专利快速检索-快速检索全球专利，免费商用专利数据库-IPRDB

1. 发明授权

US09016235B2 Substrate coating device that controls coating amount based on optical measurement of bead shape 有权
标题翻译：基于珠粒形状的光学测量来控制涂布量的基板涂布装置
公开(公告)号：US09016235B2
公开(公告)日：2015-04-28
申请号：US13256562
申请日：2010-03-12
申请人： Yoshinori Ikagawa , Mitsunori Oda , Minoru Yamamoto , Takashi Kawaguchi , Masaaki Tanabe , Hideo Hirata
发明人： Yoshinori Ikagawa , Mitsunori Oda , Minoru Yamamoto , Takashi Kawaguchi , Masaaki Tanabe , Hideo Hirata
IPC分类号： B05C11/00 , B05C5/00 , B05C11/10 , B05C5/02 , B05D1/30 , B05D1/02 , B05B12/08
CPC分类号： B05C11/1007 , B05B12/082 , B05C5/0258 , B05C11/1005
摘要： The substrate coating device (10) includes a slit nozzle (1), a first camera (3), a second camera (4), a control section (5), a pump (8), and a pressure control chamber (9). The control section (5) controls the supply of the coating liquid from the pump (8) to the slit nozzle (1) in accordance with the result of comparison between a bead shape imaged by the first camera (3) and a reference shape. The control section (5) also controls the air pressure on the upstream side of the slit nozzle (1) by the pressure control chamber (9) in accordance with the result of comparison between a distance measured from an image taken by the second camera (4) and a reference distance.
摘要翻译：基板涂布装置（10）包括狭缝喷嘴（1），第一相机（3），第二相机（4），控制部分（5），泵（8）和压力控制室（9）。控制部（5）根据由第一照相机（3）成像的珠粒形状与基准形状的比较结果，控制从泵（8）到狭缝喷嘴（1）的涂布液的供给。控制部（5）还根据从由第二照相机拍摄的图像测得的距离的比较来控制压力控制室（9）在狭缝喷嘴（1）的上游侧的空气压力 4）和参考距离。

2. 发明授权

US08770141B2 Substrate coating device with control section that synchronizes substrate moving velocity and delivery pump 有权
标题翻译：具有控制部分的基板涂层装置，其同步基板移动速度和输送泵
公开(公告)号：US08770141B2
公开(公告)日：2014-07-08
申请号：US13377606
申请日：2010-04-19
申请人： Yoshinori Ikagawa , Mitsunori Oda , Minoru Yamamoto , Takashi Kawaguchi , Hideo Hirata , Masaaki Tanabe
发明人： Yoshinori Ikagawa , Mitsunori Oda , Minoru Yamamoto , Takashi Kawaguchi , Hideo Hirata , Masaaki Tanabe
IPC分类号： B05C11/00 , C23C16/52 , B05D1/02
CPC分类号： B05C5/0262 , B05C5/0258 , B05C11/1013 , B05C11/1015 , B05C11/1023
摘要： A substrate coating device is provided which is capable of reducing non-uniform film thickness areas that take place in a coating start portion and a coating end portion during coating using a slit nozzle coater.The substrate coating device (10) includes at least a slider driving motor (4), a pump (8), a delivery state quantity measuring section (82), and a control section (5). The slider driving motor (4) scans a slit nozzle (1) over a substrate (100) at an established velocity relative to the substrate (100). The pump (8) controls the supply of the coating liquid to the slit nozzle (1). The delivery state quantity measuring section (82) is configured to measure a state quantity indicative of a delivery state of the coating liquid from the tip of the slit nozzle (1). The control section (5) corrects control information to be fed to the slider driving motor (4) in such a manner as to cancel out a difference between control information fed to the pump (8) and measurement information fed from the delivery state quantity measuring section (82) based on difference information indicative of the difference.
摘要翻译：提供一种基板涂布装置，其能够在使用狭缝喷嘴涂布机的涂布期间减少在涂层起始部分和涂覆端部发生的不均匀的膜厚度区域。基板涂布装置（10）至少包括滑块驱动电机（4），泵（8），输送状态量测量部（82）和控制部（5）。滑块驱动电机（4）以相对于基板（100）的建立速度在基板（100）上扫描狭缝喷嘴（1）。泵（8）控制向狭缝喷嘴（1）供给涂布液。输送状态量测量部（82）被配置为从狭缝喷嘴（1）的前端测量表示涂布液的输送状态的状态量。所述控制部（5）以与所述输送状态量计量供给的所述测量信息和从所述输送状态量计量得到的测量信息之间的差异来取消供给到所述滑块驱动电动机（4）的控制信息，（82）基于指示差异的差异信息。

