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    • 5. 发明授权
    • Method and apparatus for evaluating the quality of a semiconductor substrate
    • 用于评估半导体衬底的质量的方法和装置
    • US06534774B2
    • 2003-03-18
    • US09815208
    • 2001-03-22
    • Takeshi HasegawaTerumi ItoHiroyuki Shiraki
    • Takeshi HasegawaTerumi ItoHiroyuki Shiraki
    • G01N2164
    • G01N21/6489G01N21/6408
    • A first chopper between a laser device and a semiconductor substrate chops an excitation light at a specific frequency, and a second chopper between the first chopper and the semiconductor substrate chops the excitation light at a variable frequency higher than the first chopper. A photoluminescence light emitted by the semiconductor substrate when the semiconductor substrate is intermittently irradiated with the excitation light is introduced into a monochromator. A controller obtains the decay time constant T of the photoluminescence light from variation of the average intensity of the photoluminescence light when gradually increasing the chopping frequency of the excitation light by controlling the second chopper, and computes the life time &tgr; of the semiconductor substrate from an expression “&tgr;=T/C”, where C is a constant. An object of the invention is to accurately evaluate impurities, defects and the like in a semiconductor substrate by obtaining quantitatively the life time of the semiconductor substrate having a long life time.
    • 激光装置与半导体基板之间的第一斩波器以特定频率切断激励光,第一斩波器与半导体基板之间的第二斩波器以比第一斩波器高的可变频率对激发光进行斩波。 当半导体衬底间歇地用激发光照射时,由半导体衬底发射的光致发光被引入到单色器中。 控制器通过控制第二斩波器逐渐增加激发光的斩波频率,从光致发光光的平均强度的变化中获得光致发光光的衰减时间常数T,并计算半导体衬底的寿命τ 表达式“tau = T / C”,其中C是常数。 本发明的目的是通过定量地获得具有长寿命的半导体衬底的寿命来准确地评估半导体衬底中的杂质,缺陷等。
    • 6. 发明授权
    • Method for evaluating the quality of a semiconductor substrate
    • 用于评估半导体衬底的质量的方法
    • US06693286B2
    • 2004-02-17
    • US10299148
    • 2002-11-19
    • Takeshi HasegawaTerumi ItoHiroyuki Shiraki
    • Takeshi HasegawaTerumi ItoHiroyuki Shiraki
    • G01N2164
    • G01N21/6489G01N21/6408
    • A first chopper between a laser device and a semiconductor substrate chops an excitation light at a specific frequency, and a second chopper between the first chopper and the semiconductor substrate chops the excitation light at a variable frequency higher than the first chopper. A photoluminescence light emitted by the semiconductor substrate when the semiconductor substrate is intermittently irradiated with the excitation light is introduced into a monochromator. A controller obtains the decay time constant T of the photoluminescence light from variation of the average intensity of the photoluminescence light when gradually increasing the chopping frequency of the excitation light by controlling the second chopper, and computes the life time &tgr; of the semiconductor substrate from an expression “&tgr;=T/C”, where C is a constant. An object of the invention is to accurately evaluate impurities, defects and the like in a semiconductor substrate by obtaining quantitatively the life time of the semiconductor substrate having a long life time.
