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1. 发明授权

US06272763B1 Staging apparatus and method, and method for manufacturing the staging apparatus, and exposing apparatus using the staging apparatus 失效
标题翻译：分级装置和方法以及分级装置的制造方法以及使用分段装置的曝光装置
公开(公告)号：US06272763B1
公开(公告)日：2001-08-14
申请号：US09400540
申请日：1999-09-21
申请人： Atsushi Yamaguchi , Shigeru Yamasaki
发明人： Atsushi Yamaguchi , Shigeru Yamasaki
IPC分类号： G01B5004
CPC分类号： G03F7/70716 , F16F15/02 , F16F15/0232 , F16F15/027 , G03F7/70725 , G03F7/70825 , G03F7/70833 , G03F7/709 , G05B19/232 , G05B2219/37376 , G05B2219/37388 , G05B2219/42104 , G05B2219/45027 , G05B2219/49048 , G05B2219/49176
摘要： A positioning staging apparatus comprises a base provided on a floor, a stage provided on the base and movable to the base, an output unit for outputting stage positioning information for moving the stage to a predetermined target position, a stage drive unit provided on the base for driving the stage and outputting the drive information, a stage control unit for controlling the stage drive unit to accelerate and decelerate the stage in accordance with the stage positioning information to stop the stage at the target position, a stage displacement detection unit for detecting the displacement of the stage driven by the stage drive unit to output the stage displacement information, and an anti-vibration unit provided between the floor and the base for applying to the base a force to suppress the vibration of the base generated by the movement of the stage. The anti-vibration unit generates the suppression force in accordance with one of the stage displacement information and the stage positioning information. A method for manufacturing a staging apparatus and a method for controlling movement of a stage are also provided.
摘要翻译：一种定位分段装置，包括设置在地板上的基座，设置在基座上并可移动到基座的台架，用于输出用于将台架移动到预定目标位置的平台定位信息的输出单元，设置在基座上的平台驱动单元用于驱动载物台并输出驱动信息的载物台控制单元，用于控制载物台驱动单元根据载物台定位信息来加速和减速载物台以停止在目标位置的载物台位移检测单元，由舞台驱动单元驱动的舞台的位移以输出舞台位移信息，以及设置在地板和底座之间的防振单元，用于向基座施加力以抑制由于移动而产生的底座的振动阶段。防振单元根据台位移信息和平台定位信息之一产生抑制力。还提供了一种用于制造分级装置的方法和用于控制台的运动的方法。

2. 发明授权

US06651351B1 Coordinate measuring instrument with feeler element and optic sensor for measuring the position of the feeler 有权
标题翻译：带测头元件和光学传感器的坐标测量仪，用于测量探头的位置
公开(公告)号：US06651351B1
公开(公告)日：2003-11-25
申请号：US09445430
申请日：2000-03-08
申请人： Ralf Christoph , Eugen Trapet , Heinrich Schwenke
发明人： Ralf Christoph , Eugen Trapet , Heinrich Schwenke
IPC分类号： G01B5004
CPC分类号： G01B11/007
摘要： A method for measuring structures of an object using a feeler element associated with a coordinate measuring instrument and extending from an elastic bendable feeler extension is disclosed, and wherein the feeler element is brought into contact with an object having structures to be measured and the position of the feeler is then determined by comparing the position of the feeler as determined by the coordinate measuring instrument with the position determined by the optical sensor.
摘要翻译：公开了一种用于使用与坐标测量仪相关联的探测元件并且从弹性可弯曲探测器延伸部延伸的物体的结构测量的方法，并且其中使所述探测元件与具有要测量结构的物体接触，然后通过将由坐标测量仪器确定的探测器的位置与由光学传感器确定的位置进行比较来确定探测器。

