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1. 发明授权

US5516366A Supply control system for semiconductor process gasses 失效
标题翻译：半导体工艺气体供应控制系统
公开(公告)号：US5516366A
公开(公告)日：1996-05-14
申请号：US322940
申请日：1994-10-12
申请人： Yohichi Kanno , Osamu Uchisawa , Kohichi Murakami , Tadahiro Ohmi
发明人： Yohichi Kanno , Osamu Uchisawa , Kohichi Murakami , Tadahiro Ohmi
IPC分类号： B65G53/04 , B65G53/06 , C23C16/52 , F17D1/04 , H01L21/205 , C23C16/00
CPC分类号： C23C16/52 , F17D1/04 , Y10T137/87209
摘要： A supply control apparatus for semiconductor process gasses which is capable of accurately switching the timing of the supply state of the gasses flowing in accordance with the open or closed states of a plurality of gas pressure operated valves, which operate in response to a plurality of electromagnetic valves operating in time series. The content volumes of a plurality of gas tubes respectively connecting the plurality of electromagnetic valves to the plurality of drive units of the gas pressure operated valves are determined as a function of the length of time elapsed between the application of the control signal and the time the special gas is supplied to a process unit. The apparatus permits accurate switching of the supply state of the special gasses and avoids the mixing of the semiconductor process gasses.
摘要翻译：一种用于半导体工艺气体的供应控制装置，其能够精确地切换根据多个气体压力操作阀的打开或关闭状态流动的气体的供给状态的定时，其响应于多个电磁阀门以时间序列运行。分别将多个电磁阀连接到气体压力操作阀的多个驱动单元的多个气体管道的内容积被确定为施加控制信号和时间之间经过的时间长度的函数特殊气体被供应到处理单元。该装置允许精确地切换特殊气体的供应状态，并避免半导体工艺气体的混合。

2. 发明授权

US4828219A Metal diaphragm valve 失效
标题翻译：金属隔膜阀
公开(公告)号：US4828219A
公开(公告)日：1989-05-09
申请号：US114162
申请日：1987-10-27
申请人： Tadahiro Ohmi , Yohichi Kanno , Osamu Uchisawa , Kazuhiko Sato
发明人： Tadahiro Ohmi , Yohichi Kanno , Osamu Uchisawa , Kazuhiko Sato
IPC分类号： F16K7/12 , F16K7/14 , F16K7/16 , F16K41/12
CPC分类号： F16K7/14 , F16K41/12
摘要： A metal diaphragm valve in which the interior of a valve casing is divided, by means of a metal diaphragm, thereby defining a valve chamber. Inlet hole and outlet hole are connected to the valve chamber. A valve seat is provided between the inlet and outlet holes, inside the valve chamber. A valve disk adapted to rest on the valve seat, is formed integrally with the diaphragm. The valve disk is driven by a drive unit disposed outside of the valve chamber, to open or close the valve.
摘要翻译：一种金属隔膜阀，其中通过金属隔膜将阀壳体的内部分隔开，由此限定阀室。入口孔和出口孔连接到阀室。在阀室内部的入口孔和出口孔之间设有阀座。适于搁置在阀座上的阀盘与隔膜一体形成。阀盘由设置在阀室外部的驱动单元驱动，以打开或关闭阀。

3. 发明授权

US6105933A Diaphragm valve structure 失效
标题翻译：隔膜阀结构
公开(公告)号：US6105933A
公开(公告)日：2000-08-22
申请号：US492788
申请日：1995-06-20
申请人： Yohichi Kanno , Osamu Uchisawa , Jun Yamashima
发明人： Yohichi Kanno , Osamu Uchisawa , Jun Yamashima
IPC分类号： F16K7/16 , F16K7/17
CPC分类号： F16K7/16
摘要： A diaphragm valve comprises a body with an inflow passage and an outflow passage for fluid, a valve seat disposed around said inflow passage, and a diaphragm which are disposed on said valve seat and opens and closes between said inflow passage and said outflow passage, and a gas flow hole which connects said inflow passage to said outflow passage is disposed in said valve seat.
摘要翻译：隔膜阀包括具有流体通道和用于流体的流出通道的主体，围绕所述流入通道设置的阀座和设置在所述阀座上并在所述流入通道和所述流出通道之间打开和关闭的隔膜，以及将所述流入通路与所述流出通路连接的气体流路配置在所述阀座上。

