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1. 发明授权

US07386136B2 Sound detecting mechanism 失效
标题翻译：声音检测机构
公开(公告)号：US07386136B2
公开(公告)日：2008-06-10
申请号：US10544253
申请日：2004-05-25
申请人： Yoshiaki Ohbayashi , Mamoru Yasuda , Shinichi Saeki , Masatsugu Komai , Kenichi Kagawa
发明人： Yoshiaki Ohbayashi , Mamoru Yasuda , Shinichi Saeki , Masatsugu Komai , Kenichi Kagawa
IPC分类号： H04R25/00
CPC分类号： H04R19/005 , H04R19/04 , H04R2499/11
摘要： A sound detecting mechanism is provided which forms a diaphragm with a required thickness by thickness control and yet restrains distortion of the diaphragm to provide high sensitivity.The sound detecting mechanism comprises a pair of electrodes forming a capacitor on a substrate A in which one of the electrodes is a back electrode C forming perforations Ca therein corresponding to acoustic holes and the other of the electrodes is a diaphragm B. The diaphragm B is mounted on the substrate A while the back electrode C is mounted in a position opposed to the diaphragm B across a void F to be supported by the substrate A, the back electrode C being formed by polycrystal silicon of 5 μm to 20 μm in thickness.
摘要翻译：提供一种声音检测机构，其通过厚度控制形成所需厚度的膜片，并且抑制隔膜的变形以提供高灵敏度。声音检测机构包括在基板A上形成电容器的一对电极，其中一个电极是形成其中对应于声孔的穿孔Ca的背面电极C，另一个电极是隔膜B.隔膜B是安装在基板A上，而背面电极C通过空隙F安装在与隔膜B相对的位置上以由基板A支撑，背面电极C由5μm至20μm的多晶硅形成。

2. 发明申请

US20060233400A1 Sound detecting mechanism 失效
标题翻译：声音检测机构
公开(公告)号：US20060233400A1
公开(公告)日：2006-10-19
申请号：US10565059
申请日：2004-07-14
申请人： Yoshiaki Ohbayashi , Mamoru Yasuda , Shinichi Saeki , Masatsugu Komai , Kenichi Kagawa
发明人： Yoshiaki Ohbayashi , Mamoru Yasuda , Shinichi Saeki , Masatsugu Komai , Kenichi Kagawa
IPC分类号： H04R25/00
CPC分类号： H04R19/016 , H04R19/04
摘要： A sound detecting mechanism capable of forming a diaphragm and a back electrode on a substrate by a simple process includes acoustic holes corresponding to perforations formed on a front surface of a substrate. A second protective film, a sacrificial layer and a metal film are laminated on the front surface in a portion corresponding to the acoustic holes. The substrate is etched from the back surface thereof to a depth reaching the acoustic holes to form an acoustic opening. Subsequently, by effecting an etching from the back surface of the substrate through the acoustic holes, the sacrificial layer is removed and a void area is formed between the diaphragm made of the metal film, the substrate and the formed perforations. The sacrificial layer that remains after the etching is used as a spacer for maintaining a gap between the back electrodes and the diaphragm.
摘要翻译：能够通过简单的工艺在基板上形成隔膜和背面电极的声音检测机构包括对应于形成在基板前表面上的穿孔的声孔。第二保护膜，牺牲层和金属膜层叠在与声孔对应的部分的前表面上。衬底从其后表面被蚀刻到到达声孔的深度以形成声学开口。随后，通过通过声孔从衬底的背面进行蚀刻，除去牺牲层，并且在由金属膜，衬底和形成的穿孔构成的隔膜之间形成空隙区域。蚀刻后残留的牺牲层用作用于保持背电极和隔膜之间的间隙的间隔物。

