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1. 发明授权

US06853441B2 Projection aligner 失效
标题翻译：投影对准器
公开(公告)号：US06853441B2
公开(公告)日：2005-02-08
申请号：US10327946
申请日：2002-12-26
申请人： Yoshinori Kobayashi , Shigetomo Ishibashi , Masato Hara
发明人： Yoshinori Kobayashi , Shigetomo Ishibashi , Masato Hara
IPC分类号： G03B27/42 , G03F7/20 , G03F9/00 , G03B27/52 , G03B27/54 , G03B27/70
CPC分类号： G03F7/70225 , G03B27/42 , G03F7/70258 , G03F7/70275 , G03F7/70466 , G03F7/70475 , G03F7/70791 , G03F9/7003
摘要： The projection aligner transfers a mask pattern formed on a mask to a substrate. A collimated light beam is emitted from a light source toward the mask. The light beam passed through the mask is deflected by a first mirror formed on a deflector toward a lens unit having a positive power. A reflector is provided at the other side of the lens unit to reflect back the light beam passed through the lens unit. The light beam reflected by the reflector passed through the lend unit again and then deflected by a second mirror formed on the deflector toward the substrate to form an image of the mask pattern. The size of the image formed on the substrate is adjusted by moving the reflector along the optical axis of the lens unit, and the deflector along the optical path of the light beam passed through the mask.
摘要翻译：投影对准器将形成在掩模上的掩模图案转印到基板上。从光源朝向掩模发射准直光束。通过掩模的光束被形成在偏转器上的第一反射镜朝向具有正光焦度的透镜单元偏转。反射器设置在透镜单元的另一侧，以反射穿过透镜单元的光束。由反射镜反射的光束再次穿过借用单元，然后由形成在偏转器上的第二反射镜朝向衬底偏转以形成掩模图案的图像。通过沿着透镜单元的光轴移动反射器并且沿着光束的光路穿过掩模来调整形成在基板上的图像的尺寸。

2. 发明授权

US06839124B2 Projection aligner 失效
标题翻译：投影对准器
公开(公告)号：US06839124B2
公开(公告)日：2005-01-04
申请号：US10327947
申请日：2002-12-26
申请人： Yoshinori Kobayashi , Shigetomo Ishibashi , Masato Hara
发明人： Yoshinori Kobayashi , Shigetomo Ishibashi , Masato Hara
IPC分类号： G03F7/20 , G03F9/00 , G03B27/42 , G01B11/00 , G03B27/54
CPC分类号： G03F7/70225 , G03F7/70258 , G03F7/70275 , G03F7/70466 , G03F7/70475 , G03F7/70791 , G03F9/7003
摘要： A projection aligner scans a plurality of light beams over a mask in a main scanning direction to transfer an image of a mask pattern on an object by the light beams passed through the mask. The projection aligner has a plurality of optical systems for projecting light beams passed through the mask onto the object. Each of the optical system includes a lens unit, a reflector provided to one side of the lens unit and a deflector provided to the other side of the lens unit. The light beam passed through the mask is deflected by the deflector, passes through the lens unit, reflected back by the reflector, passes through the lens unit again, and deflected by the deflector toward the object. The size of the image formed by the light beam is varied by moving the reflector in the main scanning direction and moving the deflector in a direction perpendicular to the object. The location of the image on the object in the auxiliary direction is adjusted by further moving the reflector in the auxiliary direction.
摘要翻译：投影对准器在主扫描方向上扫描掩模上的多个光束，以通过通过掩模的光束将掩模图案的图像转印到物体上。投影对准器具有多个光学系统，用于将通过掩模的光束投射到物体上。每个光学系统包括透镜单元，设置在透镜单元的一侧的反射器和设置在透镜单元的另一侧的偏转器。穿过掩模的光束被偏转器偏转，穿过透镜单元，被反射器反射回来，再次穿过透镜单元，并且被偏转器偏转到物体。通过在主扫描方向上移动反射器并使偏转器沿垂直于物体的方向移动来改变由光束形成的图像的大小。通过在辅助方向上进一步移动反射器来调整图像在辅助方向上的位置。

