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    • 1. 发明授权
    • Heating roller device
    • 加热辊装置
    • US5786570A
    • 1998-07-28
    • US785220
    • 1997-01-17
    • Yukio MiyaOsamu SugiyamaRyota KoikeTakashi ToidaYuji Fukazawa
    • Yukio MiyaOsamu SugiyamaRyota KoikeTakashi ToidaYuji Fukazawa
    • G03G15/20H05B3/00
    • H05B3/0095G03G15/2057
    • A heating roller device including a center shaft, a heat roller rotatably supported on the center shaft, and heating means provided inside the heat roller has the wear resistance of the outer surface of its heat roller outer surface increased and its availability factor enhanced by forming the outer surface of the heat roller with a hard carbon film of hydrogenated amorphous carbon. The hard carbon film is preferably formed on an intermediate layer formed on the outer surface of the heat roller beforehand so and to increase its adhesion to the outer surface. Wear resistance can be further enhanced by forming the outer surface of the heat roller with a hard layer, forming an intermediate layer on the hard layer and forming the hard carbon film on the intermediate layer.
    • 一种加热辊装置,包括中心轴,可旋转地支撑在中心轴上的加热辊和设置在加热辊内部的加热装置,其加热辊外表面的外表面的耐磨性增加,并且通过形成 加热辊的外表面具有氢化无定形碳的硬碳膜。 硬碳膜优选预先形成在形成在加热辊的外表面上的中间层上,并且增加其与外表面的粘合力。 通过用硬层形成加热辊的外表面可以进一步提高耐磨性,在硬质层上形成中间层,并在中间层上形成硬碳膜。
    • 2. 发明授权
    • Method of forming films over inner surface of cylindrical member
    • 在圆柱形部件的内表面上形成膜的方法
    • US06217952B1
    • 2001-04-17
    • US09456472
    • 1999-12-09
    • Osamu SugiyamaYukio MiyaRyota KoikeTakashi ToidaToshiichi Sekine
    • Osamu SugiyamaYukio MiyaRyota KoikeTakashi ToidaToshiichi Sekine
    • H05H124
    • C23C16/045C23C14/027C23C14/046C23C16/0281C23C16/26
    • The present invention relates to a method of forming an intermediate film and a hard carbon film over the inner surface of a cylindrical member having a bore, such as a bushing or a cylinder, with the hard carbon film being formed on the intermediate film with a uniform thickness, greatly enhancing of abrasion resistance of the inner surface. The cylindrical member is placed in a vacuum vessel, an auxiliary electrode of an intermediate film forming material, such as a titanium-silicon alloy or the like, is inserted in the bore of the cylindrical member, a sputtering gas is supplied into the vacuum vessel, a voltage is applied to the auxiliary electrode to produce a plasma around the auxiliary electrode in order that the intermediate film forming material is sputtered from the auxiliary electrode and an intermediate film is formed over the inner surface of the cylindrical member. Subsequently, a gas containing carbon, such as methane gas or the like, is supplied into the vacuum vessel, and a voltage is applied to the cylindrical member to produce a plasma in the vacuum vessel in order that a hard carbon film (DLC film) is formed on the previously formed intermediate film over the inner surface of the cylindrical member.
    • 本发明涉及一种在具有诸如衬套或圆筒的孔的圆柱形构件的内表面上形成中间膜和硬碳膜的方法,其中硬碳膜在中间膜上形成有 均匀的厚度,大大增强了内表面的耐磨性。 将圆柱形构件放置在真空容器中,将中间膜形成材料的辅助电极(例如钛 - 硅合金等)插入圆柱形构件的孔中,将溅射气体供应到真空容器 向辅助电极施加电压以在辅助电极周围产生等离子体,以使中间膜形成材料从辅助电极溅射,并且在圆柱形部件的内表面上形成中间膜。 随后,将含有碳的气体(例如甲烷气体等)供应到真空容器中,并向该圆柱形构件施加电压,以在真空容器中产生等离子体,以使硬碳膜(DLC膜) 形成在预先形成的中间膜上的圆柱形构件的内表面上。
    • 3. 发明授权
    • Method of forming films over insulating material
    • 绝缘材料成膜方法
    • US6080445A
    • 2000-06-27
    • US40243
    • 1998-02-19
    • Osamu SugiyamaYukio MiyaRyota KoikeTakashi Toida
    • Osamu SugiyamaYukio MiyaRyota KoikeTakashi Toida
    • C23C16/02C23C16/26
    • C23C16/0281C23C16/0272C23C16/26Y10S427/103
    • A method of forming films over an insulating material is provided whereby an underlayer film having electric conductivity is formed on the surface of the insulating material constituting a base member, and a hard carbon film is formed over the underlayer film so that the surface electrical resistance value of the hard carbon film can be controlled so as not to cause the surface thereof to be charged with static electricity by varying an electrical resistance value of the underlayer film. In the case where the underlayer film is formed of a metal film composed of titanium, chromium, tungsten, or the like, the resistance value thereof can be changed by varying the thickness of the metal film. In the case where the underlayer film is formed of a semiconductor film composed of silicon, germanium, or the like, the resistance value thereof can be changed by varying the thickness of the semiconductor film, or the concentration of an impurity added thereto.
