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1. 发明授权

US09188876B2 Method of determining overlay error and control system for dynamic control of reticle position 有权
标题翻译：确定掩模位置动态控制的重叠误差和控制系统的方法
公开(公告)号：US09188876B2
公开(公告)日：2015-11-17
申请号：US13368085
申请日：2012-02-07
申请人： Yung-Yao Lee , Sophia Wang , Fei-Gwo Tsai , Heng-Hsin Liu
发明人： Yung-Yao Lee , Sophia Wang , Fei-Gwo Tsai , Heng-Hsin Liu
IPC分类号： G03B27/68 , G03B27/32 , G03F7/20 , G03F1/44 , G03B27/42
CPC分类号： G03F7/70633 , G03F1/44
摘要： A method of determining overlay error. The method includes transferring a pattern from a reticle to a wafer and selecting a first set of data points to measure the positional difference between features on the reticle and features on the wafer. The method also includes determining a second set of data points characteristic of the first set of data points but containing fewer data points. A control system for using the second set of data points to dynamically adjust the position of the reticle.
摘要翻译：确定重叠错误的方法。该方法包括将图案从掩模版转移到晶片并选择第一组数据点以测量掩模版上的特征与晶片上的特征之间的位置差异。该方法还包括确定第一组数据点的特征的第二组数据点，但是包含较少的数据点。一种用于使用第二组数据点的控制系统来动态地调整光罩的位置。

2. 发明授权

US08183701B2 Structure of stacking scatterometry based overlay marks for marks footprint reduction 有权
标题翻译：基于堆叠散射法的覆盖标记的结构，用于标记尺寸减少
公开(公告)号：US08183701B2
公开(公告)日：2012-05-22
申请号：US12511638
申请日：2009-07-29
申请人： Chi-Yuan Shih , Sophia Wang , Heng-Hsin Liu , Heng-Jen Lee
发明人： Chi-Yuan Shih , Sophia Wang , Heng-Hsin Liu , Heng-Jen Lee
IPC分类号： H01L23/544 , H01L21/00
CPC分类号： G03F9/7049 , G03F7/70625 , G03F7/70633 , G03F9/7076 , G03F9/7084
摘要： The present disclosure provides an integrated circuit. The integrated circuit includes a semiconductor substrate; a plurality of material layers formed on the semiconductor substrate, each of the material layers including a circuit pattern therein; and a plurality of diffraction-based periodic marks formed in the plurality of material layers and stacked in a same region. One of the diffraction-based periodic marks is different from at least one other of the diffraction-based periodic marks in pitch.
摘要翻译：本发明提供集成电路。集成电路包括半导体衬底; 形成在所述半导体基板上的多个材料层，每个所述材料层包括其中的电路图案; 以及形成在多个材料层中并堆叠在相同区域中的多个衍射基周期标记。基于衍射的周期标记中的一个不同于间距中基于衍射的周期性标记中的至少另一个。

3. 发明申请

US20110024924A1 METHOD AND STRUCTURE OF STACKING SCATTEROMETRY-BASED OVERLAY OR CD MARKS FOR MARK FOOTPRINT REDUCTION 有权
标题翻译：堆叠基于SCATTERMETRYET的覆盖或CD标记的标记减少的方法和结构
公开(公告)号：US20110024924A1
公开(公告)日：2011-02-03
申请号：US12511638
申请日：2009-07-29
申请人： Chi-Yuan Shih , Sophia Wang , Heng-Hsin Liu , Heng-Jen Lee
发明人： Chi-Yuan Shih , Sophia Wang , Heng-Hsin Liu , Heng-Jen Lee
IPC分类号： H01L23/544 , H01L21/66
CPC分类号： G03F9/7049 , G03F7/70625 , G03F7/70633 , G03F9/7076 , G03F9/7084
摘要： The present disclosure provides an integrated circuit. The integrated circuit includes a semiconductor substrate; a plurality of material layers formed on the semiconductor substrate, each of the material layers including a circuit pattern therein; and a plurality of diffraction-based periodic marks formed in the plurality of material layers and stacked in a same region. One of the diffraction-based periodic marks is different from at least one other of the diffraction-based periodic marks in pitch.
摘要翻译：本发明提供集成电路。集成电路包括半导体衬底; 形成在所述半导体基板上的多个材料层，每个所述材料层包括其中的电路图案; 以及形成在多个材料层中并堆叠在相同区域中的多个衍射基周期标记。基于衍射的周期标记中的一个不同于间距中基于衍射的周期性标记中的至少另一个。

