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11. 发明公开

EP2216804A1 PLASMA PROCESSING APPARATUS 审中-公开
标题翻译：等离子体处理装置
公开(公告)号：EP2216804A1
公开(公告)日：2010-08-11
申请号：EP08848700.4
申请日：2008-11-12
申请人： EMD Corporation , Evatech Co., Ltd.
发明人： SETSUHARA, Yuichi , EBE, Akinori , INO, Eiji , ISHIHARA, Shinichiro , ASHIDA, Hajime , WATANABE, Akira
IPC分类号： H01L21/205 , C23C16/509 , H01L21/3065
CPC分类号： C23C16/503 , C03C17/22 , C03C2217/28 , C03C2218/153 , C23C16/24 , C23C16/509 , H01J37/321 , H01J37/3211 , H01J37/32715
摘要： The present invention aims at providing a plasma processing apparatus for performing a plasma processing on a planar substrate body to be processed, the apparatus being capable of generating the plasma with good uniformity and efficiently using the plasma, and having a high productivity. That is, the plasma processing apparatus according to the present invention includes: a vacuum chamber 11; one or plural antenna supporters (plasma generator supporters) 12 projecting into the internal space 111 of the vacuum chamber 11; radio-frequency antennas (plasma generators) 13 attached to each antenna supporter 12; and a pair of substrate body holders 16 provided across the antenna supporter 12 in the vacuum chamber 11, for holding a planar substrate body to be processed 21.
摘要翻译：本发明的目的在于提供一种等离子体处理装置，该等离子体处理装置用于对平面状的被处理基板进行等离子体处理，该等离子体处理装置能够良好地均匀地生成等离子体，并且能够高效率地使用等离子体，生产率高。即，根据本发明的等离子体处理装置包括：真空室11; 伸入真空室11的内部空间111的一个或多个天线支撑件（等离子体发生器支撑件）12; 连接到每个天线支架12的射频天线（等离子体发生器）13; 以及一对基板主体保持件16，设置在真空室11中的天线支撑件12的两侧，用于保持平面的待处理基板主体21。

12. 发明公开

EP2200172A1 MOTOR CONTROL CIRCUIT, MOTOR SYSTEM, AND MOTOR CONTROL METHOD 审中-公开
标题翻译： MOTORSTEUERUNGSSCHALTUNG，MOTORSTEUERUNGSVERFAHREN
公开(公告)号：EP2200172A1
公开(公告)日：2010-06-23
申请号：EP09718472.5
申请日：2009-02-19
申请人： Asahi Kasei EMD Corporation
发明人： FUKUSHIMA, Takashi
IPC分类号： H02P6/24 , H02P3/18
CPC分类号： H02P6/24 , H02P3/18
摘要： In a motor control circuit which controls energization of a coil on the basis of a detection result of a rotor position, the control is performed so that the continuous rotation of the rotor due to its own inertia is suppressed and stopped in a short time, and that the reverse rotation of the rotor is prevented. When an external control signal CTL is changed from L to H, the normal rotation control is switched to reverse rotation control, so that a reverse brake state is effected. When motor rotation speed is monitored and reduced to a set rotation speed, a brake control signal SPSB is changed from L to H, so that a short brake state is effected. However, the motor continues to be rotated by its own inertia, and a position detection signal HALL is changed. Thus, reverse brake control is temporarily performed (only during a time period corresponding to a pulse width T RB ). The short pulse reverse brake control is intermittently performed until the motor is completely stopped. Therefore, it is possible to stop the motor in a shorter time as compared with the case where the motor is stopped only by the short brake control after the motor is decelerated to a rotation speed immediately before being stopped.
摘要翻译：在基于转子位置的检测结果来控制线圈通电的电动机控制电路中，进行控制，使得转子在其自身惯性下的连续旋转在短时间内被抑制和停止，并且防止了转子的反转。当外部控制信号CTL从L变为H时，正常旋转控制切换到反向旋转控制，从而实现反向制动状态。当电机转速被监测并降低到设定的转速时，制动控制信号SPSB从L变为H，从而实现短的制动状态。然而，马达继续通过其惯性旋转，并且改变位置检测信号HALL。因此，暂时执行反向制动控制（仅在对应于脉冲宽度T RB的时间段内）。间歇地执行短脉冲逆向制动控制，直到电机完全停止。因此，与马达在停止后马达减速到转速之后的马达仅通过短路制动控制的情况相比，可以在更短的时间内停止马达。