3. 发明授权

US06601310B2 Transfer apparatus of testing master block for measuring machine 失效
标题翻译：测量机主块传送装置
公开(公告)号：US06601310B2
公开(公告)日：2003-08-05
申请号：US09937487
申请日：2002-01-07
申请人： Susumu Asanuma
发明人： Susumu Asanuma
IPC分类号： G01B5004
CPC分类号： G01B21/042 , G01B5/0002
摘要： A transfer apparatus of a testing master block for a coordinate measuring machine which enables a testing master block to be transferred on to a measurement table of the measuring machine quickly without human intervention and can be easily attached to an existing measuring machine with a small installation space, provided with a moving member for moving a testing master block for a measuring machine between a retracted position near an end of a measurement table of the measuring machine and a measurement position on the measurement table. When measuring a workpiece, the moving member or testing master block is retracted to a retracted position to enable the measurement table as a whole to be made effective use of in the measurement work. Between measurement operations of workpieces, the testing master block can be quickly moved and transferred to the measurement position to inspect the accuracy of the measuring machine itself or check the operation.
摘要翻译：一种用于坐标测量机的测试主块的传送装置，其使测试主块能够在没有人为干预的情况下快速传送到测量机的测量台，并且可以容易地附接到具有小的安装空间的现有测量机设置有用于在测量机的测量台的端部附近的缩回位置与测量台的测量位置之间移动用于测量机的测试主块的移动构件。当测量工件时，移动构件或测试主块将缩回到缩回位置，以使整个测量表在测量工作中得到有效的使用。在工件的测量操作之间，测试主块可以快速移动并传输到测量位置，以检查测量机本身的精度或检查操作。

4. 发明授权

US06460261B1 V-groove shape measuring method and apparatus by using rotary table 有权
标题翻译： V型槽形状测量方法及使用旋转台的设备
公开(公告)号：US06460261B1
公开(公告)日：2002-10-08
申请号：US09713217
申请日：2000-11-16
申请人： Takashi Noda , Hiromi Deguchi , Katsuyuki Ogura
发明人： Takashi Noda , Hiromi Deguchi , Katsuyuki Ogura
IPC分类号： G01B5004
CPC分类号： G05B19/401 , G01B5/241 , G05B2219/4707
摘要： By combining measuring element direction constant control, rotary table radius constant scanning control, and two-flank contact control, V-groove rotary table scanning control is performed to cause the measuring element of the scanning probe to contact always with two flanks composing the V-groove of the object to be measured, so that it is possible to measure accurately the characteristic values such as pitch deviation and axial runout of side face of male threads set up and fixed on a rotary table or screw hole of the object put on the rotary table.
摘要翻译：通过组合测量元件方向恒定控制，旋转台半径恒定扫描控制和双面接触控制，进行V槽旋转台扫描控制，使扫描探头的测量元件始终与两个V- 使得能够精确地测量设置并固定在放置在旋转体上的物体的旋转台或螺丝孔上的阳螺纹侧面的俯仰偏差和轴向跳动的特性值表。

5. 发明授权

US06446349B1 Method and device for spatial positioning and alignment of a ball and socket joint 有权
标题翻译：用于球窝接头空间定位和对准的方法和装置
公开(公告)号：US06446349B1
公开(公告)日：2002-09-10
申请号：US09552598
申请日：2000-04-19
申请人： Charalambos Tassakos
发明人： Charalambos Tassakos
IPC分类号： G01B5004
CPC分类号： G01B21/22 , Y10T403/32311
摘要： The invention concerns a method and a device for spatial positioning and alignment of a two-part ball and socket joint (2) comprising a socket (3) as a first part and a solid ball (4) as a second part which is received in the socket (3) such that it can be turned and pivoted. For exact, definite and reproducible spatial positioning and alignment of the ball and socket joint (2) the invention proposes defining a virtual plane on one part (3; 4) of the ball and socket joint (2) which extends through the center (22) of the solid ball (4) of the ball and socket joint (2); defining two positioning points (23, 24), separated from one another and from the center (22) of the solid ball (4), on the virtual plane; defining a further virtual plane on the other part (4, 3) of the ball and socket joint (2); defining two reference points (25, 26) on the further virtual plane at a separation from one another and at a separation from the center (22) of the solid ball (4); positioning and aligning the further virtual plane in three-dimensional space; and moving the positioning points (23, 24) relative to the reference points (25, 26) at predetermined positioning separations.
摘要翻译：本发明涉及一种用于空间定位和对准两部分球窝接头（2）的方法和装置，其包括作为第一部分的插座（3）和作为第二部分接收的第二部分的实心球（4）所述插座（3）能够转动和枢转。为了精确，确定和可重现的球窝接头的空间定位和对准（2），本发明提出了在穿过中心（22）的球窝接头（2）的一个部分（3; 4）上限定虚拟平面）球窝接头（2）的实心球（4）; 限定在所述虚拟平面上彼此分离并与所述实心球（4）的中心（22）分离的两个定位点（23,24）在所述球窝接头（2）的另一部分（3,4）上限定另外的虚拟平面; 在所述另一虚拟平面上以彼此分离并且与所述固体球（4）的中心（22）分离地限定两个参考点（25,26）。在三维空间中定位和对准另外的虚拟平面; 以及以预定的定位分离相对于参考点（25,26）移动所述定位点（23,24）。