    • 激光装置与半导体基板之间的第一斩波器以特定频率切断激励光,第一斩波器与半导体基板之间的第二斩波器以比第一斩波器高的可变频率对激发光进行斩波。 当半导体衬底间歇地用激发光照射时,由半导体衬底发射的光致发光被引入到单色器中。 控制器通过控制第二斩波器逐渐增加激发光的斩波频率,从光致发光光的平均强度的变化中获得光致发光光的衰减时间常数T,并计算半导体衬底的寿命τ 表达式“tau = T / C”,其中C是常数。 本发明的目的是通过定量地获得具有长寿命的半导体衬底的寿命来准确地评估半导体衬底中的杂质,缺陷等。
    • 8. 发明申请
    • Spectrometric analyzing device and spectrometric analyzing method
    • 光谱分析装置和光谱分析方法
    • US20090316152A1
    • 2009-12-24
    • US12310865
    • 2007-12-21
    • Takeshi Hasegawa
    • Takeshi Hasegawa
    • G01N21/17
    • G01N21/21G01J3/447G01N21/31G01N21/8422
    • A spectrometric analyzing device is capable of analyzing a thin film with high accuracy by using light having an arbitrary wavelength, such as not only infrared light but also visible light, ultraviolet light and X-ray, and using whatever refractive index of a supporting member of the thin film. A spectrometric analyzing device comprises a light source (1), a polarizing filter (2), a detection unit (3), a regression operation unit (4) and an absorbance spectrum calculation unit (5). The light source (1) emits light at n different angles of incidence (θn) to a measurement portion. The polarizing filter (2) shields an s-polarized component. The detection unit (3) detects transmitted spectra (S). The regression operation unit (4) uses the transmitted spectra (S) and a mixing ratio (R) to obtain an in-plane mode spectrum (sip) and an out-of-plane mode spectrum (sop) through a regression analysis. The absorbance spectrum calculation unit (5) calculates an in-plane mode absorbance spectrum (Aip) and an out-of-plane mode absorbance spectrum (Aop) of the thin film, based on the results from a state in which the thin film is on the supporting member and a state in which no thin film is on the supporting member.
    • 光谱分析装置能够通过使用具有任意波长的光,例如不仅具有红外光,还包括可见光,紫外光和X射线,并且使用任何波长的光的任何折射率,能够高精度地分析薄膜 薄膜。 光谱分析装置包括光源(1),偏振滤光器(2),检测单元(3),回归运算单元(4)和吸收光谱计算单元(5)。 光源(1)将n个不同入射角(thetan)的光发射到测量部分。 偏振滤光器(2)屏蔽s偏振分量。 检测单元(3)检测发送光谱(S)。 回归运算单元(4)使用透射光谱(S)和混合比(R),通过回归分析获得平面内模式谱(sip)和平面外模式谱(sop)。 吸光度光谱计算单元(5)根据薄膜为(1)的状态的结果,计算出薄膜的面内模式吸收光谱(Aip)和平面外模式吸收光谱(Aop) 在支撑构件上并且在支撑构件上没有薄膜的状态。
    • 10. 发明授权
    • System allowing data input device to request management server to assign a data input job to itself
    • 执行数据输入作业的方法和系统
    • US07308472B2
    • 2007-12-11
    • US10455615
    • 2003-06-06
    • Takeshi Hasegawa
    • Takeshi Hasegawa
    • G06F15/16
    • H04L67/16H04L29/06H04L67/28H04L67/2852
    • A management server receives from a server storing information a request that a data input job be executed and from a data input device a request to assign a data input job to itself. The management server makes a list of information to be digitized through data input, based on information held on itself and input-specific information obtained from the server storing information, and transmits the list to a data input device adequate to the data input job. The data input device selects information as data input preference. The data input device obtains the selected information from the server storing information. Through the data input device, its operator inputs the obtained information as computer-usable data. The input data is transmitted to the server storing information. The management server stores, updates, and manages diverse data about input jobs.
    • 管理服务器从存储信息的服务器接收数据输入作业的请求,并从数据输​​入装置接收将数据输入作业分配给其自身的请求。 管理服务器根据自身保存的信息和通过存储信息从服务器获取的输入特定信息,通过数据输入来进行数字化的信息列表的发送,并将该列表发送到数据输入作业的数据输入装置。 数据输入设备选择信息作为数据输入偏好。 数据输入装置从存储信息的服务器中获取选择的信息。 通过数据输入设备,其操作员将所获得的信息输入为计算机可用的数据。 将输入数据发送到存储信息的服务器。 管理服务器存储,更新和管理有关输入作业的各种数据。