4. 发明授权

US5551477A Diaphragm-type flow control valve and manual control valve apparatus 失效
标题翻译：隔膜式流量控制阀和手动控制阀装置
公开(公告)号：US5551477A
公开(公告)日：1996-09-03
申请号：US273052
申请日：1994-07-08
申请人： Yohichi Kanno , Osamu Uchisawa , Sigekazu Yamazaki
发明人： Yohichi Kanno , Osamu Uchisawa , Sigekazu Yamazaki
IPC分类号： F16K31/524 , F16K31/60 , F16K37/00 , F16K1/32
CPC分类号： F16K31/60 , F16K31/52491 , F16K37/0058 , Y10T137/8225
摘要： A manual control valve apparatus having a structure which is provided with, as a conversion mechanism, a diaphragm compressor which is held between a valve casing and a guide member, arcuate engaging grooves formed in a surface of the diaphragm presser opposite to the valve stem, and rolling elements which engage in a freely rolling manner in the engaging grooves and are supported by the lead end part of the valve stem. The bottom surfaces of the engaging grooves are made cam surfaces for causing reciprocating motion in the axial direction of the valve stem. An indicator possessing opening indicating portions indicating the rotational position of the valve stem is attached to the opposite end of the guide member from the valve casing, and furthermore, windows exposing the opening support portions are provided in an area from the circumferential wall of the handle to the end wall thereof. Using this structure, it is possible to compactly incorporate an indicator indicating a degree of valve opening around the handle. Furthermore, the structure of the conversion mechanism is simplified and can be miniaturized, so that it is possible to incorporate the conversion mechanism within the guide member.
摘要翻译：一种手动控制阀装置，其具有设置有作为转换机构的隔膜压缩机的结构，所述隔膜压缩机保持在阀壳体和引导构件之间，形成在与阀杆相对的隔膜推压器的表面中的弓形接合槽，以及滚动元件，其在接合槽中以自由滚动的方式接合并且由阀杆的引导端部支撑。接合槽的底面形成凸轮表面，用于在阀杆的轴向方向上进行往复运动。具有表示阀杆的旋转位置的开口指示部的指示器从阀壳体附接到引导构件的相对端，此外，露出开口支撑部的窗口设置在从手柄的周壁的区域中到其端壁。使用这种结构，可以紧凑地结合指示手柄周围的阀门开度的指示器。此外，转换机构的结构简化并且可以小型化，从而可以将转换机构结合在引导构件内。

5. 再颁专利

USRE34303E Metal diaphragm valve 失效
公开(公告)号：USRE34303E
公开(公告)日：1993-07-06
申请号：US848796
申请日：1992-03-10
申请人： Tadahiro Ohmi , Yohichi Kanno , Kazuhiko Satoh , Tadahiro Hatayama
发明人： Tadahiro Ohmi , Yohichi Kanno , Kazuhiko Satoh , Tadahiro Hatayama
IPC分类号： F16K7/16
CPC分类号： F16K7/16 , Y10T137/8122
摘要： A metal diaphragm valve comprises a valve cage, a metallic valve seat integral with the valve cage, a metal diaphragm having a peripheral edge portion supported in a .[.liquid-tight.]. .Iadd.fluid-tight .Iaddend.manner by the valve cage and a central portion facing the valve to touch and leave the seat, a drive member for opening and closing the metal diaphragm, and a diaphragm pressing member interposed between the drive member and the metal diaphragm and adapted to press the diaphragm against the valve seat at a uniform sealing pressure.