3. 发明授权

US06807013B2 Projection aligner 失效
标题翻译：投影对准器
公开(公告)号：US06807013B2
公开(公告)日：2004-10-19
申请号：US10327901
申请日：2002-12-26
申请人： Yoshinori Kobayashi , Shigetomo Ishibashi , Masato Hara
发明人： Yoshinori Kobayashi , Shigetomo Ishibashi , Masato Hara
IPC分类号： G02B1514
CPC分类号： G03F7/70225 , G03B27/42 , G03F7/70258 , G03F7/70275 , G03F7/70466 , G03F7/70475 , G03F7/70791 , G03F9/7003
摘要： The projection aligner for transferring an image of a mask pattern of a mask onto an object to be exposed comprises a projection optical system that forms the image of the mask pattern onto the object, an expansion ratio determiner that measures lengths of the object in first and second directions and determines first and second expansion ratios, which are expansion ratios of the object in the first and second directions, respectively, based on those lengths, and a magnification controller that adjusts the magnification of the projection optical system to a value between the first and second expansion ratios.
摘要翻译：用于将掩模的掩模图案的图像转印到要曝光的对象上的投影对准器包括将掩模图案的图像形成在对象上的投影光学系统，测量物体的长度的扩张比确定器，第二方向，并且基于这些长度分别确定第一和第二方向上的物体的膨胀比的第一和第二膨胀比;以及放大控制器，其将投影光学系统的倍率调整为第一和第二和第二扩张比。

4. 发明授权

US06727979B2 Projection aligner 有权
标题翻译：投影对准器
公开(公告)号：US06727979B2
公开(公告)日：2004-04-27
申请号：US10339301
申请日：2003-01-10
申请人： Yoshinori Kobayashi , Shigetomo Ishibashi , Masato Hara
发明人： Yoshinori Kobayashi , Shigetomo Ishibashi , Masato Hara
IPC分类号： G03B2742
CPC分类号： G03B27/52
摘要： The projection aligner transfers the image of the pattern formed on the mask to the object by scanning a light beam across the mask and the object. The projection aligner includes a driving mechanism for synchronously moving the mask and the object and thereby scanning the light beam across the mask and the object in a predetermined beam scanning direction. The light beam scanning the mask passes through the mask and is projected onto the object by a projection optical system of which magnification is adjusted by a magnification adjusting mechanism. The magnification adjusting mechanism and the driving mechanism are controlled by a controller such that the difference between the magnification of said projection optical system and a velocity ratio of the mask and the object moved by the driving mechanism becomes below a predetermined maximum value which is determined based on a line width of the pattern formed on the mask.
摘要翻译：投影对准器通过扫描光束穿过掩模和物体将形成在掩模上的图案的图像转移到物体上。投影对准器包括用于同步移动掩模和物体的驱动机构，从而以预定的光束扫描方向扫描光束穿过掩模和物体。扫描掩模的光束通过掩模，并通过投影光学系统投影到物体上，投影光学系统通过放大调节机构来调节放大倍率。放大调节机构和驱动机构由控制器控制，使得所述投影光学系统的放大率与由驱动机构移动的掩模和物体的速度比之间的差异变得低于基于确定的预定最大值在形成在掩模上的图案的线宽上。

5. 发明授权

US09322388B2 Natural-frequency adjusting mechanism for wave-power generator 有权
标题翻译：波发电机自然调频机构
公开(公告)号：US09322388B2
公开(公告)日：2016-04-26
申请号：US14002189
申请日：2012-03-15
申请人： Kentaro Hayashi , Takeshi Yasunaga , Shunichi Ikesue , Makoto Ohta , Masami Miura , Yasuyoshi Takamoto , Yoshinori Kobayashi , Hideaki Hashimoto , Shozo Kaneko , Akira Hashimoto
发明人： Kentaro Hayashi , Takeshi Yasunaga , Shunichi Ikesue , Makoto Ohta , Masami Miura , Yasuyoshi Takamoto , Yoshinori Kobayashi , Hideaki Hashimoto , Shozo Kaneko , Akira Hashimoto
IPC分类号： F03B13/12 , F03B13/20 , F03B15/00 , F03B13/14
CPC分类号： F03B13/20 , F03B13/14 , F03B13/16 , F03B15/00 , F05B2260/403 , F05B2260/4031 , F05B2270/18 , Y02E10/38
摘要： Provided is a wave-power generator capable of adjusting a natural period (natural frequency) in response to a changing wave period. The wave-power generator includes a weight that is installed in a floating body via a spring and that linearly reciprocates in response to a fluctuation of a water surface and a generator that generates power by being driven based on the linear reciprocating motion of the weight. An additional-mass body for adding a mass to the mass of the weight is further included.
摘要翻译：提供了能够响应于波形周期变化来调整自然周期（固有频率）的波发生器。波浪发电机包括通过弹簧安装在浮体中并且响应于水面的波动而线性地往复移动的重物和通过基于重量的线性往复运动而被驱动而产生动力的发电机。还包括用于向质量块中添加质量的附加质量体。