3. 发明申请

US20120085282A1 SUBSTRATE COATING DEVICE 有权
标题翻译：基板涂层设备
公开(公告)号：US20120085282A1
公开(公告)日：2012-04-12
申请号：US13377606
申请日：2010-04-19
申请人： Yoshinori Ikagawa , Mitsunori Oda , Minoru Yamamoto , Takashi Kawaguchi , Hideo Hirata , Masaaki Tanabe
发明人： Yoshinori Ikagawa , Mitsunori Oda , Minoru Yamamoto , Takashi Kawaguchi , Hideo Hirata , Masaaki Tanabe
IPC分类号： B05C5/00
CPC分类号： B05C5/0262 , B05C5/0258 , B05C11/1013 , B05C11/1015 , B05C11/1023
摘要： A substrate coating device is provided which is capable of reducing non-uniform film thickness areas that take place in a coating start portion and a coating end portion during coating using a slit nozzle coater.The substrate coating device (10) includes at least a slider driving motor (4), a pump (8), a delivery state quantity measuring section (82), and a control section (5). The slider driving motor (4) scans a slit nozzle (1) over a substrate (100) at an established velocity relative to the substrate (100). The pump (8) controls the supply of the coating liquid to the slit nozzle (1). The delivery state quantity measuring section (82) is configured to measure a state quantity indicative of a delivery state of the coating liquid from the tip of the slit nozzle (1). The control section (5) corrects control information to be fed to the slider driving motor (4) in such a manner as to cancel out a difference between control information fed to the pump (8) and measurement information fed from the delivery state quantity measuring section (82) based on difference information indicative of the difference.
摘要翻译：提供一种基板涂布装置，其能够在使用狭缝喷嘴涂布机的涂布期间减少在涂层起始部分和涂覆端部发生的不均匀的膜厚度区域。基板涂布装置（10）至少包括滑块驱动电机（4），泵（8），输送状态量测量部（82）和控制部（5）。滑块驱动电机（4）以相对于基板（100）的建立速度在基板（100）上扫描狭缝喷嘴（1）。泵（8）控制向狭缝喷嘴（1）供给涂布液。输送状态量测量部（82）被配置为从狭缝喷嘴（1）的前端测量表示涂布液的输送状态的状态量。所述控制部（5）以与所述输送状态量计量供给的测量信息和从所述输送状态量计量得到的测量信息之间的差异来校正供给到所述滑块驱动电动机（4）的控制信息，（82）基于指示差异的差异信息。

