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1. 发明授权

US07538333B1 Contactless charge measurement of product wafers and control of corona generation and deposition 失效
标题翻译：产品晶圆的非接触式电荷测量和电晕发生和沉积的控制
公开(公告)号：US07538333B1
公开(公告)日：2009-05-26
申请号：US11460517
申请日：2006-07-27
申请人： Amin Samsavar , John M. Schmidt , Rainer Schierle , Gregory S. Horner , Thomas G. Miller , Zhiwei Xu , Xiaofeng Hu , Jianou Shi , Sergio Edelstein
发明人： Amin Samsavar , John M. Schmidt , Rainer Schierle , Gregory S. Horner , Thomas G. Miller , Zhiwei Xu , Xiaofeng Hu , Jianou Shi , Sergio Edelstein
IPC分类号： H01J37/30 , H01J37/317 , G01R31/26
CPC分类号： G01R31/303 , G01R31/2831 , H01L22/14 , H01L2924/0002 , H01L2924/00
摘要： Systems and methods for determining a property of a specimen are provided. The specimen may be a product wafer. The method may include biasing a focused spot on the specimen. The method may also include measuring a parameter of a measurement spot on the specimen. The measurement spot may overlap the focused spot. In addition, the method may include determining the property of the specimen from the measured parameter. Systems and methods for varying the performance of a corona source are also provided. The method may include altering a property of the environment within the corona source. The property may include, but is not limited to, temperature, pressure, humidity, and/or partial pressure of a gas within the corona source.
摘要翻译：提供了用于确定样品性质的系统和方法。样品可以是产品晶片。该方法可以包括将聚焦斑点偏置在样本上。该方法还可以包括测量样品上的测量点的参数。测量点可能与聚焦点重叠。此外，该方法可以包括根据测量的参数确定样品的性质。还提供了用于改变电晕源的性能的系统和方法。该方法可以包括改变电晕源内的环境的属性。该性质可以包括但不限于电晕源内的气体的温度，压力，湿度和/或分压。

2. 发明授权

US07248062B1 Contactless charge measurement of product wafers and control of corona generation and deposition 有权
标题翻译：产品晶圆的非接触式电荷测量和电晕发生和沉积的控制
公开(公告)号：US07248062B1
公开(公告)日：2007-07-24
申请号：US10701112
申请日：2003-11-04
申请人： Amin Samsavar , John M. Schmidt , Rainer Schierle , Gregory S. Horner , Thomas G. Miller , Zhiwei Xu , Xiaofeng Hu , Jianou Shi , Sergio Edelstein
发明人： Amin Samsavar , John M. Schmidt , Rainer Schierle , Gregory S. Horner , Thomas G. Miller , Zhiwei Xu , Xiaofeng Hu , Jianou Shi , Sergio Edelstein
IPC分类号： G01R31/26
CPC分类号： G01R31/303 , G01R31/2831 , H01L22/14 , H01L2924/0002 , H01L2924/00
摘要： Systems and methods for determining a property of a specimen are provided. The specimen may be a product wafer. The method may include biasing a focused spot on the specimen. The method may also include measuring a parameter of a measurement spot on the specimen. The measurement spot may overlap the focused spot. In addition, the method may include determining the property of the specimen from the measured parameter. Systems and methods for varying the performance of a corona source are also provided. The method may include altering a property of the environment within the corona source. The property may include, but is not limited to, temperature, pressure, humidity, and/or partial pressure of a gas within the corona source.
摘要翻译：提供了用于确定样品性质的系统和方法。样品可以是产品晶片。该方法可以包括将聚焦斑点偏置在样本上。该方法还可以包括测量样品上的测量点的参数。测量点可能与聚焦点重叠。此外，该方法可以包括根据测量的参数确定样品的性质。还提供了用于改变电晕源的性能的系统和方法。该方法可以包括改变电晕源内的环境的属性。该性质可以包括但不限于电晕源内的气体的温度，压力，湿度和/或分压。

