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    • 100. 发明公开
    • Integrated circuit device and fabrication using metal-doped chalcogenide materials
    • Integrierte Schaltungsvorrichtung und Herstellung unter Verwendung von metalldotierten Chalkogenidmaterialien
    • EP1801898A2
    • 2007-06-27
    • EP07006928.1
    • 2002-08-30
    • MICRON TECHNOLOGY, INC.
    • Li, JiutaoMcTeer, Allen
    • H01L45/00H01L27/24
    • C23C14/5846C23C14/0623C23C14/544H01L27/2409H01L45/085H01L45/1233H01L45/141H01L45/143H01L45/1658
    • A method of forming a chalcogenide memory element having a first electrode, a second electrode, and a doped chalcogenide layer interposed between the first electrode and the second electrode, the method comprising:
      forming a chalcogenide layer on the first electrode;
      sputtering metal onto the chalcogenide layer using a first plasma containing at least one component gas selected from the group consisting of neon and helium,
      thereby forming the doped chalcogenide layer, wherein the first plasma emits a UV component sufficient to induce diffusion of the sputtered metal into the chalcogenide layer; and
      sputtering metal onto the doped chalcogenide layer using a second plasma containing at least one component gas having an atomic weight higher than an atomic weight of neon, thereby forming the second electrode.
    • 一种形成具有第一电极,第二电极和插入在第一电极和第二电极之间的掺杂硫族化物层的硫族化物存储元件的方法,所述方法包括:在所述第一电极(210)上形成硫族化物层(215) ; 使用包含选自氖和氦中的至少一种成分气体的第一等离子体将溅射金属(240)溅射到硫族化物层上,从而形成掺杂的硫族化物层(230),其中第一等离子体发射足以诱导 将溅射的金属扩散到硫族化物层中; 以及使用具有原子量高于氖原子量的至少一种组分气体的第二等离子体将溅射金属(245)涂覆到掺杂的硫族化物层上,从而形成第二电极(250)。