13. 发明公开

EP2110639A1 SPATIAL INFORMATION DETECTING SYSTEM, ITS DETECTING METHOD, AND SPATIAL INFORMATION DETECTING DEVICE 审中-公开
标题翻译： SYSTEM FOR空间信息检测方法的查看客房信息的检测机构的检测和设备
公开(公告)号：EP2110639A1
公开(公告)日：2009-10-21
申请号：EP08711031.8
申请日：2008-02-08
申请人： Asahi Kasei EMD Corporation
发明人： NAKAMURA, Takenobu , YAMASHITA, Masaya
IPC分类号： G01B7/00 , G01B7/30
CPC分类号： G01B7/003 , G01D5/145
摘要： The present invention relates to a spatial information detecting system that can conduct continuous measurement using an alternating magnetic field, and that has a high degree of freedom of frequency settings and a simple configuration. A magnetic sensor driving unit (23) drives a magnetic sensor (21) via a multiplexer unit (22). Signals of the magnetic sensor are converted from analog signals to digital signals, and are transmitted from a data transmitting unit (26) to an arithmetic unit (3) as magnetic data. A Fourier transform unit (32) calculates the amplitudes and phases of a plurality of frequency components of individual axes from the output signal of the magnetic data receiving unit (31). A magnetic field vector calculating unit (33) calculates signs of the amplitudes of the individual axes from phase relationships between the plurality of frequency components on the individual axes from the output signal from the Fourier transform unit (32), and calculates the magnetic field vector representing the direction and magnitude of the magnetic field from the signs and amplitudes. A direction calculating unit (34) calculates the direction of the information terminal (2).
摘要翻译：本发明涉及一种空间信息检测系统确实可以进行使用简单的交变磁场连续测量，并做具有高度的频率设置和配置自由度。一种磁传感器驱动部（23）驱动经由多路复用单元（22）的磁传感器（21）。磁传感器的信号从模拟信号作为磁数据转换成数字信号，和为反式mitted从数据发送单元（26），以在计算单元（3）。傅立叶变换单元（32）计算接收单元（31）从所述磁数据的输出信号各轴的频率分量的多个振幅和相位。磁场矢量算出部（33）计算从来自输出信号的各轴从傅立叶变换单元（32）的频率分量的多元性之间的相位关系的各轴的振幅的符号，并且计算磁场矢量表示从符号和振幅的方向和磁场的幅度。 A方向计算单元（34）计算的信息终端（2）的方向。

