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    • 1. 发明授权
    • Transistor with variable channel width
    • 具有可变通道宽度的晶体管
    • US06501132B1
    • 2002-12-31
    • US09468859
    • 1999-12-21
    • Hisashi Ohtani
    • Hisashi Ohtani
    • H01L2901
    • H01L29/66757H01L29/42384H01L29/78675
    • A gate insulating film 103 is oxidized by a thermal oxidation method using a gate electrode 104 as a mask. At this time, the thickness of the gate insulating film 103 becomes thicker so that the portions indicated by 106 and 107 are obtained. The thickness of an active layer becomes thin at an end 112 of a channel, so that the distance from the gate electrode becomes long by the thickness. Then the strength of an electric field between a source and drain is relaxed by this portion. In this way, a thin film transistor having improved withstand voltage characteristics and leak current characteristics is obtained.
    • 栅极绝缘膜103通过使用栅电极104作为掩模的热氧化法氧化。 此时,栅极绝缘膜103的厚度变厚,得到106,107所示的部分。 有源层的厚度在沟道的端部112处变薄,使得与栅电极的距离变长为厚度。 那么这个部分放宽源极和漏极之间的电场的强度。 以这种方式,获得具有改善的耐压特性和漏电流特性的薄膜晶体管。
    • 3. 发明授权
    • System and method for manufacturing a thin film transistor
    • 用于制造薄膜晶体管的系统和方法
    • US06765265B2
    • 2004-07-20
    • US09936040
    • 2001-12-11
    • Ichio YudasakaMitsutoshi MiyasakaPiero Migliorato
    • Ichio YudasakaMitsutoshi MiyasakaPiero Migliorato
    • H01L2901
    • H01L29/78696H01L29/42384H01L29/78612
    • The present invention provides a thin film transistor (TET) and its production method which enable the stabilizing of saturation current and improving reliability by improving the film quality of the channel region. The TFT includes a channel region towering over a gate electrode through a gate insulation film, a source region connecting to the channel region and a drain region connecting to the channel region on an opposite side of the source region are formed on the polycrystal semiconductor film on which island-like patterning is performed. An indented section is formed on a surface of the channel region, and the section corresponding to the indented section becomes a recombination center which captures the small-number carrier (holes) because the degree of the crystallization is low in the section corresponding to the indented section due to shift from the optimum conditions at the time of laser annealing of the semiconductor.
    • 本发明提供一种薄膜晶体管(TET)及其制造方法,其能够通过提高沟道区域的膜质量来稳定饱和电流并提高可靠性。 TFT包括通过栅极绝缘膜在栅电极上耸立的沟道区,在多晶半导体膜上形成连接到沟道区的源极区和连接到源极区相对侧的沟道区的漏极区, 进行岛状图案化。 在通道区域的表面上形成凹陷部分,并且与缩进部分对应的部分成为俘获小数载体(空穴)的复合中心,因为在对应于缩进的部分中结晶度低 由于半导体的激光退火时的最佳条件的变化。