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1. 发明申请

US20090061360A1 MATERIAL FOR RESIST PROTECTIVE FILM FOR IMMERSION LITHOGRAPHY 审中-公开
标题翻译：材料用于耐久性保护薄膜
公开(公告)号：US20090061360A1
公开(公告)日：2009-03-05
申请号：US12254030
申请日：2008-10-20
申请人： Yoko Takebe , Shu-zhong Wang , Osamu Yokokoji , Naoko Shirota , Yasuhisa Matsukawa , Daisuke Shirakawa
发明人： Yoko Takebe , Shu-zhong Wang , Osamu Yokokoji , Naoko Shirota , Yasuhisa Matsukawa , Daisuke Shirakawa
IPC分类号： C08F20/24 , C08F20/12 , C08F20/26 , G03F7/20
CPC分类号： G03F7/2041 , C08F214/18 , C08F220/24 , G03F7/11
摘要： To provide a resist protective film material for immersion lithography.An alkali soluble resist protective film material for immersion lithography, which comprises a polymer (F) containing repeating units (FU) formed by polymerizing a polymerizable compound (fm) having a fluorine-containing bridged cyclic structure. For example, repeating units (FU) are repeating units formed by polymerizing a compound (f) selected from the group consisting of the following formulae (f1) to (f4) (RF represents H, F, a C1-3 alkyl group or a C1-3 fluoroalkyl group, and XF represents F, OH or CH2OH.)
摘要翻译：提供用于浸没光刻的抗蚀保护膜材料。一种用于浸渍光刻的碱溶性抗蚀剂保护膜材料，其包含通过聚合具有含氟桥连环状结构的可聚合化合物（fm）形成的重复单元（FU）的聚合物（F）。例如，重复单元（FU）是通过使从下述式（f1）〜（f4）中选择的化合物（f）聚合形成的重复单元（RF表示H，F，C1-3烷基或 C 3氟烷基，X F表示F，OH或CH 2 OH）

2. 发明授权

US08134033B2 Fluorocompound having highly fluorinated norbornane structure, fluoropolymer, and their production processes 失效
标题翻译：具有高氟化降冰片烷结构的氟化合物，含氟聚合物及其制备方法
公开(公告)号：US08134033B2
公开(公告)日：2012-03-13
申请号：US12351905
申请日：2009-01-12
申请人： Yasuhisa Matsukawa , Daisuke Shirakawa , Eisuke Murotani , Naoko Shirota , Yoko Takebe
发明人： Yasuhisa Matsukawa , Daisuke Shirakawa , Eisuke Murotani , Naoko Shirota , Yoko Takebe
IPC分类号： C07C49/467 , C07C67/14 , C07C69/653 , C08F20/22
CPC分类号： C07C49/477 , C07C29/143 , C07C29/147 , C07C31/44 , C07C35/52 , C07C45/54 , C07C61/40 , C07C67/14 , C07C69/653 , C07C69/753 , C07C2602/42 , C08F220/24
摘要： To provide a novel polymerizable fluorocompound having a highly fluorinated norbornane structure, and a polymer obtained from the compound. Further, their production processes and a novel intermediate useful for the processes.A novel compound (1) such as a compound (11) or a compound (12), and its polymer. A compound (2) such as a compound (21) or (22), and a compound (3) such as a compound (31) or (32M), which are useful as an intermediate for the production of the compound (1), and its production process. However, each of ZA to ZE represents such as —CH(—OC(O)C(CH3)═CH2)— or —CF2, Each of WA and WB represents such as F, each of YA to YE represents such as —CH(—OH)— or —CF(CH2OH), and each of XA to XE represents such as —C(O)— or —CF2—.
摘要翻译：提供具有高氟化降冰片烷结构的新型可聚合氟化合物和由该化合物获得的聚合物。此外，它们的制备方法和用于该方法的新型中间体。新化合物（1）如化合物（11）或化合物（12）及其聚合物。作为化合物（1）的制造中间体的化合物（21）或（22）的化合物（2）和化合物（31）或（32M）等化合物（3），及其生产工艺。然而，ZA至ZE各自表示-CH（-OC（O）C（CH 3)≡CH2） - 或-CF 2，WA和WB各自表示F，YA至YE各自表示-CH （-OH） - 或-CF（CH 2 OH），XA至XE各自表示-C（O） - 或-CF 2 - 。

