会员体验
专利管家(专利管理)
工作空间(专利管理)
风险监控(情报监控)
数据分析(专利分析)
侵权分析(诉讼无效)
联系我们
交流群
官方交流:
QQ群: 891211   
微信请扫码    >>>
现在联系顾问~
热词
    • 1. 发明授权
    • Plasma generating apparatus and semiconductor manufacturing method
    • 等离子体发生装置和半导体制造方法
    • US06380684B1
    • 2002-04-30
    • US09573253
    • 2000-05-18
    • Yunlong LiMasanobu SatoYoshio TominagaNoriyoshi SatoSatoru Iizuka
    • Yunlong LiMasanobu SatoYoshio TominagaNoriyoshi SatoSatoru Iizuka
    • H05H146
    • H01J37/32082H01J37/3266
    • A plasma generating apparatus and processing method, which generate high-density plasma, even in the central portion of the plasma generating zone. The apparatus comprises rectangular electrodes, a rectangular fistulous discharge electrode which surrounds the plasma generating zone, and a vacuum chamber of rectangular cross-section. Permanent magnets surround the discharge electrode, produce predetermined magnetic lines of force with portions which extend approximately parallel to the central axis of discharge electrode. A pair of parallel plate electrodes define the extension of the plasma generating zone in the direction of the central axis of the discharge electrode. The apparatus is configured such that the magnetic lines of force passing through the central portion of the plasma generating zone do not intersect with the electrodes.
    • 即使在等离子体产生区域的中心部分也产生高密度等离子体的等离子体发生装置和处理方法。 该装置包括矩形电极,围绕等离子体生成区域的矩形排出电极和矩形横截面的真空室。 永磁体围绕放电电极,产生预定的磁力线,其部分大致平行于放电电极的中心轴延伸。 一对平行板电极限定等离子体生成区在放电电极的中心轴线方向上的延伸。 该装置被配置成使得通过等离子体产生区的中心部分的磁力线不与电极相交。
    • 2. 发明授权
    • Plasma generation apparatus
    • 等离子体发生装置
    • US06238512B1
    • 2001-05-29
    • US09234488
    • 1999-01-21
    • Yunlong LiNoriyoshi SatoSatoru Iizuka
    • Yunlong LiNoriyoshi SatoSatoru Iizuka
    • C23F102
    • H01J37/321H01J37/32357H01L21/67069
    • An object is to make it possible to prevent electron temperature distribution from becoming uneven at surface of a process object when dimensions of the process object are large. A region division unit 30 encloses the inside of a ring-shaped discharge electrode 15 in the vicinity of that discharge electrode 15, thereby dividing the interior region of a tube-shaped vacuum vessel 11 in a direction perpendicular to the center axis Z thereof into a plasma generation region R1 and a plasma diffusion region R2, This region division unit 30 has a tube-shaped grid 301. This grid 301 has a plurality of electron passing holes and exhibits electrical conductivity. This grid 301, furthermore, is set in place concentrically with the vacuum vessel 11 so as to be positioned on the outside of a substrate W.
    • 其目的在于,能够防止在加工对象的尺寸较大时电极温度分布变得不均匀的区域。区域分割单元30将环状放电电极15的内部包围在 该放电电极15将管状真空容器11的内部区域沿垂直于其中心轴线Z的方向分成等离子体产生区域R1和等离子体扩散区域R2。该区域分割单元30具有管状真空容器11, 该栅格301具有多个电子通过孔并且具有导电性。 此外,该格栅301与真空容器11同心地设置在位,以便被定位在基板W的外侧。
    • 3. 发明授权
    • Plasma generation apparatus
    • 等离子体发生装置
    • US06835279B2
    • 2004-12-28
    • US09123352
    • 1998-07-28
    • Yunlong LiNoriyoshi SatoSatoru Iizuka
    • Yunlong LiNoriyoshi SatoSatoru Iizuka
    • H05H100
    • H01J37/32623H01J37/3266H05H1/46
    • The object of the present invention is to make possible generation of high-density plasma even in the center of a plasma generation region. A plasma generation apparatus comprises a vacuum vessel 11, gas induction unit 12, exhaust unit 13, cylindrical discharge electrode 14, high-frequency oscillators 19 and 21, ring-shaped permanent magnets 15 and 16, and two disk-shaped walls 17 and 18. The discharge electrode 14 is fashioned so as to enclose a plasma generation region 41. The permanent magnets 15 and 16 form prescribed magnetic force lines. These magnetic force lines have portions that are roughly parallel to the center axis 42 of the discharge electrode 14, the lengths of which parallel portions become longer as the magnetic force lines approach the center axis 42. The two walls 17 and 18 define the scope of the plasma generation region 41 in the dimension of the center axis 42 of the discharge electrode 14. These two walls 17 and 18 are positioned so as to sandwich therebetween the plasma generation region 41 in the dimension of the center axis 42. The plasma generation apparatus is also configured so that the magnetic force lines 43 passing through the center of the plasma generation 41 are shaped so that they do not intersect the two walls 17 and 18.
