专利快速检索-快速检索全球专利，免费商用专利数据库-IPRDB

1. 发明授权

US06380684B1 Plasma generating apparatus and semiconductor manufacturing method 有权
标题翻译：等离子体发生装置和半导体制造方法
公开(公告)号：US06380684B1
公开(公告)日：2002-04-30
申请号：US09573253
申请日：2000-05-18
申请人： Yunlong Li , Masanobu Sato , Yoshio Tominaga , Noriyoshi Sato , Satoru Iizuka
发明人： Yunlong Li , Masanobu Sato , Yoshio Tominaga , Noriyoshi Sato , Satoru Iizuka
IPC分类号： H05H146
CPC分类号： H01J37/32082 , H01J37/3266
摘要： A plasma generating apparatus and processing method, which generate high-density plasma, even in the central portion of the plasma generating zone. The apparatus comprises rectangular electrodes, a rectangular fistulous discharge electrode which surrounds the plasma generating zone, and a vacuum chamber of rectangular cross-section. Permanent magnets surround the discharge electrode, produce predetermined magnetic lines of force with portions which extend approximately parallel to the central axis of discharge electrode. A pair of parallel plate electrodes define the extension of the plasma generating zone in the direction of the central axis of the discharge electrode. The apparatus is configured such that the magnetic lines of force passing through the central portion of the plasma generating zone do not intersect with the electrodes.
摘要翻译：即使在等离子体产生区域的中心部分也产生高密度等离子体的等离子体发生装置和处理方法。该装置包括矩形电极，围绕等离子体生成区域的矩形排出电极和矩形横截面的真空室。永磁体围绕放电电极，产生预定的磁力线，其部分大致平行于放电电极的中心轴延伸。一对平行板电极限定等离子体生成区在放电电极的中心轴线方向上的延伸。该装置被配置成使得通过等离子体产生区的中心部分的磁力线不与电极相交。

2. 发明授权

US06238512B1 Plasma generation apparatus 有权
标题翻译：等离子体发生装置
公开(公告)号：US06238512B1
公开(公告)日：2001-05-29
申请号：US09234488
申请日：1999-01-21
申请人： Yunlong Li , Noriyoshi Sato , Satoru Iizuka
发明人： Yunlong Li , Noriyoshi Sato , Satoru Iizuka
IPC分类号： C23F102
CPC分类号： H01J37/321 , H01J37/32357 , H01L21/67069
摘要： An object is to make it possible to prevent electron temperature distribution from becoming uneven at surface of a process object when dimensions of the process object are large. A region division unit 30 encloses the inside of a ring-shaped discharge electrode 15 in the vicinity of that discharge electrode 15, thereby dividing the interior region of a tube-shaped vacuum vessel 11 in a direction perpendicular to the center axis Z thereof into a plasma generation region R1 and a plasma diffusion region R2, This region division unit 30 has a tube-shaped grid 301. This grid 301 has a plurality of electron passing holes and exhibits electrical conductivity. This grid 301, furthermore, is set in place concentrically with the vacuum vessel 11 so as to be positioned on the outside of a substrate W.
摘要翻译：其目的在于，能够防止在加工对象的尺寸较大时电极温度分布变得不均匀的区域。区域分割单元30将环状放电电极15的内部包围在该放电电极15将管状真空容器11的内部区域沿垂直于其中心轴线Z的方向分成等离子体产生区域R1和等离子体扩散区域R2。该区域分割单元30具有管状真空容器11，该栅格301具有多个电子通过孔并且具有导电性。此外，该格栅301与真空容器11同心地设置在位，以便被定位在基板W的外侧。

