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    • 1. 发明授权
    • Apparatus including a specimen tilt mechanism for measuring
electromagnetic field distribution in the specimen using a focused
electron beam
    • 包括用于使用聚焦电子束测量样本中的电磁场分布的样本倾斜机构的装置
    • US5572122A
    • 1996-11-05
    • US141077
    • 1993-10-26
    • Yusuke YajimaYoshio TakahashiMasakazu IchikawaShigeyuki Hosoki
    • Yusuke YajimaYoshio TakahashiMasakazu IchikawaShigeyuki Hosoki
    • G01N23/04G01R31/305G01R33/028G01R33/12G01R33/02G01R33/025
    • G01R31/305
    • An apparatus for measuring an electromagnetic field distribution using a focused electron beam can measure the electromagnetic field distribution in a specimen with high resolution and high reliability. A focused electron beam radiation system irradiates a specimen with a focused electron beam. A specimen tilt mechanism tilts a specimen by 180.degree. about a tilt axis that is perpendicular to the optical axis of the focused electron beam. An electron beam position detector measures the direction and quantity of the deflection given to the focused electron beam when it is transmitted through the specimen. Further, a processing system calculates the direction and the intensity of an electric field, and the direction and the intensity of a magnetic field separately at a point on the specimen through which the focused electron beam is transmitted, from the data on the direction and the quantity of the deflection of the focused electron beam measured by the electron beam position detector before and after the turnover of the specimen by the specimen tilt mechanism. Thus, an electric field and a magnetic field in a specimen can be separately observed independently of each other.
    • 使用聚焦电子束测量电磁场分布的装置可以以高分辨率和高可靠性测量样品中的电磁场分布。 聚焦电子束辐射系统用聚焦电子束照射样品。 样品倾斜机构围绕垂直于聚焦电子束的光轴的倾斜轴将样品倾斜180度。 电子束位置检测器测量当聚焦电子束透过样品时给予聚焦电子束的偏转的方向和数量。 此外,处理系统从方向和方向上的数据分别计算电场的方向和强度,以及分别在聚焦电子束透过的样本上的点上的磁场的方向和强度 电子束位置检测器在样品倾倒机构转换之前和之后测量的聚焦电子束的偏转量。 因此,可以彼此独立地分别观察试样中的电场和磁场。
    • 10. 发明授权
    • Motor driving apparatus
    • 电机驱动装置
    • US5973469A
    • 1999-10-26
    • US981033
    • 1998-04-13
    • Haruhiko HiguchiMasakazu IchikawaHiroyuki KiharaTomomi MurakamiHidetaka Tsuchiya
    • Haruhiko HiguchiMasakazu IchikawaHiroyuki KiharaTomomi MurakamiHidetaka Tsuchiya
    • H02P6/20H02P8/02H02P8/08H02P8/00
    • H02P6/20H02P8/02H02P8/08
    • It is an object of this invention to attain reliable starting characteristics and stable rotation performance of a motor in a motor of a phase synchronization driving type. To achieve this object, according to this invention, there is provided a motor driving apparatus having a stepping motor constituted by a stator with at least two poles, a rotor having a permanent magnet with at least two poles, and a driving coil magnetically coupled to the stator, a driving pulse generation means for outputting a driving pulse signal for driving the stepping motor, a driving circuit for supplying a driving current to the driving coil on the basis of the signal from the driving pulse generation means, a voltage detection circuit for detecting a counter electromotive voltage generated upon rotation of the rotor, and a pole position detection means for detecting the pole position of the rotating rotor with respect to the rotor on the basis of a detection signal generated by the voltage detection circuit, the driving pulse generation means controlling the output timing of the driving pulse signal on the basis of the detection signal from the pole position detection means, characterized in that the pole position detection means stops outputting the driving pulse signal on the basis of the detection signal from the voltage detection circuit which is detected during the output period of the driving pulse signal, and outputs a driving pulse signal having a phase opposite to that of the driving pulse signal.
    • PCT No.PCT / JP97 / 01276 Sec。 371日期:1998年4月13日 102(e)日期1998年4月13日PCT 1997年4月11日PCT公布。 公开号WO97 / 38487 日期为1997年10月16日本发明的目的是获得电动机在相位同步驱动型电动机中的可靠起动特性和稳定的旋转性能。 为了达到这个目的,根据本发明,提供了一种马达驱动装置,其具有步进马达,该步进马达由具有至少两个极的定子构成,转子具有至少两个极的永磁体,以及驱动线圈,磁耦合到 定子,驱动脉冲产生装置,用于输出用于驱动步进电机的驱动脉冲信号;驱动电路,用于根据来自驱动脉冲发生装置的信号向驱动线圈提供驱动电流;电压检测电路,用于 检测在转子旋转时产生的反电动势;以及极位置检测装置,用于根据由电压检测电路产生的检测信号来检测旋转转子相对于转子的极位置,驱动脉冲产生 基于来自极位置检测装置的检测信号来控制驱动脉冲信号的输出定时 其特征在于,所述极位置检测装置根据来自所述驱动脉冲信号的输出期间检测出的电压检测电路的检测信号,停止输出驱动脉冲信号,并输出相位相反的驱动脉冲信号 到驱动脉冲信号。