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11. 发明公开

EP2293135A1 MOVABLE STRUCTURE AND MICRO-MIRROR ELEMENT USING THE SAME 审中-公开
标题翻译： BEGEGLICHE STRUKTUR UND MIKROSPIEGELELEMENT DAMIT
公开(公告)号：EP2293135A1
公开(公告)日：2011-03-09
申请号：EP09770196.5
申请日：2009-06-24
申请人： Panasonic Electric Works Co., Ltd.
发明人： UEDA, Hideki , NOGE, Hiroshi , KAWANO, Kiyohiko , TACHIBANA, Hiroaki
IPC分类号： G02B26/10 , B81B3/00 , G02B26/08 , H04N1/113
CPC分类号： G02B26/0841 , B81B3/007 , B81B2201/042 , B81B2203/0109 , H04N1/1017 , H04N1/193
摘要： In a moving structure, stability of swing motion of a moving plate is increased by enhancing tensional rigidity or flexural rigidity while restraining torsion rigidity of the hinge units. The hinge units 3 of ladder shape with honeycombed portions 3c are formed by twin supporting rods 3a and crosspieces 3b bridged between the twin supporting rods 3a so as to support the moving plate 2 rotatably. The tensional rigidity or the flexural rigidity is increased while restraining the torsion rigidity of the hinge units 3 by the honeycombed portions 3c of the hinge units 3.
摘要翻译：在移动结构中，通过在抑制铰链单元的扭转刚性的同时增强张力刚性或弯曲刚度来提高移动板的摆动运动的稳定性。具有蜂窝部分3c的梯形铰链单元3由双支撑杆3a和桥接在双支撑杆3a之间的横梁3b形成，以便可旋转地支撑移动板2。在铰链单元3的蜂窝部分3c抑制铰链单元3的扭转刚度的同时增加张力刚度或抗弯刚度。

12. 发明公开

EP2235821A1 MEMS RESONATOR STRUCTURE AND METHOD FOR USE IN ASSOCIATION WITH THE RESONATOR STRUCTURE 有权
标题翻译： MEMS谐振器和方法中使用与谐振器连接
公开(公告)号：EP2235821A1
公开(公告)日：2010-10-06
申请号：EP08862478.8
申请日：2008-11-26
申请人： Robert Bosch GmbH
发明人： LUTZ, Markus , PAN, Zhiyu , PARTRIDGE, Aaron
IPC分类号： H03H3/007 , H03H9/02 , B81B3/00
CPC分类号： H03H9/02244 , B81B3/007 , B81B3/0072 , B81B2201/0271 , B81B2203/0109 , B81B2203/0163 , H03H3/0076 , H03H9/02338 , H03H2009/0233 , H03H2009/02496 , H03H2009/02503
摘要： A microelectromechanical resonator may include one or more resonator masses that oscillates in a bulk mode and that includes a first plurality of regions each having a density, and a second plurality of regions each having a density, the density of each of the second plurality of regions differing from the density of each of the first plurality of regions. The second plurality of regions may be disposed in a non-uniform arrangement. The oscillation may include a first state in which the resonator mass is contracted, at least in part, in a first and/or a second direction, and expanded, at least in part, in a third and/or a fourth direction, the second direction being opposite the first direction, the fourth direction being opposite the third direction.