3. 发明授权

US06835279B2 Plasma generation apparatus 失效
标题翻译：等离子体发生装置
公开(公告)号：US06835279B2
公开(公告)日：2004-12-28
申请号：US09123352
申请日：1998-07-28
申请人： Yunlong Li , Noriyoshi Sato , Satoru Iizuka
发明人： Yunlong Li , Noriyoshi Sato , Satoru Iizuka
IPC分类号： H05H100
CPC分类号： H01J37/32623 , H01J37/3266 , H05H1/46
摘要： The object of the present invention is to make possible generation of high-density plasma even in the center of a plasma generation region. A plasma generation apparatus comprises a vacuum vessel 11, gas induction unit 12, exhaust unit 13, cylindrical discharge electrode 14, high-frequency oscillators 19 and 21, ring-shaped permanent magnets 15 and 16, and two disk-shaped walls 17 and 18. The discharge electrode 14 is fashioned so as to enclose a plasma generation region 41. The permanent magnets 15 and 16 form prescribed magnetic force lines. These magnetic force lines have portions that are roughly parallel to the center axis 42 of the discharge electrode 14, the lengths of which parallel portions become longer as the magnetic force lines approach the center axis 42. The two walls 17 and 18 define the scope of the plasma generation region 41 in the dimension of the center axis 42 of the discharge electrode 14. These two walls 17 and 18 are positioned so as to sandwich therebetween the plasma generation region 41 in the dimension of the center axis 42. The plasma generation apparatus is also configured so that the magnetic force lines 43 passing through the center of the plasma generation 41 are shaped so that they do not intersect the two walls 17 and 18.
摘要翻译：本发明的目的是即使在等离子体产生区域的中心也可能产生高密度等离子体。等离子体产生装置包括真空容器11，气体感应单元12，排气单元13，圆柱形放电电极14，高频振荡器19和21，环形永磁体15和16以及两个盘形壁17和18 放电电极14被形成为包围等离子体产生区域41.永久磁铁15和16形成规定的磁力线。这些磁力线具有大致平行于放电电极14的中心轴线42的部分，随着磁力线接近中心轴线42，其平行部分变长的长度。两个壁17和18限定了等离子体产生区域41，其尺寸为放电电极14的中心轴线42的尺寸。这两个壁17和18被定位成在等离子体产生区域41之间夹着中心轴线42的尺寸。等离子体产生装置通过等离子体产生部41的中心的磁力线43也被配置成使得它们不与两个壁17和18相交。

4. 发明授权

US06376796B2 Plasma processing system 失效
标题翻译：等离子体处理系统
公开(公告)号：US06376796B2
公开(公告)日：2002-04-23
申请号：US09738989
申请日：2000-12-19
申请人： Noriyoshi Sato , Satoru Iizuka , Tsukasa Yoneyama , Hiroyasu Sato , Unryu Ogawa , Yoshio Tominaga , Yoichiro Numazawa , Yukito Nakagawa
发明人： Noriyoshi Sato , Satoru Iizuka , Tsukasa Yoneyama , Hiroyasu Sato , Unryu Ogawa , Yoshio Tominaga , Yoichiro Numazawa , Yukito Nakagawa
IPC分类号： B23K902
CPC分类号： H01J37/32192 , H05B7/00
摘要： A plasma processing system provided with a vacuum chamber for accommodating a substrate and for generation of plasma in a space in the front of the same, an antenna provided at the vacuum chamber, and a high frequency power source for supplying high frequency power to the antenna. The antenna emits high frequency power, generates plasma inside the vacuum chamber, and processes the surface of the substrate by the plasma. In the plasma processing system, the antenna has a disk-shaped conductor plate having a predetermined thickness. A coaxial waveguide having a folded portion is formed around the disk-shaped conductor plate. The folded portion of the waveguide is provided with a short-circuit 3 dB directional coupler having an impedance matching function. The antenna having the above structure prevents the generation of a standing wave in the high frequency wave propagation path from the high frequency power source to the vacuum chamber and generates high density plasma by supply of a large power. Due to this, processing of a large area substrate becomes possible.
摘要翻译：一种等离子体处理系统，其具有用于容纳基板的真空室和用于在其前部的空间中产生等离子体，设置在真空室处的天线以及用于向天线提供高频功率的高频电源。天线发射高频功率，在真空室内产生等离子体，并通过等离子体处理衬底的表面。在等离子体处理系统中，天线具有预定厚度的盘状导体板。在盘形导体板周围形成具有折叠部分的同轴波导。波导的折叠部分设置有具有阻抗匹配功能的短路3dB定向耦合器。具有上述结构的天线防止在从高频电源到真空室的高频波传播路径中产生驻波，并通过大功率的供给产生高密度等离子体。由此，能够对大面积基板进行加工。

