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    • 2. 发明授权
    • Substrate coating device with control section that synchronizes substrate moving velocity and delivery pump
    • 具有控制部分的基板涂层装置,其同步基板移动速度和输送泵
    • US08770141B2
    • 2014-07-08
    • US13377606
    • 2010-04-19
    • Yoshinori IkagawaMitsunori OdaMinoru YamamotoTakashi KawaguchiHideo HirataMasaaki Tanabe
    • Yoshinori IkagawaMitsunori OdaMinoru YamamotoTakashi KawaguchiHideo HirataMasaaki Tanabe
    • B05C11/00C23C16/52B05D1/02
    • B05C5/0262B05C5/0258B05C11/1013B05C11/1015B05C11/1023
    • A substrate coating device is provided which is capable of reducing non-uniform film thickness areas that take place in a coating start portion and a coating end portion during coating using a slit nozzle coater.The substrate coating device (10) includes at least a slider driving motor (4), a pump (8), a delivery state quantity measuring section (82), and a control section (5). The slider driving motor (4) scans a slit nozzle (1) over a substrate (100) at an established velocity relative to the substrate (100). The pump (8) controls the supply of the coating liquid to the slit nozzle (1). The delivery state quantity measuring section (82) is configured to measure a state quantity indicative of a delivery state of the coating liquid from the tip of the slit nozzle (1). The control section (5) corrects control information to be fed to the slider driving motor (4) in such a manner as to cancel out a difference between control information fed to the pump (8) and measurement information fed from the delivery state quantity measuring section (82) based on difference information indicative of the difference.
    • 提供一种基板涂布装置,其能够在使用狭缝喷嘴涂布机的涂布期间减少在涂层起始部分和涂覆端部发生的不均匀的膜厚度区域。 基板涂布装置(10)至少包括滑块驱动电机(4),泵(8),输送状态量测量部(82)和控制部(5)。 滑块驱动电机(4)以相对于基板(100)的建立速度在基板(100)上扫描狭缝喷嘴(1)。 泵(8)控制向狭缝喷嘴(1)供给涂布液。 输送状态量测量部(82)被配置为从狭缝喷嘴(1)的前端测量表示涂布液的输送状态的状态量。 所述控制部(5)以与所述输送状态量计量供给的所述测量信息和从所述输送状态量计量得到的测量信息之间的差异来取消供给到所述滑块驱动电动机(4)的控制信息, (82)基于指示差异的差异信息。
    • 3. 发明申请
    • SUBSTRATE COATING DEVICE
    • 基板涂层设备
    • US20120085282A1
    • 2012-04-12
    • US13377606
    • 2010-04-19
    • Yoshinori IkagawaMitsunori OdaMinoru YamamotoTakashi KawaguchiHideo HirataMasaaki Tanabe
    • Yoshinori IkagawaMitsunori OdaMinoru YamamotoTakashi KawaguchiHideo HirataMasaaki Tanabe
    • B05C5/00
    • B05C5/0262B05C5/0258B05C11/1013B05C11/1015B05C11/1023
    • A substrate coating device is provided which is capable of reducing non-uniform film thickness areas that take place in a coating start portion and a coating end portion during coating using a slit nozzle coater.The substrate coating device (10) includes at least a slider driving motor (4), a pump (8), a delivery state quantity measuring section (82), and a control section (5). The slider driving motor (4) scans a slit nozzle (1) over a substrate (100) at an established velocity relative to the substrate (100). The pump (8) controls the supply of the coating liquid to the slit nozzle (1). The delivery state quantity measuring section (82) is configured to measure a state quantity indicative of a delivery state of the coating liquid from the tip of the slit nozzle (1). The control section (5) corrects control information to be fed to the slider driving motor (4) in such a manner as to cancel out a difference between control information fed to the pump (8) and measurement information fed from the delivery state quantity measuring section (82) based on difference information indicative of the difference.
