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1. 发明授权

US06217952B1 Method of forming films over inner surface of cylindrical member 有权
标题翻译：在圆柱形部件的内表面上形成膜的方法
公开(公告)号：US06217952B1
公开(公告)日：2001-04-17
申请号：US09456472
申请日：1999-12-09
申请人： Osamu Sugiyama , Yukio Miya , Ryota Koike , Takashi Toida , Toshiichi Sekine
发明人： Osamu Sugiyama , Yukio Miya , Ryota Koike , Takashi Toida , Toshiichi Sekine
IPC分类号： H05H124
CPC分类号： C23C16/045 , C23C14/027 , C23C14/046 , C23C16/0281 , C23C16/26
摘要： The present invention relates to a method of forming an intermediate film and a hard carbon film over the inner surface of a cylindrical member having a bore, such as a bushing or a cylinder, with the hard carbon film being formed on the intermediate film with a uniform thickness, greatly enhancing of abrasion resistance of the inner surface. The cylindrical member is placed in a vacuum vessel, an auxiliary electrode of an intermediate film forming material, such as a titanium-silicon alloy or the like, is inserted in the bore of the cylindrical member, a sputtering gas is supplied into the vacuum vessel, a voltage is applied to the auxiliary electrode to produce a plasma around the auxiliary electrode in order that the intermediate film forming material is sputtered from the auxiliary electrode and an intermediate film is formed over the inner surface of the cylindrical member. Subsequently, a gas containing carbon, such as methane gas or the like, is supplied into the vacuum vessel, and a voltage is applied to the cylindrical member to produce a plasma in the vacuum vessel in order that a hard carbon film (DLC film) is formed on the previously formed intermediate film over the inner surface of the cylindrical member.
摘要翻译：本发明涉及一种在具有诸如衬套或圆筒的孔的圆柱形构件的内表面上形成中间膜和硬碳膜的方法，其中硬碳膜在中间膜上形成有均匀的厚度，大大增强了内表面的耐磨性。将圆柱形构件放置在真空容器中，将中间膜形成材料的辅助电极（例如钛 - 硅合金等）插入圆柱形构件的孔中，将溅射气体供应到真空容器向辅助电极施加电压以在辅助电极周围产生等离子体，以使中间膜形成材料从辅助电极溅射，并且在圆柱形部件的内表面上形成中间膜。随后，将含有碳的气体（例如甲烷气体等）供应到真空容器中，并向该圆柱形构件施加电压，以在真空容器中产生等离子体，以使硬碳膜（DLC膜）形成在预先形成的中间膜上的圆柱形构件的内表面上。

2. 发明授权

US5939152A Method of forming hard carbon film over the inner surface of guide bush 失效
标题翻译：在导套内表面上形成硬质碳膜的方法
公开(公告)号：US5939152A
公开(公告)日：1999-08-17
申请号：US911048
申请日：1997-08-14
申请人： Osamu Sugiyama , Yukio Miya , Ryota Koike , Takashi Toida , Toshiichi Sekine
发明人： Osamu Sugiyama , Yukio Miya , Ryota Koike , Takashi Toida , Toshiichi Sekine
IPC分类号： C23C16/02 , C23C16/04 , C23C16/26 , C23C16/503 , C23C16/509 , B05D3/06 , B05D7/22 , B23B13/02
CPC分类号： C23C16/26 , C23C16/0281 , C23C16/045 , C23C16/503 , C23C16/509
摘要： A hard carbon film is formed in a vacuum vessel directly or through an intermediate layer for enhancing adhesion over an inner surface of a guide bush with a uniform thickness and excellent adhesion wherein the inner surface is in sliding contact with a workpiece and the guide bush is mounted on an automatic lathe for holding the workpiece rotatably and slidably in the axial direction near a cutting tool. Accordingly, the method comprises disposing the guide bush in a vacuum vessel, inserting an auxiliary electrode into the center bore forming the inner surface of the guide bush to be at a ground potential, introducing a gas containing carbon into the vacuum vessel through the gas inlet port after evacuating the vacuum vessel, and applying a DC voltage to the guide bush through a reactor, thereby producing a plasma in the vacuum vessel so that a hard carbon film of hydrogenated amorphous carbon is formed over the inner surface of the guide bush by a plasma CVD method.
摘要翻译：在真空容器中直接或通过中间层形成硬碳膜，以增强厚度均匀的导套的内表面上的附着力，并且内表面与工件滑动接触，并且导套是安装在自动车床上，用于在切削工具附近沿轴向方向可旋转地且可滑动地保持工件。因此，该方法包括将引导衬套设置在真空容器中，将辅助电极插入形成导套的内表面的中心孔中，使其处于接地电位，通过气体入口将含碳的气体引入真空容器在真空容器中抽真空之后，通过反应器向引导衬套施加直流电压，从而在真空容器中产生等离子体，从而在导管的内表面上形成氢化无定形碳的硬碳膜等离子体CVD法。

