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    • 1. 发明授权
    • Catadioptric system and image pickup apparatus
    • 反射折射系统和摄像装置
    • US09110287B2
    • 2015-08-18
    • US13566395
    • 2012-08-03
    • Yuji Katashiba
    • Yuji Katashiba
    • G02B17/00G02B21/00G02B23/00G02B21/04G02B17/08
    • G02B21/04G02B17/0808
    • The catadioptric system includes a first imaging optical system collecting light from an object and a second imaging optical system causing the light from the first imaging optical system to form an intermediate image and to cause the light from the intermediate image to form an optical image. The first imaging optical system includes a first optical element including a first light transmissive portion and a first back reflective portion, and a second optical element including a second light transmissive portion and a second back reflective portion. The first light transmissive portion, the second back reflective portion, the first back reflective portion and the second light transmissive portion introduce the light from the object to the second imaging optical system. The second imaging optical system includes an aspheric lens having a negative refractive power on and around the optical axis and a positive refractive index in its peripheral portion.
    • 反折射系统包括收集来自物体的光的第一成像光学系统和使来自第一成像光学系统的光形成中间图像并使来自中间图像的光形成光学图像的第二成像光学系统。 第一成像光学系统包括:第一光学元件,包括第一透光部分和第一后部反射部分;以及第二光学元件,其包括第二透光部分和第二后部反射部分。 第一透光部分,第二背反射部分,第一背反射部分和第二光透射部分将来自物体的光引入第二成像光学系统。 第二成像光学系统包括在光轴上和周围具有负折光力并且在其周边部分具有正折射率的非球面透镜。
    • 3. 发明申请
    • CATADIOPTRIC SYSTEM AND IMAGE PICKUP APPARATUS
    • CATADIOPTRIC系统和图像拾取装置
    • US20130033635A1
    • 2013-02-07
    • US13566395
    • 2012-08-03
    • Yuji KATASHIBA
    • Yuji KATASHIBA
    • G02B13/16G02B17/08
    • G02B21/04G02B17/0808
    • The catadioptric system includes a first imaging optical system collecting light from an object and a second imaging optical system causing the light from the first imaging optical system to form an intermediate image and to cause the light from the intermediate image to form an optical image. The first imaging optical system includes a first optical element including a first light transmissive portion and a first back reflective portion, and a second optical element including a second light transmissive portion and a second back reflective portion. The first light transmissive portion, the second back reflective portion, the first back reflective portion and the second light transmissive portion introduce the light from the object to the second imaging optical system. The second imaging optical system includes an aspheric lens having a negative refractive power on and around the optical axis and a positive refractive index in its peripheral portion.
    • 反折射系统包括收集来自物体的光的第一成像光学系统和使来自第一成像光学系统的光形成中间图像并使来自中间图像的光形成光学图像的第二成像光学系统。 第一成像光学系统包括:第一光学元件,包括第一透光部分和第一后部反射部分;以及第二光学元件,其包括第二透光部分和第二后部反射部分。 第一透光部分,第二背反射部分,第一背反射部分和第二光透射部分将来自物体的光引入第二成像光学系统。 第二成像光学系统包括在光轴上和周围具有负折光力并且在其周边部分具有正折射率的非球面透镜。
    • 5. 发明授权
    • Catadioptric projection optical system, exposure apparatus having the same, device fabrication method
    • 折反射投影光学系统,具有相同的曝光设备,器件制造方法
    • US07283294B2
    • 2007-10-16
    • US11257785
    • 2005-10-24
    • Yuji KatashibaChiaki TerasawaHideki Morishima
    • Yuji KatashibaChiaki TerasawaHideki Morishima
    • G02B17/08
    • G03F7/70225G02B17/08G02B17/0892G03F7/70275G03F7/70341
    • A catadioptric optical system comprising a first imaging optical system including a concave mirror and forming an intermediate image of a first object, said first imaging optical system forming a reciprocating optical system that an incidence light and reflected light pass, a second imaging optical system for forming an image of the intermediate image onto a second object, and a first optical path deflective member, provided between the concave mirror and the intermediate image, for introducing a light from the first imaging optical system to the second imaging optical system, wherein said first optical path deflective member deflects a light in such a direction that a forward path of the first imaging optical system intersects a return path of the first imaging optical system, and wherein said intermediate image is formed without an optical element after a deflection.