13. 发明公开

EP2161238A1 Structure tridimensionnelle très haute densité 有权
标题翻译： Dreidimensionale Struktur mit sehr hoher Dichte
公开(公告)号：EP2161238A1
公开(公告)日：2010-03-10
申请号：EP09169175.8
申请日：2009-09-01
申请人： STMicroelectronics (Tours) SAS
发明人： Morand, Jean-Luc
IPC分类号： B81B3/00 , H01M8/10 , H01L29/92
CPC分类号： B81B3/007 , B81B2203/033 , H01M2/0202 , H01M8/1286
摘要： L'invention concerne une structure tridimensionnelle formée dans un évidement d'un substrat délimité par des parois (13, 15, 17, 19), comprenant un grand nombre de lamelles parallélépipédiques rectangle (21) s'étendant à partir du fond de l'évidement jusqu'à la surface du substrat en étant orientées perpendiculairement les unes aux autres et selon un motif occupant toute la surface dudit évidement, certaines lamelles étant non sécantes à l'une des parois, chaque lamelle non sécante étant reliée à l'une des parois par au moins une autre lamelle perpendiculaire.
摘要翻译：该结构具有从凹部的底部延伸到基板表面的大量平行六面体薄片（21），同时彼此垂直取向并形成为覆盖凹部的整个表面的图案。一些叶片被非正切地放置到墙壁之一（13-19）中，其中每个非割线叶片通过另一垂直叶片连接到其中一个壁。基板和刀片由硅制成。叶片的厚度小于0.8微米，并且彼此分开距离小于0.8微米。

14. 发明公开

EP1998210A3 Methods of fabricating mems with a carrier for patterned mechanical strips and devices formed by same 审中-公开
标题翻译：一种用于生产MEMS的与载体结构化的金属带和器件被形成为使得处理
公开(公告)号：EP1998210A3
公开(公告)日：2009-03-04
申请号：EP08153791.2
申请日：2008-03-31
申请人： QUALCOMM MEMS Technologies, Inc.
发明人： Sampsell, Jeffrey Brian , Gally, Brian James , Floyd, Philip Don
IPC分类号： G02B26/00 , B81B3/00
CPC分类号： G02B26/0841 , B81B3/007 , B81B2201/042 , B81B2207/07 , B81B2207/092 , G02B5/284 , G02B26/001 , H01L31/04 , Y10T29/49126
摘要： Methods of fabricating a microelectromechanical systems (MEMS) device with a carrier for patterned mechanical strips and MEMS devices formed by the same are disclosed. In one embodiment, a MEMS device is fabricated by laminating a front substrate and a carrier, each of which has components preformed thereon. The front substrate is provided with stationary electrodes formed thereover. A carrier including movable electrodes formed thereover is attached to the front substrate. The movable electrodes are formed on the carrier by, for example, deposition and patterning. The carrier of some embodiments is released after transferring the movable electrodes to the front substrate. In other embodiments, the carrier stays over the front substrate, and serves as a backplate for the MEMS device. The methods not only reduce the manufacturing costs, but also provide a higher yield. The resulting MEMS devices can trap smaller volumes between laminated substrates and are less susceptible to pressure variations and moisture leakage.

15. 发明公开

EP1645022A4 PULSE DRIVE OF RESONANT MEMS DEVICES 有权
标题翻译：冲激响应控MEMS BLOCKS
公开(公告)号：EP1645022A4
公开(公告)日：2008-12-24
申请号：EP04755676
申请日：2004-06-16
申请人： TEXAS INSTRUMENTS INC
发明人： TURNER ARTHUR M , DEWA ANDREW S , HEATON MARK W , RODEN PHILIP A , SIMPSON CARTER B
IPC分类号： H02K33/00 , G02B26/08 , H02K33/16 , H02K35/00 , H02P25/02
CPC分类号： H02K33/16 , B81B3/007 , B81B2201/042 , G02B26/0833 , G02B26/085 , G02B26/101 , H02P25/032
摘要： System and method for establishing and maintaining resonant oscillations of a torsional hinged device such as a pivotally hinged mirror. The system and methods comprise a permanent magnet mounted to the pivoting mirror that interacts with an electromagnetic coil. The magnetic coil is periodically connected and disconnected from a DC power supply in response to a series of drive pulses having a timing and duration such that the magnetic forces generated by the interaction of the permanent magnet and the electromagnetic coil maintains resonant oscillations of the device.

