专利快速检索-快速检索全球专利，免费商用专利数据库-IPRDB

1. 发明申请

US20120108047A1 Methods Of Forming Conductive Contacts In The Fabrication Of Integrated Circuitry 有权
标题翻译：在集成电路制造中形成导电触头的方法
公开(公告)号：US20120108047A1
公开(公告)日：2012-05-03
申请号：US12917339
申请日：2010-11-01
申请人： Ying-Cheng Chuang , Hung-Ming Tsai , Sheng-Wei Yang , Ping-Cheng Hsu , Ming-Cheng Chang
发明人： Ying-Cheng Chuang , Hung-Ming Tsai , Sheng-Wei Yang , Ping-Cheng Hsu , Ming-Cheng Chang
IPC分类号： H01L21/768 , H01L21/28
CPC分类号： H01L27/10876 , H01L21/28531 , H01L21/76897 , H01L27/10855 , H01L27/10888
摘要： A method of forming a conductive contact includes forming a structure comprising an upper surface joining with a sidewall surface. The sidewall surface contains elemental-form silicon. Silicon is epitaxially grown from the sidewall surface. Dielectric material is formed over the upper surface and the epitaxially-grown silicon. A conductive contact is formed through the dielectric material to conductively connect with the upper surface.
摘要翻译：形成导电接触的方法包括形成包括与侧壁表面接合的上表面的结构。侧壁表面含有元素型硅。硅从侧壁表面外延生长。电介质材料形成在上表面和外延生长的硅上。通过电介质材料形成导电接触，以与上表面导电连接。

2. 发明授权

US08334196B2 Methods of forming conductive contacts in the fabrication of integrated circuitry 有权
标题翻译：在集成电路制造中形成导电触点的方法
公开(公告)号：US08334196B2
公开(公告)日：2012-12-18
申请号：US12917339
申请日：2010-11-01
申请人： Ying-Cheng Chuang , Hung-Ming Tsai , Sheng-Wei Yang , Ping-Cheng Hsu , Ming-Cheng Chang
发明人： Ying-Cheng Chuang , Hung-Ming Tsai , Sheng-Wei Yang , Ping-Cheng Hsu , Ming-Cheng Chang
IPC分类号： H01L21/768 , H01L21/28
CPC分类号： H01L27/10876 , H01L21/28531 , H01L21/76897 , H01L27/10855 , H01L27/10888
摘要： A method of forming a conductive contact includes forming a structure comprising an upper surface joining with a sidewall surface. The sidewall surface contains elemental-form silicon. Silicon is epitaxially grown from the sidewall surface. Dielectric material is formed over the upper surface and the epitaxially-grown silicon. A conductive contact is formed through the dielectric material to conductively connect with the upper surface.
摘要翻译：形成导电接触的方法包括形成包括与侧壁表面接合的上表面的结构。侧壁表面含有元素型硅。硅从侧壁表面外延生长。电介质材料形成在上表面和外延生长的硅上。通过电介质材料形成导电接触，以与上表面导电连接。

3. 发明申请

US20130037919A1 METHODS OF FORMING TRENCHES IN SILICON AND A SEMICONDUCTOR DEVICE INCLUDING SAME 有权
标题翻译：在硅中形成铁素体的方法和包括其中的半导体器件
公开(公告)号：US20130037919A1
公开(公告)日：2013-02-14
申请号：US13206907
申请日：2011-08-10
申请人： Sanjeev Sapra , Cheng-Shun Chen , Hung-Ming Tsai , Sheng-Wei Yang
发明人： Sanjeev Sapra , Cheng-Shun Chen , Hung-Ming Tsai , Sheng-Wei Yang
IPC分类号： H01L21/306 , H01L29/06 , B82Y40/00 , B82Y99/00
CPC分类号： H01L23/5283 , B82Y30/00 , H01L21/02238 , H01L21/30604 , H01L21/3083 , H01L21/31111 , H01L29/04 , H01L29/16 , H01L2924/0002 , H01L2924/00
摘要： A method of creating a trench having a portion of a bulb-shaped cross-section in silicon is disclosed. The method comprises forming at least one trench in silicon and forming a liner in the at least one trench. The liner is removed from a bottom surface of the at least one trench to expose the underlying silicon. A portion of the underlying exposed silicon is removed to form a cavity in the silicon. At least one removal cycle is conducted to remove exposed silicon in the cavity to form a bulb-shaped cross-sectional profile, with each removal cycle comprising subjecting the silicon in the cavity to ozonated water to oxidize the silicon and subjecting the oxidized silicon to a hydrogen fluoride solution to remove the oxidized silicon. A semiconductor device structure comprising the at least one trench comprising a cavity with a bulb-shaped cross-sectional profile is also disclosed.
摘要翻译：公开了一种在硅中产生一个具有一个灯泡形横截面的沟槽的方法。该方法包括在硅中形成至少一个沟槽并在至少一个沟槽中形成衬垫。将衬垫从至少一个沟槽的底表面移除以暴露下面的硅。去除底层暴露的硅的一部分以在硅中形成空腔。进行至少一个去除周期以去除空腔中的暴露的硅以形成球形横截面轮廓，每个去除周期包括使空腔中的硅经受臭氧化水以氧化硅并将氧化的硅经受氟化氢溶液去除氧化硅。还公开了一种半导体器件结构，其包括包括具有灯泡形横截面轮廓的空腔的至少一个沟槽。

