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1. 发明授权

US07283294B2 Catadioptric projection optical system, exposure apparatus having the same, device fabrication method 失效
标题翻译：折反射投影光学系统，具有相同的曝光设备，器件制造方法
公开(公告)号：US07283294B2
公开(公告)日：2007-10-16
申请号：US11257785
申请日：2005-10-24
申请人： Yuji Katashiba , Chiaki Terasawa , Hideki Morishima
发明人： Yuji Katashiba , Chiaki Terasawa , Hideki Morishima
IPC分类号： G02B17/08
CPC分类号： G03F7/70225 , G02B17/08 , G02B17/0892 , G03F7/70275 , G03F7/70341
摘要： A catadioptric optical system comprising a first imaging optical system including a concave mirror and forming an intermediate image of a first object, said first imaging optical system forming a reciprocating optical system that an incidence light and reflected light pass, a second imaging optical system for forming an image of the intermediate image onto a second object, and a first optical path deflective member, provided between the concave mirror and the intermediate image, for introducing a light from the first imaging optical system to the second imaging optical system, wherein said first optical path deflective member deflects a light in such a direction that a forward path of the first imaging optical system intersects a return path of the first imaging optical system, and wherein said intermediate image is formed without an optical element after a deflection.
摘要翻译：一种反折射光学系统，包括：第一成像光学系统，包括凹面镜并形成第一物体的中间图像，所述第一成像光学系统形成入射光和反射光通过的往复光学系统;第二成像光学系统，用于形成设置在第二物体上的中间图像的图像和设置在凹面镜和中间图像之间的第一光路偏转构件，用于将来自第一成像光学系统的光引入第二成像光学系统，其中所述第一光学路径偏转构件沿着第一成像光学系统的前进路径与第一成像光学系统的返回路径相交的方向偏转光，并且其中所述中间图像在偏转之后形成为没有光学元件。

2. 发明申请

US20060088320A1 Catadioptric projection optical system, exposure apparatus having the same, device fabrication method 失效
标题翻译：折反射投影光学系统，具有相同的曝光设备，器件制造方法
公开(公告)号：US20060088320A1
公开(公告)日：2006-04-27
申请号：US11257785
申请日：2005-10-24
申请人： Yuji Katashiba , Chiaki Terasawa , Hideki Morishima
发明人： Yuji Katashiba , Chiaki Terasawa , Hideki Morishima
IPC分类号： H04B10/00
CPC分类号： G03F7/70225 , G02B17/08 , G02B17/0892 , G03F7/70275 , G03F7/70341
摘要： A catadioptric optical system comprising a first imaging optical system including a concave mirror and forming an intermediate image of a first object, said first imaging optical system forming a reciprocating optical system that an incidence light and reflected light pass, a second imaging optical system for forming an image of the intermediate image onto a second object, and a first optical path deflective member, provided between the concave mirror and the intermediate image, for introducing a light from the first imaging optical system to the second imaging optical system, wherein said first optical path deflective member deflects a light in such a direction that a forward path of the first imaging optical system intersects a return path of the first imaging optical system, and wherein said intermediate image is formed without an optical element after a deflection.
摘要翻译：一种反折射光学系统，包括：第一成像光学系统，包括凹面镜并形成第一物体的中间图像，所述第一成像光学系统形成入射光和反射光通过的往复光学系统;第二成像光学系统，用于形成设置在第二物体上的中间图像的图像和设置在凹面镜和中间图像之间的第一光路偏转构件，用于将来自第一成像光学系统的光引入第二成像光学系统，其中所述第一光学路径偏转构件沿着第一成像光学系统的前进路径与第一成像光学系统的返回路径相交的方向偏转光，并且其中所述中间图像在偏转之后形成为没有光学元件。