6. 发明授权

US06810597B2 Use of surface measuring probes 有权
标题翻译：使用表面测量探头
公开(公告)号：US06810597B2
公开(公告)日：2004-11-02
申请号：US10632868
申请日：2003-08-04
申请人： Jean-Louis Grzesiak , Alexander Tennant Sutherland
发明人： Jean-Louis Grzesiak , Alexander Tennant Sutherland
IPC分类号： G01B5004
CPC分类号： B82Y15/00 , G01B21/042
摘要： A method of measuring an artefact 5 using a machine 2 on which a measuring probe 6 is mounted. The probe is brought into contact with the artefact and movement continued for a limited distance to deflect the stylus 7. The machine and probe outputs are recorded whilst the probe is free and when the stylus is deflected. A model of the probe and CMM outputs during both contact and non-contact between the probe and artefact is fitted to the data to allow the contact position when the stylus contacts the artefact with zero force to be determined. The probe outputs may be fitted to the model individually to determine a single contact position. By using data during movement of the probe towards and away from the artefact, errors due to time delays may be corrected.
摘要翻译：使用其上安装有测量探针6的机器2来测量人造物5的方法。使探针与伪影接触，并且移动持续一段有限的距离以使触针7偏转。当探针自由并且当触针偏转时，记录机器和探头输出。在探针和伪影之间的接触和非接触期间，探头和CMM输出的模型被拟合到数据中，以便当触针以零力接触人造物以确定接触位置时。探头输出可以单独安装到模型上，以确定单个接触位置。通过在探针移动和远离伪影的过程中使用数据，可能会纠正由于时间延迟引起的错误。

7. 发明授权

US06694634B2 Position error evaluation method of moving device and method of improving movement accuracy based on evaluation results thereof 失效
公开(公告)号：US06694634B2
公开(公告)日：2004-02-24
申请号：US10110740
申请日：2002-07-29
申请人： Hisayoshi Sato , Kazunori Umeda
发明人： Hisayoshi Sato , Kazunori Umeda
IPC分类号： G01B5004
CPC分类号： B82Y15/00 , B23Q17/24 , B25J9/1669 , G01B21/042 , G01B21/045
摘要： Disclosed is a position error evaluating method of a moving device, which includes the following steps. Specifically, in a moving device which moves a movable body in two axial directions or in three axial directions orthogonal to each other, a straightness error curve indicating a state of change in a position error of the movable body along a uniaxial direction out of predetermined two axial directions is obtained by a sequential two-point method, the position error being related to a direction orthogonal to the predetermined two axial directions out of the biaxial or three axial directions. Then, the above step is repeated for the other uniaxial direction out of the two axial directions. Subsequently, straightness error curves indicating a state of change in a position error of the movable body along the other uniaxial direction is obtained based on coordinate positions of both ends of a group of already obtained straightness error curves, the position error being related to the direction orthogonal to the predetermined two axial directions. The straightness error curves at the coordinate positions of the both ends are set as a boundary straightness error curve. Thereafter, based on the boundary straightness error curves, alignment of the group of straightness error curves is corrected, thereby obtaining an error surface. Lastly, in accordance with the error surface, a two-dimensional position error of the movable body on a planar surface including the predetermined two axes is evaluated, the two-dimensional position error being related to a direction orthogonal to the planar surface. According to this method, in evaluating the position error of the moving device, compared to the conventional method, adjustment takes less time, and automatic evaluation can be easily performed. Thus, accuracy of a measuring device can be easily maintained.