    • 本发明的目的是即使在等离子体产生区域的中心也可能产生高密度等离子体。 等离子体产生装置包括真空容器11,气体感应单元12,排气单元13,圆柱形放电电极14,高频振荡器19和21,环形永磁体15和16以及两个盘形壁17和18 放电电极14被形成为包围等离子体产生区域41.永久磁铁15和16形成规定的磁力线。 这些磁力线具有大致平行于放电电极14的中心轴线42的部分,随着磁力线接近中心轴线42,其平行部分变长的长度。两个壁17和18限定了 等离子体产生区域41,其尺寸为放电电极14的中心轴线42的尺寸。这两个壁17和18被定位成在等离子体产生区域41之间夹着中心轴线42的尺寸。等离子体产生装置 通过等离子体产生部41的中心的磁力线43也被配置成使得它们不与两个壁17和18相交。
    • 4. 外观设计
    • Electric spin scrubber
    • USD1046465S1
    • 2024-10-15
    • US29927403
    • 2024-02-05
    • Yunlong Li
    • Yunlong Li
    • FIG. 1 is a top perspective view of an electric spin scrubber, showing my new design;
      FIG. 2 is a bottom perspective view thereof;
      FIG. 3 is a top perspective view showing the electric spin scrubber as it would appear when used;
      FIG. 4 is a front view thereof;
      FIG. 5 is a rear view thereof;
      FIG. 6 is a left side view thereof;
      FIG. 7 is a right side view thereof;
      FIG. 8 is a top view thereof;
      FIG. 9 is a bottom view thereof;
      FIG. 10 is an enlarged detail view of area 10 in FIG. 1; and,
      FIG. 11 is an enlarged detail view of area 11 in FIG. 2.
      The dash-dash-style broken lines in the drawings illustrate the portions of the electric spin scrubber, which form no part of the claimed design. The dot-dash-style broken lines illustrate the bounds of the enlarged areas taken from FIGS. 1 and 2, as well as the original areas of FIGS. 1 and 2 from which the enlargements were extracted. The boundaries form no part of the claimed design.
    • 6. 发明授权
    • Current-switching LED driver using DAC to ramp bypass currents to accelerate switching speed and reduce ripple
    • 电流切换LED驱动器使用DAC斜坡旁路电流,以加速开关速度并减少纹波
    • US08581519B2
    • 2013-11-12
    • US13218426
    • 2011-08-25
    • Kwok Kuen (David) KwongLee L. YangYunlong LiWeina Zhou
    • Kwok Kuen (David) KwongLee L. YangYunlong LiWeina Zhou
    • H05B37/02
    • G09G3/3406H05B33/0818
    • A light-emitting diode (LED) driver provides faster rise and fall times for LED current to reduce image sticking and other interference. A standard DC-DC converter provides a sum current that is slowly ramped up and down by a bypass current digital-to-analog converter (DAC). A digital value to the bypass current DAC is ramped up or down before an LED current is turned on or off. When the LED current is turned on, current is shifted from a bypass path to a path through the LED, maintaining a constant sum current from the DC-DC converter. When a different LED is turned on, current is shifted from one LED's path to the other LED's path. Separate LED current DAC's in each LED path and in the bypass path can share the sum current with digital precision. Using a single DAC for the sum current and switches in each path reduces cost.
    • 发光二极管(LED)驱动器为LED电流提供更快的上升和下降时间,以减少图像残留和其他干扰。 标准DC-DC转换器提供由旁路电流数模转换器(DAC)缓慢上升和下降的和电流。 在LED电流打开或关闭之前,旁路电流DAC的数字值上升或下降。 当LED电流接通时,电流从旁路路径移动到通过LED的路径,保持来自DC-DC转换器的恒定的和电流。 当不同的LED打开时,电流从一个LED的路径移动到另一个LED的路径。 每个LED路径和旁路路径中的独立LED电流DAC可以以数字精度共享和电流。 使用单个DAC作为每个路径的总和电流和开关可以降低成本。
    • 7. 发明授权
    • Backup disk-tape integration method and system
    • 备份磁盘集成方法和系统
    • US08131681B1
    • 2012-03-06
    • US12691735
    • 2010-01-21
    • Vinay HangudYunlong Li
    • Vinay HangudYunlong Li
    • G06F17/30
    • G06F11/1461G06F11/1456G06F11/1469
    • Aspects of the present invention provide a disk-to-disk-to-tape backup method and system responsive to a combined backup request to backup a dataset to a backup disk according to a disk backup schedule and then to backup the dataset from the backup disk to a backup tape according to a tape backup schedule. The combined backup method completes a backup of the dataset to the backup disk and then to a backup tape device in accordance with a resolved schedule that considers potential conflicts between the schedules. To restore, aspects of the invention receive a request to restore a backup of the dataset from a backup-tape and the resolved schedule derived from the tape backup schedule and the disk backup schedule. The restoration verifies that a backup tape holds the target dataset by matching a combined backup identifier from the request against a corresponding combined backup identifier held in storage.
    • 本发明的方面提供了一种磁盘到磁带到磁带的备份方法和系统,其响应于根据磁盘备份计划将数据集备份到备份磁盘的组合备份请求,然后从备份磁盘备份数据集 根据磁带备份计划到备份磁带。 组合的备份方法将数据集的备份完成到备份磁盘,然后根据考虑到计划之间的潜在冲突的已解决安排进行备份磁带设备的备份。 要恢复,本发明的方面接收到从备份磁带还原备份数据集的请求以及从磁带备份计划和磁盘备份计划导出的已解决计划。 恢复通过将来自请求的组合备份标识符与保存在存储器中的对应组合备份标识符相匹配来验证备份磁带保存目标数据集。