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    • 1. 发明申请
    • Fluorinated compound, fluoropolymer and process for its production
    • 氟化合物,含氟聚合物及其生产工艺
    • US20060004164A1
    • 2006-01-05
    • US11218472
    • 2005-09-06
    • Shun-ichi KodamaIsamu KanekoOsamu YokokojiShinji OkadaYoko TakebeYasuhide Kawaguchi
    • Shun-ichi KodamaIsamu KanekoOsamu YokokojiShinji OkadaYoko TakebeYasuhide Kawaguchi
    • C08F114/18C07C21/18
    • C08F36/20C08F36/16C08F214/18C08F2/60
    • To provide a fluoropolymer which has a high concentration of functional groups to provide adequate characteristics of the functional groups and which brings about no decrease of Tg. A fluoropolymer having monomer units formed by cyclopolymerization of a functional group-containing fluorinated diene represented by the formula (1): CFR1═CR2-Q-CR3═CHR4  (1) wherein each of R1 to R4 which are independent of one another, represents a hydrogen atom, a fluorine atom, an alkyl group having at most 8 carbon atoms, or an alicyclic hydrocarbon group, and at least one of them is an alicyclic hydrocarbon group, provided that hydrogen atoms in the alkyl group or the alicyclic hydrocarbon group may be substituted by a fluorine atom, an alkyl group or a fluoroalkyl group; and Q represents a bivalent organic group having a blocked acidic group capable of developing an acidic group by an acid or a group capable of being converted into such a blocked acidic group.
    • 提供具有高浓度官能团的含氟聚合物以提供官能团的足够特性,并且不会导致Tg的降低。 具有由式(1)表示的含官能团的氟化二烯的环化聚合形成的单体单元的含氟聚合物:<?in-line-formula description =“In-line formula”end =“lead”→CFR < 1 -CR 2 -Q-CR 3 -RR 4(1)<?在线公式描述=“ 其中独立的R 1〜R 4中的每一个表示氢原子,氟原子, 具有至多8个碳原子的烷基或脂环族烃基,并且其中至少一个是脂环族烃基,条件是烷基或脂环族烃基中的氢原子可以被氟原子取代, 烷基或氟代烷基; Q表示可以通过酸或能够转化为这种封端的酸性基团的基团而能够形成酸性基团的封端酸性基团的二价有机基团。
    • 2. 发明授权
    • Resist composition
    • 抗蚀组成
    • US06818258B2
    • 2004-11-16
    • US10635514
    • 2003-08-07
    • Isamu KanekoShinji OkadaYasuhide KawaguchiYoko TakebeShun-ichi Kodama
    • Isamu KanekoShinji OkadaYasuhide KawaguchiYoko TakebeShun-ichi Kodama
    • B05D306
    • G03F7/0392G03F7/0046G03F7/0395Y10S430/114Y10S430/146Y10T428/3154
    • To provide a chemical amplification type resist composition which is excellent in transparency to a radiation and in dry etching properties and which gives a resist pattern excellent in sensitivity, resolution, evenness, heat resistance, etc. A resist composition comprising a fluoropolymer (A) which is a fluoropolymer having repeating units formed by cyclopolymerization of a fluorinated diene represented by the formula (1) and which has blocked acidic groups as Q, an acid-generating compound (B) which generates an acid under irradiation with light, and an organic solvent (C): CF2═CR1—Q—CR2═CH2  (1) wherein each of R1 and R2 which are independent of each other, is a hydrogen atom, a fluorine atom, a methyl group or a trifluoromethyl group, and Q is a bivalent organic group having a blocked acidic group capable of forming an acidic group by an acid or a group which can be converted to such a blocked acidic group.
    • 提供一种透光性和干蚀刻性能优异的化学放大型抗蚀剂组合物,其具有优异的灵敏度,分辨率,均匀性,耐热性等的抗蚀剂图案。一种抗蚀剂组合物,其包含含氟聚合物(A) 是具有由式(1)表示的氟化二烯和阻聚酸性基团Q的重复单元形成的重复单元,在光照下产生酸的产酸化合物(B)和有机溶剂 (C):其中彼此独立的R 1和R 2各自为氢原子,氟原子,甲基或三氟甲基,Q为具有封端的二价有机基团 能够通过酸或可以转化为这种封闭的酸性基团的基团形成酸性基团的酸性基团。
    • 8. 发明授权
    • Fluorinated compound, fluoropolymer and process for its production
    • 氟化合物,含氟聚合物及其生产工艺
    • US07015366B2
    • 2006-03-21
    • US11218472
    • 2005-09-06
    • Shun-ichi KodamaIsamu KanekoOsamu YokokojiShinji OkadaYoko TakebeYasuhide Kawaguchi
    • Shun-ichi KodamaIsamu KanekoOsamu YokokojiShinji OkadaYoko TakebeYasuhide Kawaguchi
    • C07C41/00C07C43/00C07C407/00C07C409/00C08F136/16
    • C08F36/20C08F36/16C08F214/18C08F2/60
    • To provide a fluoropolymer which has a high concentration of functional groups to provide adequate characteristics of the functional groups and which brings about no decrease of Tg.A fluoropolymer having monomer units formed by cyclopolymerization of a functional group-containing fluorinated diene represented by the formula (1): CFR1═CR2—Q—CR3═CHR4   (1) wherein each of R1 to R4 which are independent of one another, represents a hydrogen atom, a fluorine atom, an alkyl group having at most 8 carbon atoms, or an alicyclic hydrocarbon group, and at least one of them is an alicyclic hydrocarbon group, provided that hydrogen atoms in the alkyl group or the alicyclic hydrocarbon group may be substituted by a fluorine atom, an alkyl group or a fluoroalkyl group; and Q represents a bivalent organic group having a blocked acidic group capable of developing an acidic group by an acid or a group capable of being converted into such a blocked acidic group.
    • 提供具有高浓度官能团的含氟聚合物以提供官能团的足够特性,并且不会降低Tg。 具有由式(1)表示的含官能团的氟化二烯的环化聚合形成的单体单元的含氟聚合物:<?in-line-formula description =“In-line formula”end =“lead”→CFR < 1 -CR 2 -Q-CR 3 -RR 4(1)<?在线公式描述=“ 其中独立的R 1〜R 4中的每一个表示氢原子,氟原子, 具有至多8个碳原子的烷基或脂环族烃基,并且其中至少一个是脂环族烃基,条件是烷基或脂环族烃基中的氢原子可以被氟原子取代, 烷基或氟代烷基; Q表示可以通过酸或能够转化为这种封端的酸性基团的基团而能够形成酸性基团的封端酸性基团的二价有机基团。