14. 发明公开

EP2006700A9 MAGNETIC SENSOR AND METHOD FOR FABRICATING THE SAME 有权
标题翻译：磁传感器及其制造方法
公开(公告)号：EP2006700A9
公开(公告)日：2009-07-29
申请号：EP07740148.7
申请日：2007-03-28
申请人： Asahi Kasei EMD Corporation
发明人： KATAOKA, Makoto , KAKUTA, Katsumi , YAMAGATA, Yo , KANAYAMA, Yuichi
IPC分类号： G01R33/07 , H01L43/06
CPC分类号： G01R33/07 , G01R33/0011 , H01L27/22 , H01L43/06
摘要： The present invention relates to a magnetic sensor with which magnetic characteristics are made extremely stable by consideration of an area of contact of a base layer of a magnetic substance and a semiconductor substrate. On a semiconductor substrate (111) a plurality of Hall elements (112a, 112b) are embedded so as to be coplanar to a top surface of the semiconductor substrate while being mutually spaced apart by a predetermined distance, and above the Hall elements and the semiconductor substrate, a base layer (114), having coefficient of thermal expansion differing from that of the Hall elements and partially covers a region of each Hall elements, is formed via a protective layer (113), and a magnetic flux concentrator (115), having an area larger than the base layer and with magnetic amplification, is formed on the base layer. An area of contact of the base layer of the magnetic substance and the semiconductor substrate is made small to lessen the generation of an offset voltage.
摘要翻译：本发明涉及考虑到磁性体的基底层与半导体基板的接触面积而使磁特性极其稳定的磁性传感器。在半导体衬底（111）上，多个霍尔元件（112a，112b）被嵌入，以便与半导体衬底的顶面共面，同时彼此间隔开预定的距离，并且在霍尔元件和半导体衬底，通过保护层（113）和磁通量集中器（115）形成热膨胀系数不同于霍尔元件的热膨胀系数并部分地覆盖每个霍尔元件的区域的基层（114）具有大于基极层并具有磁放大的面积的基极层形成在基极层上。减小磁性物质基层与半导体衬底的接触面积以减小偏移电压的产生。

15. 发明公开

EP2058944A1 TRANSCONDUCTANCE AMPLIFIER 有权
标题翻译： TRANSKONDUKTANZVERSTÄRKER
公开(公告)号：EP2058944A1
公开(公告)日：2009-05-13
申请号：EP07792993.3
申请日：2007-08-27
申请人： Asahi Kasei EMD Corporation
发明人： AIBA, Yusuke
IPC分类号： H03G3/10 , H03F3/34 , H03F3/45
CPC分类号： H03G1/0029 , H03F1/3211 , H03F3/45179 , H03F3/45183 , H03F3/45188 , H03F2203/45052 , H03F2203/45066 , H03F2203/45101 , H03F2203/45292 , H03F2203/45356 , H03F2203/45394 , H03F2203/45481 , H03F2203/45586 , H03G1/0023 , H03G1/04
摘要： Provided is a transconductance amplifier capable of suppressing variation in the range of a linear relationship between an input voltage and an output current depending on the magnitude of a tuning voltage Vctrl, thereby adjusting transconductance over a wider range of operating input voltages. The transconductance amplifier is configured by a differential pair formed of MOS transistors (111, 112) having a common source, MOS transistors (113, 114), amplifiers (106, 107), a voltage generator circuit (100), and a differential-pair input voltage generator circuit (120). An input differential common voltage Vcm of all differential signals inputted to the differential pair is adjusted so that a difference between Vcm and Vctrl is equal to a constant, in accordance with a change in the tuning voltage Vctrl that controls the transconductance. This enables keeping constant the range in which the transconductance amplifier can achieve good linearity.
摘要翻译：提供了能够根据调谐电压Vctr1的大小来抑制输入电压和输出电流之间的线性关系的范围的变化的跨导放大器，由此在更宽的工作输入电压范围内调节跨导。跨导放大器由具有公共源的MOS晶体管（111,112），MOS晶体管（113,114），放大器（106,107），电压发生器电路（100）和差分放大器构成的差分对构成，对输入电压发生器电路（120）。根据控制跨导的调谐电压Vctrl的变化，调整输入到差分对的所有差分信号的输入差分公共电压Vcm，使得Vcm和Vctr1之间的差等于常数。这使得跨导放大器可以实现良好线性度的范围保持恒定。

