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    • 5. 发明授权
    • Vibration mirror, optical scanning device, and image forming using the same, method for making the same, and method for scanning image
    • 振动镜,光学扫描装置和使用其的图像形成,其制造方法和扫描图像的方法
    • US07417780B2
    • 2008-08-26
    • US11216180
    • 2005-09-01
    • Mitsumi FujiiYukito SatohTomohiro Nakajima
    • Mitsumi FujiiYukito SatohTomohiro Nakajima
    • G02B26/08
    • G02B26/101B41J2/471G02B26/0841G02B26/0858G06K7/10653Y10S359/90
    • A vibration mirror is reciprocatively vibrated by an electrostatic force to reflect an incident light beam. The vibration mirror comprises a reflection means for reflecting the incident light beam; a reflection means holding substrate for holding the reflection means; a torsional rotation shaft comprising rod members rotatably supporting two ends of the reflection means holding substrate; movable electrodes formed on side faces of the reflection means holding substrate supported; a first substrate for supporting the reflection means supporting substrate via the torsional rotation shaft; first fixed electrodes formed on the first substrate so as to face the movable electrodes; a first electrically insulating and separating means formed on the first substrate to electrically insulate and separate the movable electrodes from the first fixed electrodes; and a second substrate overlaid on the first substrate with an insulating layer therebetween so as to be electrically insulated from and overlapped to adhere onto the first substrate.
    • 振动镜由静电力往复振动以反射入射光束。 振动镜包括用于反射入射光束的反射装置; 保持反射装置的保持基板的反射装置; 扭转轴,其包括可旋转地支撑所述反射装置保持基板的两端的杆构件; 形成在支撑着反射装置保持基板的侧面的可动电极; 用于经由所述扭转轴支撑所述反射装置支撑基板的第一基板; 第一固定电极,形成在第一基板上以面对可动电极; 第一电绝缘和分离装置,形成在所述第一基板上,以使所述可移动电极与所述第一固定电极电绝缘和分离; 以及覆盖在第一基板上的第二基板,其间具有绝缘层,以便与第一基板电绝缘并重叠。
    • 6. 发明授权
    • Vibration mirror, optical scanning device, and image forming using the same, method for making the same, and method for scanning image
    • 振动镜,光学扫描装置和使用其的图像形成,其制造方法和扫描图像的方法
    • US07221493B2
    • 2007-05-22
    • US10953388
    • 2004-09-30
    • Mitsumi FujiiYukito SatohTomohiro Nakajima
    • Mitsumi FujiiYukito SatohTomohiro Nakajima
    • G02B26/08B24D11/00B44C1/22
    • G02B26/101B41J2/471G02B26/0841G02B26/0858G06K7/10653Y10S359/90
    • A vibration mirror is reciprocatively vibrated by an electrostatic force to reflect an incident light beam. The vibration mirror comprises a reflection means for reflecting the incident light beam; a reflection means holding substrate for holding the reflection means; a torsional rotation shaft comprising rod members rotatably supporting two ends of the reflection means holding substrate; movable electrodes formed on side faces of the reflection means holding substrate supported; a first substrate for supporting the reflection means supporting substrate via the torsional rotation shaft; first fixed electrodes formed on the first substrate so as to face the movable electrodes; a first electrically insulating and separating means formed on the first substrate to electrically insulate and separate the movable electrodes from the first fixed electrodes; and a second substrate overlaid on the first substrate with an insulating layer therebetween so as to be electrically insulated from and overlapped to adhere onto the first substrate.
    • 振动镜由静电力往复振动以反射入射光束。 振动镜包括用于反射入射光束的反射装置; 保持反射装置的保持基板的反射装置; 扭转轴,其包括可旋转地支撑所述反射装置保持基板的两端的杆构件; 形成在支撑着反射装置保持基板的侧面的可动电极; 用于经由所述扭转轴支撑所述反射装置支撑基板的第一基板; 第一固定电极,形成在第一基板上以面对可动电极; 第一电绝缘和分离装置,形成在所述第一基板上,以使所述可移动电极与所述第一固定电极电绝缘和分离; 以及覆盖在第一基板上的第二基板,其间具有绝缘层,以便与第一基板电绝缘并重叠。
    • 8. 发明授权
    • Vibration mirror, optical scanning device, and image forming using the same, method for making the same, and method for scanning image
    • 振动镜,光学扫描装置和使用其的图像形成,其制造方法和扫描图像的方法
    • US06972883B2
    • 2005-12-06
    • US10367706
    • 2003-02-19
    • Mitsumi FujiiYukito SatohTomohiro Nakajima
    • Mitsumi FujiiYukito SatohTomohiro Nakajima
    • B41J2/47B81B3/00G02B26/08G02B26/10G06K7/10
    • G02B26/101B41J2/471G02B26/0841G02B26/0858G06K7/10653Y10S359/90
    • A vibration mirror is reciprocatively vibrated by an electrostatic force to reflect an incident light beam. The vibration mirror comprises a reflection means for reflecting the incident light beam; a reflection means holding substrate for holding the reflection means; a torsional rotation shaft comprising rod members rotatably supporting two ends of the reflection means holding substrate; movable electrodes formed on side faces of the reflection means holding substrate supported; a first substrate for supporting the reflection means supporting substrate via the torsional rotation shaft; first fixed electrodes formed on the first substrate so as to face the movable electrodes; a first electrically insulating and separating means formed on the first substrate to electrically insulate and separate the movable electrodes from the first fixed electrodes; and a second substrate overlaid on the first substrate with an insulating layer therebetween so as to be electrically insulated from and overlapped to adhere onto the first substrate.
    • 振动镜由静电力往复振动以反射入射光束。 振动镜包括用于反射入射光束的反射装置; 保持反射装置的保持基板的反射装置; 扭转轴,其包括可旋转地支撑所述反射装置保持基板的两端的杆构件; 形成在支撑着反射装置保持基板的侧面的可动电极; 用于经由所述扭转轴支撑所述反射装置支撑基板的第一基板; 第一固定电极,形成在第一基板上以面对可动电极; 第一电绝缘和分离装置,形成在所述第一基板上,以使所述可移动电极与所述第一固定电极电绝缘和分离; 以及覆盖在第一基板上的第二基板,其间具有绝缘层,以便与第一基板电绝缘并重叠。