3. 发明申请

US20060145570A1 Sound detecting mechanism 失效
标题翻译：声音检测机构
公开(公告)号：US20060145570A1
公开(公告)日：2006-07-06
申请号：US10544253
申请日：2004-05-25
申请人： Yoshiaki Ohbayashi , Mamoru Yasuda , Shinichi Saeki , Masatsugu Komai , Kenichi Kagawa
发明人： Yoshiaki Ohbayashi , Mamoru Yasuda , Shinichi Saeki , Masatsugu Komai , Kenichi Kagawa
IPC分类号： H01L41/08
CPC分类号： H04R19/005 , H04R19/04 , H04R2499/11
摘要： A sound detecting mechanism is provided which forms a diaphragm with a required thickness by thickness control and yet restrains distortion of the diaphragm to provide high sensitivity. The sound detecting mechanism comprises a pair of electrodes forming a capacitor on a substrate A in which one of the electrodes is a back electrode C forming perforations Ca therein corresponding to acoustic holes and the other of the electrodes is a diaphragm B. The diaphragm B is mounted on the substrate A while the back electrode C is mounted in a position opposed to the diaphragm B across a void F to be supported by the substrate A, the back electrode C being formed by polycrystal silicon of 5 μm to 20 μm in thickness.
摘要翻译：提供一种声音检测机构，其通过厚度控制形成所需厚度的膜片，并且抑制隔膜的变形以提供高灵敏度。声音检测机构包括在基板A上形成电容器的一对电极，其中一个电极是形成其中对应于声孔的穿孔Ca的背面电极C，另一个电极是隔膜B.隔膜B是安装在基板A上，而背面电极C通过空隙F安装在与隔膜B相对的位置上以由基板A支撑，背面电极C由5μm至20μm的多晶硅形成。

4. 发明申请

US20060050905A1 Sound detecting mechanism and process for manufacturing the same 审中-公开
标题翻译：声音检测机构及其制造方法
公开(公告)号：US20060050905A1
公开(公告)日：2006-03-09
申请号：US10544120
申请日：2004-05-25
申请人： Yoshiaki Ohbayashi , Mamoru Yasuda , Shinichi Saeki , Masatsugu Komai , Kenichi Kagawa
发明人： Yoshiaki Ohbayashi , Mamoru Yasuda , Shinichi Saeki , Masatsugu Komai , Kenichi Kagawa
IPC分类号： H04R25/00
CPC分类号： H04R19/005
摘要： A sound detecting mechanism is provided which forms a diaphragm with a required thickness and yet restraining distortion of the diaphragm to provide high sensitivity. The sound detecting mechanism comprises a pair of electrodes forming a capacitor on a substrate A in which one of the electrodes is a back electrode C forming perforations Ca therein corresponding to acoustic holes and the other of the electrodes is a diaphragm B. A silicon nitride film 303 is provided on the side adjacent a base of the substrate A with respect to a membrane acting as the diaphragm B formed on the substrate A.
摘要翻译：提供了一种声音检测机构，其形成具有所需厚度并且抑制隔膜的变形以提供高灵敏度的隔膜。

5. 发明授权

US07570773B2 Sound detecting mechanism 失效
标题翻译：声音检测机构
公开(公告)号：US07570773B2
公开(公告)日：2009-08-04
申请号：US10565059
申请日：2004-07-14
申请人： Yoshiaki Ohbayashi , Mamoru Yasuda , Shinichi Saeki , Masatsugu Komai , Kenichi Kagawa
发明人： Yoshiaki Ohbayashi , Mamoru Yasuda , Shinichi Saeki , Masatsugu Komai , Kenichi Kagawa
IPC分类号： H04R25/00
CPC分类号： H04R19/016 , H04R19/04
摘要： A sound detecting mechanism capable of forming a diaphragm and a back electrode on a substrate by a simple process includes acoustic holes corresponding to perforations formed on a front surface of a substrate. A second protective film, a sacrificial layer and a metal film are laminated on the front surface in a portion corresponding to the acoustic holes. The substrate is etched from the back surface thereof to a depth reaching the acoustic holes to form an acoustic opening. Subsequently, by effecting an etching from the back surface of the substrate through the acoustic holes, the sacrificial layer is removed and a void area is formed between the diaphragm made of the metal film, the substrate and the formed perforations. The sacrificial layer that remains after the etching is used as a spacer for maintaining a gap between the back electrode and the diaphragm.
摘要翻译：能够通过简单的工艺在基板上形成隔膜和背面电极的声音检测机构包括对应于形成在基板前表面上的穿孔的声孔。第二保护膜，牺牲层和金属膜层叠在与声孔对应的部分的前表面上。衬底从其后表面被蚀刻到到达声孔的深度以形成声学开口。随后，通过通过声孔从衬底的背面进行蚀刻，除去牺牲层，并且在由金属膜，衬底和形成的穿孔构成的隔膜之间形成空隙区域。蚀刻后残留的牺牲层用作用于保持背电极和隔膜之间的间隙的间隔物。