    • 提供一种在绝缘材料上形成膜的方法,由此在构成基底构件的绝缘材料的表面上形成具有导电性的下层膜,并且在下层膜上形成硬碳膜,使得表面电阻值 可以通过改变下层膜的电阻值来控制硬质碳膜不致使其表面被静电带电。 在下层膜由钛,铬,钨等构成的金属膜的情况下,可以通过改变金属膜的厚度来改变其电阻值。 在下层膜由硅,锗等构成的半导体膜的情况下,可以通过改变半导体膜的厚度或添加其杂质的浓度来改变其电阻值。
    • 7. 发明授权
    • Guide bush and method of forming film over guide bush
    • 导套和导套上形成薄膜的方法
    • US6056443A
    • 2000-05-02
    • US43032
    • 1998-03-06
    • Ryota KoikeYukio MiyaOsamu SugiyamaTakashi ToidaToshiichi Sekine
    • Ryota KoikeYukio MiyaOsamu SugiyamaTakashi ToidaToshiichi Sekine
    • B23B31/20C23C16/26C23C16/509F16C17/02B05D7/22
    • C23C16/26B23B31/202C23C16/509B23B2231/2059
    • A hard carbon film (15) is formed directly or through an intermediate layer for enhancing adhesion over an inner surface (11b) and over a portion (11h.sub.1) of an end face (11h) of a guide bush 11 adjacent to the end of the inner surface for holding a workpiece (51) rotatably and axially slidable on an automatic lathe at a position near a cutting tool, to be in sliding contact with the workpiece (51) or directly or through an intermediate layer for enhancing adhesion on the surface of a superhard lining fixed to the inner surface (11b) in a plasma CVD process employing an auxiliary electrode and a dummy member. Thereby, the guide bush (11) has remarkably enhanced durability and prevents seizing that makes a machining operation impossible, even when the guide bush (11) is used for an extended period of time and when the automatic lathe operates for heavy machining. Flaws caused by flashes on the workpiece are prevented from occurring on the inner surface of the guide bush (11).
    • PCT No.PCT / JP97 / 02365 Sec。 371日期1998年3月6日 102(e)1998年3月6日PCT PCT 1997年7月8日PCT公布。 公开号WO98 / 01600 日期1998年1月15日硬碳膜(15)直接或通过中间层形成,用于增强内表面(11b)上的粘附力,并且在相邻的导向衬套11的端面(11h)的一部分(11h1) 到用于保持工件(51)的内表面的端部,以便在靠近切割工具的位置处可旋转地并且可轴向地滑动在自动车床上,与工件(51)滑动接触,或者直接地或通过中间层来增强 在使用辅助电极和虚拟构件的等离子体CVD工艺中,固定到内表面(11b)的超硬衬里的表面上的附着力。 由此,即使在长时间使用导套(11)的情况下以及自动车床进行重型加工的情况下,导套(11)也具有显着提高的耐久性,防止不能进行加工的卡住。 在导套(11)的内表面上,不会发生由工件上的闪光引起的缺陷。
    • 9. 发明授权
    • Method of forming films over inner surface of cylindrical member
    • 在圆柱形部件的内表面上形成膜的方法
    • US6126793A
    • 2000-10-03
    • US730156
    • 1996-10-15
    • Osamu SugiyamaYukio MiyaRyota KoikeTakashi ToidaToshiichi Sekine
    • Osamu SugiyamaYukio MiyaRyota KoikeTakashi ToidaToshiichi Sekine
    • C23C14/02C23C14/04C23C16/02C23C16/04C23C16/26C23C14/34
    • C23C16/045C23C14/027C23C14/046C23C16/0281C23C16/26
    • The present invention relates to a method of forming an intermediate film and a hard cabon film over the inner surface of a cylindrical member having a bore, such as a bushing or a cylinder, with the hard carbon film being formed on the intermediate film with a uniform thickness, greatly enhancing of abrasion resistance of the inner surface. The cylindrical member is placed in a vacuum vessel, an auxiliary electrode of an intermediate film forming material, such as a titanium-silicon alloy or the like, is inserted in the bore of the cylindrical member, a sputtering gas is supplied into the vacuum vessel, a voltage is applied to the auxiliary electrode to produce a plasma around the auxiliary electrode in order that the intermediate film forming material is sputtered from the auxiliary electrode and an intermediate film is formed over the inner surface of the cylindrical member. Subsequently, a gas containing carbon, such as methane gas or the like, is supplied into the vacuum vessel, and a voltage is applied to the cylindrical member to produce a plasma in the vacuum vessel in order that a hard carbon film (DLC film) is formed on the previously formed intermediate film over the inner surface of the cylindrical member.
