi, Seiji, c/o Canon Kabushiki Kaisha
IPC分类号： G01N21/88 , G03F7/20
CPC分类号： G03F7/70616 , G01N21/94 , G01N2021/4792 , G03F7/7065 , G03F7/70916
摘要： An inspection method includes the steps of forming a first beam of first polarization and a second beam of second polarization different from the first polarization, illuminating a surface to be inspected, with the first beam, and detecting an interference beam resulting from interference between the second beam and a particular beam being scattered from the surface illuminated with the first beam and advancing in a direction sideways to the direction of illumination with the first beam, the scattered beam having its polarization being changed from the first polarization.
摘要翻译：一种检查方法包括以下步骤：利用第一光束形成第一偏振光的第一光束和与第一偏振不同的第二偏振的第二光束照射待检查的表面，并且检测由第二光束产生的干涉光束光束和特定光束从用第一光束照射的表面散射并且沿着与第一光束的照明方向横向的方向前进，散射光束具有从第一偏振变化的偏振光。

4. 发明公开

EP0598582A3 Method and apparatus for inspecting surfaces for foreign matter 失效
标题翻译：用于检查外部表面的方法和装置。
公开(公告)号：EP0598582A3
公开(公告)日：1994-09-14
申请号：EP93309113.4
申请日：1993-11-15
申请人： CANON KABUSHIKI KAISHA
发明人： Yoshii, Minoru, c/o Canon Kabushiki Kaisha , Nose, Noriyuki, c/o Canon Kabushiki Kaisha , Mori, Tetsuzo, c/o Canon Kabushiki Kaisha , Miyazaki, Kyoichi, c/o Canon Kabushiki Kaisha , Tsuji, Toshihiko, c/o Canon Kabushiki Kaisha , Takeuchi, Seiji, c/o Canon Kabushiki Kaisha
IPC分类号： G01N21/88 , G03F7/20
CPC分类号： G03F7/70616 , G01N21/94 , G01N2021/4792 , G03F7/7065 , G03F7/70916
摘要： An inspection method includes the steps of forming a first beam of first polarization and a second beam of second polarization different from the first polarization, illuminating a surface to be inspected, with the first beam, and detecting an interference beam resulting from interference between the second beam and a particular beam being scattered from the surface illuminated with the first beam and advancing in a direction sideways to the direction of illumination with the first beam, the scattered beam having its polarization being changed from the first polarization.
摘要翻译：一种检查方法包括以下步骤：利用第一光束形成第一偏振光的第一光束和与第一偏振不同的第二偏振的第二光束照射待检查的表面，并且检测由第二光束产生的干涉光束光束和特定光束从用第一光束照射的表面散射并且沿着与第一光束的照明方向横向的方向前进，散射光束具有从第一偏振变化的偏振光。

5. 发明公开

EP0567701A1 Inspection method and apparatus 失效
标题翻译： Verfahren undGerätzur Inspektion。
公开(公告)号：EP0567701A1
公开(公告)日：1993-11-03
申请号：EP92305510.7
申请日：1992-06-16
申请人： CANON KABUSHIKI KAISHA
发明人： Tsuji, Toshihiko, c/o Canon Kabushiki Kaisha , Nose, Noriyuki, c/o Canon Kabushiki Kaisha , Yoshii, Minoru, c/o Canon Kabushiki Kaisha , Miyazaki, Kyoichi, c/o Canon Kabushiki Kaisha , Takeuchi, Seiji, c/o Canon Kabushiki Kaisha
IPC分类号： G01N21/88 , G01J9/04
CPC分类号： G03F7/70616 , G01J9/04 , G01J2009/0261 , G01N21/88 , G01N21/8806 , G01N21/94 , G03F7/7065 , G03F7/70916
摘要： An inspection method and apparatus is disclosed, wherein a laser beam from a laser source is separated into two orthogonal, linearly polarized lights which are then modulated at different shift frequencies and are projected on the same spot on a surface to be inspected. Scattered light resulting in response to impingement of one laser beam and resulting from depolarization attributable to a particle or fault on the surface, and zero-th order diffraction light resulting from the other laser beam, are caused to interfere with each other. The resultant interference light is detected through heterodyne detecting method, whereby a beat signal is detected only on the basis of the light depolarized by the particle or fault. This assures precise inspection of a high S/N ratio to a particle or fault on the surface.
摘要翻译：公开了一种检查方法和装置，其中将来自激光源的激光束分成两个正交的线偏振光，然后以不同的移动频率进行调制，并将其投影在待检测的表面上的同一点上。导致响应于一个激光束的冲击并由归因于表面上的颗粒或故障引起的去极化以及由另一个激光束产生的零级衍射光的散射光彼此干涉。通过外差检测方法检测合成的干涉光，由此仅根据由粒子或故障去极化的光检测拍频信号。这确保了对表面上的颗粒或故障的高S / N比的精确检查。