6. 发明授权

US4953826A Metal diaphragm valve 失效
标题翻译：金属隔膜阀
公开(公告)号：US4953826A
公开(公告)日：1990-09-04
申请号：US389704
申请日：1989-08-04
申请人： Tadahiro Ohmi , Yohichi Kanno , Kazuhiko Satoh , Tadahiro Hatayama
发明人： Tadahiro Ohmi , Yohichi Kanno , Kazuhiko Satoh , Tadahiro Hatayama
IPC分类号： F16K7/16
CPC分类号： F16K7/16 , Y10T137/8122
摘要： A metal diaphragm valve comprises a valve cage, a metallic valve seat integral with the valve cage, a metal diaphragm having a peripheral edge portion supported in a liquid-tight manner by the valve cage and a central portion facing the valve to touch and leave the seat, a drive member for opening and closing the metal diaphragm, and a diaphragm pressing member interposed between the drive member and the metal diaphragm and adapted to press the diaphragm against the valve seat at a uniform sealing pressure.
摘要翻译：金属隔膜阀包括阀笼，与阀保持架一体的金属阀座，金属隔膜，其具有由阀笼以液密方式支撑的周边边缘部分和面向阀的中心部分以接触和离开阀座，用于打开和关闭金属隔膜的驱动构件，以及插入在驱动构件和金属隔膜之间并且以均匀的密封压力将隔膜压靠在阀座上的隔膜推压构件。

7. 发明授权

US5827949A Method and system for measuring external leakage 失效
标题翻译：测量外部泄漏的方法和系统
公开(公告)号：US5827949A
公开(公告)日：1998-10-27
申请号：US894504
申请日：1997-11-17
申请人： Tadihiro Ohmi , Atsushi Ohki , Yohichi Kanno
发明人： Tadihiro Ohmi , Atsushi Ohki , Yohichi Kanno
IPC分类号： G01M3/20 , G01M3/22 , G01M3/04 , G01N7/00
CPC分类号： G01M3/222 , G01M3/202
摘要： A method of measuring external leakage, which comprises the steps of introducing a first gas different from main component gasses of an external atmosphere into a pipe having a leak, adding H.sub.2 gas (or H.sub.2 -containing gas) to the first has at a down-stream point, and measuring gas components entering from the external atmosphere of the leak by an atmospheric ionization mass spectrometer (atmospheric pressure ionization mass spectrometer) at a further downstream point (for example, N.sub.2 H.sup.+ is detected when the external atmosphere is the N.sub.2 gas). A method of measuring the external leakage of a gas supply piping line having a plurality of branch piping lines comprises the steps of introducing H.sub.2 gas (or a H.sub.2 -containing gas) into at least one of the branch piping lines, introducing a first gas different from main component gases of an external atmosphere into the rest of the branch piping lines, and measuring gas components entering from the external atmosphere by the atmospheric pressure ionization mass spectrometer at a downstream point of the branch portion. The present invention can measure the external leakage very simply and with high levels of sensitivity and accuracy. Particularly, the present invention can be suitable applied to the cases where an inspection portion is elongated or branched such as feed pipe of a semiconductor plant.
摘要翻译： PCT No.PCT / JP95 / 00284 Sec。 371日期：1997年11月17日 102（e）日期1997年11月17日PCT提交1995年2月24日PCT公布。公开号WO96 / 26426 日期1996年8月29日一种测量外部泄漏的方法，包括以下步骤：将不同于外部气氛的主要组分气体的第一气体引入到具有泄漏的管道中，将第二气体（或含H2气体）具有下游点，并通过大气电离质谱仪（大气压电离质谱仪）在另外的下游点（例如，当外部气氛为...时检测到N2H +）测量从泄漏的外部大气进入的气体成分 N2气）。一种测量具有多个分支管道管道的气体供应管线的外部泄漏的方法包括以下步骤：将H2气（或含H2气体）引入到至少一个分支管道中，引入不同的第一气体从外部气氛的主要成分气体进入分支管道的其余部分，并且在分支部分的下游点测量由大气压电离质谱仪从外部气氛进入的气体成分。本发明可以非常简单地以高灵敏度和精确度测量外部泄漏。特别地，本发明适用于半导体装置的供给管等检查部是细长的或分支的情况。

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