3. 发明授权

US07719294B1 Systems configured to perform a non-contact method for determining a property of a specimen 有权
标题翻译：被配置为执行用于确定样本的属性的非接触方法的系统
公开(公告)号：US07719294B1
公开(公告)日：2010-05-18
申请号：US11460505
申请日：2006-07-27
申请人： Amin Samsavar , John M. Schmidt , Rainer Schierle , Gregory S. Horner , Thomas G. Miller , Zhiwei Xu , Xiaofeng Hu , Jianou Shi , Sergio Edelstein
发明人： Amin Samsavar , John M. Schmidt , Rainer Schierle , Gregory S. Horner , Thomas G. Miller , Zhiwei Xu , Xiaofeng Hu , Jianou Shi , Sergio Edelstein
IPC分类号： G01R31/26
CPC分类号： G01R31/303 , G01R31/2831 , H01L22/14 , H01L2924/0002 , H01L2924/00
摘要： Systems configured to perform a non-contact method for determining a property of a specimen are provided. One system configured to perform a non-contact method for determining a property of a specimen includes a focused biasing device configured to provide a stimulus to a focused spot on the specimen. The system also includes a sensor configured to measure a parameter of a measurement spot on the specimen. The measurement spot overlaps the focused spot. The system further includes a processor configured to determine the property of the specimen from the parameter.
摘要翻译：提供被配置为执行用于确定样本的属性的非接触方法的系统。被配置为执行用于确定样本的属性的非接触方法的一个系统包括被配置为向所述样本上的聚焦点提供刺激的聚焦偏置装置。该系统还包括被配置为测量样品上的测量点的参数的传感器。测量点与聚焦点重叠。该系统还包括处理器，该处理器被配置为根据该参数确定样本的属性。

4. 发明授权

US07064565B1 Methods and systems for determining an electrical property of an insulating film 失效
标题翻译：用于确定绝缘膜的电性能的方法和系统
公开(公告)号：US07064565B1
公开(公告)日：2006-06-20
申请号：US10699352
申请日：2003-10-31
申请人： Zhiwei Xu , Thomas G. Miller , Jianou Shi , Gregory S. Horner
发明人： Zhiwei Xu , Thomas G. Miller , Jianou Shi , Gregory S. Horner
IPC分类号： G01R31/302 , G01R31/26
CPC分类号： G01R31/129 , G01R31/2831
摘要： Methods for determining a surface voltage of an insulating film are provided. One method includes depositing a charge on an upper surface of the insulating film and measuring a current to the wafer during deposition. The method also includes determining the surface voltage of the insulating film from the current. In this manner, the surface voltage is not measured, but is determined from a measured current. Another embodiment may include measuring a second current to the wafer during a high current mode deposition of a charge on the film and determining a second surface voltage of the film from the second current. This method may be repeated until a Q-V sweep is measured. An additional embodiment may include altering a control voltage during deposition of the charge such that a current to the wafer is substantially constant over time and determining charge vs. voltage data for the insulating film.
摘要翻译：提供了确定绝缘膜的表面电压的方法。一种方法包括在绝缘膜的上表面上沉积电荷并在沉积期间测量到晶片的电流。该方法还包括从电流确定绝缘膜的表面电压。以这种方式，不测量表面电压，而是根据测量的电流确定。另一个实施例可以包括在电荷的高电流模式沉积期间测量到晶片的第二电流，并从第二电流确定膜的第二表面电压。可以重复该方法直到测量Q-V扫描。附加实施例可以包括在沉积电荷期间改变控制电压，使得到晶片的电流随时间基本上是恒定的，并且确定绝缘膜的电荷对电压数据。

