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    • 8. 发明授权
    • Method for conserving a resource by flow interruption
    • 通过流中断节省资源的方法
    • US06394119B2
    • 2002-05-28
    • US09873736
    • 2001-06-04
    • Michael B. Ball
    • Michael B. Ball
    • G05D706
    • H01L21/67017Y10T137/0318Y10T137/7759Y10T137/86389
    • A method of conserving a facility delivered to a machine during the machine's idle mode is herein described. In one embodiment, the method is directed to a method for conserving coolant water delivery to a semiconductor wafer grinding machine. The system monitors the status of the grinder to determine whether the grinder is active or idle. After the system determines the grinder has entered idle mode, the system reduces the flow of water to the machine. In one embodiment, the flow is simply reduced while, in another embodiment, the flow is terminated. A delay circuit in the system may delay the reduction of the flow rate until some point after entering idle mode. Periodically throughout the idle mode, the system increases the flow of coolant water to the grinder to ensure the temperature of all grinder components remains consistent. The duty cycle of the coolant flow may be adjusted to optimize water conservation and machine readiness.
    • 这里描述了在机器的空闲模式期间节省输送到机器的设施的方法。 在一个实施例中,该方法涉及一种用于节省向半导体晶片研磨机的冷却水输送的方法。 系统监控研磨机的状态,以确定研磨机是否处于活动状态或空闲状态。 系统确定研磨机进入空闲模式后,系统会减少机器的水量。 在一个实施例中,简单地减少流量,而在另一个实施例中,流程终止。 系统中的延迟电路可能会延迟流量的降低,直到进入空闲模式后的某一点。 在整个怠速模式下,系统会逐渐增加冷却水流向研磨机的流量,以确保所有研磨机组件的温度保持一致。 可以调节冷却剂流量的占空比以优化节水和机器准备。
    • 9. 发明授权
    • System for conserving a resource by flow interruption
    • 通过流中断节省资源的系统
    • US06363968B1
    • 2002-04-02
    • US09873661
    • 2001-06-04
    • Michael B. Ball
    • Michael B. Ball
    • G05D706
    • H01L21/67017Y10T137/0318Y10T137/7759Y10T137/86389
    • A method of conserving a facility delivered to a machine during the machine's idle mode is herein described. In one embodiment, the method is directed to a method for conserving coolant water delivery to a semiconductor wafer grinding machine. The system monitors the status of the grinder to determine whether the grinder is active or idle. After the system determines the grinder has entered idle mode, the system reduces the flow of water to the machine. In one embodiment, the flow is simply reduced while, in another embodiment, the flow is terminated. A delay circuit in the system may delay the reduction of the flow rate until some point after entering idle mode. Periodically throughout the idle mode, the system increases the flow of coolant water to the grinder to ensure the temperature of all grinder components remains consistent. The duty cycle of the coolant flow may be adjusted to optimize water conservation and machine readiness.
    • 这里描述了在机器的空闲模式期间节省输送到机器的设施的方法。 在一个实施例中,该方法涉及一种用于节省向半导体晶片研磨机的冷却水输送的方法。 系统监控研磨机的状态,以确定研磨机是否处于活动状态或空闲状态。 系统确定研磨机进入空闲模式后,系统会减少机器的水量。 在一个实施例中,简单地减少流量,而在另一个实施例中,流程终止。 系统中的延迟电路可能会延迟流量的降低,直到进入空闲模式后的某一点。 在整个怠速模式下,系统会逐渐增加冷却水流向研磨机的流量,以确保所有研磨机组件的温度保持一致。 可以调节冷却剂流量的占空比以优化节水和机器准备。