16. 发明公开

EP2056461A1 DELTA-SIGMA MODULATOR 审中-公开
标题翻译： Δ-Σ调制器
公开(公告)号：EP2056461A1
公开(公告)日：2009-05-06
申请号：EP07792809.1
申请日：2007-08-21
申请人： Asahi Kasei EMD Corporation
发明人： AIBA, Yusuke
IPC分类号： H03M3/02
CPC分类号： H03M3/372 , H03M1/66 , H03M3/43 , H03M3/456
摘要： The present invention provides a continuous-time delta-sigma modulator which is configured with an SC (SCR) feedback DA (103) for improving tolerance to jitter for a clock signal and operates stably by maintaining a certain feedback amount without being influenced by a change in a production process thereof or an operating temperature condition thereof. By adjusting a reference voltage Vref that determines an output voltage of the SC feedback DA (103), it is possible to feed back a certain amount of charge from the SC feedback DA (103) to a loop filter (101). Thereby, operation of the delta-sigma modulator is stabilized.
摘要翻译：本发明提供一种连续时间Δ-Σ调制器，其配置有用于改善对时钟信号的抖动容限的SC（SCR）反馈DA（103），并且通过维持一定的反馈量而不受变化的影响而稳定地操作在其生产过程中或其工作温度条件下。通过调整确定SC反馈DA（103）的输出电压的参考电压Vref，可以将来自SC反馈DA（103）的一定量的电荷反馈到环路滤波器（101）。因此，Δ-Σ调制器的操作是稳定的。

17. 发明公开

EP2019488A1 DRIVE DEVICE 有权
标题翻译： ANTRIEBSVORRICHTUNG
公开(公告)号：EP2019488A1
公开(公告)日：2009-01-28
申请号：EP07743381.1
申请日：2007-05-15
申请人： Asahi Kasei EMD Corporation
发明人： KAIHO, Toshio , MACHIDA, Junichi
IPC分类号： H03K17/687
CPC分类号： H03F3/387 , H03F1/3211 , H03F1/34 , H03F3/2173 , H03F3/45475 , H03F2200/351 , H03F2203/45138 , H03F2203/45526 , H03K5/06 , H03K7/08 , H03K17/284
摘要： Output signal waveform having high input signal reproducibility is outputted from inductive load or the like. Output signals V1a and V1b obtained by feeding back an output signal Vp-n1 at output terminals (50 and 51) across load L1 to input terminals (9a and 9b) are compared with an input signal Vin to detect an error between signals; a first error suppression signal Vout1 is produced such that the detected error between the signals is suppressed; inclination of first error suppression signal Vout1 is detected, and a second error suppression signal Vout2 is produced such that inclination error to input signal Vin is suppressed based on the detected inclination signal; and the ratio between the period that electric power is supplied to the load L1 and the period that electric power is not supplied to the load L1 is modified according to the error of the error suppression signal.
摘要翻译：从感性负载等输出具有高输入信号再现性的输出信号波形。将通过负载L1的输出端子（50和51）上的输出信号Vp-n1输出到输入端子（9a和9b）而获得的输出信号V1a和V1b与输入信号Vin进行比较，以检测信号之间的误差; 产生第一误差抑制信号Vout1，使得检测到的信号误差被抑制; 检测到第一误差抑制信号Vout1的倾斜，并且产生第二误差抑制信号Vout2，使得基于检测到的倾斜信号抑制对输入信号Vin的倾斜误差; 并且根据误差抑制信号的误差来修改向负载L1提供电力的周期与不向负载L1供电的周期之间的比率。

18. 发明授权

EP1380927B1 POINTING DEVICE 有权
标题翻译：指点设备
公开(公告)号：EP1380927B1
公开(公告)日：2008-12-31
申请号：EP02718620.4
申请日：2002-04-19
申请人： Asahi Kasei EMD Corporation
发明人： TAKATSUKA, Toshinori , ISHIBASHI, Kazutoshi , YAMASHITA, Masataka
IPC分类号： G06F3/033
CPC分类号： G06F3/0338 , G05G9/047 , G05G2009/04744 , G05G2009/04755
摘要： A pointing device being improved in assembling performance, capable of being downsized, being long in product life. Magnetic sensors (21) are disposed on a mounting substrate (24), two each symmetrically along the X axis and Y axis. A switch (28) is disposed on the silicone resin (23) side of the mounting substrate (24) to provide a switching function so that the switching function is satisfied when a magnet cover (25) is pushed in a magnet (22) direction. Although originally designed to output coordinates values of an input point, the pointing device can be provided with a determining function in addition to coordinates values by being given a switching function. Silicone resin (23), when under an external force, easily deforms, and, when the external force is removed, immediately restores to an initial condition not under the external force.