8. 发明授权

US06526669B2 Apparatus for acquiring human finger manipulation data 失效
标题翻译：用于获取人类手指操纵数据的装置
公开(公告)号：US06526669B2
公开(公告)日：2003-03-04
申请号：US09749951
申请日：2000-12-29
申请人： Kazuyuki Nagata
发明人： Kazuyuki Nagata
IPC分类号： G01B5004
CPC分类号： G06F3/014 , A61B5/1125 , A61B5/225 , A61B5/4528 , A61B5/6826 , A61B5/6838 , B25J13/02 , B25J13/084 , B25J13/085
摘要： An apparatus for acquiring human finger manipulation data includes at least one finger motion detector consisting of a force sensor to be fitted on a human fingertip, at least three links and at least four angle detectors; and a base supporting the finger motion detector. The base can be attached to an external mount or a human hand. The force sensor is connected to the base through a link mechanism constituted by the links, and the angle detectors are attached at pivots between the links and optionally at a pivot between the link mechanism and the base. Three-dimensional motion of the finger is determined by measuring data of the angle detectors of the link mechanism, and fingertip contact force is measured by the force sensor. Up to five finger motion detectors, one for the thumb and each finger, can be supported on the base.
摘要翻译：一种用于获取人类手指操作数据的装置包括至少一个手指运动检测器，其包括要装配在人类指尖上的力传感器，至少三个链接和至少四个角度检测器; 以及支撑手指运动检测器的基座。基座可以连接到外部安装座或人手上。力传感器通过由连杆构成的连杆机构连接到基座，并且角度检测器安装在链节之间的枢轴处，并且可选地连接在连杆机构和基座之间的枢轴处。通过测量连杆机构的角度检测器的数据来确定手指的三维运动，并且通过力传感器测量指尖接触力。多达五个手指运动检测器，一个用于拇指和每个手指，可以支撑在基座上。

9. 发明授权

US06470584B1 Locating arm for a probe on a coordinate positioning machine 失效
标题翻译：在坐标定位机上定位探针
公开(公告)号：US06470584B1
公开(公告)日：2002-10-29
申请号：US09582993
申请日：2000-07-10
申请人： Matthew A Stoodley
发明人： Matthew A Stoodley
IPC分类号： G01B5004
CPC分类号： G01B7/004 , G01B7/012
摘要： A probe arm for locating a probe on a machine includes a signal conditioning circuit which produces probe status signals to be sent to the machine. The signal conditioning circuit includes two LEDs mounted on the arm and which are differently coloured to provide a visual indication of probe status e.g. probe ready or probe triggered. One of the LEDs has twice the efficiency of the other and therefore to maintain consistent illumination one is driven with twice the current of the other. Thus by monitoring the current through the LEDs in a sensing circuit at the output terminals of the signal conditioning circuit the status of the probe is communicated to the machine. Power to the probe and signal conditioning circuit is provided from the machine via the output terminals so that only two wires are required to connect the arm to the machine.
摘要翻译：用于将探头定位在机器上的探针臂包括产生探头状态信号以发送到机器的信号调节电路。信号调理电路包括安装在臂上的两个LED，其颜色不同以提供探针状态的视觉指示，例如，探头就绪或探测器触发。其中一个LED的效率是另一个LED的两倍，因此保持一致的照明，其中一个照明是以另一个的两倍的电流驱动的。因此，通过在信号调节电路的输出端监测感测电路中的LED的电流，探头的状态被传送到机器。通过输出端子从机器提供探头和信号调理电路的电源，只需要两根电线将手臂连接到机器上即可。

10. 发明授权

US06272760B1 Damping device for a coordinate measuring equipment 失效
标题翻译：用于坐标测量设备的阻尼装置
公开(公告)号：US06272760B1
公开(公告)日：2001-08-14
申请号：US09120258
申请日：1998-07-21
申请人： Wolfgang Wiedmann , Carsten Würfel , Eugen Aubele
发明人： Wolfgang Wiedmann , Carsten Würfel , Eugen Aubele
IPC分类号： G01B5004
CPC分类号： G01B21/04 , G01B5/008 , G01D11/10
摘要： A damping device for vibration damping of components of a coordinate measuring equipment has a damping component which is frictionally connected to the component to be damped. The characteristic frequency of the damping component deviates from the characteristic frequency of the component to be damped.
摘要翻译：用于坐标测量设备的部件的减振的阻尼装置具有与要被阻尼的部件摩擦连接的阻尼部件。阻尼部件的特征频率偏离要被阻尼的部件的特征频率。

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