3. 发明授权

US6056443A Guide bush and method of forming film over guide bush 失效
标题翻译：导套和导套上形成薄膜的方法
公开(公告)号：US6056443A
公开(公告)日：2000-05-02
申请号：US43032
申请日：1998-03-06
申请人： Ryota Koike , Yukio Miya , Osamu Sugiyama , Takashi Toida , Toshiichi Sekine
发明人： Ryota Koike , Yukio Miya , Osamu Sugiyama , Takashi Toida , Toshiichi Sekine
IPC分类号： B23B31/20 , C23C16/26 , C23C16/509 , F16C17/02 , B05D7/22
CPC分类号： C23C16/26 , B23B31/202 , C23C16/509 , B23B2231/2059
摘要： A hard carbon film (15) is formed directly or through an intermediate layer for enhancing adhesion over an inner surface (11b) and over a portion (11h.sub.1) of an end face (11h) of a guide bush 11 adjacent to the end of the inner surface for holding a workpiece (51) rotatably and axially slidable on an automatic lathe at a position near a cutting tool, to be in sliding contact with the workpiece (51) or directly or through an intermediate layer for enhancing adhesion on the surface of a superhard lining fixed to the inner surface (11b) in a plasma CVD process employing an auxiliary electrode and a dummy member. Thereby, the guide bush (11) has remarkably enhanced durability and prevents seizing that makes a machining operation impossible, even when the guide bush (11) is used for an extended period of time and when the automatic lathe operates for heavy machining. Flaws caused by flashes on the workpiece are prevented from occurring on the inner surface of the guide bush (11).
摘要翻译： PCT No.PCT / JP97 / 02365 Sec。 371日期1998年3月6日 102（e）1998年3月6日PCT PCT 1997年7月8日PCT公布。公开号WO98 / 01600 日期1998年1月15日硬碳膜（15）直接或通过中间层形成，用于增强内表面（11b）上的粘附力，并且在相邻的导向衬套11的端面（11h）的一部分（11h1）到用于保持工件（51）的内表面的端部，以便在靠近切割工具的位置处可旋转地并且可轴向地滑动在自动车床上，与工件（51）滑动接触，或者直接地或通过中间层来增强在使用辅助电极和虚拟构件的等离子体CVD工艺中，固定到内表面（11b）的超硬衬里的表面上的附着力。由此，即使在长时间使用导套（11）的情况下以及自动车床进行重型加工的情况下，导套（11）也具有显着提高的耐久性，防止不能进行加工的卡住。在导套（11）的内表面上，不会发生由工件上的闪光引起的缺陷。

