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    • 5. 发明授权
    • Apparatus and method for testing non-contact pads of a semiconductor device to be tested
    • 用于测试要测试的半导体器件的非接触焊盘的装置和方法
    • US08253431B2
    • 2012-08-28
    • US12784121
    • 2010-05-20
    • Yi-Shao LaiTsung-Yueh TsaiMing-Kun ChenI. L. LinKen JuangMing-Hsiang Cheng
    • Yi-Shao LaiTsung-Yueh TsaiMing-Kun ChenI. L. LinKen JuangMing-Hsiang Cheng
    • G01R31/20G01R31/00
    • G01R1/0483G01R1/0466G01R31/2886
    • The present invention relates to an apparatus and a method for testing non-contact pads of a semiconductor device to be tested. The apparatus includes an insulating body, at least one testing module and a plurality of probes. The insulating body includes an accommodating cavity, a lower opening and at least one side opening. The side opening communicates with the accommodating cavity and the lower opening. The testing module is disposed in the side opening, and each testing module includes a circuit board and an active chip. The active chip is disposed on and electrically connected to the circuit board. The active chip has a plurality of testing pads exposed to the accommodating cavity. The probes are disposed in the lower opening. Whereby, the non-contact pads of the semiconductor device to be tested face but not in physically contact with the testing pads of the active chip, so as to test the proximity communication between the non-contact pads of the semiconductor device and the testing pads of the active chip.
    • 本发明涉及一种用于测试待测半导体器件的非接触焊盘的装置和方法。 该装置包括绝缘体,至少一个测试模块和多个探针。 绝缘体包括容纳腔,下开口和至少一个侧开口。 侧开口与容纳腔和下开口连通。 测试模块设置在侧开口中,每个测试模块包括电路板和有源芯片。 有源芯片设置在电路板上并与之电连接。 有源芯片具有暴露于容纳腔的多个测试焊盘。 探针设置在下开口中。 因此,要测试的半导体器件的非接触焊盘面对但不与有源芯片的测试焊盘物理接触,以便测试半导体器件的非接触焊盘与测试焊盘之间的接近连接 的有源芯片。