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    • 6. 发明授权
    • Semiconductor device, method for manufacturing the same, and liquid jet apparatus
    • 半导体装置及其制造方法以及液体喷射装置
    • US07056798B2
    • 2006-06-06
    • US10657269
    • 2003-09-09
    • Mineo ShimotsusaKei FujitaYukihiro Hayakawa
    • Mineo ShimotsusaKei FujitaYukihiro Hayakawa
    • H01L21/336
    • H01L29/7816B41J2/14072B41J2202/13H01L21/26586H01L27/088H01L29/0696H01L29/1095H01L29/42368H01L29/66674H01L29/7835H01L2924/0002H01L2924/00
    • A semiconductor device in which electro-thermal conversion elements and switching devices for flowing currents through the elements are integrated on a first conductive type semiconductor substrate. The switching devices are insulated gate type field effect transistors having a second conductive type first semiconductor region on one principal surface of the semiconductor substrate; a first conductive type second semiconductor region for supplying a channel region and for adjoining the first semiconductor region; a second conductive type source region on the surface of the second semiconductor region; a second conductive type drain region on the surface of the first semiconductor region; and gate electrodes on the channel region with a gate insulator film between them. The second semiconductor region is formed by a semiconductor having an impurity concentration higher than that of the first semiconductor region, and is disposed between two adjacent drain regions, separating them in a traverse direction.
    • 一种半导体器件,其中电流转换元件和用于使流过元件的电流的开关器件集成在第一导电类型半导体衬底上。 开关器件是在半导体衬底的一个主表面上具有第二导电类型的第一半导体区域的绝缘栅型场效应晶体管; 第一导电型第二半导体区域,用于提供沟道区域并邻接第一半导体区域; 在所述第二半导体区域的表面上的第二导电类型源极区域; 在所述第一半导体区域的表面上的第二导电类型漏极区域; 和沟道区上的栅极电极,栅极绝缘膜在它们之间。 第二半导体区域由具有比第一半导体区域的杂质浓度高的杂质浓度的半导体形成,并且设置在两个相邻的漏极区域之间,沿横向方向分离。
    • 8. 发明授权
    • Semiconductor device and liquid jetting device using the same
    • 半导体装置及使用其的液体喷射装置
    • US06867457B2
    • 2005-03-15
    • US10615288
    • 2003-07-09
    • Yukihiro HayakawaKei FujitaMineo Shimotsusa
    • Yukihiro HayakawaKei FujitaMineo Shimotsusa
    • B41J2/05B41J2/14B41J2/16H01L21/336H01L21/8234H01L27/088H01L29/06H01L29/78H01L29/76H01L29/94H01L31/062H01L31/113H01L31/119
    • H01L29/7816B41J2/14072B41J2/14129B41J2202/13H01L27/088H01L29/0696H01L29/66681H01L29/7835
    • A semiconductor device having a plurality of electrothermal conversion elements and a plurality of switching elements for flowing current through the electrothermal conversion elements, respectively formed on a semiconductor substrate of a first conductivity type, wherein each of the switching elements is an insulated gate field effect transistor including: a first semiconductor region of a second conductivity type opposite to the first conductivity type, the first semiconductor region being formed on a principal surface of the semiconductor substrate, a second semiconductor region of the first conductivity type for providing a channel region, the second semiconductor region being formed adjacent to the first semiconductor region, a source region of the second conductivity type formed in a surface layer of the second semiconductor region, a drain region of the second conductivity type formed in a surface layer of the first semiconductor region, and a gate electrode formed on a gate insulating film on the channel region, and a resistivity of the semiconductor substrate is 5 to 18 Ωcm, and the first semiconductor region has a depth of 2.0 to 2.2 μm along a depth direction of the semiconductor substrate and an impurity concentration of 1×1014 to 1×1018/cm3.
    • 一种半导体器件,具有多个电热转换元件和多个开关元件,用于使电流流过电热转换元件,分别形成在第一导电类型的半导体衬底上,其中每个开关元件是绝缘栅场效应晶体管 包括:与所述第一导电类型相反的第二导电类型的第一半导体区域,所述第一半导体区域形成在所述半导体衬底的主表面上,所述第一导电类型的第二半导体区域用于提供沟道区域,所述第二半导体区域 半导体区域形成在第一半导体区域附近,形成在第二半导体区域的表面层中的第二导电类型的源极区域,形成在第一半导体区域的表面层中的第二导电类型的漏极区域,以及 形成在栅极上的栅电极 并且半导体衬底的电阻率为5〜18Ω·cm,第一半导体区域沿着半导体衬底的深度方向的深度为2.0〜2.2μm,杂质浓度为1×10 14Ω·cm, 至1×10 18 / cm 3。