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1. 发明授权

US07593029B2 Optical scanning device and image forming apparatus using the same 有权
标题翻译：光学扫描装置及使用其的成像装置
公开(公告)号：US07593029B2
公开(公告)日：2009-09-22
申请号：US10223294
申请日：2002-08-20
申请人： Yukito Satoh , Mitsumi Fujii , Tomohiro Nakajima , Yoshinori Hayashi , Eiji Mochizuki
发明人： Yukito Satoh , Mitsumi Fujii , Tomohiro Nakajima , Yoshinori Hayashi , Eiji Mochizuki
IPC分类号： B41J15/14 , B41J27/00 , G02B26/08
CPC分类号： H04N1/126 , G02B26/0841 , H04N1/1135 , H04N1/12
摘要： An optical deflector of the present invention includes a movable mirror and torsion bars supporting the mirror and formed integrally with the mirror. The mirror reciprocatingly vibrates to reflect a light beam to thereby deflect it. The mirror is curved in the form of an arch in a section including at least the torsion bars. The mirror deforms little during vibration even if it is thin. Small power can cause such a thin mirror to vibrate with a large amplitude.
摘要翻译：本发明的光偏转器包括可移动镜和支撑反射镜并与镜一体形成的扭杆。镜子往复振动以反射光束从而使其偏转。镜子在至少包括扭杆的部分中以拱形的形式弯曲。振动时镜子很小，变薄。小功率可能导致这样一个薄镜子以大幅度振动。

2. 发明授权

US07068296B2 Optical scanning device for reducing a dot position displacement at a joint of scanning lines 有权
公开(公告)号：US07068296B2
公开(公告)日：2006-06-27
申请号：US10242710
申请日：2002-09-13
申请人： Yoshinori Hayashi , Tomohiro Nakajima , Mitsumi Fujii , Yukito Satoh , Eiji Mochizuki
发明人： Yoshinori Hayashi , Tomohiro Nakajima , Mitsumi Fujii , Yukito Satoh , Eiji Mochizuki
IPC分类号： B41J27/00
CPC分类号： G02B7/1821 , G02B26/105 , G02B26/123
摘要： In this optical scanning device, a plurality of scanning optical systems are arranged in a main scanning direction. Each of the scanning optical systems includes a deflecting unit performing an optical scanning by oscillation. Scanning frequencies of the deflecting units are substantially equal to one another. Each of the deflecting units is provided with means for varying the scanning frequency. The scanning frequency of each of the deflecting units is set midway between a maximum value and a minimum value of a resonance frequency intrinsic to the deflecting unit.

3. 发明授权

US07417780B2 Vibration mirror, optical scanning device, and image forming using the same, method for making the same, and method for scanning image 有权
标题翻译：振动镜，光学扫描装置和使用其的图像形成，其制造方法和扫描图像的方法
公开(公告)号：US07417780B2
公开(公告)日：2008-08-26
申请号：US11216180
申请日：2005-09-01
申请人： Mitsumi Fujii , Yukito Satoh , Tomohiro Nakajima
发明人： Mitsumi Fujii , Yukito Satoh , Tomohiro Nakajima
IPC分类号： G02B26/08
CPC分类号： G02B26/101 , B41J2/471 , G02B26/0841 , G02B26/0858 , G06K7/10653 , Y10S359/90
摘要： A vibration mirror is reciprocatively vibrated by an electrostatic force to reflect an incident light beam. The vibration mirror comprises a reflection means for reflecting the incident light beam; a reflection means holding substrate for holding the reflection means; a torsional rotation shaft comprising rod members rotatably supporting two ends of the reflection means holding substrate; movable electrodes formed on side faces of the reflection means holding substrate supported; a first substrate for supporting the reflection means supporting substrate via the torsional rotation shaft; first fixed electrodes formed on the first substrate so as to face the movable electrodes; a first electrically insulating and separating means formed on the first substrate to electrically insulate and separate the movable electrodes from the first fixed electrodes; and a second substrate overlaid on the first substrate with an insulating layer therebetween so as to be electrically insulated from and overlapped to adhere onto the first substrate.
摘要翻译：振动镜由静电力往复振动以反射入射光束。振动镜包括用于反射入射光束的反射装置; 保持反射装置的保持基板的反射装置; 扭转轴，其包括可旋转地支撑所述反射装置保持基板的两端的杆构件; 形成在支撑着反射装置保持基板的侧面的可动电极; 用于经由所述扭转轴支撑所述反射装置支撑基板的第一基板; 第一固定电极，形成在第一基板上以面对可动电极; 第一电绝缘和分离装置，形成在所述第一基板上，以使所述可移动电极与所述第一固定电极电绝缘和分离; 以及覆盖在第一基板上的第二基板，其间具有绝缘层，以便与第一基板电绝缘并重叠。