6. 发明申请

US20070193358A1 Capacity detection type sensor element 审中-公开
标题翻译：容量检测型传感器元件
公开(公告)号：US20070193358A1
公开(公告)日：2007-08-23
申请号：US10589352
申请日：2005-02-14
申请人： Kenichi Kagawa , Masami Yakabe , Shinichi Saeki , Takahisa Ohtsuji
发明人： Kenichi Kagawa , Masami Yakabe , Shinichi Saeki , Takahisa Ohtsuji
IPC分类号： G01L9/12
CPC分类号： H04R19/005 , H04R19/04
摘要： A capacity detection type sensor element includes a rectangular vibrating plate, a flat back electrode which are provided opposedly with each other, and fixing portions which are provided adjoining to the vibrating plate, and has a predetermined length A of edge at a side adjoining to the vibrating plate. The back electrode is held by the fixing portions in a state that space is provided between the back electrode and the vibrating plate. Outer edges of the back electrode which are not held by the adjoining fixing portions, are straight lines and the straight lines define an octagonal shape as a whole.
摘要翻译：容量检测型传感器元件包括彼此相对设置的矩形振动板，扁平背面电极和与振动板相邻设置的固定部，并且在与该振动板相邻的一侧具有预定长度A的边缘振动板在背面电极和振动板之间设置有空间的状态下，由固定部保持背面电极。没有被相邻的固定部分保持的背面电极的外边缘是直线，并且直线整体形成八边形。

7. 发明申请

US20120085655A1 INTERPOSER AND MANUFACTURING METHOD FOR THE SAME 审中-公开
标题翻译：其相关的制程和制造方法
公开(公告)号：US20120085655A1
公开(公告)日：2012-04-12
申请号：US13328710
申请日：2011-12-16
申请人： Kenichi Kagawa , Tomohisa Hoshino , Masami Yakabe
发明人： Kenichi Kagawa , Tomohisa Hoshino , Masami Yakabe
IPC分类号： C25D5/02 , B05D5/12
CPC分类号： H01L23/49827 , H01L21/486 , H01L2924/0002 , H01L2924/00
摘要： In a manufacturing method for an interposer, a seed layer is formed at an opening portion in a through hole on back surface side of a substrate, an electrode layer for electroplated coating is formed based on the seed layer, and an electroplated coating layer is formed to fill the through hole from the electrode layer for electroplated coating layer to a front surface side. As a result, a manufacturing method for an interposer is provided in which the manufacturing process is simple and the void is not generated inside of the through hole.
摘要翻译：在中介层的制造方法中，在基板的背面侧的通孔的开口部形成种子层，基于种子层形成电镀用电极层，形成电镀覆盖层以将电镀层用电极层的贯通孔填充到前表面侧。结果，提供了一种用于插入器的制造方法，其中制造工艺简单并且在通孔内部不产生空隙。

8. 发明授权

US07866038B2 Through substrate, interposer and manufacturing method of through substrate 有权
标题翻译：通过基板，内插器和通过基板的制造方法
公开(公告)号：US07866038B2
公开(公告)日：2011-01-11
申请号：US11631638
申请日：2005-07-05
申请人： Masami Yakabe , Kenichi Kagawa , Tomohisa Hoshino
发明人： Masami Yakabe , Kenichi Kagawa , Tomohisa Hoshino
IPC分类号： H01K3/10
CPC分类号： H01L21/486 , H01L21/76898 , H01L23/147 , H01L23/481 , H01L23/49827 , H01L23/552 , H01L2223/6622 , H01L2924/0002 , H05K1/0222 , H05K1/0306 , H05K3/423 , H05K2201/09809 , H05K2203/0733 , Y10T29/49165 , H01L2924/00
摘要： A through substrate which comprises a silicon substrate (10) having a through hole (19) penetrating a front surface (11) and a back surface (12), a oxidized silicon film (13) being provided along the inner wall surface of the through hole (19), layers (14, 15) comprising Zn and Cu, respectively, being formed on the inner wall surface of the oxidized silicon film (13), and a Cu plating layer (18) which has been grown from a Cu seed layer (17) along the inner wall surface of layers (14, 15) comprising Zn and Cu, respectively, via an insulating layer (16) between them. The above through substrate can provide a through electrode capable of avoiding the noise due to the cross talk.
摘要翻译：一种贯穿基板，包括具有贯通前表面（11）和后表面（12）的通孔（19）的硅基板（10），沿着贯通孔的内壁表面设置的氧化硅膜（13）分别形成在氧化硅膜（13）的内壁面上的包含Zn和Cu的层（14,15），以及从Cu种子生长的Cu镀层（18）层（17）分别经由它们之间的绝缘层（16）沿着包括Zn和Cu的层（14,15）的内壁表面。上述通过基板可以提供能够避免由于串扰引起的噪声的通孔电极。