5. 发明授权

US07075318B1 Methods for imperfect insulating film electrical thickness/capacitance measurement 失效
标题翻译：绝缘膜电气厚度/电容测量不完美的方法
公开(公告)号：US07075318B1
公开(公告)日：2006-07-11
申请号：US10754332
申请日：2004-01-09
申请人： Xiafang (Michelle) Zhang , Zhiwei (Steve) Xu , Jianou Shi , Bao Vu , Thomas G. Miller , Gregory S. Horner
发明人： Xiafang (Michelle) Zhang , Zhiwei (Steve) Xu , Jianou Shi , Bao Vu , Thomas G. Miller , Gregory S. Horner
IPC分类号： G01R31/302 , G01R27/26
CPC分类号： G01R31/2648 , G01R27/26 , G01R31/312
摘要： Methods for determining an electrical parameter of an insulating film are provided. One method includes measuring a surface potential of a leaky insulating film without inducing leakage across the insulating film and determining the electrical parameter from the surface potential. Another method includes applying an electrical field across the insulating film. Leakage across the insulating film caused by the electrical field is negligible. The method also includes measuring a surface potential of the specimen and determining a potential of the substrate. In addition, the method includes determining a pure voltage across the insulating film from the surface potential and the substrate potential. The method further includes determining the electrical parameter from the pure voltage. The electrical parameter may be capacitance or electrical thickness of the insulating film.
摘要翻译：提供了确定绝缘膜的电参数的方法。一种方法包括测量泄漏绝缘膜的表面电位，而不会导致绝缘膜上的泄漏并且从表面电位确定电参数。另一种方法包括在绝缘膜上施加电场。由电场引起的绝缘膜上的泄漏可忽略不计。该方法还包括测量样品的表面电位并确定衬底的电位。此外，该方法包括从表面电位和衬底电位确定绝缘膜两端的纯电压。该方法还包括从纯电压确定电参数。电气参数可以是绝缘膜的电容或电气厚度。

6. 发明授权

US07397254B1 Methods for imperfect insulating film electrical thickness/capacitance measurement 失效
标题翻译：绝缘膜电气厚度/电容测量不完美的方法
公开(公告)号：US07397254B1
公开(公告)日：2008-07-08
申请号：US11277053
申请日：2006-03-21
申请人： Xiafang (Michelle) Zhang , Zhiwei (Steve) Xu , Jianou Shi , Quoc-Bao Vu , Thomas G. Miller , Gregory S. Horner
发明人： Xiafang (Michelle) Zhang , Zhiwei (Steve) Xu , Jianou Shi , Quoc-Bao Vu , Thomas G. Miller , Gregory S. Horner
IPC分类号： G01R31/302
CPC分类号： G01R31/2648 , G01R27/26 , G01R31/312
摘要： Methods for determining an electrical parameter of an insulating film are provided. One method includes measuring a surface potential of a leaky insulating film without inducing leakage across the insulating film and determining the electrical parameter from the surface potential. Another method includes applying an electrical field across the insulating film. Leakage across the insulating film caused by the electrical field is negligible. The method also includes measuring a surface potential of the specimen and determining a potential of the substrate. In addition, the method includes determining a pure voltage across the insulating film from the surface potential and the substrate potential. The method further includes determining the electrical parameter from the pure voltage. The electrical parameter may be capacitance or electrical thickness of the insulating film.
摘要翻译：提供了确定绝缘膜的电参数的方法。一种方法包括测量泄漏绝缘膜的表面电位，而不会导致绝缘膜上的泄漏并且从表面电位确定电参数。另一种方法包括在绝缘膜上施加电场。由电场引起的绝缘膜上的泄漏可忽略不计。该方法还包括测量样品的表面电位并确定衬底的电位。此外，该方法包括从表面电位和衬底电位确定绝缘膜两端的纯电压。该方法还包括从纯电压确定电参数。电气参数可以是绝缘膜的电容或电气厚度。