4. 发明申请

US20120000420A1 SUBSTRATE COATING DEVICE 有权
标题翻译：基板涂层设备
公开(公告)号：US20120000420A1
公开(公告)日：2012-01-05
申请号：US13256562
申请日：2010-03-12
申请人： Yoshinori Ikagawa , Mitsunori Oda , Minoru Yamamoto , Takashi Kawaguchi , Masaaki Tanabe , Hideo Hirata
发明人： Yoshinori Ikagawa , Mitsunori Oda , Minoru Yamamoto , Takashi Kawaguchi , Masaaki Tanabe , Hideo Hirata
IPC分类号： B05C11/10
CPC分类号： B05C11/1007 , B05B12/082 , B05C5/0258 , B05C11/1005
摘要： The substrate coating device (10) includes a slit nozzle (1), a first camera (3), a second camera (4), a control section (5), a pump (8), and a pressure control chamber (9). The control section (5) controls the supply of the coating liquid from the pump (8) to the slit nozzle (1) in accordance with the result of comparison between a bead shape imaged by the first camera (3) and a reference shape. The control section (5) also controls the air pressure on the upstream side of the slit nozzle (1) by the pressure control chamber (9) in accordance with the result of comparison between a distance measured from an image taken by the second camera (4) and a reference distance.
摘要翻译：基板涂布装置（10）包括狭缝喷嘴（1），第一相机（3），第二相机（4），控制部分（5），泵（8）和压力控制室（9）。控制部（5）根据由第一照相机（3）成像的珠粒形状与基准形状的比较结果，控制从泵（8）到狭缝喷嘴（1）的涂布液的供给。控制部（5）还根据从由第二照相机拍摄的图像测得的距离的比较来控制压力控制室（9）在狭缝喷嘴（1）的上游侧的空气压力 4）和参考距离。

5. 发明授权

US09067234B2 Substrate coating device and substrate coating method 有权
标题翻译：基材涂布装置和基材涂布方法
公开(公告)号：US09067234B2
公开(公告)日：2015-06-30
申请号：US13519212
申请日：2010-06-03
申请人： Masaaki Tanabe , Hideo Hirata , Mitsunori Oda
发明人： Masaaki Tanabe , Hideo Hirata , Mitsunori Oda
IPC分类号： B05B1/02 , B05C13/02 , H01L21/67 , H01L21/677 , B05C5/02
CPC分类号： B05C13/02 , B05C5/0208 , B05C5/0216 , B05C5/0254 , B05C5/0283 , H01L21/6715 , H01L21/6776
摘要： A substrate coating device (10) includes a precision stage (7), a nozzle (8), and conveyors (3 to 6 and 21). The precision stage (7) has a horizontal placement surface for placing a substrate W thereon and is configured to be reciprocable between an upstream end and a downstream end in a conveying direction. The conveyors (3 to 6 and 21) are configured to convey the substrate W in the conveying direction via the placement surface of the precision stage (7) in such manner that a surface of the substrate W is positioned in a horizontal plane. The intermediate conveyor (21) is liftable between a conveying position where a conveying surface of the intermediate conveyor is coincident with the placement surface of the stage and a non-conveying position where the conveying surface is positioned below the placement surface of the stage.
摘要翻译：衬底涂覆装置（10）包括精密工作台（7），喷嘴（8）和输送机（3至6和21）。精密工作台（7）具有用于将衬底W放置在其上的水平放置表面，并且构造成可沿输送方向在上游端和下游端之间往复运动。输送机（3〜6,21）构成为，以使基板W的表面位于水平面的方式，经由精密台（7）的配置面在输送方向上输送基板W. 中间输送器（21）可以在输送位置与中间输送机的输送表面与载物台的放置表面重合的输送位置和输送表面位于载物台的放置表面下方的非输送位置之间提升。