5. 发明授权

US06893532B1 Method and apparatus for processing fine particle dust in plasma 失效
标题翻译：用于处理等离子体中细粒尘埃的方法和装置
公开(公告)号：US06893532B1
公开(公告)日：2005-05-17
申请号：US10019245
申请日：1999-06-29
申请人： Noriyoshi Sato , Satoru Iizuka , Giichiro Uchida
发明人： Noriyoshi Sato , Satoru Iizuka , Giichiro Uchida
IPC分类号： H01J37/32 , H01L21/3065
CPC分类号： H01J37/32431 , H01J2237/022
摘要： An apparatus for processing particulate dust when a substrate is arranged in a high vacuum enclosure, plasma is generated in the high vacuum enclosure, and a reactive material is introduced into the high vacuum enclosure to perform processing of the substrate. At least one collecting electrode is provided around the substrate in the high vacuum enclosure other than the electrode that generates plasma, and particulates generated in plasma are efficiently removed by applying a predetermined electric potential of a direct-current or an alternating current to the collecting electrode, and thus a deposition problem onto an inner wall of the vacuum enclosure and a deterioration problem of processing accuracy and a film quality associated with flowing of the particulates onto the substrate are solved.
摘要翻译：当将基板布置在高真空外壳中时处理颗粒状灰尘的装置，在高真空外壳中产生等离子体，并且将反应性材料引入高真空外壳中以执行基板的处理。在除了产生等离子体的电极之外的高真空封壳中的基板周围设置至少一个集电极，并且通过向集电极施加直流电流或交流电的预定电位来有效地除去在等离子体中产生的微粒，因此解决了真空外壳的内壁上的沉积问题，以及与微粒流入基板相关的加工精度和膜质量的劣化问题。

6. 发明申请

US20120127044A1 PORTABLE WIRELESS DEVICE 审中-公开
标题翻译：便携式无线设备
公开(公告)号：US20120127044A1
公开(公告)日：2012-05-24
申请号：US13388423
申请日：2010-02-19
申请人： Nobuharu Mashima , Yoshio Koyanagi , Noriyoshi Sato
发明人： Nobuharu Mashima , Yoshio Koyanagi , Noriyoshi Sato
IPC分类号： H01Q1/24 , H05K5/02
CPC分类号： H01Q1/242 , H01Q1/48 , H04M1/0216
摘要： Provided is a portable wireless device capable of preventing deterioration in performance of an antenna caused by reverse phase current. The portable wireless device (100) comprises at least two box-shaped housings each of which is formed by fitting respective annular fitting surfaces of two cases. Further, in the portable wireless device (100), a first circuit board (110) is provided in a first housing (101). A second circuit board (115) is provided in a second housing (102). A signal line (119) electrically connects the first circuit board (110) and the second circuit board (115). A waterproofing packing (116) has an annular shape, and is provided between the fitting surfaces of the two cases and held by the two cases which constitute the second housing (102). A conductive element (118) is integrally formed with the waterproofing packing (116), electrically connected to an end of the second circuit board (115), and electrically connected to the signal line (119).
摘要翻译：提供了能够防止由反相电流引起的天线性能劣化的便携式无线装置。便携式无线装置（100）包括至少两个箱形壳体，每个箱形壳体通过装配两个壳体的相应的环形装配表面而形成。此外，在便携式无线设备（100）中，第一电路板（110）设置在第一壳体（101）中。第二电路板（115）设置在第二壳体（102）中。信号线（119）电连接第一电路板（110）和第二电路板（115）。防水填料（116）具有环状，并且设置在两壳体的嵌合面之间并由构成第二壳体（102）的两个壳体保持。导电元件（118）与防水填料（116）整体形成，电连接到第二电路板（115）的端部，并电连接到信号线（119）。