3. 发明授权

US08236901B2 Fluorinated compound, fluoropolymer and method for producing the compound 失效
标题翻译：氟化合物，含氟聚合物及其制造方法
公开(公告)号：US08236901B2
公开(公告)日：2012-08-07
申请号：US12858752
申请日：2010-08-18
申请人： Koichi Murata , Naoko Shirota , Osamu Yokokoji , Yoko Takebe
发明人： Koichi Murata , Naoko Shirota , Osamu Yokokoji , Yoko Takebe
IPC分类号： C08F14/18
CPC分类号： C07C57/32 , C07C69/65 , C07C2601/08 , C07C2601/14 , C07C2602/42 , C07C2603/74 , C07D307/20 , C08F14/18 , C08F36/20 , C08F214/18 , Y10S430/146 , C08F2/00
摘要： Provided is a novel fluorinated compound, a fluoropolymer, and a method for producing the compound. A monomer of the compound has a formula F2═CFCF2C(X)(C(O)OZ)(CH2)nCR═CHR, wherein X is a hydrogen atom, a cyano group, or a group of formula —C(O)OZ; Z is a hydrogen atom or a C1-20 monovalent organic group, n is 0, 1, or 2; and R is a hydrogen atom or a C1-20 monovalent organic group.
摘要翻译：提供了一种新的氟化化合物，含氟聚合物及其制备方法。化合物的单体具有式F2 = CFCF 2 C（X）（C（O）OZ）（CH 2）n CR = CHR，其中X为氢原子，氰基或式-C（O）OZ ; Z为氢原子或C1-20一价有机基团，n为0,1或2; 且R为氢原子或C 1-20二价一价有机基团。

4. 发明授权

US07825275B2 Fluorinated compound, fluoropolymer and method for producing the compound 失效
标题翻译：氟化合物，含氟聚合物及其制造方法
公开(公告)号：US07825275B2
公开(公告)日：2010-11-02
申请号：US12567932
申请日：2009-09-28
申请人： Koichi Murata , Naoko Shirota , Osamu Yokokoji , Yoko Takebe
发明人： Koichi Murata , Naoko Shirota , Osamu Yokokoji , Yoko Takebe
IPC分类号： C07C51/09 , C07C51/38 , C07C57/52 , C07C67/04 , C07C67/343 , C07C69/65
CPC分类号： C07C57/32 , C07C69/65 , C07C2601/08 , C07C2601/14 , C07C2602/42 , C07C2603/74 , C07D307/20 , C08F14/18 , C08F36/20 , C08F214/18 , Y10S430/146 , C08F2/00
摘要： To provide a novel fluorinated compound, a fluoropolymer and a method for producing the compound.A compound represented by the formula CF2═CFCF2C(X)(C(O)OZ)(CH2)nCR═CHR (wherein X is a hydrogen atom, a cyano group or a group represented by the formula —C(O)OZ, Z is a hydrogen atom or a C1-20 monovalent organic group, n is 0, 1, or 2, and R is a hydrogen atom or a C1-20 monovalent organic group), a method for producing it, and a fluoropolymer obtained by polymerizing the compound.
摘要翻译：提供新的含氟化合物，含氟聚合物及其制备方法。由式CF2 = CFCF2C（X）（C（O）OZ）（CH2）nCR = CHR（其中X是氢原子，氰基或由式-C（O）OZ表示的基团）表示的化合物， Z为氢原子或碳原子数为1〜20的一价有机基团，n为0,1或2，R为氢原子或碳原子数为1〜20的一价有机基团），其制造方法以及由使化合物聚合。