4. 发明申请

US20050046917A1 Vibration mirror, optical scanning device, and image forming using the same, method for making the same, and method for scanning image 有权
公开(公告)号：US20050046917A1
公开(公告)日：2005-03-03
申请号：US10953388
申请日：2004-09-30
申请人： Mitsumi Fujii , Yukito Satoh , Tomohiro Nakajima
发明人： Mitsumi Fujii , Yukito Satoh , Tomohiro Nakajima
IPC分类号： B41J2/47 , B81B3/00 , G02B26/08 , G02B26/10 , G06K7/10
CPC分类号： G02B26/101 , B41J2/471 , G02B26/0841 , G02B26/0858 , G06K7/10653 , Y10S359/90
摘要： A vibration mirror is reciprocatively vibrated by an electrostatic force to reflect an incident light beam. The vibration mirror comprises a reflection means for reflecting the incident light beam; a reflection means holding substrate for holding the reflection means; a torsional rotation shaft comprising rod members rotatably supporting two ends of the reflection means holding substrate; movable electrodes formed on side faces of the reflection means holding substrate supported; a first substrate for supporting the reflection means supporting substrate via the torsional rotation shaft; first fixed electrodes formed on the first substrate so as to face the movable electrodes; a first electrically insulating and separating means formed on the first substrate to electrically insulate and separate the movable electrodes from the first fixed electrodes; and a second substrate overlaid on the first substrate with an insulating layer therebetween so as to be electrically insulated from and overlapped to adhere onto the first substrate.

5. 发明授权

US06972883B2 Vibration mirror, optical scanning device, and image forming using the same, method for making the same, and method for scanning image 失效
标题翻译：振动镜，光学扫描装置和使用其的图像形成，其制造方法和扫描图像的方法
公开(公告)号：US06972883B2
公开(公告)日：2005-12-06
申请号：US10367706
申请日：2003-02-19
申请人： Mitsumi Fujii , Yukito Satoh , Tomohiro Nakajima
发明人： Mitsumi Fujii , Yukito Satoh , Tomohiro Nakajima
IPC分类号： B41J2/47 , B81B3/00 , G02B26/08 , G02B26/10 , G06K7/10
CPC分类号： G02B26/101 , B41J2/471 , G02B26/0841 , G02B26/0858 , G06K7/10653 , Y10S359/90
摘要： A vibration mirror is reciprocatively vibrated by an electrostatic force to reflect an incident light beam. The vibration mirror comprises a reflection means for reflecting the incident light beam; a reflection means holding substrate for holding the reflection means; a torsional rotation shaft comprising rod members rotatably supporting two ends of the reflection means holding substrate; movable electrodes formed on side faces of the reflection means holding substrate supported; a first substrate for supporting the reflection means supporting substrate via the torsional rotation shaft; first fixed electrodes formed on the first substrate so as to face the movable electrodes; a first electrically insulating and separating means formed on the first substrate to electrically insulate and separate the movable electrodes from the first fixed electrodes; and a second substrate overlaid on the first substrate with an insulating layer therebetween so as to be electrically insulated from and overlapped to adhere onto the first substrate.
摘要翻译：振动镜由静电力往复振动以反射入射光束。振动镜包括用于反射入射光束的反射装置; 保持反射装置的保持基板的反射装置; 扭转轴，其包括可旋转地支撑所述反射装置保持基板的两端的杆构件; 形成在支撑着反射装置保持基板的侧面的可动电极; 用于经由所述扭转轴支撑所述反射装置支撑基板的第一基板; 第一固定电极，形成在第一基板上以面对可动电极; 第一电绝缘和分离装置，形成在所述第一基板上，以使所述可移动电极与所述第一固定电极电绝缘和分离; 以及覆盖在第一基板上的第二基板，其间具有绝缘层，以便与第一基板电绝缘并重叠。