6. 发明申请

US20120288635A1 SUBSTRATE COATING DEVICE AND SUBSTRATE COATING METHOD 有权
标题翻译：基板涂层装置和基板涂层方法
公开(公告)号：US20120288635A1
公开(公告)日：2012-11-15
申请号：US13519212
申请日：2010-06-03
申请人： Masaaki Tanabe , Hideo Hirata , Mitsunori Oda
发明人： Masaaki Tanabe , Hideo Hirata , Mitsunori Oda
IPC分类号： B05B1/02 , B05D1/02
CPC分类号： B05C13/02 , B05C5/0208 , B05C5/0216 , B05C5/0254 , B05C5/0283 , H01L21/6715 , H01L21/6776
摘要： A substrate coating device (10) includes a precision stage (7), a nozzle (8), and conveyors (3 to 6 and 21). The precision stage (7) has a horizontal placement surface for placing a substrate W thereon and is configured to be reciprocable between an upstream end and a downstream end in a conveying direction. The conveyors (3 to 6 and 21) are configured to convey the substrate W in the conveying direction via the placement surface of the precision stage (7) in such manner that a surface of the substrate W is positioned in a horizontal plane. The intermediate conveyor (21) is liftable between a conveying position where a conveying surface of the intermediate conveyor is coincident with the placement surface of the stage and a non-conveying position where the conveying surface is positioned below the placement surface of the stage.
摘要翻译：衬底涂覆装置（10）包括精密工作台（7），喷嘴（8）和输送机（3至6和21）。精密工作台（7）具有用于将衬底W放置在其上的水平放置表面，并且构造成可沿输送方向在上游端和下游端之间往复运动。输送机（3〜6,21）构成为，以使基板W的表面位于水平面的方式，经由精密台（7）的配置面在输送方向上输送基板W. 中间输送器（21）可以在输送位置与中间输送机的输送表面与载物台的放置表面重合的输送位置和输送表面位于载物台的放置表面下方的非输送位置之间提升。

7. 发明申请

US20120243112A1 Lens Barrel, An Imaging Device, A Optical System Retaining Method and A Manufacturing Method 有权
标题翻译：透镜筒，成像装置，光学系统保持方法和制造方法
公开(公告)号：US20120243112A1
公开(公告)日：2012-09-27
申请号：US13490372
申请日：2012-06-06
申请人： Kunihiro Fukino , Kazuyasu Oone , Masaaki Tanabe
发明人： Kunihiro Fukino , Kazuyasu Oone , Masaaki Tanabe
IPC分类号： G02B7/04 , B23P11/00
CPC分类号： G02B7/10
摘要： A lens barrel comprising: a first retention member that includes a first engaging portion, which engages with a guide shaft, and that retains a first optical system and a second optical system, which is different from the first optical system, to be integrally movable along the guide shaft; and a second retention member that includes a second engaging portion, which engages with the guide shaft, and that retains a third optical system, which is disposed between the first optical system and the second optical system, to be movable independently of the first and second optical systems.
摘要翻译：一种镜筒，包括：第一保持构件，其包括与导向轴接合的第一接合部分，并且保持与第一光学系统不同的第一光学系统和第二光学系统，以沿着导轴; 以及第二保持构件，其包括与所述引导轴接合并且保持设置在所述第一光学系统和所述第二光学系统之间的第三光学系统能够独立于所述第一和第二光学系统移动的第二接合部分光学系统。

8. 发明授权

US06540491B1 Electromagnetic reciprocating compressor 有权
标题翻译：电磁往复式压缩机
公开(公告)号：US06540491B1
公开(公告)日：2003-04-01
申请号：US09890045
申请日：2001-07-25
申请人： Masaaki Tanabe
发明人： Masaaki Tanabe
IPC分类号： F04B1704
CPC分类号： F04B35/045
摘要： There is provided a compressor having two compression portions arranged in parallel. A compression chamber is formed into an air-tight chamber surrounded by a head of a piston, a cylinder, and a head cover. A discharge chamber is provided to the periphery of each cylinder, and these discharge chambers communicate with each other by a through hole. Two field cores of each electromagnet for driving each piston are formed in the integral structure, and a half wave of an alternating electric current is supplied to each coil wound around these coils in such a manner that the excitation directions of the respective field cores are opposed from each other.
摘要翻译：提供一种压缩机，其具有平行布置的两个压缩部。压缩室形成为由活塞头，气缸盖和头罩包围的气密室。排气室设置在每个气缸的周边，并且这些排放室通过通孔相互连通。用于驱动每个活塞的每个电磁体的两个磁芯形成在一体结构中，并且以这样的方式将缠绕在这些线圈周围的每个线圈供给交流电的半波，使得各个磁场的激励方向相对从彼此。