19. 发明授权

EP1143536B1 SEMICONDUCTOR DEVICE 有权
标题翻译：半导体器件
公开(公告)号：EP1143536B1
公开(公告)日：2008-12-03
申请号：EP99959791.7
申请日：1999-12-13
申请人： Asahi Kasei EMD Corporation
发明人： NAGANO, Shuichi , Fiedler, Horst-Lothar
IPC分类号： H01L43/06 , G01D3/028
CPC分类号： G01K7/21 , G01D3/02 , G01P21/02
摘要： A sensor (1) produces the output that changes linearly with absolute temperature. In response to the output, a reference voltage generator (13) produces reference voltages (Vhigh, Vlow) that change linearly with absolute temperature. A Schmidt trigger (14) compares the output signal from a sensor signal amplifier (12) with the reference voltages and produces output. The sensor signal amplifier (12) with a temperature-independent amplification factor amplifies the output signal from the sensor (1) while performing offset compensation. The sensor signal processing circuit (2) is formed of thin-film silicon deposited on an insulating substrate. The output from the sensor (1) undergoes accurate temperature compensation over a wide temperature range, resulting in reliable operation at high temperature.
摘要翻译：传感器（1）产生随绝对温度线性变化的输出。响应该输出，参考电压发生器（13）产生与绝对温度线性变化的参考电压（Vhigh，Vlow）。施密特触发器（14）将来自传感器信号放大器（12）的输出信号与参考电压进行比较并产生输出。具有温度无关放大因子的传感器信号放大器（12）放大来自传感器（1）的输出信号，同时执行偏移补偿。传感器信号处理电路（2）由沉积在绝缘基板上的薄膜硅形成。传感器（1）的输出在很宽的温度范围内进行精确的温度补偿，从而在高温下可靠运行。

20. 发明授权

EP0780920B1 NON-AQUEOUS BATTERY 失效
标题翻译：不水系电池
公开(公告)号：EP0780920B1
公开(公告)日：2007-04-18
申请号：EP95932918.6
申请日：1995-09-27
申请人： Asahi Kasei EMD Corporation
发明人： YAMASHITA, Masaya
IPC分类号： H01M10/38 , H01M10/40 , H01M6/10 , H01M2/34
CPC分类号： H01M2/34 , H01M2/0217 , H01M2/16 , H01M6/10 , H01M10/0431 , H01M10/05 , H01M2200/00 , H01M2300/0025
摘要： A non-aqueous cell comprising a rolled electrode assembly including a positive plate with an active layer, a negative plate with an active layer, and a separator between the active layers of the positive and the negative plates; and a case that contains the electrode assembly and a non-aqueous electrolyte. In this cell, a metallic portion disposed in association with the positive plate and having an equipotential to the positive plate is equipped on at least one of the sides thereof with a portion having no active layer, and thus forms a positive plate equipotential exposed metallic portion (α) extending in a lontitudinal direction for a length at least one turn, and this positive plate equipotential exposed metallic portion (α) is so arranged as to oppose a negative plate equipotential exposed metallic portion (β) disposed in association with the negative plate, for a length at least one turn. The invention discloses also a non-aqueous cell produced by employing a simple laminate electrode assembly or a zigzag-woven laminate electrode assembly, which has substantially the same structure as the rolled electrode assembly. Due to the unique construction described above, even when the case is crushed by an external pressure or when overcharge is generated due to abnormality in a charger circuit, etc, or when a nail, etc, pierces the cell or when the cell is abnormally heated from outside, an abnormal rise of the cell temperature is limited due to internal short-circuit of the metals having sufficiently low resistance, and the safety of the cell is therefore ensured.

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