3. 发明授权

US07268952B2 Catadioptric projection system, and exposure apparatus having the same 失效
标题翻译：反射折射投射系统和具有该曝光装置的曝光装置
公开(公告)号：US07268952B2
公开(公告)日：2007-09-11
申请号：US11271665
申请日：2005-11-10
申请人： Takashi Kato , Chiaki Terasawa
发明人： Takashi Kato , Chiaki Terasawa
IPC分类号： G02B3/00
CPC分类号： G02B17/0892 , G02B17/08 , G03F7/70225 , G03F7/70275 , G03F7/70341
摘要： A catadioptric projection system for forming an intermediate image of a first object plural times, and images the intermediate image onto a second object includes at least two deflective reflectors, a lens unit arranged in an optical path between the two deflective reflectors, the lens unit having a negative refractive power, and not forming a reciprocating optical system that passes incident light and reflected light.
摘要翻译：一种用于形成第一对象的中间图像多次并且将中间图像成像到第二对象上的反折射投影系统包括至少两个偏转反射器，布置在两个偏转反射器之间的光路中的透镜单元，透镜单元具有负折射力，并且不形成通过入射光和反射光的往复光学系统。

4. 发明申请

US20060028715A1 Catadioptric projection optical system, exposure apparatus having the same, device fabrication method 失效
标题翻译：折反射投影光学系统，具有相同的曝光设备，器件制造方法
公开(公告)号：US20060028715A1
公开(公告)日：2006-02-09
申请号：US11196378
申请日：2005-08-02
申请人： Takashi Kato , Chiaki Terasawa , Hirohiko Shinonaga
发明人： Takashi Kato , Chiaki Terasawa , Hirohiko Shinonaga
IPC分类号： H04B10/00 , G02B17/00 , G02B21/00 , G02B23/00
CPC分类号： G02B17/0892 , G02B17/08 , G03F7/70225
摘要： A catadioptric projection optical system for forming an intermediate image of a first object twice and for forming an image of the intermediate image onto a second object, said catadioptric projection optical system comprising, in order from the first object side and along an optical axis of said catadioptric projection optical system, a first dioptric group that does not form a reciprocating optical system (double-pass optical system) that an incidence light and reflected light pass, said first dioptric group including a first lens group that has a positive refractive power and a second lens group that has a positive refractive power, a catadioptric group that forms the reciprocating optical system (double-pass optical system), said catadioptric group including a third lens group that forms the reciprocating optical system (double-pass optical system), a second dioptric group that does not form the reciprocating optical system (double-pass optical system), a first deflective reflector that arranges between the first lens group and the second lens group, and a second deflective reflector that arranges between the second lens group and the third lens group or between the second dioptric group and the third lens group.
摘要翻译：一种用于形成第一物体的中间图像的反射折射投影光学系统，用于形成第二物体的中间图像的图像，所述反射折射投影光学系统按照从第一物体侧起依次沿着所述第二物体的光轴反射折射投影光学系统，不形成入射光和反射光通过的往复式光学系统（双通光学系统）的第一屈光度组，所述第一度数组包括具有正屈光力的第一透镜组和具有正屈光力的第二透镜组，形成往复光学系统的反射折射组（双光学系统），所述反射折射组包括形成往复光学系统的第三透镜组（双光学系统），第二屈光度组，其不形成往复光学系统（双程光学系统），第一偏转反射器该第一透镜组和第二透镜组之间布置的第二透镜组和第二透镜组之间布置的第二偏转反射器。

5. 发明授权

US06459534B1 Projection optical system and projection exposure apparatus with the same, and device manufacturing method 失效
标题翻译：投影光学系统和投影曝光装置相同，以及装置制造方法
公开(公告)号：US06459534B1
公开(公告)日：2002-10-01
申请号：US09591218
申请日：2000-06-12
申请人： Takashi Kato , Chiaki Terasawa , Hiroyuki Ishii
发明人： Takashi Kato , Chiaki Terasawa , Hiroyuki Ishii
IPC分类号： G02B300
CPC分类号： G03F7/70241 , G02B13/14 , G02B13/18
摘要： A projection optical system for projecting a pattern of a mask onto a wafer, includes at least one aspherical surface lens having an aspherical surface on one side and a flat surface on the other side, the spherical surface satisfying a relation |&Dgr;ASPH/L|>1×10−6 where &Dgr;ASPH is the aspherical amount of the aspherical surface and L is an object-to-image distance of the projection optical system.
摘要翻译：一种用于将掩模图案投影到晶片上的投影光学系统包括至少一个非球面透镜，其具有一侧的非球面和另一侧的平坦表面，该球面满足关系| DELTAASPH / L |> 1×10-6其中DELTAASPH是非球面的非球面量，L是投影光学系统的物体到图像的距离。