7. 发明授权

US07831275B2 Information terminal device provided with turning function carrying camera 失效
标题翻译：信息终端设备配有转动功能携带摄像机
公开(公告)号：US07831275B2
公开(公告)日：2010-11-09
申请号：US11835034
申请日：2007-08-07
申请人： Noriyoshi Sato , Yutaka Masutani , Koichi Yoda
发明人： Noriyoshi Sato , Yutaka Masutani , Koichi Yoda
IPC分类号： H04M1/00
CPC分类号： H04M1/0218 , H04M1/0264 , H04N5/2253 , H04N7/142 , H04N2007/145
摘要： In an information terminal apparatus with a camera having a rotating function, the object of the invention is to impart a predetermined torque to a camera so as to render the camera easily rotatable by the force of a finger in a desired direction and to continue its state of standstill when the rotation is stopped.An information terminal apparatus with a camera having a rotating function in accordance with the invention comprises: a camera unit including a cylindrical member 62 having a shaft portion 62C at one end thereof and for accommodating a camera therein, and an annular member 72 which is fitted over the shaft portion 62C; a main body portion 1 having a bearing portion 42 for holding the annular member 72 and for rotatably supporting the camera unit; and an elastic member 74 provided between the main body portion 1 and the cylindrical member 72, wherein the elastic member 74 is arranged to impart a direction-of-axis force in an axial direction of the camera unit while moving together with the rotation of the camera unit.
摘要翻译：在具有旋转功能的照相机的信息终端装置中，本发明的目的是赋予照相机预定的扭矩，以便通过手指在期望方向上的力使照相机容易旋转并且继续其状态停止旋转时停止。具有根据本发明的具有旋转功能的照相机的信息终端设备包括：相机单元，包括：圆柱形部件62，其一端具有轴部分62C并用于在其中容纳照相机;以及环形部件72，在轴部62C上方; 主体部分1具有用于保持环形构件72并可旋转地支撑相机单元的支承部分42; 以及设置在主体部分1和圆筒构件72之间的弹性构件74，其中弹性构件74被布置成沿相机单元的轴向方向施加轴向力，同时与相机单元。

8. 发明申请

US20090048005A1 MOBILE TERMINAL 失效
标题翻译：移动终端
公开(公告)号：US20090048005A1
公开(公告)日：2009-02-19
申请号：US12167469
申请日：2008-07-03
申请人： Kazunori Kouno , Eiji Nishimura , Noriyoshi Sato
发明人： Kazunori Kouno , Eiji Nishimura , Noriyoshi Sato
IPC分类号： H04M1/00
CPC分类号： H04M1/0222
摘要： A mobile terminal includes: a first body including an operation part; a second body including a display; and a connector which rotatably connects the first body and the second body. The connector is connected to the first body, and rotates with respect to the first body about a first rotating shaft. The connector is connected to a lateral end of the second body, and rotates with respect to the second body about a second rotating shaft orthogonal to the first rotating shaft. A first fitting portion is formed on a connected surface of the connector to be connected with the second body. A second fitting portion which is fitted to the first fitting portion, is formed on the second body. When the second body relatively rotates about the second rotating shaft to overlap the connector on the connected surface, the first fitting portion fits to the second fitting portion.
摘要翻译：移动终端包括：第一主体，包括操作部分; 包括显示器的第二主体; 以及可旋转地连接第一主体和第二主体的连接器。连接器连接到第一主体，并且围绕第一旋转轴相对于第一主体旋转。连接器连接到第二主体的横向端，并且围绕与第一旋转轴正交的第二旋转轴相对于第二主体旋转。第一装配部分形成在连接器的连接表面上以与第二主体连接。安装在第一装配部分上的第二装配部分形成在第二主体上。当第二主体围绕第二旋转轴相对旋转以与连接表面上的连接器重叠时，第一配合部分配合到第二装配部分。