4. 发明授权

US09117759B2 Methods of forming bulb-shaped trenches in silicon 有权
标题翻译：在硅中形成球形沟槽的方法
公开(公告)号：US09117759B2
公开(公告)日：2015-08-25
申请号：US13206907
申请日：2011-08-10
申请人： Sanjeev Sapra , Cheng-Shun Chen , Hung-Ming Tsai , Sheng-Wei Yang
发明人： Sanjeev Sapra , Cheng-Shun Chen , Hung-Ming Tsai , Sheng-Wei Yang
IPC分类号： H01L21/3205 , H01L21/306 , H01L21/02 , H01L21/308 , H01L21/311 , B82Y30/00
CPC分类号： H01L23/5283 , B82Y30/00 , H01L21/02238 , H01L21/30604 , H01L21/3083 , H01L21/31111 , H01L29/04 , H01L29/16 , H01L2924/0002 , H01L2924/00
摘要： A method of creating a trench having a portion of a bulb-shaped cross-section in silicon is disclosed. The method comprises forming at least one trench in silicon and forming a liner in the at least one trench. The liner is removed from a bottom surface of the at least one trench to expose the underlying silicon. A portion of the underlying exposed silicon is removed to form a cavity in the silicon. At least one removal cycle is conducted to remove exposed silicon in the cavity to form a bulb-shaped cross-sectional profile, with each removal cycle comprising subjecting the silicon in the cavity to ozonated water to oxidize the silicon and subjecting the oxidized silicon to a hydrogen fluoride solution to remove the oxidized silicon. A semiconductor device structure comprising the at least one trench comprising a cavity with a bulb-shaped cross-sectional profile is also disclosed.
摘要翻译：公开了一种在硅中产生一个具有一个灯泡形横截面的沟槽的方法。该方法包括在硅中形成至少一个沟槽并在至少一个沟槽中形成衬垫。将衬垫从至少一个沟槽的底表面移除以暴露下面的硅。去除底层暴露的硅的一部分以在硅中形成空腔。进行至少一个去除周期以去除空腔中的暴露的硅以形成球形横截面轮廓，每个去除周期包括使空腔中的硅经受臭氧化水以氧化硅并将氧化的硅经受氟化氢溶液去除氧化硅。还公开了一种半导体器件结构，其包括包括具有灯泡形横截面轮廓的空腔的至少一个沟槽。

5. 发明申请

US20140054794A1 MEMORY PROCESS AND MEMORY STRUCTURE MADE THEREBY 有权
标题翻译：存储过程和存储器结构
公开(公告)号：US20140054794A1
公开(公告)日：2014-02-27
申请号：US13590204
申请日：2012-08-21
申请人： Vivek Gopalan , Robert Kerr , Hung-Ming Tsai
发明人： Vivek Gopalan , Robert Kerr , Hung-Ming Tsai
IPC分类号： H01L21/283 , H01L23/48
CPC分类号： H01L21/76883 , H01L21/76802 , H01L27/108 , H01L27/10891
摘要： A memory process is described. A substrate is provided, having therein trenches and conductive lines buried in the trenches and having thereon an array area, wherein each of the conductive lines has an array portion in the array area. A contact area apart from the array area is defined on the substrate, wherein each of the conductive lines has a contact portion in the contact area. The substrate between the contact portions of the conductive lines is etched down to below the tops of the conductive layers to form gaps between the contact portions of the conductive lines. The gaps are then filled with an insulating layer.
摘要翻译：描述记忆过程。提供了一种衬底，其中具有埋在沟槽中的沟槽和导线，并且具有阵列区域，其中每条导线在阵列区域中具有阵列部分。在基板上限定与阵列区域分开的接触区域，其中每个导线在接触区域中具有接触部分。导电线的接触部分之间的衬底被蚀刻到导电层的顶部之下，以在导电线的接触部分之间形成间隙。然后用绝缘层填充间隙。

