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    • 2. 发明授权
    • Method for fabricating semiconductor device
    • 制造半导体器件的方法
    • US07371628B2
    • 2008-05-13
    • US11228340
    • 2005-09-19
    • Cha-Hsin LinZing-Way PeiChee-Wee Liu
    • Cha-Hsin LinZing-Way PeiChee-Wee Liu
    • H01L21/336
    • H01L21/823828H01L21/823807
    • A method for fabricating a semiconductor device is provided. The method mainly involves steps of forming at least one first patterned high stress layer below a silicon substrate, then forming a semiconductor device onto the substrate, and forming at least one second patterned high stress layer on the semiconductor device. According to the method, the characteristics of the PMOS and the NMOS transistors formed on the same wafer may be improved simultaneously, by utilizing the stress of the patterned layers of high stress material. Further, the mobility of the carriers is enhanced, so that the output characteristic of the transistors can be improved.
    • 提供一种制造半导体器件的方法。 该方法主要包括以下步骤:在硅衬底下方形成至少一个第一图案化的高应力层,然后在衬底上形成半导体器件,并在半导体器件上形成至少一个第二图案化的高应力层。 根据该方法,通过利用高应力材料的图案化层的应力,可以同时改善形成在同一晶片上的PMOS和NMOS晶体管的特性。 此外,载流子的迁移率增强,从而可以提高晶体管的输出特性。
    • 4. 发明授权
    • Avalanche photo-detector with high saturation power and high gain-bandwidth product
    • 具有高饱和功率和高增益带宽产品的雪崩光电检测器
    • US06963089B2
    • 2005-11-08
    • US10720117
    • 2003-11-25
    • Jin-Wei ShiChee-Wee Liu
    • Jin-Wei ShiChee-Wee Liu
    • H01L31/08H01L31/107
    • B82Y10/00H01L31/107
    • An avalanche photo-detector (APD) is disclosed, which can reduce device capacitance, operating voltage, carrier transport time and dark current as well as increasing response speed and output power. Thus, an avalanche photo-detector (APD) with high saturation power, high gain-bandwidth product, low noise, fast response, low dark current is achieved. The APD includes an absorption layer with graded doping for converting an incident light into carriers, an undoped multiplication layer for multiplying current by means of receiving carriers, a doped field buffer layer sandwiched between the absorption layer and the multiplication layer for concentrating an electric field in the multiplication layer when a bias voltage is applied, and an undoped drift layer sandwiched between the absorption layer and the field buffer layer for capacitance reduction.
    • 公开了一种雪崩光电检测器(APD),可以降低器件电容,工作电压,载流子传输时间和暗电流以及响应速度和输出功率。 因此,实现了具有高饱和功率,高增益带宽乘积,低噪声,快速响应,低暗电流的雪崩光电检测器(APD)。 APD包括具有用于将入射光转换成载流子的渐变掺杂的吸收层,用于通过接收载流子来乘以电流的未掺杂乘法层,夹在吸收层和乘法层之间的掺杂场缓冲层,用于将电场集中 施加偏置电压时的倍增层和夹在吸收层和场缓冲层之间的未掺杂漂移层用于电容降低。
    • 7. 发明申请
    • POINT-CONTACT SOLAR CELL STRUCTURE
    • 点接触太阳能电池结构
    • US20130087191A1
    • 2013-04-11
    • US13341526
    • 2011-12-30
    • Seow-Wei TANYen-Yu ChenWei-Shuo HoYu-Hung HuangChee-Wee Liu
    • Seow-Wei TANYen-Yu ChenWei-Shuo HoYu-Hung HuangChee-Wee Liu
    • H01L31/0224H01L31/0216
    • H01L31/022425H01L31/1804Y02E10/547Y02P70/521
    • A point-contact solar cell structure includes a semiconductor substrate, a front electrode, a first passivation layer, a second passivation layer, and a rear electrode. The semiconductor substrate includes an upper surface, a lower surface, and an emitter layer, a base layer, and a plurality of locally doped regions located between the upper surface and the lower surface. The plurality of locally doped regions is located on the lower surface at intervals. The second passivation layer is located on the lower surface, and has a plurality of openings disposed respectively corresponding to the locally doped regions. The rear electrode is located on one side of the second passivation layer opposite to the semiconductor substrate, and passes through the second passivation layer via the openings to contact the locally doped regions. The width of at least one opening corresponding to the front electrode is greater than that of the remaining openings.
    • 点接触太阳能电池结构包括半导体衬底,前电极,第一钝化层,第二钝化层和后电极。 半导体衬底包括位于上表面和下表面之间的上表面,下表面和发射极层,基底层和多个局部掺杂区域。 多个局部掺杂区域间隔地位于下表面上。 第二钝化层位于下表面,并且具有分别对应于局部掺杂区域设置的多个开口。 后电极位于与半导体衬底相对的第二钝化层的一侧上,并且经由开口穿过第二钝化层以接触局部掺杂区域。 对应于前电极的至少一个开口的宽度大于其余开口的宽度。