4. 发明授权

US6033533A Method of forming films over inner surface of cylindrical member 有权
公开(公告)号：US6033533A
公开(公告)日：2000-03-07
申请号：US268345
申请日：1999-03-16
申请人： Osamu Sugiyama , Yukio Miya , Ryota Koike , Takashi Toida , Toshiichi Sekine
发明人： Osamu Sugiyama , Yukio Miya , Ryota Koike , Takashi Toida , Toshiichi Sekine
IPC分类号： C23C14/02 , C23C14/04 , C23C16/02 , C23C16/04 , C23C16/26 , C23C14/34 , C23C14/26
CPC分类号： C23C16/045 , C23C14/027 , C23C14/046 , C23C16/0281 , C23C16/26
摘要： The present invention relates to a method of forming an intermediate film and a hard cabon film over the inner surface of a cylindrical member having a bore, such as a bushing or a cylinder, with the hard carbon film being formed on the intermediate film with a uniform thickness, greatly enhancing of abrasion resistance of the inner surface. The cylindrical member is placed in a vacuum vessel, an auxiliary electrode of an intermediate film forming material, such as a titanium-silicon alloy or the like, is inserted in the bore of the cylindrical member, a sputtering gas is supplied into the vacuum vessel, a voltage is applied to the auxiliary electrode to produce a plasma around the auxiliary electrode in order that the intermediate film forming material is sputtered from the auxiliary electrode and an intermediate film is formed over the inner surface of the cylindrical member. Subsequently, a gas containing carbon, such as methane gas or the like, is supplied into the vacuum vessel, and a voltage is applied to the cylindrical member to produce a plasma in the vacuum vessel in order that a hard carbon film (DLC film) is formed on the previously formed intermediate film over the inner surface of the cylindrical member.

5. 发明授权

US6126793A Method of forming films over inner surface of cylindrical member 失效
标题翻译：在圆柱形部件的内表面上形成膜的方法
公开(公告)号：US6126793A
公开(公告)日：2000-10-03
申请号：US730156
申请日：1996-10-15
申请人： Osamu Sugiyama , Yukio Miya , Ryota Koike , Takashi Toida , Toshiichi Sekine
发明人： Osamu Sugiyama , Yukio Miya , Ryota Koike , Takashi Toida , Toshiichi Sekine
IPC分类号： C23C14/02 , C23C14/04 , C23C16/02 , C23C16/04 , C23C16/26 , C23C14/34
CPC分类号： C23C16/045 , C23C14/027 , C23C14/046 , C23C16/0281 , C23C16/26
摘要： The present invention relates to a method of forming an intermediate film and a hard cabon film over the inner surface of a cylindrical member having a bore, such as a bushing or a cylinder, with the hard carbon film being formed on the intermediate film with a uniform thickness, greatly enhancing of abrasion resistance of the inner surface. The cylindrical member is placed in a vacuum vessel, an auxiliary electrode of an intermediate film forming material, such as a titanium-silicon alloy or the like, is inserted in the bore of the cylindrical member, a sputtering gas is supplied into the vacuum vessel, a voltage is applied to the auxiliary electrode to produce a plasma around the auxiliary electrode in order that the intermediate film forming material is sputtered from the auxiliary electrode and an intermediate film is formed over the inner surface of the cylindrical member. Subsequently, a gas containing carbon, such as methane gas or the like, is supplied into the vacuum vessel, and a voltage is applied to the cylindrical member to produce a plasma in the vacuum vessel in order that a hard carbon film (DLC film) is formed on the previously formed intermediate film over the inner surface of the cylindrical member.
摘要翻译：本发明涉及一种在具有诸如衬套或圆筒的孔的圆柱形构件的内表面上形成中间膜和硬质碳膜的方法，其中硬碳膜在中间膜上形成有均匀的厚度，大大增强了内表面的耐磨性。将圆柱形构件放置在真空容器中，将中间膜形成材料的辅助电极（例如钛 - 硅合金等）插入圆柱形构件的孔中，将溅射气体供应到真空容器向辅助电极施加电压以在辅助电极周围产生等离子体，以使中间膜形成材料从辅助电极溅射，并且在圆柱形部件的内表面上形成中间膜。随后，将含有碳的气体（例如甲烷气体等）供应到真空容器中，并向该圆柱形构件施加电压，以在真空容器中产生等离子体，以使硬碳膜（DLC膜）形成在预先形成的中间膜上的圆柱形构件的内表面上。