16. 发明公开

EP1998211A2 Methods of fabricating mems with a shaped substrate and devices formed by same 审中-公开
标题翻译：一种用于生产MEMS的具有由此形成的成型基底和设备处理
公开(公告)号：EP1998211A2
公开(公告)日：2008-12-03
申请号：EP08153806.8
申请日：2008-03-31
申请人： Qualcomm Mems Technologies, Inc.
发明人： Sampsell, Jeffrey Brian , Gally, Brian James , Floyd, Philip, Don
IPC分类号： G02B26/00 , B81B3/00
CPC分类号： G02B26/0841 , B81B3/007 , B81B2201/042 , B81B2207/07 , B81B2207/092 , G02B5/284 , G02B26/001 , H01L31/04 , Y10T29/49126
摘要： Methods of fabricating a microelectromechanical systems (MEMS) device with shaped substrate and MEMS devices formed by the same are disclosed. In one embodiment, a MEMS device is fabricated by laminating a front substrate and a carrier, each of which has components preformed thereon. The front substrate is provided with stationary electrodes formed thereover. A carrier including movable electrodes formed thereover is attached to the front substrate. The carrier of some embodiments is released after transferring the movable electrodes to the front substrate. In other embodiments, the carrier stays over the front substrate, and serves as a backplate for the MEMS device. Features on the front substrate are shaped by embossing, by inscribing, or by patterning and etching. The methods not only reduce the manufacturing costs, but also provide a higher yield. The resulting MEMS devices can trap smaller volumes between laminated substrates and are less susceptible to pressure variations and moisture leakage.
摘要翻译：微机电系统（MEMS）装置与由相同的形成的成型基板和MEMS器件的制造方法是游离缺失盘。在一个，实施例的MEMS装置通过层叠前部衬底和载体，其每一个具有预成型于其上的组件制成。前基板上设置有上形成有固定电极。载体，包括在被附接到前部衬底在那里形成可动电极。一些实施例的载体传递环后释放可动电极的前部衬底。在其它实施方案中，载体保持在所述前基片，并作为MEMS器件的背板。在前面基板的特征由压花形，通过刻或通过图案化和蚀刻。该方法不仅降低制造成本，因此而提供更高的收益率。所得MEMS装置可以层叠基板之间并捕获更小的体积对压力变化和湿气泄漏不敏感。

17. 发明公开

EP1939599A2 Pressure transducer diaphragm and method of making same 审中-公开
标题翻译：。en。en。。。。。。。。。。。。。。。。。。
公开(公告)号：EP1939599A2
公开(公告)日：2008-07-02
申请号：EP07123556.8
申请日：2007-12-19
申请人： General Electric Company
发明人： Craddock, Russell William , Kinnell, Peter Ken
IPC分类号： G01L9/00
CPC分类号： G01L9/0042 , B81B3/007
摘要： A method of making a pressure transducer diaphragm 10. One or more trenches 54 are etched in a first surface 63 of a first substrate 50. The trench is rendered etch resistant. A cavity 60 is then formed in a second opposite surface of the first substrate defining a diaphragm supported by a frame with one or more hollow bosses 14 stiffening the membrane.
摘要翻译：制造压力换能器隔膜10的方法。在第一基底50的第一表面63中蚀刻一个或多个沟槽54.该沟槽具有耐蚀刻性。然后在第一衬底的第二相对表面中形成空腔60，该第二衬底限定由框架支撑的隔膜，该隔膜具有加强膜的一个或多个中空凸起14。