6. 发明授权

US07092168B2 Projection optical system and projection exposure apparatus 有权
公开(公告)号：US07092168B2
公开(公告)日：2006-08-15
申请号：US11268640
申请日：2005-11-08
申请人： Chiaki Terasawa , Hiroyuki Ishii , Takashi Kato
发明人： Chiaki Terasawa , Hiroyuki Ishii , Takashi Kato
IPC分类号： G02B3/00 , G02B9/00
CPC分类号： G02B17/0892 , G02B13/143 , G02B13/24 , G02B17/0621 , G02B17/0812 , G02B17/0844 , G02B17/0852 , G02B17/0856 , G03F7/70225 , G03F7/70275
摘要： A catadioptric projection optical system for projecting an image of an object onto an image plane through two intermediate image formations. The catadioptric projection optical system includes a first optical system, for receiving light from the object, including a plurality of lenses, a second optical system, for forming the image of the object on the image plane, including a plurality of lenses, and a third optical system disposed optically between the first optical system and the second optical system. The third optical system includes a first concave mirror and a second concave mirror. The light is reflected by the first concave mirror then by the second concave mirror to be directed to the second optical system along a z-shaped optical path, and the first, second and third optical systems have a common straight optical axis.

7. 发明授权

US06995918B2 Projection optical system and projection exposure apparatus 失效
标题翻译：投影光学系统和投影曝光装置
公开(公告)号：US06995918B2
公开(公告)日：2006-02-07
申请号：US10992853
申请日：2004-11-22
申请人： Chiaki Terasawa , Hiroyuki Ishii , Takashi Kato
发明人： Chiaki Terasawa , Hiroyuki Ishii , Takashi Kato
IPC分类号： G02B3/00 , G02B9/00
CPC分类号： G02B17/0892 , G02B13/143 , G02B13/24 , G02B17/0621 , G02B17/0812 , G02B17/0844 , G02B17/0852 , G02B17/0856 , G03F7/70225 , G03F7/70275
摘要： A projection optical system for projecting an image of an object onto an image plane. The projection optical system includes a first imaging optical system for forming an image of the object in which the first imaging optical system includes a first mirror for reflecting and collecting abaxial light from the object, a second imaging optical system for re-imaging the image upon the image plane, a second mirror for reflecting light from the first mirror to the image plane side, whereby the abaxial light is caused to pass outside of an effective diameter of the first mirror, and a field optical system including three lenses each having a positive refractive power. The abaxial light passed through the outside of the effective diameter of the first mirror is refracted by the three lenses toward a direction nearing an optical axis of the three lenses. Light that has passed through the three lenses is directed to the second imaging optical system, and the first and second imaging optical systems are disposed along a common optical axis.
摘要翻译：一种用于将物体的图像投影到图像平面上的投影光学系统。投影光学系统包括用于形成物体的图像的第一成像光学系统，其中第一成像光学系统包括用于反射和收集来自物体的远轴光的第一反射镜，用于将图像重新成像的第二成像光学系统图像平面，用于将来自第一反射镜的光反射到图像平面侧的第二反射镜，由此使远轴光穿过第一反射镜的有效直径外部，并且包括三个透镜的场光学系统，每个透镜具有正屈光力。通过第一反射镜的有效直径的外侧的背光被三个透镜朝向接近三个透镜的光轴的方向折射。通过三个透镜的光被引导到第二成像光学系统，并且第一和第二成像光学系统沿着共同的光轴设置。

8. 发明授权

US06995833B2 Projection optical system, exposure apparatus, and device manufacturing method 失效
标题翻译：投影光学系统，曝光装置和装置制造方法
公开(公告)号：US06995833B2
公开(公告)日：2006-02-07
申请号：US10851869
申请日：2004-05-21
申请人： Takashi Kato , Chiaki Terasawa
发明人： Takashi Kato , Chiaki Terasawa
IPC分类号： G03B27/54 , G03B27/42 , G02B5/08
CPC分类号： G02B17/0892 , G02B13/143 , G02B17/08 , G03F7/70225 , G03F7/70275
摘要： A projection optical system for projecting an image of a first object onto a second object includes a first imaging optical system that forms a first intermediate image of the first object, and includes a lens, a second imaging optical system that forms a second intermediate image of the first object, and includes a lens and a concave mirror, and a third imaging optical system that forms an image of the first object onto the second object, and includes a lens, wherein the first, second and third imaging optical systems are arranged along an optical path from the first object in this order, and 0.7
摘要翻译：一种用于将第一物体的图像投影到第二物体上的投影光学系统包括形成第一物体的第一中间图像的第一成像光学系统，并且包括透镜，第二成像光学系统，其形成第二物镜的第二中间图像第一物体，并且包括透镜和凹面镜，以及第三成像光学系统，其在第二物体上形成第一物体的图像，并且包括透镜，其中第一，第二和第三成像光学系统沿着满足第一对象的光路，并且满足0.7 <|β1beta2| <3.0，其中β1是第一成像光学系统的近轴倍率，β2是第二成像光学系统的近轴倍率系统。