    • 提供一种基板涂布装置,其能够在使用狭缝喷嘴涂布机的涂布期间减少在涂层起始部分和涂覆端部发生的不均匀的膜厚度区域。 基板涂布装置(10)至少包括滑块驱动电机(4),泵(8),输送状态量测量部(82)和控制部(5)。 滑块驱动电机(4)以相对于基板(100)的建立速度在基板(100)上扫描狭缝喷嘴(1)。 泵(8)控制向狭缝喷嘴(1)供给涂布液。 输送状态量测量部(82)被配置为从狭缝喷嘴(1)的前端测量表示涂布液的输送状态的状态量。 所述控制部(5)以与所述输送状态量计量供给的测量信息和从所述输送状态量计量得到的测量信息之间的差异来校正供给到所述滑块驱动电动机(4)的控制信息, (82)基于指示差异的差异信息。
    • 5. 发明授权
    • Substrate coating device and substrate coating method
    • 基材涂布装置和基材涂布方法
    • US09067234B2
    • 2015-06-30
    • US13519212
    • 2010-06-03
    • Masaaki TanabeHideo HirataMitsunori Oda
    • Masaaki TanabeHideo HirataMitsunori Oda
    • B05B1/02B05C13/02H01L21/67H01L21/677B05C5/02
    • B05C13/02B05C5/0208B05C5/0216B05C5/0254B05C5/0283H01L21/6715H01L21/6776
    • A substrate coating device (10) includes a precision stage (7), a nozzle (8), and conveyors (3 to 6 and 21). The precision stage (7) has a horizontal placement surface for placing a substrate W thereon and is configured to be reciprocable between an upstream end and a downstream end in a conveying direction. The conveyors (3 to 6 and 21) are configured to convey the substrate W in the conveying direction via the placement surface of the precision stage (7) in such manner that a surface of the substrate W is positioned in a horizontal plane. The intermediate conveyor (21) is liftable between a conveying position where a conveying surface of the intermediate conveyor is coincident with the placement surface of the stage and a non-conveying position where the conveying surface is positioned below the placement surface of the stage.
    • 衬底涂覆装置(10)包括精密工作台(7),喷嘴(8)和输送机(3至6和21)。 精密工作台(7)具有用于将衬底W放置在其上的水平放置表面,并且构造成可沿输送方向在上游端和下游端之间往复运动。 输送机(3〜6,21)构成为,以使基板W的表面位于水平面的方式,经由精密台(7)的配置面在输送方向上输送基板W. 中间输送器(21)可以在输送位置与中间输送机的输送表面与载物台的放置表面重合的输送位置和输送表面位于载物台的放置表面下方的非输送位置之间提升。
    • 6. 发明申请
    • SUBSTRATE COATING DEVICE AND SUBSTRATE COATING METHOD
    • 基板涂层装置和基板涂层方法
    • US20120288635A1
    • 2012-11-15
    • US13519212
    • 2010-06-03
    • Masaaki TanabeHideo HirataMitsunori Oda
    • Masaaki TanabeHideo HirataMitsunori Oda
    • B05B1/02B05D1/02
    • B05C13/02B05C5/0208B05C5/0216B05C5/0254B05C5/0283H01L21/6715H01L21/6776
    • A substrate coating device (10) includes a precision stage (7), a nozzle (8), and conveyors (3 to 6 and 21). The precision stage (7) has a horizontal placement surface for placing a substrate W thereon and is configured to be reciprocable between an upstream end and a downstream end in a conveying direction. The conveyors (3 to 6 and 21) are configured to convey the substrate W in the conveying direction via the placement surface of the precision stage (7) in such manner that a surface of the substrate W is positioned in a horizontal plane. The intermediate conveyor (21) is liftable between a conveying position where a conveying surface of the intermediate conveyor is coincident with the placement surface of the stage and a non-conveying position where the conveying surface is positioned below the placement surface of the stage.
    • 衬底涂覆装置(10)包括精密工作台(7),喷嘴(8)和输送机(3至6和21)。 精密工作台(7)具有用于将衬底W放置在其上的水平放置表面,并且构造成可沿输送方向在上游端和下游端之间往复运动。 输送机(3〜6,21)构成为,以使基板W的表面位于水平面的方式,经由精密台(7)的配置面在输送方向上输送基板W. 中间输送器(21)可以在输送位置与中间输送机的输送表面与载物台的放置表面重合的输送位置和输送表面位于载物台的放置表面下方的非输送位置之间提升。