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    • 10. 发明申请
    • POSITIONING CONTROL DEVICE
    • 定位控制装置
    • US20150279613A1
    • 2015-10-01
    • US14601327
    • 2015-01-21
    • Hitachi, Ltd.
    • Hironori OGAWATomohiro INOUEMasaki ODAI
    • H01J37/20H01J37/26G01B11/14
    • H01J37/20G01B11/14G05B19/404G05B2219/37612G05B2219/42249G05B2219/49176H01J37/261H01J2237/2007H01J2237/20292H01J2237/2602
    • An object of the invention is to provide a positioning apparatus and a positioning control device that may perform precise positioning by suppressing relative displacement of a movable point and positioning target objects. In a positioning apparatus including a movable stage, a stage position detector that detects a position of the movable stage, a control device that performs positioning of the movable stage, a positioning target object for positioning of the movable stage, and at least one or more sensors in a structure of the positioning target object or the movable stage, the control device includes an amount of relative displacement estimation unit that estimates an amount of relative displacement of the movable stage and the positioning target object using information of the sensor and information of the stage position detector, and a unit that controls the position of the stage using information calculated by the amount of relative displacement estimation unit.
    • 本发明的目的是提供一种定位装置和定位控制装置,其可以通过抑制可移动点和定位目标对象的相对位移来执行精确定位。 在包括可移动台的定位装置中,检测可移动台的位置的台位置检测器,执行可移动台的定位的控制装置,用于定位可移动台的定位对象物体,以及至少一个或多个 传感器在定位目标物体或可移动台的结构中,控制装置包括一定量的相对位移估计单元,该量相对位移估计单元使用传感器的信息来估计可移动台和定位目标物体的相对位移量, 阶段位置检测器,以及使用由相对位移估计单元的量计算的信息来控制台的位置的单元。