18. 发明公开

EP1640781A2 Scanning device and fabrication method thereof 审中-公开
标题翻译： Abtastvorrichtung und Methode zu dessen Herstellung
公开(公告)号：EP1640781A2
公开(公告)日：2006-03-29
申请号：EP05291734.1
申请日：2005-08-16
申请人： LG Electronics, Inc.
发明人： Yee, Young-Joo, Gyeongnam Apt. 707-304 , Ji, Chang-Hyeon , Kim, Seong-Hyeok
IPC分类号： G02B26/08
CPC分类号： B81B3/007 , B81B2201/042 , B81B2203/0109 , G02B26/0841
摘要： A scanning device includes a mirror unit formed on a substrate so as to be pivotable centering around one axis for adjusting the direction of reflected light; a support frame formed at one surface of the mirror unit for preventing dynamic deflection of the mirror unit and supporting the mirror unit; and a driving unit provided on the substrate and driving the mirror unit. Thus, a dynamic deflection phenomenon does not occur when the mirror unit is pivoted centering around the pivoting axis. Accordingly, stable operation is possible and the angle of rotation of the mirror unit can be accurately adjusted, so that the scanning device can be effectively used in a high-speed precision scanning system.
摘要翻译：扫描装置包括形成在基板上的反射镜单元，以便围绕一个轴线枢转以调节反射光的方向; 支撑框架，形成在反射镜单元的一个表面，用于防止反射镜单元的动态偏转并支撑反射镜单元; 以及设置在基板上并驱动反射镜单元的驱动单元。因此，当镜单元围绕枢转轴线枢转时，不会发生动态偏转现象。因此，可以进行稳定的动作，能够精确地调整反射镜单元的旋转角度，能够将扫描装置有效地用于高速精密扫描系统。

19. 发明公开

EP1260019A1 MICRO-ELECTROMECHANICAL STRUCTURE RESONATOR METHOD OF MAKING 有权
标题翻译：用于生产微机电谐振器和过程
公开(公告)号：EP1260019A1
公开(公告)日：2002-11-27
申请号：EP01908666.9
申请日：2001-01-22
申请人： INTEL CORPORATION
发明人： MA, Qing , CHENG, Peng
IPC分类号： H03H3/00 , H03H3/007 , G11B21/16 , G11B21/21
CPC分类号： H03H3/0077 , B81B3/007 , G11B5/484 , G11B21/16 , H03H9/24 , H03H9/2463 , H03H2009/0233
摘要： The invention relates to a hollow microbeam that is fabricated upon a base or pedestal. Processing of the hollow microbeam includes forming at least one hollow channel in the microbeam by removing temporary fillers after formation of the microbeam. The inventive microbeam may provide at least an order of magnitude increase in oscillational frequency over a solid microbeam.

20. 发明公开

EP0674181A3 Micro mechanical component and production process thereof 失效
标题翻译：微机械部件及其制造相同的过程。
公开(公告)号：EP0674181A3
公开(公告)日：1997-02-05
申请号：EP95104148.2
申请日：1995-03-21
申请人： SUMITOMO ELECTRIC INDUSTRIES, LTD.
发明人： Shiomi, Hiromu, c/o Itami Works of Sumimoto Elec. , Nishibayahi. Yoshiki, c/o Itami Works of Sumimoto , Shikata, Shin-ichi, c/o Itami Works of Sumimoto
IPC分类号： G01P15/08 , G01L1/18
CPC分类号： G01P15/0802 , B81B3/007 , B81B2201/0235 , B81B2201/0264 , B81B2201/034 , B81B2201/035 , B81B2201/054 , B81B2203/0118 , B81B2203/04 , B81C1/0015 , B81C1/00682 , B81C2201/0109 , G01H3/08 , G01H11/00 , G01H11/06 , G01P15/125 , G01P2015/0828
摘要： A micro mechanical component of the present invention comprises a base, and at least one drive portion supported on the base and relatively driving to the base, in which the drive portion is formed from a diamond layer. Thus, because the drive portion has excellent mechanical strength and modulus of elasticity, the operational performance can be greatly improved as a micro mechanical component processed in a fine shape, from the conventional level. Further, because the drive portion exhibits excellent device characteristics under severe circumstances, the range of applications as a micro mechanical component can be widely expanded from the conventional range.

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