会员体验
专利管家(专利管理)
工作空间(专利管理)
风险监控(情报监控)
数据分析(专利分析)
侵权分析(诉讼无效)
联系我们
交流群
官方交流:
QQ群: 891211   
微信请扫码    >>>
现在联系顾问~
热词
    • 2. 发明申请
    • IMAGE-REVERSIBLE DRY-FILM PHOTORESISTS
    • 图像可逆干膜电影
    • WO1989005475A1
    • 1989-06-15
    • PCT/US1988002676
    • 1988-08-08
    • MACDERMID, INCORPORATED
    • MACDERMID, INCORPORATEDGAL, ChavaBEN-SHUSHAN, GioraARONHIME, Marc, T.JOHN, J., Grunwald
    • G03C01/60
    • G03F7/0226
    • A dry-film photoresist is described which comprises a film of a light-sensitive image-reversible photoresist composition supported on a removable backing sheet and, optionally, having a removable cover sheet extending substantially completely over the exposed surface of the film. The photoresist composition employed in the film comprises a mixture of at least one phenolic resin, a 1,2-quinonediazide sensitizer and, optionally, at least one organic solubilizing agent containing phenolic and/or carboxylic acid groups and present in the mixture in an amount to promote the solubility of the mixture in alkaline developer. The dry-film photoresist can be used to produce either positive or negative resists on a substrate. The dry-film photoresist is laminated to the substrate and then exposed imagewise to actinic radiation. To produce a positive image the exposed film is developed using an alkaline developer. To produce a negative image the exposed film is first baked to a temperature and for a time sufficient to render the exposed portions of the photoresist insoluble in alkaline developer and is then developed, optionally after flood exposure to actinic radiation, using an alkaline developer to remove the unwanted portions of the photoresist.
    • 描述了一种干膜光致抗蚀剂,其包含支撑在可移除背衬片上的感光图像可逆光致抗蚀剂组合物的膜,并且可选地具有基本上完全延伸到膜的暴露表面上的可移除覆盖片。 用于薄膜中的光致抗蚀剂组合物包含至少一种酚醛树脂,1,2-醌二叠氮化物增感剂和任选的至少一种含有酚和/或羧酸基团的有机增溶剂并以混合物的量存在的混合物 以促进混合物在碱性显影剂中的溶解度。 干膜光致抗蚀剂可用于在基材上产生正或负的抗蚀剂。 将干膜光致抗蚀剂层压到基底上,然后成像曝光于光化辐射。 为了产生正像,使用碱性显影剂显影曝光的胶片。 为了产生负像,首先将曝光的薄膜烘烤至足以使光致抗蚀剂的曝光部分不溶于碱性显影剂并随后显影的温度,任选地在曝光于光化辐射之后,使用碱性显影剂除去 光刻胶的不想要的部分。