5. 发明申请

US20100016532A1 NOVEL FLUORINATED COMPOUND, FLUOROPOLYMER AND METHOD FOR PRODUCING THE COMPOUND 失效
标题翻译：新型氟化合物，氟代聚合物及其制备方法
公开(公告)号：US20100016532A1
公开(公告)日：2010-01-21
申请号：US12567932
申请日：2009-09-28
申请人： Koichi Murata , Naoko Shirota , Osamu Yokokoji , Yoko Takebe
发明人： Koichi Murata , Naoko Shirota , Osamu Yokokoji , Yoko Takebe
IPC分类号： C08F120/68 , C07C69/52 , C07D309/12
CPC分类号： C07C57/32 , C07C69/65 , C07C2601/08 , C07C2601/14 , C07C2602/42 , C07C2603/74 , C07D307/20 , C08F14/18 , C08F36/20 , C08F214/18 , Y10S430/146 , C08F2/00
摘要： To provide a novel fluorinated compound, a fluoropolymer and a method for producing the compound.A compound represented by the formula CF2═CFCF2C(X)(C(O)OZ)(CH2)nCR═CHR (wherein X is a hydrogen atom, a cyano group or a group represented by the formula —C(O)OZ, Z is a hydrogen atom or a C1-20 monovalent organic group, n is 0, 1, or 2, and R is a hydrogen atom or a C1-20 monovalent organic group), a method for producing it, and a fluoropolymer obtained by polymerizing the compound.
摘要翻译：提供新的含氟化合物，含氟聚合物及其制备方法。由式CF2-CFCF2C（X）（C（O）OZ）（CH2）nCR-CHR（其中X是氢原子，氰基或由式-C（O）OZ表示的基团）表示的化合物， Z为氢原子或碳原子数为1〜20的一价有机基团，n为0,1或2，R为氢原子或碳原子数为1〜20的一价有机基团），其制造方法以及由使化合物聚合。

6. 发明授权

US07015366B2 Fluorinated compound, fluoropolymer and process for its production 失效
标题翻译：氟化合物，含氟聚合物及其生产工艺
公开(公告)号：US07015366B2
公开(公告)日：2006-03-21
申请号：US11218472
申请日：2005-09-06
申请人： Shun-ichi Kodama , Isamu Kaneko , Osamu Yokokoji , Shinji Okada , Yoko Takebe , Yasuhide Kawaguchi
发明人： Shun-ichi Kodama , Isamu Kaneko , Osamu Yokokoji , Shinji Okada , Yoko Takebe , Yasuhide Kawaguchi
IPC分类号： C07C41/00 , C07C43/00 , C07C407/00 , C07C409/00 , C08F136/16
CPC分类号： C08F36/20 , C08F36/16 , C08F214/18 , C08F2/60
摘要： To provide a fluoropolymer which has a high concentration of functional groups to provide adequate characteristics of the functional groups and which brings about no decrease of Tg.A fluoropolymer having monomer units formed by cyclopolymerization of a functional group-containing fluorinated diene represented by the formula (1): CFR1═CR2—Q—CR3═CHR4 (1) wherein each of R1 to R4 which are independent of one another, represents a hydrogen atom, a fluorine atom, an alkyl group having at most 8 carbon atoms, or an alicyclic hydrocarbon group, and at least one of them is an alicyclic hydrocarbon group, provided that hydrogen atoms in the alkyl group or the alicyclic hydrocarbon group may be substituted by a fluorine atom, an alkyl group or a fluoroalkyl group; and Q represents a bivalent organic group having a blocked acidic group capable of developing an acidic group by an acid or a group capable of being converted into such a blocked acidic group.
摘要翻译：提供具有高浓度官能团的含氟聚合物以提供官能团的足够特性，并且不会降低Tg。具有由式（1）表示的含官能团的氟化二烯的环化聚合形成的单体单元的含氟聚合物：<？in-line-formula description =“In-line formula”end =“lead”→CFR < 1 -CR 2 -Q-CR 3 -RR 4（1）<？在线公式描述=“ 其中独立的R 1〜R 4中的每一个表示氢原子，氟原子，具有至多8个碳原子的烷基或脂环族烃基，并且其中至少一个是脂环族烃基，条件是烷基或脂环族烃基中的氢原子可以被氟原子取代，烷基或氟代烷基; Q表示可以通过酸或能够转化为这种封端的酸性基团的基团而能够形成酸性基团的封端酸性基团的二价有机基团。