6. 发明申请

US20140129360A1 CREDIT CARD INFORMATION PROCESSING SYSTEM, CREDIT CARD INFORMATION PROCESSING METHOD, ORDER INFORMATION RECEIVING DEVICE, CREDIT CARD TRANSACTION DEVICE, PROGRAM, AND INFORMATION RECORDING MEDIUM 有权
标题翻译：信用卡信息处理系统，信用卡信息处理方法，订单信息接收设备，信用卡交易设备，程序和信息记录介质
公开(公告)号：US20140129360A1
公开(公告)日：2014-05-08
申请号：US14129284
申请日：2012-05-29
申请人： Yoshinori Kobayashi
发明人： Yoshinori Kobayashi
IPC分类号： G06Q20/34 , G06Q20/24
CPC分类号： G06Q20/34 , G06Q20/02 , G06Q20/12 , G06Q20/202 , G06Q20/24 , G06Q20/385
摘要： A seller's workload of managing credit card information can be reduced without changing convenience for an orderer and the seller in a transaction using a credit card. A virtual mall server (3) and a credit card server (5) share conversion information for obtaining, from actual data of the credit card, corresponding dummy data of the credit card. The virtual mall server (3) obtains, based on the conversion information, the corresponding dummy data from the actual data of the credit card to be used for a settlement of the order information, and sends the obtained dummy data to a shop terminal as data of the credit card to be used for the settlement of the order information. Upon receiving, from the shop terminal, a predetermined card processing request based on the dummy data, the credit card server (5) obtains, based on the conversion information, the corresponding actual data from the dummy data of the credit card, and performs the predetermined card processing based on the obtained actual data of the credit card.
摘要翻译：可以减少卖方管理信用卡信息的工作量，而不会在使用信用卡的交易中更改订单人和卖方的便利性。虚拟购物中心服务器（3）和信用卡服务器（5）共享用于从信用卡的实际数据获得信用卡的相应虚拟数据的转换信息。虚拟购物中心服务器（3）基于转换信息，从用于结算订单信息的信用卡的实际数据中获得相应的虚拟数据，并将所获得的虚拟数据作为数据发送到商店终端的信用卡用于结算订单信息。从商店终端接收到基于伪数据的预定的卡处理请求时，信用卡服务器（5）根据转换信息从信用卡的伪数据中获得相应的实际数据，并执行基于获得的信用卡的实际数据进行预定的卡处理。

7. 发明授权

US08599357B2 Photolithography system 有权
标题翻译：光刻系统
公开(公告)号：US08599357B2
公开(公告)日：2013-12-03
申请号：US12185202
申请日：2008-08-04
申请人： Takashi Okuyama , Yoshinori Kobayashi
发明人： Takashi Okuyama , Yoshinori Kobayashi
IPC分类号： G03B27/42 , G03B27/32 , G03F7/20
CPC分类号： G03F7/70508 , G03F7/70275 , G03F7/70291 , G03F7/704
摘要： A photolithography system has at least one spatial light modulator, a scanning mechanism configured to move an exposure area relative to a target object in a scanning direction, a plurality of memories (1st to Nth memories), a data processor, and exposure controller. The exposure area is defined as a projection area of the spatial light modulator. The plurality of memories corresponds to a plurality of partial exposure areas that is defined by dividing the exposure area. The data processor successively writes exposure data into each memory in accordance with the timing of an exposure, and the exposure controller controls the plurality of light modulating elements on the basis of the relative position of the exposure area. The data processor writes newly generated exposure data into the first memory, and shifts exposure data stored in the 1st to (N−1)st memories to the 2nd to Nth memories, respectively.
摘要翻译：光刻系统具有至少一个空间光调制器，被配置为沿扫描方向相对于目标物体移动曝光区域的扫描机构，多个存储器（第1至第N存储器），数据处理器和曝光控制器。曝光区域被定义为空间光调制器的投影区域。多个存储器对应于通过划分曝光区域限定的多个部分曝光区域。数据处理器根据曝光的定时将曝光数据连续地写入每个存储器，并且曝光控制器基于曝光区域的相对位置控制多个光调制元件。数据处理器将新产生的曝光数据写入第一存储器，并将存储在第1至第（N-1）个存储器中的曝光数据分别移位到第2至第N存储器。