6. 发明授权

US07577144B2 Dynamic network address translation system and method of transparent private network device 有权
标题翻译：透明私网设备的动态网络地址转换系统及方法
公开(公告)号：US07577144B2
公开(公告)日：2009-08-18
申请号：US10442161
申请日：2003-05-21
申请人： Hung-chun Chang , Ming-Deng Hsieh , Chien-Chao Tseng , Hung-Ming Tsai
发明人： Hung-chun Chang , Ming-Deng Hsieh , Chien-Chao Tseng , Hung-Ming Tsai
IPC分类号： H04L12/28 , H04L12/56
CPC分类号： H04L29/12066 , H04L29/12377 , H04L29/12462 , H04L29/12547 , H04L45/00 , H04L61/1511 , H04L61/2517 , H04L61/255 , H04L61/2582
摘要： The present invention provides a dynamic network address translation system and method of transparent private network device. With the NAT approach, the first device in a public network can be connected to a second device in a private network. The first packet for the connection is sent from the first device in the public network to the second device in the private network. Before establishing the connection, the first device exchanges information between the NAPT router of the private network. The NAPT router maintains its translation table according to the information. Then, the first device sends a connection request to a specific port of the NAPT router, and the packet will be transformed and routed properly to the second device.
摘要翻译：本发明提供一种透明专用网络设备的动态网络地址转换系统和方法。使用NAT方法，公共网络中的第一个设备可以连接到专用网络中的第二个设备。用于连接的第一个分组从公共网络中的第一个设备发送到专用网络中的第二个设备。在建立连接之前，第一个设备在专网的NAPT路由器之间交换信息。 NAPT路由器根据信息维护其转换表。然后，第一个设备向NAPT路由器的特定端口发送连接请求，并且该数据包将被正确转换并路由到第二个设备。

7. 发明申请

US20130049074A1 METHODS FOR FORMING CONNECTIONS TO A MEMORY ARRAY AND PERIPHERY 审中-公开
标题翻译：用于形成与存储器阵列和外围设备的连接的方法
公开(公告)号：US20130049074A1
公开(公告)日：2013-02-28
申请号：US13216164
申请日：2011-08-23
申请人： Shyam Surthi , Hung-Ming Tsai
发明人： Shyam Surthi , Hung-Ming Tsai
IPC分类号： H01L23/52 , H01L21/768
CPC分类号： H01L27/1052 , H01L27/10826 , H01L27/10879 , H01L27/10894
摘要： Methods are disclosed for forming connections to a memory array and a periphery of the array. The methods include forming stacks of conductive materials on the array and the periphery and forming a step between the periphery stack and the array stack. The step is removed during subsequent processing, and connections are formed from the conductive materials remaining on the array and the periphery. In some embodiments, the step is removed before any photolithographic processes.
摘要翻译：公开了用于形成到阵列的存储器阵列和外围的连接的方法。所述方法包括在阵列和周边上形成导电材料的叠层并在外围堆叠和阵列堆叠之间形成一个台阶。在随后的处理期间移除该步骤，并且由保留在阵列和周边上的导电材料形成连接。在一些实施例中，在任何光刻工艺之前去除该步骤。

8. 发明申请

US20100097854A1 FLASH MEMORY AND FLASH MEMORY ARRAY 审中-公开
标题翻译：闪存和闪存存储阵列
公开(公告)号：US20100097854A1
公开(公告)日：2010-04-22
申请号：US12352588
申请日：2009-01-12
申请人： Jen-Jui Huang , Hung-Ming Tsai , Kuo-Chung Chen
发明人： Jen-Jui Huang , Hung-Ming Tsai , Kuo-Chung Chen
IPC分类号： G11C16/04 , H01L29/788 , H01L27/115
CPC分类号： H01L27/11521 , G11C16/3427 , H01L29/40114 , H01L29/42336 , H01L29/66825 , H01L29/7881
摘要： A flash memory including a substrate having a recess, a buried bit line, a word line, a single side insulating layer, a floating gate, a tunneling dielectric layer, a control gate, and an inter-gate dielectric layer is provided. The buried bit line extends below the recess of the substrate along a first direction. The word line is on the substrate, and extends above the recess along a second direction. The single side insulating layer is on a first sidewall of the recess. The floating gate is on a second sidewall of the recess to be opposite to the single side insulating layer. The tunneling dielectric layer is sandwiched by the floating gate and the substrate to contact the buried bit line. The control gate fills the recess and contacts the word line. The inter-gate dielectric layer is sandwiched by the control gate and the floating gate.
摘要翻译：提供一种闪速存储器，其包括具有凹部，掩埋位线，字线，单侧绝缘层，浮动栅极，隧道电介质层，控制栅极和栅极间介电层的衬底。埋置的位线沿着第一方向延伸到衬底的凹部下方。字线在基板上，并且沿着第二方向在凹部上方延伸。单侧绝缘层位于凹部的第一侧壁上。浮动栅极位于凹槽的与单侧绝缘层相对的第二侧壁上。隧道电介质层被浮动栅极和衬底夹在接触掩埋位线之间。控制门填充凹槽并接触字线。栅极间电介质层被控制栅极和浮动栅极夹在中间。