9. 发明申请

US20050088761A1 Projection optical system and projection exposure apparatus 失效
标题翻译：投影光学系统和投影曝光装置
公开(公告)号：US20050088761A1
公开(公告)日：2005-04-28
申请号：US10992853
申请日：2004-11-22
申请人： Chiaki Terasawa , Hiroyuki Ishii , Takashi Kato
发明人： Chiaki Terasawa , Hiroyuki Ishii , Takashi Kato
IPC分类号： G02B13/18 , G02B17/08 , G03F7/20 , H01L21/027 , G02B17/00 , G02B21/00 , G02B23/00
CPC分类号： G02B17/0892 , G02B13/143 , G02B13/24 , G02B17/0621 , G02B17/0812 , G02B17/0844 , G02B17/0852 , G02B17/0856 , G03F7/70225 , G03F7/70275
摘要： A projection optical system for projecting an image of an object onto an image plane. The projection optical system includes a first imaging optical system for forming an image of the object in which the first imaging optical system includes a first mirror for reflecting and collecting abaxial light from the object, a second imaging optical system for re-imaging the image upon the image plane, a second mirror for reflecting light from the first mirror to the image plane side, whereby the abaxial light is caused to pass outside of an effective diameter of the first mirror, and a field optical system including three lenses each having a positive refractive power. The abaxial light passed through the outside of the effective diameter of the first mirror is refracted by the three lenses toward a direction nearing an optical axis of the three lenses. Light that has passed through the three lenses is directed to the second imaging optical system, and the first and second imaging optical systems are disposed along a common optical axis.
摘要翻译：一种用于将物体的图像投影到图像平面上的投影光学系统。投影光学系统包括用于形成物体的图像的第一成像光学系统，其中第一成像光学系统包括用于反射和收集来自物体的远轴光的第一反射镜，用于将图像重新成像的第二成像光学系统图像平面，用于将来自第一反射镜的光反射到图像平面侧的第二反射镜，由此使远轴光穿过第一反射镜的有效直径外部，并且包括三个透镜的场光学系统，每个透镜具有正屈光力。通过第一反射镜的有效直径的外侧的背光被三个透镜朝向接近三个透镜的光轴的方向折射。通过三个透镜的光被引导到第二成像光学系统，并且第一和第二成像光学系统沿着共同的光轴设置。

10. 发明授权

US06860610B2 Reflection type projection optical system, exposure apparatus and device fabrication method using the same 失效
标题翻译：反射式投影光学系统，曝光装置及使用其的装置制造方法
公开(公告)号：US06860610B2
公开(公告)日：2005-03-01
申请号：US10359937
申请日：2003-02-06
申请人： Chiaki Terasawa
发明人： Chiaki Terasawa
IPC分类号： G02B17/00 , G02B17/06 , G02B27/18 , G03F7/20 , H01L21/027 , G02B5/08 , G02B5/10
CPC分类号： G03F7/70233 , G02B17/0657 , G03F7/70275
摘要： A reflection type projection optical system for projecting a pattern on an object surface onto an image surface and forming an imaging system that forms an intermediate image between the object surface and image surface includes four or more mirrors arranged substantially as a coaxial system to reflect light from an object side to an image side, reflection surfaces on the four or more mirrors forming the same direction for forming a reflection angle.
摘要翻译：用于将物体表面上的图案投影到图像表面上并形成在物体表面和图像表面之间形成中间图像的成像系统的反射型投影光学系统包括基本上以同轴系统布置的四个或更多个反射镜，以反射来自物体侧到像侧，四个或更多个反射镜上的反射表面形成用于形成反射角的相同方向。

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