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    • 1. 发明公开
    • Simultaneous testing of semiconductor components on a wafer
    • SimultanesPrüfenvon Halbleiterkomponenten auf einem Wafer
    • EP2397862A2
    • 2011-12-21
    • EP11004345.2
    • 2011-05-26
    • Broadcom Corporation
    • Behzad, Arya RezaZhao, Sam ZiqunBoers, MichaelRofougaran, AhmadrezaCastaneda, Jesus Alfonso
    • G01R31/28
    • G01R31/2834G01R31/3025G01R31/311
    • Methods and apparatus are disclosed to simultaneously, wirelessly test semiconductor components formed on a semiconductor wafer. The semiconductor components transmit respective outcomes of a self-contained testing operation to wireless automatic test equipment via a common communication channel. Multiple receiving antennas observe the outcomes from multiple directions in three dimensional space. The wireless automatic test equipment determines whether one or more of the semiconductor components operate as expected and, optionally, may use properties of the three dimensional space to determine a location of one or more of the semiconductor components. The wireless testing equipment may additionally determine performance of the semiconductor components by detecting infrared energy emitted, transmitted, and/or reflected by the semiconductor wafer before, during, and/or after a self-contained testing operation.
    • 公开了同时无线地测试形成在半导体晶片上的半导体元件的方法和装置。 半导体部件通过公共通信信道将各自的测试结果传送到无线自动测试设备。 多个接收天线在三维空间中观察多个方向的结果。 无线自动测试设备确定一个或多个半导体组件是否按预期运行,并且可选地,可以使用三维空间的属性来确定一个或多个半导体组件的位置。 无线测试设备可以通过检测在独立测试操作之前,期间和/或之后由半导体晶片发射,传输和/或反射的红外能量来另外确定半导体组件的性能。