9. 发明申请

US20080285107A1 Electromagnetically actuating optical deflecting element 有权
标题翻译：电磁致动光学偏转元件
公开(公告)号：US20080285107A1
公开(公告)日：2008-11-20
申请号：US11890608
申请日：2007-08-07
申请人： Norihiro Asada , Kenichi Kagawa
发明人： Norihiro Asada , Kenichi Kagawa
IPC分类号： G02B26/08
CPC分类号： G02B26/085
摘要： The present invention provides an electromagnetically actuating optical deflecting elements which can be manufactured out of reduced number of components and are capable of being actuated at lower frequencies and at wider deflecting angles without causing mechanical influences of the metal wiring on beams of the optical deflecting element.For that purpose, the electromagnetically actuating optical deflecting element comprises: a movable part having a light reflecting plane and a coil; a base component having a magnetic field generating means; and a pair of beams which axially support said movable part on to the base component, The movable part is actuated by an electromagnetic force generated by an electric current flowing through the coil and the magnetic field generating means. The beams 108 are constituted by one material having functions to perform as conductors for supplying electric current to the coil, to support the movable part, to perform as springs for returning the movable part to a starting position.
摘要翻译：本发明提供了一种电磁致动的光学偏转元件，其可以由数量较少的部件制造，并且能够以较低的频率和较宽的偏转角度被致动，而不会引起金属布线对光学偏转元件的光束的机械影响。为此，电磁致动光学偏转元件包括：具有光反射面和线圈的可动部; 具有磁场发生装置的基座部件; 以及一对梁，其将所述可动部件轴向地支撑在基部部件上。可动部分由通过线圈和磁场产生装置的电流产生的电磁力致动。梁108由具有作为向线圈提供电流的导体的功能的一种材料构成，以支撑可移动部分，作为将可动部分返回到起始位置的弹簧来执行。

10. 发明授权

US4765349A System for controlling lamina size in a raw material treatment process for tobacco leaves 失效
标题翻译：烟叶原料处理过程中叶片尺寸控制系统
公开(公告)号：US4765349A
公开(公告)日：1988-08-23
申请号：US922806
申请日：1986-10-27
申请人： Kenichi Kagawa
发明人： Kenichi Kagawa
IPC分类号： A24B5/06 , A24B3/04 , A24B5/00 , A24B5/10 , A24B3/18
CPC分类号： A24B5/00 , A24B5/10
摘要： A system for controlling the lamina size, in a material treatment process for tobacco leaves. The system comprises measuring means for measuring the production ratio of the lamina larger than a given size in the raw material treatment process in which the tobacco leaves which have been provided with a water content and temperature by a humidity controller are stripped into laminae and ribs by means of rib removing machines capable of changing a mechanical impact force applied upon the tobacco leaves by changing the rotational speed of grid or threshing gear and are then separated by means of separating machines; and operational control means for receiving measurement signals from said measuring means as a feedback signal for searching a rotational speed of grid or threshing gear which provides an optimum lamina size by a hill-climb method using the rotational speed of grid or threshing gear of the rib removing machines as manipulation factor.
摘要翻译：一种用于控制烟叶尺寸的系统，用于烟叶的材料处理过程。该系统包括用于测量在原料处理过程中大于给定尺寸的层板的生产率的测量装置，其中通过湿度控制器提供含水量和温度的烟草叶被剥离成薄片和肋条能够通过改变格栅或脱粒齿轮的转速来改变施加在烟叶上的机械冲击力的肋去除机的装置，然后通过分离机分离; 以及操作控制装置，用于从所述测量装置接收测量信号作为用于搜索格栅或脱粒齿轮的旋转速度的反馈信号，其通过爬坡方式使用栅格或脱粒齿轮的旋转速度提供最佳叶片尺寸去除机器作为操纵因素。

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