    • 一种反折射光学系统,包括:第一成像光学系统,包括凹面镜并形成第一物体的中间图像,所述第一成像光学系统形成入射光和反射光通过的往复光学系统;第二成像光学系统,用于形成 设置在第二物体上的中间图像的图像和设置在凹面镜和中间图像之间的第一光路偏转构件,用于将来自第一成像光学系统的光引入第二成像光学系统,其中所述第一光学 路径偏转构件沿着第一成像光学系统的前进路径与第一成像光学系统的返回路径相交的方向偏转光,并且其中所述中间图像在偏转之后形成为没有光学元件。
    • 6. 发明申请
    • Catadioptric projection optical system, exposure apparatus having the same, device fabrication method
    • 折反射投影光学系统,具有相同的曝光设备,器件制造方法
    • US20060088320A1
    • 2006-04-27
    • US11257785
    • 2005-10-24
    • Yuji KatashibaChiaki TerasawaHideki Morishima
    • Yuji KatashibaChiaki TerasawaHideki Morishima
    • H04B10/00
    • G03F7/70225G02B17/08G02B17/0892G03F7/70275G03F7/70341
    • A catadioptric optical system comprising a first imaging optical system including a concave mirror and forming an intermediate image of a first object, said first imaging optical system forming a reciprocating optical system that an incidence light and reflected light pass, a second imaging optical system for forming an image of the intermediate image onto a second object, and a first optical path deflective member, provided between the concave mirror and the intermediate image, for introducing a light from the first imaging optical system to the second imaging optical system, wherein said first optical path deflective member deflects a light in such a direction that a forward path of the first imaging optical system intersects a return path of the first imaging optical system, and wherein said intermediate image is formed without an optical element after a deflection.
    • 一种反折射光学系统,包括:第一成像光学系统,包括凹面镜并形成第一物体的中间图像,所述第一成像光学系统形成入射光和反射光通过的往复光学系统;第二成像光学系统,用于形成 设置在第二物体上的中间图像的图像和设置在凹面镜和中间图像之间的第一光路偏转构件,用于将来自第一成像光学系统的光引入第二成像光学系统,其中所述第一光学 路径偏转构件沿着第一成像光学系统的前进路径与第一成像光学系统的返回路径相交的方向偏转光,并且其中所述中间图像在偏转之后形成为没有光学元件。
    • 7. 发明授权
    • Catadioptric system and image pickup apparatus
    • 反射折射系统和摄像装置
    • US09019633B2
    • 2015-04-28
    • US13581663
    • 2011-05-19
    • Yuji KatashibaKazuhiko KajiyamaMasayuki Suzuki
    • Yuji KatashibaKazuhiko KajiyamaMasayuki Suzuki
    • G02B17/08
    • G02B17/0808
    • The catadioptric system includes a first optical imaging system (catadioptric part) causing a light flux from an object to form an intermediate image and a second optical imaging system (dioptric part) causing the light flux from the intermediate image to form an image. In the first optical imaging system, the light flux sequentially passes a first transmissive portion, a second reflective portion, a first reflective portion and a second transmissive portion. In the second optical imaging system, consecutive four lens surfaces among plural lens surfaces placed between an aperture stop and an image surface have a negative combined refractive power, and a condition of −0.52
    • 反折射系统包括使来自物体的光束形成中间图像的第一光学成像系统(反射折射部分)和引起来自中间图像的光束形成图像的第二光学成像系统(屈光部分)。 在第一光学成像系统中,光通​​量依次通过第一透射部分,第二反射部分,第一反射部分和第二透射部分。 在第二光学成像系统中,放置在孔径光阑和图像表面之间的多个透镜表面中的连续的四个透镜表面具有负的组合折射光焦度,并且满足-0.52 <4nm-max·Ymax <-0.14的条件 ,&phgr; 4n-max表示负组合折射光焦度的最大值,Ymax表示物体在反射折射系统的视野中的最大物体高度。