7. 发明申请

US20070126458A1 METHODS AND SYSTEMS FOR DETERMINING ONE OR MORE PROPERTIES OF A SPECIMEN 审中-公开
标题翻译：用于确定样本的一个或多个属性的方法和系统
公开(公告)号：US20070126458A1
公开(公告)日：2007-06-07
申请号：US11669209
申请日：2007-01-31
申请人： Jianou Shi , Jeffrey Rzepiela , Shiyou Pei , Zhiwei Xu , John Alexander
发明人： Jianou Shi , Jeffrey Rzepiela , Shiyou Pei , Zhiwei Xu , John Alexander
IPC分类号： G01R31/26
CPC分类号： G01R31/311 , G01R31/2648
摘要： Various methods and systems for determining one or more properties of a specimen are provided. One system for determining a property of a specimen is configured to illuminate a specimen with different wavelengths of light substantially simultaneously. The different wavelengths of light are modulated at substantially the same frequency. The system is also configured to perform at least two measurements on the specimen. A minority carrier diffusion length of the specimen may be determined from the measurements and absorption coefficients of the specimen at the different wavelengths. Another system for detecting defects on a specimen is configured to deposit a charge at multiple locations on an upper surface of the specimen. This system is also configured to measure a vibration of a probe at the multiple locations. Defects may be detected on the specimen using a two-dimensional map of the specimen generated from the measured surface voltages.
摘要翻译：提供了用于确定样本的一个或多个属性的各种方法和系统。用于确定样本特性的一个系统被配置为基本上同时照射具有不同波长的光的样本。不同波长的光以基本上相同的频率被调制。该系统还被配置为对样本进行至少两次测量。样品的少数载流子扩散长度可以根据不同波长的样品的测量和吸收系数来确定。用于检测样本上的缺陷的另一系统被配置为在样本的上表面上的多个位置沉积电荷。该系统还被配置为测量在多个位置处的探针的振动。可以使用从测量的表面电压产生的样本的二维图来在样本上检测缺陷。

8. 发明授权

US07187186B2 Methods and systems for determining one or more properties of a specimen 有权
标题翻译：用于确定样品的一个或多个性质的方法和系统
公开(公告)号：US07187186B2
公开(公告)日：2007-03-06
申请号：US11078669
申请日：2005-03-10
申请人： Jianou Shi , Jeffrey Rzepiela , Shiyou Pei , Zhiwei Xu , John Alexander
发明人： Jianou Shi , Jeffrey Rzepiela , Shiyou Pei , Zhiwei Xu , John Alexander
IPC分类号： G01R31/302
CPC分类号： G01R31/311 , G01R31/2648
摘要： Various methods and systems for determining one or more properties of a specimen are provided. One system for determining a property of a specimen is configured to illuminate a specimen with different wavelengths of light substantially simultaneously. The different wavelengths of light are modulated at substantially the same frequency. The system is also configured to perform at least two measurements on the specimen. A minority carrier diffusion length of the specimen may be determined from the measurements and absorption coefficients of the specimen at the different wavelengths. Another system for detecting defects on a specimen is configured to deposit a charge at multiple locations on an upper surface of the specimen. This system is also configured to measure a vibration of a probe at the multiple locations. Defects may be detected on the specimen using a two-dimensional map of the specimen generated from the measured surface voltages.
摘要翻译：提供了用于确定样本的一个或多个属性的各种方法和系统。用于确定样本特性的一个系统被配置为基本上同时照射具有不同波长的光的样本。不同波长的光以基本上相同的频率被调制。该系统还被配置为对样本进行至少两次测量。样品的少数载流子扩散长度可以根据不同波长的样品的测量和吸收系数来确定。用于检测样本上的缺陷的另一系统被配置为在样本的上表面上的多个位置沉积电荷。该系统还被配置为测量在多个位置处的探针的振动。可以使用从测量的表面电压产生的样本的二维图来在样本上检测缺陷。