9. 发明授权

US4968225A Magnet holder for electromagnetic diaphragm pump 失效
标题翻译：电磁隔膜泵用磁铁座
公开(公告)号：US4968225A
公开(公告)日：1990-11-06
申请号：US446428
申请日：1989-12-05
申请人： Atsuki Hashimoto , Masaaki Tanabe
发明人： Atsuki Hashimoto , Masaaki Tanabe
IPC分类号： F04B43/04 , H02K1/34 , H02K33/06
CPC分类号： H02K1/34 , F04B43/04 , H02K33/06
摘要： A magnet holder for an electromagnetic diaphragm pump comprising a reinforcing member having at least in part thereof a width smaller than the distance between a pair of magnets placed in the predetermined positions in magnet insertion windows is provided integrally with the magnet holder between the pair of magnet insertion windows for juxtaposing and holding a pair of flat plate-shaped magnets in the same plane, so that the mechanical strength of the magnet holder is prevented from decreasing. And positioning members may be formed in the reinforcing member for pressing the pair of magnets inserted into the magnet insertion windows toward the diaphragms attached to opposite ends of the magnet holder, thereby positioning the magnets with enough accuracy and determining the distance between the magnets.
摘要翻译：一种用于电磁隔膜泵的磁体保持器，包括至少部分地具有小于放置在磁体插入窗口中的预定位置中的一对磁体之间的距离的宽度的加强构件，与磁体保持器一体地设置在一对磁体之间插入窗口，用于将一对平板状磁体并置并保持在同一平面内，从而防止磁体保持器的机械强度降低。并且定位构件可以形成在加强构件中，用于将插入到磁体插入窗口中的一对磁体朝向附接到磁体保持器的相对端的隔膜挤压，从而以足够的精度定位磁体并确定磁体之间的距离。

10. 发明授权

US4886429A Electromagnetic pump 失效
标题翻译：电磁泵
公开(公告)号：US4886429A
公开(公告)日：1989-12-12
申请号：US218962
申请日：1988-07-14
申请人： Toshio Osada , Masaaki Tanabe
发明人： Toshio Osada , Masaaki Tanabe
IPC分类号： F04B43/04 , H02K33/06 , H02K33/16
CPC分类号： F04B43/04 , H02K33/06 , H02K33/16
摘要： An electromagnetic pump comprising fluid operation chambers for discharging fluid to the outside; and electromagnet connected to an AC power source device for polarity switching for every half cycle of AC when energized; a permanent magent which moves together with the electromagnets; and a reciprocative shaft holding the permanent magnet, which reciprocates in the shaft direction when the electromagnet is energized. The width of a securement portion for the permanent magnet of the reciprocative shaft is relatively narrow compared to the other portions, and the permanent magnet consists of a pair of permanent magnet pieces bonded together by sandwiching the securement portion therebetween. The electromagnetic pump further comprises a fluid operation member for expanding or contracting the volume in the fluid operation chamber by the reciprocation movement of the reciprocative shaft so as to guide fluid out.
摘要翻译：一种电磁泵，包括用于将流体排放到外部的流体操作室; 电磁铁连接到交流电源装置，用于在通电时每半个周期进行极性切换; 与电磁铁一起移动的永久性魔法; 以及保持永磁体的往复运动轴，当电磁铁通电时，永磁体在轴向上往复运动。往复轴的永磁体的固定部分的宽度与其它部分相比相对较窄，并且永磁体由一对通过将固定部夹在两者之间而结合在一起的永磁体组成。电磁泵还包括流体操作构件，用于通过往复运动轴的往复运动使流体操作室中的体积膨胀或收缩，以便引导流体流出。

你已经成功收藏专利！

检索式保存成功!

IPRDB

热门服务

关于我们

友情链接

联系方式