7. 发明授权

US07498393B2 Fluorinated compound, fluoropolymer, resist composition, and composition for resist protective film 失效
标题翻译：氟化合物，含氟聚合物，抗蚀剂组合物和抗蚀剂保护膜的组合物
公开(公告)号：US07498393B2
公开(公告)日：2009-03-03
申请号：US11626913
申请日：2007-01-25
申请人： Yoko Takebe , Masataka Eda , Osamu Yokokoji , Takashi Sasaki
发明人： Yoko Takebe , Masataka Eda , Osamu Yokokoji , Takashi Sasaki
IPC分类号： C08F136/16
CPC分类号： C07C43/30 , C07C33/423 , C07C43/17 , C08F36/20 , C08F214/18 , G03F7/0046 , G03F7/0392 , G03F7/0395 , G03F7/11 , Y10S430/115 , Y10S430/146
摘要： A fluoropolymer having functional groups and having high transparency in a wide wavelength range is provided, and a resist composition and a composition for a resist protective film, comprising the fluoropolymer, wherein the fluoropolymer has monomer units formed by cyclopolymerization of a fluorinated diene represented by the formula (1): CF2═CFCF2C(CF3)(OR1)—(CH2)nCR2═CHR3 (1) wherein R1 is a hydrogen atom, an alkyl group having at most 20 carbon atoms, or (CH2)aCOOR4 (wherein a is 0 or 1, and R4 is a hydrogen atom or an alkyl group having at most 20 carbon atoms), each of R2 and R3, which are independent of each other, is a hydrogen atom or an alkyl group having at most 12 carbon atoms, and n is 0 or 2, provided that when n is 0, at least one of R1, R2 and R3 is other than a hydrogen atom.
摘要翻译：提供具有官能团并且在宽波长范围内具有高透明度的含氟聚合物，以及抗蚀剂组合物和用于抗蚀剂保护膜的组合物，其包含含氟聚合物，其中所述含氟聚合物具有通过氟代二烯表示的氟化二烯的环化聚合形成的单体单元 CF2-CFCF2C（CF3）（OR1） - （CH2）nCR2-CHR3（1）<α-in-line-formula description =“In-line formula”end =“lead” line-formula description =“In-line Formulas”end =“tail”？>其中R1是氢原子，最多20个碳原子的烷基或（CH2）aCOOR4（其中a是0或1，R4 是氢原子或具有至多20个碳原子的烷基），R 2和R 3各自独立地为氢原子或至多12个碳原子的烷基，n为0或2 条件是当n为0时，R 1，R 2和R 3中的至少一个不是氢原子。

8. 发明授权

US07244545B2 Fluorinated compound, fluoropolymer and process for its production 失效
标题翻译：氟化合物，含氟聚合物及其生产工艺
公开(公告)号：US07244545B2
公开(公告)日：2007-07-17
申请号：US11412191
申请日：2006-04-27
申请人： Yoko Takebe , Osamu Yokokoji
发明人： Yoko Takebe , Osamu Yokokoji
IPC分类号： G03C1/73 , C08F14/18 , C07C33/42 , C07C21/19
CPC分类号： G03F7/0046 , C07C33/423 , C08F14/18 , C08F36/20 , G03F7/11 , Y10S430/108 , Y10S430/115 , C08F2/02
摘要： The present invention provides a fluorinated compound having functional groups in a high concentration so that adequate characteristics of the functional groups can be obtained and having high transparency in a wide wavelength region, a fluoropolymer, and a process for its production.The present invention provides a fluorinated diene represented by the following formula (1): CF2═CFCH2CH(C(R1)(R2)(OH))CH2CH═CH2 (1) wherein each of R1 and R2 which are independent of each other, is a fluorine atom or a fluoroalkyl group having at most 5 carbon atoms.
摘要翻译：本发明提供了具有高浓度官能团的含氟化合物，从而可以获得足够的官能团特性，并且在宽波长范围内具有高透明度，含氟聚合物及其生产方法。本发明提供由下式（1）表示的氟化二烯：<？in-line-formula description =“In-line formula”end =“lead”？> CF 2 -CFCH （C（R 1）2（CH 2）（OH））CH 2 CH-CH _{1 （1）<？in-line-formula description =“In-line formula”end =“tail”？>其中R 1和R 2中的每一个，彼此独立的是氟原子或具有至多5个碳原子的氟代烷基。}