6. 发明授权

US6117496A Method of forming a hard carbon film over an inner surface of a guide bush using a jig 失效
标题翻译：使用夹具在导套的内表面上形成硬质碳膜的方法
公开(公告)号：US6117496A
公开(公告)日：2000-09-12
申请号：US262918
申请日：1999-03-05
申请人： Osamu Sugiyama , Yukio Miya , Ryota Koike , Takashi Toida , Toshiichi Sekine
发明人： Osamu Sugiyama , Yukio Miya , Ryota Koike , Takashi Toida , Toshiichi Sekine
IPC分类号： C23C16/02 , C23C16/04 , C23C16/26 , C23C16/503 , C23C16/509 , H05H1/24
CPC分类号： C23C16/0281 , C23C16/045 , C23C16/26 , C23C16/503 , C23C16/509 , Y10S279/906 , Y10S427/104 , Y10T279/17231 , Y10T279/18 , Y10T279/29 , Y10T82/2518 , Y10T82/2521
摘要： A hard carbon film is formed over an inner surface of a guide bush including the steps of fixing an auxiliary electrode support member for supporting an auxiliary electrode of a jig for forming a film in a center bore of the guide bush by an auxiliary electrode insulation member, disposing an auxiliary electrode in alignment with the axis of the center bore so as to face the inner surface, disposing legs, and a first electrode plate, a second electrode plate, and the insulation member which are fixed to the legs are placed on the bottom of a vacuum vessel placing the guide bush on the first electrode plate contacted electrically with a power source, while the projection of the auxiliary electrode support member projecting out of the auxiliary electrode insulation member is contacted electrically with the second electrode plate. The auxiliary electrode is grounded through the auxiliary electrode support member, the second electrode plate, the legs, and the vacuum vessel, a gas containing carbon is introduced into the vacuum vessel after evacuating the vacuum vessel, and a plasma is produced in the vacuum vessel by supplying electric power to the guide bush through the first electrode plate from the power source.
摘要翻译：在引导衬套的内表面上形成硬碳膜，包括以下步骤：通过辅助电极绝缘部件固定辅助电极支撑部件，辅助电极支撑部件用于支撑用于在引导衬套的中心孔中形成膜的夹具的辅助电极将辅助电极配置成与中心孔的轴线对准，以面对内表面，设置腿，以及固定在腿上的第一电极板，第二电极板和绝缘构件放置在将引导衬套放置在与电源电接触的第一电极板的真空容器的底部，同时从辅助电极绝缘构件突出的辅助电极支撑构件的突起与第二电极板电接触。辅助电极通过辅助电极支撑构件，第二电极板，支腿和真空容器接地，抽空真空容器后，将含碳气体引入真空容器中，并在真空容器中产生等离子体通过第一电极板从电源向引导衬套提供电力。

7. 发明授权

US5941647A Guide bush and method of forming hard carbon film over the inner surface of the guide bush 失效
标题翻译：引导衬套和在导套内表面上形成硬质碳膜的方法
公开(公告)号：US5941647A
公开(公告)日：1999-08-24
申请号：US912923
申请日：1997-08-15
申请人： Ryota Koike , Yukio Miya , Osamu Sugiyama , Takashi Toida , Toshiichi Sekine
发明人： Ryota Koike , Yukio Miya , Osamu Sugiyama , Takashi Toida , Toshiichi Sekine
IPC分类号： B23B13/12 , B23B31/20 , C23C16/02 , C23C16/04 , C23C16/26 , C23C16/50 , C23C16/503 , F16C17/02
CPC分类号： C23C16/0272 , B23B13/125 , B23B31/202 , C23C16/045 , C23C16/26 , C23C16/50 , C23C16/503 , B23B2228/04 , B23B2228/08 , B23B2231/2059 , Y10T279/17427 , Y10T279/17452
摘要： A hard carbon film is formed directly or through an intermediate layer for enhancing adhesion over an inner surface of a guide bush in such a manner that the thickness of the inner surface at the portion near an open end is greater than that at the inner portion thereof, wherein the inner surface is in sliding contact with a workpiece and the guide bush is mounted on an automatic lathe for holding the workpiece rotatably and slidably in the axial direction near a cutting tool. Accordingly, the guide bush is disposed in a vacuum vessel to form a hard carbon film of a hydrogenated amorphous carbon over the inner surface of the guide bush by a plasma CVD method. At this time, a rodlike auxiliary electrode provided with a stepped portion having an extremity which is smaller than another portion or a rodlike auxiliary electrode provided with a tapered portion having an extremity is inserted into the center bore forming the inner surface of the guide bush in such a manner that the extremity of the tapered portion is positioned near the open end of the inner surface of the guide bush, and the auxiliary electrode is grounded or a positive DC current is applied to the auxiliary electrode.
摘要翻译：直接或通过中间层直接或通过中间层形成硬碳膜，以增强在引导衬套的内表面上的附着力，使得靠近开口端的部分的内表面的厚度大于其内部部分处的内表面的厚度其特征在于，所述内表面与工件滑动接触，并且所述导套安装在自动车床上，用于在所述切削工具附近沿轴向方向可旋转地且可滑动地保持所述工件。因此，将引导衬套设置在真空容器中，通过等离子体CVD法在引导衬套的内表面上形成氢化无定形碳的硬碳膜。此时，设置有具有小于另一部分的末端的阶梯部分的杆状辅助电极或设置有具有末端的锥形部分的棒状辅助电极插入形成导筒的内表面的中心孔中锥形部的端部位于导套的内表面的开口端附近，辅助电极接地或向辅助电极施加正的直流电流的方式。