6. 发明授权

US07221493B2 Vibration mirror, optical scanning device, and image forming using the same, method for making the same, and method for scanning image 有权
标题翻译：振动镜，光学扫描装置和使用其的图像形成，其制造方法和扫描图像的方法
公开(公告)号：US07221493B2
公开(公告)日：2007-05-22
申请号：US10953388
申请日：2004-09-30
申请人： Mitsumi Fujii , Yukito Satoh , Tomohiro Nakajima
发明人： Mitsumi Fujii , Yukito Satoh , Tomohiro Nakajima
IPC分类号： G02B26/08 , B24D11/00 , B44C1/22
CPC分类号： G02B26/101 , B41J2/471 , G02B26/0841 , G02B26/0858 , G06K7/10653 , Y10S359/90
摘要： A vibration mirror is reciprocatively vibrated by an electrostatic force to reflect an incident light beam. The vibration mirror comprises a reflection means for reflecting the incident light beam; a reflection means holding substrate for holding the reflection means; a torsional rotation shaft comprising rod members rotatably supporting two ends of the reflection means holding substrate; movable electrodes formed on side faces of the reflection means holding substrate supported; a first substrate for supporting the reflection means supporting substrate via the torsional rotation shaft; first fixed electrodes formed on the first substrate so as to face the movable electrodes; a first electrically insulating and separating means formed on the first substrate to electrically insulate and separate the movable electrodes from the first fixed electrodes; and a second substrate overlaid on the first substrate with an insulating layer therebetween so as to be electrically insulated from and overlapped to adhere onto the first substrate.
摘要翻译：振动镜由静电力往复振动以反射入射光束。振动镜包括用于反射入射光束的反射装置; 保持反射装置的保持基板的反射装置; 扭转轴，其包括可旋转地支撑所述反射装置保持基板的两端的杆构件; 形成在支撑着反射装置保持基板的侧面的可动电极; 用于经由所述扭转轴支撑所述反射装置支撑基板的第一基板; 第一固定电极，形成在第一基板上以面对可动电极; 第一电绝缘和分离装置，形成在所述第一基板上，以使所述可移动电极与所述第一固定电极电绝缘和分离; 以及覆盖在第一基板上的第二基板，其间具有绝缘层，以便与第一基板电绝缘并重叠。

7. 发明申请

US20060012844A1 Vibration mirror, optical scanning device, and image forming using the same, method for making the same, and method for scanning image 有权
公开(公告)号：US20060012844A1
公开(公告)日：2006-01-19
申请号：US11216180
申请日：2005-09-01
申请人： Mitsumi Fujii , Yukito Satoh , Tomohiro Nakajima
发明人： Mitsumi Fujii , Yukito Satoh , Tomohiro Nakajima
IPC分类号： G02B26/08
CPC分类号： G02B26/101 , B41J2/471 , G02B26/0841 , G02B26/0858 , G06K7/10653 , Y10S359/90
摘要： A vibration mirror is reciprocatively vibrated by an electrostatic force to reflect an incident light beam. The vibration mirror comprises a reflection means for reflecting the incident light beam; a reflection means holding substrate for holding the reflection means; a torsional rotation shaft comprising rod members rotatably supporting two ends of the reflection means holding substrate; movable electrodes formed on side faces of the reflection means holding substrate supported; a first substrate for supporting the reflection means supporting substrate via the torsional rotation shaft; first fixed electrodes formed on the first substrate so as to face the movable electrodes; a first electrically insulating and separating means formed on the first substrate to electrically insulate and separate the movable electrodes from the first fixed electrodes; and a second substrate overlaid on the first substrate with an insulating layer therebetween so as to be electrically insulated from and overlapped to adhere onto the first substrate.

