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1. 发明授权

US06909291B1 Systems and methods for using non-contact voltage sensors and corona discharge guns 失效
标题翻译：使用非接触式电压传感器和电晕放电枪的系统和方法
公开(公告)号：US06909291B1
公开(公告)日：2005-06-21
申请号：US10606066
申请日：2003-06-24
申请人： Zhiwei (Steve) Xu , Jianou Shi , Shiyou Pei , Mahmood Mirzaaghaeian , Jeffrey A. Rzepiela
发明人： Zhiwei (Steve) Xu , Jianou Shi , Shiyou Pei , Mahmood Mirzaaghaeian , Jeffrey A. Rzepiela
IPC分类号： G01N27/00 , G01R35/00 , G01R31/02
CPC分类号： G01N27/002
摘要： A method and a system for calibrating the work function of a non-contact voltage sensor are provided. The method includes preparing a reference sample to have a stable work function, measuring a voltage of the sample using a non-contact voltage sensor, and determining a work function correction factor of the sensor from the measured voltage. In turn, the calibrated work function may be used to adjust voltages of substrates measured by the sensor. A corona gun which includes a first electrode and one or more conductive rods is provided. In some embodiments, the conductive rods may be angled between 0 and 90 degrees with respect to a first electrode sidewall and/or be concentrically arranged less than 90 degrees from each other. In addition or alternatively, the corona gun may be adapted to alter its length and/or include a second electrode partially inset within a space surrounded by the first electrode.
摘要翻译：提供了一种用于校准非接触式电压传感器的功能的方法和系统。该方法包括制备参考样品以具有稳定的功函数，使用非接触电压传感器测量样品的电压，以及根据测量的电压确定传感器的功函数校正因子。反过来，校准的功函数可以用于调节由传感器测量的衬底的电压。提供包括第一电极和一个或多个导电棒的电晕枪。在一些实施例中，导电棒相对于第一电极侧壁可以在0度和90度之间成角度和/或彼此同心布置成小于90度。另外或替代地，电晕枪可以适于改变其长度和/或包括在由第一电极包围的空间内部分插入的第二电极。

2. 发明授权

US07110238B1 Systems and methods for using non-contact voltage sensors and corona discharge guns 有权
标题翻译：使用非接触式电压传感器和电晕放电枪的系统和方法
公开(公告)号：US07110238B1
公开(公告)日：2006-09-19
申请号：US11154991
申请日：2005-06-16
申请人： Zhiwei (Steve) Xu , Jianou Shi , Shiyou Pei , Mahmood Mirzaaghaeian , Jeffrey A. Rzepiela
发明人： Zhiwei (Steve) Xu , Jianou Shi , Shiyou Pei , Mahmood Mirzaaghaeian , Jeffrey A. Rzepiela
IPC分类号： H01H47/00
CPC分类号： G01N27/002
摘要： A method and a system for calibrating the work function of a non-contact voltage sensor are provided. The method includes preparing a reference sample to have a stable work function, measuring a voltage of the sample using a non-contact voltage sensor, and determining a work function correction factor of the sensor from the measured voltage. In turn, the calibrated work function may be used to adjust voltages of substrates measured by the sensor. A corona gun which includes a first electrode and one or more conductive rods is provided. In some embodiments, the conductive rods may be angled between 0 and 90 degrees with respect to a first electrode sidewall and/or be concentrically arranged less than 90 degrees from each other. In addition or alternatively, the corona gun may be adapted to alter its length and/or include a second electrode partially inset within a space surrounded by the first electrode.
摘要翻译：提供了一种用于校准非接触式电压传感器的功能的方法和系统。该方法包括制备参考样品以具有稳定的功函数，使用非接触电压传感器测量样品的电压，以及根据测量的电压确定传感器的功函数校正因子。反过来，校准的功函数可以用于调节由传感器测量的衬底的电压。提供包括第一电极和一个或多个导电棒的电晕枪。在一些实施例中，导电棒相对于第一电极侧壁可以在0度和90度之间成角度和/或彼此同心布置成小于90度。另外或替代地，电晕枪可以适于改变其长度和/或包括在由第一电极包围的空间内部分插入的第二电极。

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