9. 发明申请

US20050147765A1 Method for producing particles with diamond structure 审中-公开
标题翻译：用金刚石结构生产颗粒的方法
公开(公告)号：US20050147765A1
公开(公告)日：2005-07-07
申请号：US10499260
申请日：2002-11-22
申请人： Volker Dose , Gregor Morfill , Vladimir Fortov , Noriyoshi Sato , Yukio Watanabe
发明人： Volker Dose , Gregor Morfill , Vladimir Fortov , Noriyoshi Sato , Yukio Watanabe
IPC分类号： C23C16/26 , C23C16/27 , C23C16/44 , C30B25/10 , C30B29/04 , C30B30/08 , B05D1/22
CPC分类号： C30B30/08 , C23C16/27 , C23C16/4417 , C30B25/105 , C30B29/04
摘要： A method for producing particles having a monocrystalline diamond structure, comprises the steps of operating a plasma chamber (100) containing a reaction gas with at least one carbon compound and generating a reactive plasma, providing seed particles in said plasma chamber (100) which are arranged under the influence of external gravity compensating forces within the reactive plasma, and polydirectional growing carbon with diamond structure on said seed particles, so that growing diamond containing particles are formed.
摘要翻译：一种用于生产具有单晶金刚石结构的颗粒的方法，包括以下步骤：将含有反应气体的等离子体室（100）与至少一种碳化合物一起操作并产生反应性等离子体，在所述等离子体室（100）中提供种子颗粒，在反应性等离子体内的外部重力补偿力的影响下排列，并且在所述种子颗粒上形成具有金刚石结构的多向生长碳，从而形成生长的含金刚石的颗粒。

10. 发明申请

US20120127043A1 PORTABLE RADIO 审中-公开
标题翻译：便携式无线电
公开(公告)号：US20120127043A1
公开(公告)日：2012-05-24
申请号：US13387948
申请日：2010-03-04
申请人： Daigo Imano , Kenya Nagano , Yoshio Koyanagi , Noriyoshi Sato
发明人： Daigo Imano , Kenya Nagano , Yoshio Koyanagi , Noriyoshi Sato
IPC分类号： H01Q1/24
CPC分类号： H01Q1/243 , H01Q9/0421 , H01Q9/285 , H01Q9/30 , H01Q21/28 , H04M1/026 , H04M1/18
摘要： A portable radio having a housing 10 made up of a combination of a first case 11 and a second case 12 includes: an annular resilient member 13 sandwiched between the first case 11 and the second case 12; a flexible printed board 14 that is formed integrally with the annular resilient member 13 and that is provided in at least an area surrounded by the annular resilient member 13; an antenna section 15 that is provided on the flexible printed board 14 while being folded along a plurality of inner wall surfaces which are oriented in mutually different orientations and which belong to at least one of the first case 11 and the second case 12; and a circuit board 17 placed within an area surrounded by the annular resilient member 13.
摘要翻译：具有由第一壳体11和第二壳体12的组合构成的壳体10的便携式无线电设备包括：夹在第一壳体11和第二壳体12之间的环形弹性构件13; 柔性印刷电路板14，其与环形弹性构件13一体地形成，并且设置在至少由环形弹性构件13包围的区域中; 天线部分15，其设置在柔性印刷电路板14上，同时沿着相互不同的取向定向并且属于第一壳体11和第二壳体12中的至少一个的多个内壁表面折叠; 以及放置在由环形弹性构件13包围的区域内的电路板17。

你已经成功收藏专利！

检索式保存成功!

IPRDB

热门服务

关于我们

友情链接

联系方式