4. 发明申请

US20110115057A1 DESIGN STRUCTURE FOR INTEGRATED CIRCUIT ALIGNMENT 有权
标题翻译：集成电路对准的设计结构
公开(公告)号：US20110115057A1
公开(公告)日：2011-05-19
申请号：US12619460
申请日：2009-11-16
申请人： Yu-Chyi Harn , Sophia Wang , Chun-Hung Lin , Hsien-Wei Chen , Ming-Yen Chiu
发明人： Yu-Chyi Harn , Sophia Wang , Chun-Hung Lin , Hsien-Wei Chen , Ming-Yen Chiu
IPC分类号： H01L23/544 , H01L21/71 , H01L21/26
CPC分类号： G03F9/7084 , H01L2924/0002 , H01L2924/00
摘要： A method and device for pattern alignment are disclosed. The device can include an exposure field; a die within the exposure field, wherein the die comprises an integrated circuit region, a seal ring region, and a corner stress relief region; and a die alignment mark disposed between the seal ring region and the corner stress relief region.
摘要翻译：公开了一种用于图案对准的方法和装置。该装置可以包括曝光场; 在所述曝光场内的管芯，其中所述管芯包括集成电路区域，密封环区域和拐角应力释放区域; 以及设置在密封环区域和角部应力消除区域之间的模具对准标记。

5. 发明授权

US4564438A Styrene-dialkyl maleate copolymers as dewaxing agents 失效
标题翻译：苯乙烯 - 二烷基马来酸酯共聚物作为脱蜡剂
公开(公告)号：US4564438A
公开(公告)日：1986-01-14
申请号：US739644
申请日：1985-05-31
申请人： Sophia Wang , Alan A. Millard
发明人： Sophia Wang , Alan A. Millard
IPC分类号： C10G73/04
CPC分类号： C10G73/04
摘要： A solvent dewaxing process for dewaxing waxy lubricating oil with a dewaxing solvent and a dewaxing aid which comprises using as the dewaxing aid a styrene dialkyl maleate copolymer wherein the side chain groups contain from C.sub.16 -C.sub.24.sup.+ carbon atoms. These polymers are further characterized as having a molecular weight within the range of 10,000-150,000.
摘要翻译：一种用脱蜡溶剂和脱蜡助剂脱蜡蜡状润滑油的溶剂脱蜡方法，其包括使用侧链基团含有C16-C24 +碳原子的苯乙烯二烷基马来酸酯共聚物作为脱蜡助剂。这些聚合物进一步被表征为具有在10,000-150,000范围内的分子量。

6. 发明申请

US20210109248A1 SYSTEM, METHOD, AND DEVICE FOR REAL-TIME SINKHOLE DETECTION 有权
公开(公告)号：US20210109248A1
公开(公告)日：2021-04-15
申请号：US16869527
申请日：2020-05-07
申请人： Sophia Wang
发明人： Sophia Wang
IPC分类号： G01V7/06 , G06F17/13 , G06N20/00 , H04W84/18 , H04L29/08
摘要： A system for real-time sinkhole detection comprises a plurality of measuring devices, a network system, and an analysis system. The plurality of measuring devices include a plurality of sensors, wherein each of the plurality sensors is configured to record, process and compile spatial data into a data set. The network system is configured to electronically collect a plurality of the data sets from each of the plurality of sensors. The analysis system comprises an electronic database system and a server. The server is configured to electronically transmit the plurality of the data sets to the electronic database system; query the data set from the electronic database system; process the data set by applying a machine learning algorithm to generate a real-time result about sinkhole detection; transmit the real-time result to an interface system; and update the electronic database system by transmitting the real-time result back to the electronic database system.

7. 发明申请

US20060206154A1 Combined neural stimulation and cardiac resynchronization therapy 有权
公开(公告)号：US20060206154A1
公开(公告)日：2006-09-14
申请号：US11078460
申请日：2005-03-11
申请人： Julia Moffitt , Sophia Wang , Bruce KenKnight , Imad Libbus
发明人： Julia Moffitt , Sophia Wang , Bruce KenKnight , Imad Libbus
IPC分类号： A61N1/362
CPC分类号： A61N1/3627 , A61N1/056 , A61N1/0587 , A61N1/36114 , A61N1/3962
摘要： Methods and devices for delivering cardiac therapy to a patient are provided. Various implantable device embodiments comprise a plurality of leads and a controller. The leads include at least one lead to be positioned within a lead path to deliver ventricular pacing pulses and to deliver neural stimulation at a site proximate to the heart to inhibit sympathetic nerve activity. The controller controls delivery of the ventricular pacing pulses in accordance with a programmed pacing mode and controls delivery of the neural stimulation. The controller is programmed to deliver remodeling control therapy (RCT) by delivering ventricular pacing to pre-excite a ventricular myocardium region to mechanically unload that region during systole, and further is programmed to deliver anti-remodeling therapy (ART) by delivering neural stimulation to inhibit sympathetic nerve activity in conjunction with RCT. Other embodiments are provided herein.

