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    • 5. 发明授权
    • Semiconductor memory device
    • 半导体存储器件
    • US5334869A
    • 1994-08-02
    • US112480
    • 1993-08-27
    • Katsuji IguchiSeizo KakimotoNaoyuki Shinmura
    • Katsuji IguchiSeizo KakimotoNaoyuki Shinmura
    • H01L21/8242H01L27/108H01L29/68
    • H01L27/10844H01L27/10817Y10S438/947
    • A semiconductor memory device includes a plurality of memory cells each including a transistor formed on a surface of a semiconductor substrate and having one terminal, and a capacitor formed on the semiconductor substrate and having first and second electrodes, with the first electrode being connected with one terminal of the transistor. The first electrode of the capacitor includes a principal portion of either a generally rectangular cubic configuration or a generally cup-shaped configuration, a peripheral portion spaced from and surrounding a peripheral side wall of the principal portion and a bottom portion connecting an end of the principal portion with an end of the peripheral portion. On the other hand, the second electrode of the capacitor includes respective portions confronting the principal portion, the peripheral portion and the bottom portion of the first electrode.
    • 半导体存储器件包括多个存储单元,每个存储单元包括形成在半导体衬底的表面上并具有一个端子的晶体管,以及形成在半导体衬底上并具有第一和第二电极的电容器,第一电极与一个第一电极连接 晶体管的端子。 电容器的第一电极包括大致矩形立方体形状或大致杯形构造的主要部分,与主要部分的周边侧壁间隔开并围绕主体部分的周边侧壁的周边部分,以及连接主体端部的底部部分 该部分具有周边部分的端部。 另一方面,电容器的第二电极包括与第一电极的主要部分,周边部分和底部相对的各个部分。