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    • 2. 发明授权
    • Thin film forming apparatus
    • 薄膜成型装置
    • US5305366A
    • 1994-04-19
    • US817660
    • 1992-01-07
    • Takehiko NakaharaMasao KoshinakaNobuyuki KosakaToshimasa Tomoda
    • Takehiko NakaharaMasao KoshinakaNobuyuki KosakaToshimasa Tomoda
    • G01N23/223G01N23/225H01L21/66
    • G01N23/2252G01N23/223G01N23/2257G01N2223/076
    • This invention relates to a method and apparatus for analyzing a plurality of elements that are present on the surface of a material of interest or in its neighborhood, as well as a thin-film forming apparatus that is capable of measuring the composition of a sample during thin film formation in the process of semi-conductor fabrication. The apparatus are characterized in that a detector is isolated from the light and heat generated in a sample making mechanism by means of a shield which is not only heat-resistant but also transmissive of fluorescent X-ray containing soft X-rays of 1 Kev and below and that a mirror for total reflection of X-rays which is equipped with slits capable of adjusting the incident and exit angles of fluorescent X-rays from the sample excited with an excitation source as well as the ranges of those angles is provided either at the entrance or exit of said shield or at both.
    • 本发明涉及一种用于分析存在于感兴趣的材料的表面上或其附近的多个元素的方法和装置,以及能够测量样品组成的薄膜形成装置 半导体制造过程中的薄膜形成。 该装置的特征在于,检测器借助于不仅耐热而且还透射含有1Kev的软X射线的荧光X射线的屏蔽而与样品制造机构中产生的光和热隔离, 并且配备有能够调节来自激发源激发的样品的荧光X射线的入射角和出射角度的狭缝以及这些角度的范围的X射线的全反射镜,可以在 所述护罩的入口或出口或两者。