8. 发明授权

US6131533A Jig for forming hard carbon film over inner surface of guide bush using the jig 失效
标题翻译：夹具用于使用夹具在导套的内表面上形成硬质碳膜
公开(公告)号：US6131533A
公开(公告)日：2000-10-17
申请号：US910828
申请日：1997-08-15
申请人： Osamu Sugiyama , Yukio Miya , Ryota Koike , Takashi Toida , Toshiichi Sekine
发明人： Osamu Sugiyama , Yukio Miya , Ryota Koike , Takashi Toida , Toshiichi Sekine
IPC分类号： C23C16/02 , C23C16/04 , C23C16/26 , C23C16/503 , C23C16/509 , C23C16/00
CPC分类号： C23C16/0281 , C23C16/045 , C23C16/26 , C23C16/503 , C23C16/509 , Y10S279/906 , Y10S427/104 , Y10T279/17231 , Y10T279/18 , Y10T279/29 , Y10T82/2518 , Y10T82/2521
摘要： A hard carbon film is formed over an inner surface of a guide bush by fixing an auxiliary electrode support member for supporting an auxiliary electrode of a jig for forming a film in a center bore of the guide bush by an auxiliary electrode insulation member, disposing an auxiliary electrode in alignment with the axis of the center bore so as to face the inner surface, disposing legs, and a first electrode plate, a second electrode plate, and the insulation member which are fixed to the legs are placed on the bottom of a vacuum vessel placing the guide bush on the first electrode plate contacted electrically with a power source, while the projection of the auxiliary electrode support member projecting out of the auxiliary electrode insulation member is contacted electrically with the second electrode plate. The auxiliary electrode is grounded through the auxiliary electrode support member, the second electrode plate, the legs, and the vacuum vessel, a gas containing carbon is introduced into the vacuum vessel after evacuating the vacuum vessel, and a plasma is produced in the vacuum vessel by supplying electric power to the guide bush through the first electrode plate from the power source.
摘要翻译：通过辅助电极绝缘部件固定辅助电极支撑部件，该辅助电极支撑部件通过固定在辅助电极绝缘部件的引导衬套的中心孔中形成膜的夹具的辅助电极而形成在硬质碳膜的内表面上，辅助电极与中心孔的轴线对准，以面对内表面，设置腿，以及固定到腿部的第一电极板，第二电极板和绝缘构件放置在底部上真空容器将引导衬套放置在与电源电接触的第一电极板上，而从辅助电极绝缘构件突出的辅助电极支撑构件的突起与第二电极板电接触。辅助电极通过辅助电极支撑构件，第二电极板，支腿和真空容器接地，抽空真空容器后，将含碳气体引入真空容器中，并在真空容器中产生等离子体通过第一电极板从电源向引导衬套提供电力。

