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1. 发明申请

WO2005069055A3 CATADIOPTRIC PROJECTION OBJECTIVE 审中-公开
标题翻译：目标投影目标
公开(公告)号：WO2005069055A3
公开(公告)日：2006-03-02
申请号：PCT/EP2005000262
申请日：2005-01-13
申请人： ZEISS CARL SMT AG , SHAFER DAVID , ULRICH WILHELM , DODOC AURELIAN , VON BUENAU RUDOLF , MANN HANS-JUERGEN , EPPLE ALEXANDER
发明人： SHAFER DAVID , ULRICH WILHELM , DODOC AURELIAN , VON BUENAU RUDOLF , MANN HANS-JUERGEN , EPPLE ALEXANDER
IPC分类号： G02B17/08 , G03F7/20 , G02B17/00
CPC分类号： G03F7/70958 , G02B13/22 , G02B17/0812 , G02B17/0892 , G03F7/70225 , G03F7/70275 , G03F7/70341 , G03F7/70966
摘要： A catadioptric projection objective (200) for imaging a pattern provided in an object plane (201) of the projection objective onto an image plane (202) of the projection objective comprises: a first objective part (210) for imaging the pattern provided in the object plane into a first intermediate image; a second objective part (220) for imaging the first intermediate imaging into a second intermediate image; a third objective part (230) for imaging the second intermediate imaging directly onto the image plane; wherein a first concave mirror (221) having a first continuous mirror surface and at least one second concave mirror (222) having a second continuous mirror surface are arranged upstream of the second intermediate image; pupil surfaces are formed between the object plane and the first intermediate image, between the first and the second intermediate image and between the second intermediate image and the image plane; and all concave mirrors are arranged optically remote from a pupil surface. The system has potential for very high numerical apertures at moderate lens material mass consumption.
摘要翻译：用于将设置在投影物镜的物平面（201）中的图案成像到投影物镜的像平面（202）上的反射折射投射物镜（200）包括：第一物镜部分（210），用于对设置在投影物镜物平面成为第一中间图像; 第二目标部分（220），用于将第一中间成像成像成第二中间图像; 用于将所述第二中间成像直接成像到所述图像平面上的第三目标部分（230）其中具有第一连续镜面的第一凹面镜（221）和具有第二连续镜面的至少一个第二凹面镜（222）布置在所述第二中间图像的上游; 瞳孔表面形成在物平面与第一中间图像之间，第一和第二中间图像之间以及第二中间图像与图像平面之间; 并且所有凹面反射镜光学地远离光瞳表面布置。该系统具有中等透镜材料质量消耗的非常高的数值孔径的潜力。

2. 发明专利

DE60008834D1 未知
公开(公告)号：DE60008834D1
公开(公告)日：2004-04-15
申请号：DE60008834
申请日：2000-10-19
申请人： ZEISS CARL SMT AG
发明人： HERKOMMER ALOIS , FUERTER GERD , SCHUSTER KARL-HEINZ , VON BUENAU RUDOLF , SHAFER DAVID R , ULRICH WILHELM
IPC分类号： G02B17/00 , G02B17/08 , G03F7/20 , H01L21/027
摘要： A catadioptric objective of axial symmetry with two intermediate images achieving high resolution and to be used advantageously in the VUV region for microscopy or microlithography. The objective comprises a first refractive partial objective (S1) which generates a first intermediate image in the central bore of a mirror (M2), a catadioptric second partial objective (S2) which generates a second intermediate image in the central bore of a mirror (M1) and a third refractive partial objective (S3) which generates the final image (Im).

3. 发明专利

DE602005018648D1 未知
公开(公告)号：DE602005018648D1
公开(公告)日：2010-02-11
申请号：DE602005018648
申请日：2005-07-08
申请人： ZEISS CARL SMT AG
发明人： SHAFER DAVID , ULRICH WILHELM , DODOC AURELIAN , VON BUENAU RUDOLF , MANN HANS-JUERGEN , EPPLE ALEXANDER , BEDER SUSANNE , SINGER WOLFGANG
IPC分类号： G03F7/00 , G02B17/00 , G02B17/08

4. 发明专利

DE60008834T2 未知
公开(公告)号：DE60008834T2
公开(公告)日：2005-01-13
申请号：DE60008834
申请日：2000-10-19
申请人： ZEISS CARL SMT AG
发明人： HERKOMMER ALOIS , FUERTER GERD , SCHUSTER KARL-HEINZ , VON BUENAU RUDOLF , SHAFER DAVID R , ULRICH WILHELM
IPC分类号： G02B17/00 , G02B17/08 , G03F7/20 , H01L21/027
摘要： A catadioptric objective of axial symmetry with two intermediate images achieving high resolution and to be used advantageously in the VUV region for microscopy or microlithography. The objective comprises a first refractive partial objective (S1) which generates a first intermediate image in the central bore of a mirror (M2), a catadioptric second partial objective (S2) which generates a second intermediate image in the central bore of a mirror (M1) and a third refractive partial objective (S3) which generates the final image (Im).

5. 发明专利

DE602005008707D1 未知
公开(公告)号：DE602005008707D1
公开(公告)日：2008-09-18
申请号：DE602005008707
申请日：2005-01-13
申请人： ZEISS CARL SMT AG
发明人： SHAFER DAVID , ULRICH WILHELM , DODOC AURELIAN , VON BUENAU RUDOLF , MANN HANS-JUERGEN , EPPLE ALEXANDER
IPC分类号： G02B17/00 , G02B17/08 , G03F7/20
摘要： A catadioptric projection objective for imaging a pattern provided in an object plane of the projection objective onto an image plane of the projection objective comprises: an optical axis, a plurality of lenses and at least one concave mirror having a continuous mirror surface having no hole in the area of a footprints of the radiation beam on the reflecting surfaces. The projection objective is an unobscured system having no pupil obscuration. Further, the projection objective has negative isotropic magnification such that an object field disposed on one side of the optical axis is imaged into an image field disposed on the opposite side of the optical axis without image flip, whereby no change of chirality occurs between the object field and the image field. This allows to use the same type of reticles also used for imaging with refractive projection objectives.

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