6. 发明授权

EP0598582B1 INSPECTION METHOD AND APPARATUS 失效
标题翻译：检查过程和设备
公开(公告)号：EP0598582B1
公开(公告)日：2002-01-30
申请号：EP93309113.4
申请日：1993-11-15
申请人： CANON KABUSHIKI KAISHA
发明人： Yoshii, Minoru, c/o Canon Kabushiki Kaisha , Nose, Noriyuki, c/o Canon Kabushiki Kaisha , Mori, Tetsuzo, c/o Canon Kabushiki Kaisha , Miyazaki, Kyoichi, c/o Canon Kabushiki Kaisha , Tsuji, Toshihiko, c/o Canon Kabushiki Kaisha , Takeuchi, Seiji, c/o Canon Kabushiki Kaisha
IPC分类号： G01N21/88 , G03F7/20
CPC分类号： G03F7/70616 , G01N21/94 , G01N2021/4792 , G03F7/7065 , G03F7/70916

7. 发明授权

EP0567701B1 Inspection method and apparatus 失效
标题翻译：用于检查的方法和装置
公开(公告)号：EP0567701B1
公开(公告)日：1998-01-14
申请号：EP92305510.7
申请日：1992-06-16
申请人： CANON KABUSHIKI KAISHA
发明人： Tsuji, Toshihiko, c/o Canon Kabushiki Kaisha , Nose, Noriyuki, c/o Canon Kabushiki Kaisha , Yoshii, Minoru, c/o Canon Kabushiki Kaisha , Miyazaki, Kyoichi, c/o Canon Kabushiki Kaisha , Takeuchi, Seiji, c/o Canon Kabushiki Kaisha
IPC分类号： G01N21/88 , G01J9/04
CPC分类号： G03F7/70616 , G01J9/04 , G01J2009/0261 , G01N21/88 , G01N21/8806 , G01N21/94 , G03F7/7065 , G03F7/70916

8. 发明授权

EP1001301B2 Optical element with alignment mark, and optical system having such optical element 有权
标题翻译：具有对准和光学系统，其具有这样的元件的光学元件
公开(公告)号：EP1001301B2
公开(公告)日：2007-10-24
申请号：EP99308877.2
申请日：1999-11-08
申请人： CANON KABUSHIKI KAISHA
发明人： Tsuji, Toshihiko, c/o Canon Kabushiki Kaisha
IPC分类号： G02B27/32 , G02B27/62 , G02B5/18 , G02B7/00
CPC分类号： G02B27/62 , G02B5/1876 , G02B7/00

9. 发明授权

EP1001301B1 Optical element with alignment mark, and optical system having such optical element 有权
标题翻译：具有对准和光学系统，其具有这样的元件的光学元件
公开(公告)号：EP1001301B1
公开(公告)日：2004-06-09
申请号：EP99308877.2
申请日：1999-11-08
申请人： CANON KABUSHIKI KAISHA
发明人： Tsuji, Toshihiko, c/o Canon Kabushiki Kaisha
IPC分类号： G02B27/32 , G02B27/62 , G02B5/18 , G02B7/00
CPC分类号： G02B27/62 , G02B5/1876 , G02B7/00

10. 发明公开

EP0990933A2 Projection optical system for projection exposure apparatus 审中-公开
标题翻译： Optisches ProjektionssystemfürProjektionsbelichtungsgerät
公开(公告)号：EP0990933A2
公开(公告)日：2000-04-05
申请号：EP99307717.1
申请日：1999-09-30
申请人： CANON KABUSHIKI KAISHA
发明人： Tsuji, Toshihiko, c/o Canon Kabushiki Kaisha
IPC分类号： G02B7/02 , G03F7/20
CPC分类号： G03F7/70058 , G02B27/0018 , G02B27/0043 , G02B27/4211 , G02B27/4222 , G03F7/70241 , G03F7/70825
摘要： An optical unit and an optical instrument having the same, wherein the unit includes an optical element for deflecting light incident thereon toward different directions, and an attenuating device for attenuating light deflected in a predetermined direction, of the different directions.
摘要翻译：还原投影曝光装置（步进器）的投影透镜包括衍射光学元件（22），其减少像差并使光向不同方向偏转。被光吸收结构（26）衰减的偏转到不期望的用于图像形成的方向的不想要的方向（25）的光被衰减，以避免投影图像中的重影或闪光。冷却装置（27）被设置用于冷却衰减装置（26），并且确保由于热量而导致的筒体（21）的变形。衰减装置（26）优选通过多次反射进行操作。

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