    • 9. 发明申请
    • CATADIOPTRIC SYSTEM AND IMAGE PICKUP APPARATUS EQUIPPED WITH SAME
    • CATADIOPTRIC系统和图像拾取装置配备
    • US20130063650A1
    • 2013-03-14
    • US13609677
    • 2012-09-11
    • Kazuhiko KajiyamaMasayuki SuzukiYuji Katashiba
    • Kazuhiko KajiyamaMasayuki SuzukiYuji Katashiba
    • G02B17/08H04N5/232
    • G02B17/0888G02B13/18G02B13/22G02B17/0808G02B17/0856G02B21/04
    • A catadioptric unit includes, in order from an object side to an image side, a first optical element including a first transmissive unit having positive refractive power disposed in the vicinity of an optical axis and, on the object side thereof, a first reflective unit disposed at an outer circumference relative to the first transmissive unit and having a reflective surface; and a second optical element including a second transmissive unit having negative refractive power in the vicinity of the optical axis and, on the image side thereof, a second reflective unit disposed at an outer circumference relative to the second transmissive unit and having a reflective surface. Radii of curvature of object-side and image-side surfaces of the second optical element, a thickness along the optical axis and a refractive index of a material of the second optical element are set to satisfy predetermined conditions.
    • 反射折射单元包括从物体侧到像侧的顺序,包括设置在光轴附近的具有正折光力的第一透射单元的第一光学元件,并且在物体侧具有设置在第一反射单元 在相对于第一透射单元的外圆周处,并具有反射表面; 以及第二光学元件,其包括在光轴附近具有负折光力的第二透射单元,并且在其像侧上具有相对于第二透射单元设置在外周并具有反射表面的第二反射单元。 第二光学元件的物体侧和像侧表面的曲率半径,沿着光轴的厚度和第二光学元件的材料的折射率被设定为满足预定条件。
    • 10. 发明申请
    • CATADIOPTRIC SYSTEM AND IMAGE PICKUP APPARATUS
    • CATADIOPTRIC系统和图像拾取装置
    • US20120320187A1
    • 2012-12-20
    • US13581663
    • 2011-05-19
    • Yuji KatashibaKazuhiko KajiyamaMasayuki Suzuki
    • Yuji KatashibaKazuhiko KajiyamaMasayuki Suzuki
    • G02B17/08H04N7/18
    • G02B17/0808
    • The catadioptric system includes a first optical imaging system (catadioptric part) causing a light flux from an object to form an intermediate image and a second optical imaging system (dioptric part) causing the light flux from the intermediate image to form an image. In the first optical imaging system, the light flux sequentially passes a first transmissive portion, a second reflective portion, a first reflective portion and a second transmissive portion. In the second optical imaging system, consecutive four lens surfaces among plural lens surfaces placed between an aperture stop and an image surface have a negative combined refractive power, and a condition of −0.52
    • 反折射系统包括使来自物体的光束形成中间图像的第一光学成像系统(反射折射部分)和引起来自中间图像的光束形成图像的第二光学成像系统(屈光部分)。 在第一光学成像系统中,光通​​量依次通过第一透射部分,第二反射部分,第一反射部分和第二透射部分。 在第二光学成像系统中,放置在孔径光阑和图像表面之间的多个透镜表面中的连续的四个透镜表面具有负的组合折射光焦度,并且满足-0.52 <4μm-max·Ymax <-0.14的条件 ,&phgr; 4n-max表示负组合折射光焦度的最大值,Ymax表示物体在反射折射系统的视野中的最大物体高度。