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    • 7. 发明授权
    • Ga-Cu alloy for use in exchangeable electrode for an evaporation system
    • 用于蒸发系统的可交换电极的Ga-Cu合金
    • US4239534A
    • 1980-12-16
    • US072291
    • 1979-09-04
    • Kazuhisa Taketoshi
    • Kazuhisa Taketoshi
    • C22C28/00C23C14/24C23C14/34C22C30/02C22C30/04
    • C22C28/00C23C14/24C23C14/3407
    • Ga-Cu alloy having the formula of Ga.sub.1-x Cu.sub.x, wherein x is a composition ratio parameter of Ga and Cu in a range of 0.0001.ltoreq..times..ltoreq.0.05. The alloy has a stable liquid phase at the normal temperature. The Ga-Cu alloy Ga.sub.1-x Cu.sub.x with a composition ratio parameter x (0.0001.ltoreq..times..ltoreq.0.03) is assembled into the exchangeable electrode of an evaporation system in such a way that the Ga-Cu alloy is filled in a clearance portion between a fixed electrode section fixed within the vacuum chamber of the evaporation system and an exchangeable electrode section on which an evaporation source is to be placed. With this construction, both of the fixed and exchangeable electrode sections are electrically connected with each other via the Ga-Cu alloy, and the exchangeable electrode section can be easily and rapidly removed from and placed onto the fixed electrode section.
    • 具有式Ga1-xCux的Ga-Cu合金,其中x是Ga和Cu的组成比参数,在0.0001≤x≤0.05的范围内。 该合金在常温下具有稳定的液相。 将组成比参数x(0.0001≤x≤0.03)的Ga-Cu合金Ga1-xCux组装到蒸发系统的可更换电极中,使得Ga-Cu合金填充在间隙 固定在蒸发系统的真空室内的固定电极部分与放置有蒸发源的可更换电极部分之间的部分。 利用这种结构,两个固定和可更换的电极部分都经由Ga-Cu合金彼此电连接,并且可更换电极部分可以容易且快速地从固定电极部分移除并放置在固定电极部分上。
    • 9. 发明授权
    • Exchangeable Ga-Cu electrode for an evaporation system
    • 用于蒸发系统的可交换Ga-Cu电极
    • US4289369A
    • 1981-09-15
    • US121791
    • 1980-02-15
    • Kazuhisa Taketoshi
    • Kazuhisa Taketoshi
    • C22C28/00C23C14/24C23C14/34H01R3/08
    • C22C28/00C23C14/24C23C14/3407
    • Ga-Cu alloy having the formula of Ga.sub.1-x Cu.sub.x, wherein x is a composition ratio parameter of Ga and Cu in a range of 0.000.ltoreq.x.ltoreq.0.05. The alloy has a stable liquid phase at the normal temperature. The Ga-Cu alloy Ga.sub.1-x Cu.sub.x with a composition ratio parameter x (0.0001.ltoreq.x.ltoreq.0.03) is assembled into the exchangeable electrode of an evaporation system in such a way that the Ga-Cu alloy is filled in a clearance portion between a fixed electrode section fixed within the vacuum chamber of the evaporation system and an exchangeable electrode section on which an evaporation source is to be placed. With this construction, both of the fixed and exchangeable electrode sections are electrically connected with each other via the Ga-Cu alloy, and the exchangeable electrode section can be easily and rapidly removed from and placed onto the fixed electrode section.
    • 具有式Ga1-xCux的Ga-Cu合金,其中x是Ga和Cu的组成比参数在0.000≤x≤0.05的范围内。 该合金在常温下具有稳定的液相。 将组成比参数x(0.0001≤x≤0.03)的Ga-Cu合金Ga1-xCux组装到蒸发系统的可更换电极中,使得Ga-Cu合金填充在间隙 固定在蒸发系统的真空室内的固定电极部分与放置有蒸发源的可更换电极部分之间的部分。 利用这种结构,两个固定和可更换的电极部分都经由Ga-Cu合金彼此电连接,并且可更换电极部分可以容易且快速地从固定电极部分移除并放置在固定电极部分上。