9. 发明授权

US06694737B2 Compensation system for an engine of a vehicle 失效
标题翻译：车辆发动机补偿系统
公开(公告)号：US06694737B2
公开(公告)日：2004-02-24
申请号：US10161386
申请日：2002-05-31
申请人： Yeong-Shyeong Tsai , Shinn-Jieh Wang , Hung-Ming Tsai , Po-Yu Tsai , Lu-Hsing Tsai
发明人： Yeong-Shyeong Tsai , Shinn-Jieh Wang , Hung-Ming Tsai , Po-Yu Tsai , Lu-Hsing Tsai
IPC分类号： F02G300
CPC分类号： F01K21/005 , F01K23/061
摘要： A compensation system for a vehicle has a main reservoir, a vapor collector, an expansion tube, a working liquid supplying reservoir and an oil tank. The main reservoir is connected with the vapor collector via a heat absorbing pipe. The expansion tube is connected to the vapor collector. Two turbines are rotatably received in the expansion tube and are connected to a generator. The supplying reservoir is connected to the expansion tube. The oil tank encloses the expansion tube and absorbs the heat of the waste gas dissipated from the engine. Accordingly, the turbines will be actuated to rotate by means of expansion of volume of the working liquid sprayed into the expansion tube to actuate the generator to operate. The waste heat dissipated from the engine of the vehicle can be efficiently reused.
摘要翻译：车辆的补偿系统具有主容器，蒸气收集器，膨胀管，工作液供给容器和油箱。主储槽通过吸热管与蒸气收集器连接。膨胀管连接到蒸气收集器。两个涡轮机可旋转地容纳在膨胀管中并连接到发电机。供应储存器连接到膨胀管。油箱封闭膨胀管并吸收从发动机排出的废气的热量。因此，涡轮机将通过膨胀喷射到膨胀管中的工作液体的体积而致动而旋转，以驱动发电机进行操作。可以有效地重新利用从车辆的发动机消散的废热。

10. 发明授权

US09123784B2 Memory process and memory structure made thereby 有权
标题翻译：由此产生的内存进程和内存结构
公开(公告)号：US09123784B2
公开(公告)日：2015-09-01
申请号：US13590204
申请日：2012-08-21
申请人： Vivek Gopalan , Robert Kerr , Hung-Ming Tsai
发明人： Vivek Gopalan , Robert Kerr , Hung-Ming Tsai
IPC分类号： H01L27/108 , H01L21/768
CPC分类号： H01L21/76883 , H01L21/76802 , H01L27/108 , H01L27/10891
摘要： A memory process is described. A substrate is provided, having therein trenches and conductive lines buried in the trenches and having thereon an array area, wherein each of the conductive lines has an array portion in the array area. A contact area apart from the array area is defined on the substrate, wherein each of the conductive lines has a contact portion in the contact area. The substrate between the contact portions of the conductive lines is etched down to below the tops of the conductive layers to form gaps between the contact portions of the conductive lines. The gaps are then filled with an insulating layer.
摘要翻译：描述记忆过程。提供了一种衬底，其中具有埋在沟槽中的沟槽和导线，并且具有阵列区域，其中每条导线在阵列区域中具有阵列部分。在基板上限定与阵列区域分开的接触区域，其中每个导线在接触区域中具有接触部分。导电线的接触部分之间的衬底被蚀刻到导电层的顶部之下，以在导电线的接触部分之间形成间隙。然后用绝缘层填充该间隙。

你已经成功收藏专利！

检索式保存成功!

IPRDB

热门服务

关于我们

友情链接

联系方式