8. 发明授权

US08281177B2 Distributed control system 有权
标题翻译：分布式控制系统
公开(公告)号：US08281177B2
公开(公告)日：2012-10-02
申请号：US12700132
申请日：2010-02-04
申请人： Hideharu Yajima , Satoshi Kitamura , Senji Watanabe , Masafumi Kisa , Kazushi Sakamoto , Hiroyuki Takizawa , Kuniharu Akabane , Yoshinori Kobayashi , Kenji Habaguchi , Kiyotaka Kozakai , Mitsuhiro Kurono , Hiroaki Nakajima , Takeshi Hongo
发明人： Hideharu Yajima , Satoshi Kitamura , Senji Watanabe , Masafumi Kisa , Kazushi Sakamoto , Hiroyuki Takizawa , Kuniharu Akabane , Yoshinori Kobayashi , Kenji Habaguchi , Kiyotaka Kozakai , Mitsuhiro Kurono , Hiroaki Nakajima , Takeshi Hongo
IPC分类号： G06F1/12
CPC分类号： G05B19/042 , G05B19/05
摘要： There is provided a distributed control system including a plurality of field controllers which are connected through a control network. Each of the field controllers includes: a control clock that defines a control timing of the field controller; and an adjustment unit that adjusts a control time of the control clock depending on a network time obtained through the control network.
摘要翻译：提供了包括通过控制网络连接的多个现场控制器的分布式控制系统。每个现场控制器包括：定义现场控制器的控制定时的控制时钟; 以及调整单元，其根据通过控制网络获得的网络时间调整控制时钟的控制时间。

9. 发明申请

US20100323254A1 ENERGY SUPPLY SYSTEM 审中-公开
标题翻译：能源供应系统
公开(公告)号：US20100323254A1
公开(公告)日：2010-12-23
申请号：US12597344
申请日：2007-04-23
申请人： Yasushi Mori , Tadashi Gengo , Yoshinori Kobayashi
发明人： Yasushi Mori , Tadashi Gengo , Yoshinori Kobayashi
IPC分类号： H01M8/06
CPC分类号： H01M8/065 , C01B3/065 , C01B3/08 , C01B6/04 , C01B2203/06 , C01B2203/066 , C22B4/02 , C22B26/22 , H01M8/04089 , Y02E60/362 , Y02P10/212
摘要： An energy supplying system is provided with an energy generating section that generates energy by being supplied with hydrogen and oxygen, a hydrogen supplying unit that generates hydrogen by a reaction of water contained in exhaust gas from the energy generation unit with magnesium hydride contained therein, a regenerating section that generates magnesium hydride and second oxygen with magnesium hydroxide generated by the reaction of water and magnesium hydride in the hydrogen supplying section, and an oxygen supplying section that supplies oxygen to the energy generation section by being supplied with oxygen from the regenerating section.
摘要翻译：能量供给系统具备通过供给氢和氧而产生能量的能量产生部，通过能量产生单元的废气中含有的水与其中所含的氢化镁反应而产生氢的氢供给单元，再生部，其通过氢供给部中的水和氢化镁的反应而产生氢氧化镁和第二氧;氢供给部，其通过从再生部供给氧而向能量产生部供给氧。

10. 发明申请

US20100198363A1 DISTRIBUTED CONTROL SYSTEM 有权
标题翻译：分布式控制系统
公开(公告)号：US20100198363A1
公开(公告)日：2010-08-05
申请号：US12700132
申请日：2010-02-04
申请人： Hideharu Yajima , Satoshi Kitamura , Senji Watanabe , Masafumi Kisa , Kazushi Sakamoto , Hiroyuki Takizawa , Kuniharu Akabane , Yoshinori Kobayashi , Kenji Habaguchi , Kiyotaka Kozakai , Mitsuhiro Kurono , Hiroaki Nakajima , Takeshi Hongo
发明人： Hideharu Yajima , Satoshi Kitamura , Senji Watanabe , Masafumi Kisa , Kazushi Sakamoto , Hiroyuki Takizawa , Kuniharu Akabane , Yoshinori Kobayashi , Kenji Habaguchi , Kiyotaka Kozakai , Mitsuhiro Kurono , Hiroaki Nakajima , Takeshi Hongo
IPC分类号： G06F1/12
CPC分类号： G05B19/042 , G05B19/05
摘要： There is provided a distributed control system including a plurality of field controllers which are connected through a control network. Each of the field controllers includes: a control clock that defines a control timing of the field controller; and an adjustment unit that adjusts a control time of the control clock depending on a network time obtained through the control network.
摘要翻译：提供了包括通过控制网络连接的多个现场控制器的分布式控制系统。每个现场控制器包括：定义现场控制器的控制定时的控制时钟; 以及调整单元，其根据通过控制网络获得的网络时间调整控制时钟的控制时间。

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