9. 发明申请

US20050206402A1 Methods and systems for determining one or more properties of a specimen 有权
标题翻译：用于确定样品的一个或多个性质的方法和系统
公开(公告)号：US20050206402A1
公开(公告)日：2005-09-22
申请号：US11078669
申请日：2005-03-10
申请人： Jianou Shi , Jeffrey Rzepiela , Shiyou Pei , Zhiwei Xu , John Alexander
发明人： Jianou Shi , Jeffrey Rzepiela , Shiyou Pei , Zhiwei Xu , John Alexander
IPC分类号： H01L21/66 , G01R31/26 , G01R31/311
CPC分类号： G01R31/311 , G01R31/2648
摘要： Various methods and systems for determining one or more properties of a specimen are provided. One system for determining a property of a specimen is configured to illuminate a specimen with different wavelengths of light substantially simultaneously. The different wavelengths of light are modulated at substantially the same frequency. The system is also configured to perform at least two measurements on the specimen. A minority carrier diffusion length of the specimen may be determined from the measurements and absorption coefficients of the specimen at the different wavelengths. Another system for detecting defects on a specimen is configured to deposit a charge at multiple locations on an upper surface of the specimen. This system is also configured to measure a vibration of a probe at the multiple locations. Defects may be detected on the specimen using a two-dimensional map of the specimen generated from the measured surface voltages.
摘要翻译：提供了用于确定样本的一个或多个属性的各种方法和系统。用于确定样本特性的一个系统被配置为基本上同时照射具有不同波长的光的样本。不同波长的光以基本上相同的频率被调制。该系统还被配置为对样本进行至少两次测量。样品的少数载流子扩散长度可以根据不同波长的样品的测量和吸收系数来确定。用于检测样本上的缺陷的另一系统被配置为在样本的上表面上的多个位置沉积电荷。该系统还被配置为测量在多个位置处的探针的振动。可以使用从测量的表面电压产生的样本的二维图来在样本上检测缺陷。

10. 发明授权

US06909291B1 Systems and methods for using non-contact voltage sensors and corona discharge guns 失效
标题翻译：使用非接触式电压传感器和电晕放电枪的系统和方法
公开(公告)号：US06909291B1
公开(公告)日：2005-06-21
申请号：US10606066
申请日：2003-06-24
申请人： Zhiwei (Steve) Xu , Jianou Shi , Shiyou Pei , Mahmood Mirzaaghaeian , Jeffrey A. Rzepiela
发明人： Zhiwei (Steve) Xu , Jianou Shi , Shiyou Pei , Mahmood Mirzaaghaeian , Jeffrey A. Rzepiela
IPC分类号： G01N27/00 , G01R35/00 , G01R31/02
CPC分类号： G01N27/002
摘要： A method and a system for calibrating the work function of a non-contact voltage sensor are provided. The method includes preparing a reference sample to have a stable work function, measuring a voltage of the sample using a non-contact voltage sensor, and determining a work function correction factor of the sensor from the measured voltage. In turn, the calibrated work function may be used to adjust voltages of substrates measured by the sensor. A corona gun which includes a first electrode and one or more conductive rods is provided. In some embodiments, the conductive rods may be angled between 0 and 90 degrees with respect to a first electrode sidewall and/or be concentrically arranged less than 90 degrees from each other. In addition or alternatively, the corona gun may be adapted to alter its length and/or include a second electrode partially inset within a space surrounded by the first electrode.
摘要翻译：提供了一种用于校准非接触式电压传感器的功能的方法和系统。该方法包括制备参考样品以具有稳定的功函数，使用非接触电压传感器测量样品的电压，以及根据测量的电压确定传感器的功函数校正因子。反过来，校准的功函数可以用于调节由传感器测量的衬底的电压。提供包括第一电极和一个或多个导电棒的电晕枪。在一些实施例中，导电棒相对于第一电极侧壁可以在0度和90度之间成角度和/或彼此同心布置成小于90度。另外或替代地，电晕枪可以适于改变其长度和/或包括在由第一电极包围的空间内部分插入的第二电极。

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