9. 发明授权

US07091294B2 Fluoropolymer and resist composition 失效
标题翻译：含氟聚合物和抗蚀剂组成
公开(公告)号：US07091294B2
公开(公告)日：2006-08-15
申请号：US11100527
申请日：2005-04-07
申请人： Yoko Takebe , Masataka Eda , Osamu Yokokoji
发明人： Yoko Takebe , Masataka Eda , Osamu Yokokoji
IPC分类号： C08F18/20 , C08F118/00 , C08F220/22 , C08F12/20 , C08F214/18
CPC分类号： C08F214/18 , C08F14/18 , C08F222/18 , C08F2/06
摘要： A fluoropolymer (A) having units derived from monomer units formed by cyclopolymerization of at least one fluorinated diene selected from a fluorinated diene represented by the formula (1) and a fluorinated diene represented by the formula (2), and units derived from monomer units formed by cyclopolymerization of a fluorinated diene represented by the formula (3): CF2═CFCF2—C(CF3)(OR1)—CH2CH═CH2 (1) CF2═CFCH2—CH((CH2)nC(CF3)2(OR1))—CH2CH═CH2 (2) CF2═CFCH2—CH(COOR2)—CH2CH═CH2 (3) wherein R1 represents a hydrogen atom, a blocked group of a hydroxyl group capable of being converted into a hydrogen atom by an acid, or a blocked carboxyl group-containing organic group capable of being converted into a carboxyl group-containing organic group by an acid, R2 represents a hydrocarbon group having at most 20 carbon atoms, and n represents 0 or 1.
摘要翻译：具有衍生自由至少一种选自式（1）所示的氟化二烯和式（2）表示的氟化二烯的氟化二烯通过环化聚合形成的单体单元的单元的氟聚合物和由式（2）表示的单体单元通过由式（3）表示的氟化二烯的环化聚合形成：<？in-line-formula description =“In-line Formulas”end =“lead”？> CF 2 -CFCF _{C 2 -C（CF 3）（OR 1）2 CH 2 CH-CH 2 2 / >（1）<？in-line-formula description =“In-line Formulas”end =“tail”？> <？in-line-formula description =“In-line Formulas”end =“lead”？> CF < C（CF 3）2 CH 2（CH 2）n（C 1 -C 3））2（OR 1）） - CH 2 CH-CH 2（2）＆lt;＆lt; 1＆gt; -formulae description =“In-line Formulas”end =“tail”？> <？in-line-formula description =“In-line Formulas”end =“lead”？> CF -CH 2（CH 2 CH 2）-CH 2 CH-CH 其中R 1表示氢原子，被封闭的基团的能够被酸转化为氢原子的羟基或被能够通过酸转化成含羧基的有机基团的被封端的含羧基的有机基团，R 2，表示具有至多20个碳原子的烃基，n表示0或1。}

10. 发明授权

US06984704B2 Fluorinated compound, fluoropolymer and process for its production 失效
公开(公告)号：US06984704B2
公开(公告)日：2006-01-10
申请号：US11059695
申请日：2005-02-17
申请人： Shun-ichi Kodama , Isamu Kaneko , Osamu Yokokoji , Shinji Okada , Yoko Takebe , Yasuhide Kawaguchi
发明人： Shun-ichi Kodama , Isamu Kaneko , Osamu Yokokoji , Shinji Okada , Yoko Takebe , Yasuhide Kawaguchi
IPC分类号： C08F36/20 , C08F114/18
CPC分类号： C08F36/20 , C08F36/16 , C08F214/18 , C08F2/60
摘要： To provide a fluoropolymer which has a high concentration of functional groups to provide adequate characteristics of the functional groups and which brings about no decrease of Tg.A fluoropolymer having monomer units formed by cyclopolymerization of a functional group-containing fluorinated diene represented by the formula (1): CFR1═CR2-Q-CR3═CHR4 (1) wherein each of R1 to R4 which are independent of one another, represents a hydrogen atom, a fluorine atom, an alkyl group having at most 8 carbon atoms, or an alicyclic hydrocarbon group, and at least one of them is an alicyclic hydrocarbon group, provided that hydrogen atoms in the alkyl group or the alicyclic hydrocarbon group may be substituted by a fluorine atom, an alkyl group or a fluoroalkyl group; and Q represents a bivalent organic group having a blocked acidic group capable of developing an acidic group by an acid or a group capable of being converted into such a blocked acidic group.

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