8. 发明授权

US08054327B2 Optical scanning device and image forming apparatus using the same 有权
标题翻译：光学扫描装置及使用其的成像装置
公开(公告)号：US08054327B2
公开(公告)日：2011-11-08
申请号：US12533796
申请日：2009-07-31
申请人： Yukito Satoh , Mitsumi Fujii
发明人： Yukito Satoh , Mitsumi Fujii
IPC分类号： B41J15/14 , B41J27/00 , G02B26/08
CPC分类号： H04N1/126 , G02B26/0841 , H04N1/1135 , H04N1/12
摘要： An optical deflector of the present invention includes a movable mirror and torsion bars supporting the mirror and formed integrally with the mirror. The mirror reciprocatingly vibrates to reflect a light beam to thereby deflect it. The mirror is curved in the form of an arch in a section including at least the torsion bars. The mirror deforms little during vibration even if it is thin. Small power can cause such a thin mirror to vibrate with a large amplitude.
摘要翻译：本发明的光偏转器包括可移动镜和支撑反射镜并与镜一体形成的扭杆。镜子往复振动以反射光束从而使其偏转。镜子在至少包括扭杆的部分中以弧形的形式弯曲。振动时镜子很小，变薄。小功率可能导致这样一个薄镜子以大幅度振动。

9. 发明授权

US5793073A Semiconductor thin film sensor device with (110) plane 失效
标题翻译：具有（110）面的半导体薄膜传感器装置
公开(公告)号：US5793073A
公开(公告)日：1998-08-11
申请号：US613447
申请日：1996-03-01
申请人： Morimasa Kaminishi , Takayuki Yamaguchi , Yukito Satoh
发明人： Morimasa Kaminishi , Takayuki Yamaguchi , Yukito Satoh
IPC分类号： G01P5/12 , G01F1/68 , G01F1/684 , G01F1/692 , G01N27/12 , G01N27/18 , H01L21/306 , H01L29/82
CPC分类号： G01N27/18 , G01F1/6845
摘要： A semiconductor thin film sensor device including a semiconductor body formed of silicon having a (110) plane; a depression formed by an anisotropic etch applied to a first surface of the semiconductor body, wherein the first surface is substantially parallel to the (110) plane; and a thin film insulation member having a predetermined configuration suspended over the depression, and having substantially opposing ends connected to the first surface of the semiconductor body so that the thin film insulation member is bridged across the depression. Preferably, the depth of the depression is over 200 .mu.m. In one embodiment, the predetermined configuration of the thin film insulation member is oriented substantially parallel to a direction of the semiconductor body.
摘要翻译：一种半导体薄膜传感器装置，包括由具有（110）面的硅形成的半导体本体; 通过施加到半导体主体的第一表面的各向异性蚀刻形成的凹陷，其中第一表面基本上平行于（110）面; 以及具有预定结构的薄膜绝缘构件，其悬挂在所述凹部上，并且具有大致相对的端部连接到所述半导体主体的第一表面，使得所述薄膜绝缘构件跨越所述凹陷。优选地，凹陷的深度超过200μm。在一个实施例中，薄膜绝缘构件的预定构造基本上平行于半导体本体的<100>方向取向。

10. 发明授权

US06497474B2 Electrostatic actuator, method of producing electrostatic actuator, micropump, recording head, ink jet recording apparatus, ink cartridge, and method of producing recording head 有权
公开(公告)号：US06497474B2
公开(公告)日：2002-12-24
申请号：US09922010
申请日：2001-08-03
申请人： Mitsugu Irinoda , Yukito Satoh , Junichi Azumi , Kaihei Isshiki
发明人： Mitsugu Irinoda , Yukito Satoh , Junichi Azumi , Kaihei Isshiki
IPC分类号： B41J204
CPC分类号： B41J2/1628 , B41J2/14314 , B41J2/16 , B41J2/1606 , B41J2/1623 , B41J2/1629 , B41J2/1631 , B41J2/1632 , B41J2/1634 , B41J2/1642 , B41J2/1643 , B41J2/1646 , B41J2002/14411 , B41J2202/03
摘要： An electrostatic actuator includes a diaphragm caused to vibrate by electrostatic force, an electrode substrate opposing the diaphragm, an electrode formed on the electrode substrate so as to oppose said diaphragm with a gap being formed between the electrode and the diaphragm, an anti-corrosive thin film formed on said diaphragm, and diaphragm deflection prevention means preventing the diaphragm from deflecting.

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