    • 本发明涉及一种在具有诸如衬套或圆筒的孔的圆柱形构件的内表面上形成中间膜和硬质碳膜的方法,其中硬碳膜在中间膜上形成有 均匀的厚度,大大增强了内表面的耐磨性。 将圆柱形构件放置在真空容器中,将中间膜形成材料的辅助电极(例如钛 - 硅合金等)插入圆柱形构件的孔中,将溅射气体供应到真空容器 向辅助电极施加电压以在辅助电极周围产生等离子体,以使中间膜形成材料从辅助电极溅射,并且在圆柱形部件的内表面上形成中间膜。 随后,将含有碳的气体(例如甲烷气体等)供应到真空容器中,并向该圆柱形构件施加电压,以在真空容器中产生等离子体,以使硬碳膜(DLC膜) 形成在预先形成的中间膜上的圆柱形构件的内表面上。
    • 10. 发明授权
    • Method of forming a hard carbon film over an inner surface of a guide
bush using a jig
    • 使用夹具在导套的内表面上形成硬质碳膜的方法
    • US6117496A
    • 2000-09-12
    • US262918
    • 1999-03-05
    • Osamu SugiyamaYukio MiyaRyota KoikeTakashi ToidaToshiichi Sekine
    • Osamu SugiyamaYukio MiyaRyota KoikeTakashi ToidaToshiichi Sekine
    • C23C16/02C23C16/04C23C16/26C23C16/503C23C16/509H05H1/24
    • C23C16/0281C23C16/045C23C16/26C23C16/503C23C16/509Y10S279/906Y10S427/104Y10T279/17231Y10T279/18Y10T279/29Y10T82/2518Y10T82/2521
    • A hard carbon film is formed over an inner surface of a guide bush including the steps of fixing an auxiliary electrode support member for supporting an auxiliary electrode of a jig for forming a film in a center bore of the guide bush by an auxiliary electrode insulation member, disposing an auxiliary electrode in alignment with the axis of the center bore so as to face the inner surface, disposing legs, and a first electrode plate, a second electrode plate, and the insulation member which are fixed to the legs are placed on the bottom of a vacuum vessel placing the guide bush on the first electrode plate contacted electrically with a power source, while the projection of the auxiliary electrode support member projecting out of the auxiliary electrode insulation member is contacted electrically with the second electrode plate. The auxiliary electrode is grounded through the auxiliary electrode support member, the second electrode plate, the legs, and the vacuum vessel, a gas containing carbon is introduced into the vacuum vessel after evacuating the vacuum vessel, and a plasma is produced in the vacuum vessel by supplying electric power to the guide bush through the first electrode plate from the power source.
    • 在引导衬套的内表面上形成硬碳膜,包括以下步骤:通过辅助电极绝缘部件固定辅助电极支撑部件,辅助电极支撑部件用于支撑用于在引导衬套的中心孔中形成膜的夹具的辅助电极 将辅助电极配置成与中心孔的轴线对准,以面对内表面,设置腿,以及固定在腿上的第一电极板,第二电极板和绝缘构件放置在 将引导衬套放置在与电源电接触的第一电极板的真空容器的底部,同时从辅助电极绝缘构件突出的辅助电极支撑构件的突起与第二电极板电接触。 辅助电极通过辅助电极支撑构件,第二电极板,支腿和真空容器接地,抽空真空容器后,将含碳气体引入真空容器中,并在真空容器中产生等离子体 通过第一电极板从电源向引导衬套提供电力。