8. 发明授权

US08786054B2 Structure for integrated circuit alignment 有权
标题翻译：集成电路对准的结构
公开(公告)号：US08786054B2
公开(公告)日：2014-07-22
申请号：US12619460
申请日：2009-11-16
申请人： Yu-Chyi Harn , Sophia Wang , Chun-Hung Lin , Hsien-Wei Chen , Ming-Yen Chiu
发明人： Yu-Chyi Harn , Sophia Wang , Chun-Hung Lin , Hsien-Wei Chen , Ming-Yen Chiu
IPC分类号： H01L23/48
CPC分类号： G03F9/7084 , H01L2924/0002 , H01L2924/00
摘要： A method and device for pattern alignment are disclosed. The device can include an exposure field; a die within the exposure field, wherein the die comprises an integrated circuit region, a seal ring region, and a corner stress relief region; and a die alignment mark disposed between the seal ring region and the corner stress relief region.
摘要翻译：公开了一种用于图案对准的方法和装置。该装置可以包括曝光场; 在所述曝光场内的管芯，其中所述管芯包括集成电路区域，密封环区域和拐角应力释放区域; 以及设置在密封环区域和角部应力消除区域之间的模具对准标记。

9. 发明授权

US08131362B2 Combined neural stimulation and cardiac resynchronization therapy 有权
标题翻译：组合神经刺激和心脏再同步治疗
公开(公告)号：US08131362B2
公开(公告)日：2012-03-06
申请号：US12543654
申请日：2009-08-19
申请人： Julia Moffitt , Sophia Wang , Bruce H. KenKnight , Imad Libbus
发明人： Julia Moffitt , Sophia Wang , Bruce H. KenKnight , Imad Libbus
IPC分类号： A61N1/00
CPC分类号： A61N1/3627 , A61N1/056 , A61N1/0587 , A61N1/36114 , A61N1/3962
摘要： Methods and devices for delivering cardiac therapy to a patient are provided. Various implantable device embodiments comprise a plurality of leads and a controller. The leads include at least one lead to be positioned within a lead path to deliver ventricular pacing pulses and to deliver neural stimulation at a site proximate to the heart to inhibit sympathetic nerve activity. The controller controls delivery of the ventricular pacing pulses in accordance with a programmed pacing mode and controls delivery of the neural stimulation. The controller is programmed to deliver remodeling control therapy (RCT) by delivering ventricular pacing to pre-excite a ventricular myocardium region to mechanically unload that region during systole, and further is programmed to deliver anti-remodeling therapy (ART) by delivering neural stimulation to inhibit sympathetic nerve activity in conjunction with RCT. Other embodiments are provided herein.
摘要翻译：提供了向患者输送心脏治疗的方法和装置。各种可植入装置实施例包括多个引线和控制器。引线包括至少一个引线定位在引导路径内以提供心室起搏脉冲并且在靠近心脏的部位输送神经刺激以抑制交感神经活动。控制器根据编程的起搏模式控制心室起搏脉冲的传递并控制神经刺激的传递。控制器被编程为通过提供心室起搏来预先激发心室心肌区域以在心脏收缩期间机械地卸载该区域来递送重建控制治疗（RCT），并且进一步被编程以通过递送神经刺激来递送抗重塑疗法（ART）与RCT结合抑制交感神经活动。本文提供了其他实施例。

10. 发明申请

US20060206153A1 Integrated lead for applying cardiac resynchronization therapy and neural stimulation therapy 有权
公开(公告)号：US20060206153A1
公开(公告)日：2006-09-14
申请号：US11077970
申请日：2005-03-11
申请人： Imad Libbus , Julio Spinelli , Randy Westlund , Julia Moffitt , Sophia Wang
发明人： Imad Libbus , Julio Spinelli , Randy Westlund , Julia Moffitt , Sophia Wang
IPC分类号： A61N1/362
CPC分类号： A61N1/3627 , A61N1/0551 , A61N1/0556 , A61N1/0558 , A61N1/056 , A61N1/057 , A61N1/0587 , A61N1/36114 , A61N2001/0585
摘要： An embodiment includes a main lead assembly having a proximal portion adapted for connection to a device and a distal portion adapted for placement in a coronary sinus, the distal portion terminating in a distal end for placement proximal a left ventricle. Additionally, the main lead assembly includes a left ventricular electrode located at its distal end which is adapted to deliver cardiac resynchronization therapy to reduce ventricular wall stress. The main lead assembly also includes a fat pad electrode disposed along the main lead assembly a distance from the distal end to position the fat pad electrode proximal to at least one parasympathetic ganglia located in a fat pad bounded by an inferior vena cava and a left atrium. The fat pad electrode is adapted to stimulate the parasympathetic ganglia to reduce ventricular wall stress.

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