9. 发明授权

US6096390A Method of forming a hard carbon film over the inner surface of a guide bush 失效
标题翻译：在导套的内表面上形成硬质碳膜的方法
公开(公告)号：US6096390A
公开(公告)日：2000-08-01
申请号：US260487
申请日：1999-03-02
申请人： Ryota Koike , Yukio Miya , Osamu Sugiyama , Takashi Toida , Toshiichi Sekine
发明人： Ryota Koike , Yukio Miya , Osamu Sugiyama , Takashi Toida , Toshiichi Sekine
IPC分类号： B23B13/12 , B23B31/20 , C23C16/02 , C23C16/04 , C23C16/26 , C23C16/50 , C23C16/503 , H05H1/24
CPC分类号： C23C16/0272 , B23B13/125 , B23B31/202 , C23C16/045 , C23C16/26 , C23C16/50 , C23C16/503 , B23B2228/04 , B23B2228/08 , B23B2231/2059 , Y10T279/17427 , Y10T279/17452
摘要： A hard carbon film is formed over an inner surface of a guide bush by the steps of disposing the guide bush in a vacuum vessel, inserting an electrode into a center bore of the guide bush and applying a positive current to the electrode, introducing a gas, containing carbon, through a gas inlet port into the vacuum chamber after evacuating the vacuum vessel, and producing a plasma in the vacuum vessel to form a hard carbon film of hydrogenated amorphous carbon over the inner surface of the guide bush by a plasma CVD method.
摘要翻译：通过将引导衬套设置在真空容器中的步骤，在引导衬套的内表面上形成硬碳膜，将电极插入导套的中心孔并向电极施加正电流，引入气体，通过真空室中的气体入口进入真空室，并在真空容器中产生等离子体，以通过等离子体CVD法在引导衬套的内表面上形成氢化无定形碳的硬碳膜。

10. 发明授权

US6020036A Method of forming hard carbon film over the inner surface of guide bush 失效
标题翻译：在导套内表面上形成硬质碳膜的方法
公开(公告)号：US6020036A
公开(公告)日：2000-02-01
申请号：US51636
申请日：1998-04-16
申请人： Osamu Sugiyama , Yukio Miya , Ryota Koike , Takashi Toida , Toshiichi Sekine
发明人： Osamu Sugiyama , Yukio Miya , Ryota Koike , Takashi Toida , Toshiichi Sekine
IPC分类号： C23C16/04 , C23C16/26 , B05D3/06 , B05D7/22
CPC分类号： C23C16/045 , C23C16/26 , Y10S427/103 , Y10S427/104
摘要： A guide bush (11), coming in sliding contact with a workpiece, for use in an automatic lathe is placed in a vacuum vessel (61), and after inserting an auxiliary electrode (71), which is grounded or to which a positive DC voltage is applied, in the center bore (11j) of the guide bush (11), forming the inner surface (11b) thereof, the vacuum vessel (61) is evacuated such that an initially reached pressure therein is not higher than a predetermined degree of vacuum. Then, after a DC voltage is applied to an anode (79) and an AC voltage is applied to a filament (81) while applying a DC voltage to the guide bush (11), carbon-containing gas is fed into the vacuum vessel (61), producing a plasma therein and the pressure inside the vacuum vessel (61) is controlled to attain a film-forming pressure higher than the initially reached pressure while forming a hard carbon film over the inner surface of the guide bush (11) by means of a plasma CVD process.
摘要翻译： PCT No.PCT / JP97 / 02868 Sec。 371日期：1998年4月16日 102（e）1998年4月16日PCT PCT 1997年8月19日PCT公布。出版物WO98 / 07895 日期1998年2月26日将与工件滑动接触的导向衬套（11）用于自动车床放置在真空容器（61）中，并且在插入辅助电极（71）之后，其被接地或在该导套（11）的中心孔（11j）中施加正的直流电压，形成其内表面（11b），真空容器（61）被抽真空，使得其中初始达到的压力不在高于预定的真空度。然后，在将直流电压施加到阳极（79）上并且向引线衬套（11）施加DC电压的同时向灯丝（81）施加AC电压时，将含碳气体供给到真空容器 61），在其中产生等离子体，并且控制真空容器（61）内部的压力，以获得高于初始达到的压力的成膜压力，同时在导套（11）的内表面上形成硬碳膜，同时通过等离子体CVD工艺的手段。

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