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    • 5. 发明授权
    • Sensor apparatus and information processing apparatus
    • 传感器装置和信息处理装置
    • US08711122B2
    • 2014-04-29
    • US13228686
    • 2011-09-09
    • Yutaka WadaNaohiro TakahashiTakashi Itaya
    • Yutaka WadaNaohiro TakahashiTakashi Itaya
    • G06F3/045G06F3/041
    • G06F3/044G06F3/0414
    • A sensor apparatus includes: a sensor panel that includes an input operation surface and is configured to detect positional coordinates of a detection object that comes into contact with the input operation surface; a casing; and a pressure-sensitive sensor that includes a first electrode fixed on the sensor panel side, a second electrode fixed on the casing side, and an elastic member that is provided between the sensor panel and the casing and elastically supports the sensor panel with respect to the casing, includes, between the first electrode and the second electrode, a first area formed with a first capacitance and a second area formed with a second capacitance larger than the first capacitance, and is configured to detect a pressing force input to the input operation surface as a change in a capacitance between the first electrode and the second electrode.
    • 传感器装置包括:传感器面板,包括输入操作面,被配置为检测与输入操作面接触的检测对象的位置坐标; 套管 以及压敏传感器,其包括固定在所述传感器面板侧的第一电极,固定在所述壳体侧的第二电极和设置在所述传感器面板与所述壳体之间的弹性部件,并相对于所述传感器面板弹性地支撑所述传感器面板 壳体在第一电极和第二电极之间包括形成有第一电容的第一区域和形成有大于第一电容的第二电容的第二区域,并且被配置为检测输入到输入操作的按压力 表面作为第一电极和第二电极之间的电容的变化。
    • 8. 发明申请
    • Defect inspection method and apparatus
    • 缺陷检查方法和装置
    • US20070285653A1
    • 2007-12-13
    • US11580870
    • 2006-10-16
    • Naohiro TakahashiTamihide YasumotoTadamasa Noguchi
    • Naohiro TakahashiTamihide YasumotoTadamasa Noguchi
    • G01N21/00
    • G01N21/9501G01N21/95607G01N2021/8854
    • (a) Scattered light from the surface of a sample subjected to the same process as a process for an inspection object is observed, a defect is detected from an intensity of scatted light, and a position of the detected defect and an intensity of scattered light caused by the detected defect are acquired.(b) Defects detected at the step (a) are classified into a group detectable by observing secondary electrons emitted when an electron beam is applied to the surface of the sample and a group not detectable. (c) A decision threshold value of a scattered light intensity for extracting defects to be counted is determined, in accordance with a result of classification by the step (b) and the intensity of scattered light caused by the detected defect.
    • (a)观察到与经过与检查对象的处理相同的处理的样品的表面的散射光,从散射光的强度,检测到的缺陷的位置和散射光的强度检测缺陷 由检测到的缺陷获得。 (b)在步骤(a)中检测到的缺陷被分类为可以通过观察将电子束施加到样品表面上发射的二次电子和不可检测的组来检测的组。 (c)根据步骤(b)的分类结果和由检测到的缺陷引起的散射光的强度,确定用于提取要计数的缺陷的散射光强度的判定阈值。