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    • 2. 发明申请
    • Film-formation method for semiconductor process
    • 半导体工艺的成膜方法
    • US20050136657A1
    • 2005-06-23
    • US11033406
    • 2005-01-12
    • Hiroaki YokoiTetsu ZenkoHiroaki AshizawaTsuyoshi Hashimoto
    • Hiroaki YokoiTetsu ZenkoHiroaki AshizawaTsuyoshi Hashimoto
    • C23C16/34C23C16/44H01L21/44
    • C23C16/34C23C16/4404
    • A film-formation method for a semiconductor process includes pre-coating of covering a worktable with a pre-coat before loading a target substrate into a process chamber, and film formation thereafter of loading the target substrate into the process chamber, and forming a main film on the target substrate. The pre-coating repeats the first and second steps a plurality of times, thereby laminating segment films to form the pre-coat. The first step supplies first and second process gases into the process chamber, thereby forming a segment film containing a metal element on the worktable. The second step supplies the second process gas containing no metal element into the process chamber, thereby exhausting and removing, from the process chamber, a byproduct produced in the first step other than a component forming the segment film.
    • 半导体工艺的成膜方法包括在将目标衬底加载到处理室中之前用预涂层覆盖工作台,以及之后将目标衬底装载到处理室中的膜形成,以及形成主体 目标底物上的胶片。 预涂层重复第一和第二步骤多次,从而层压段膜以形成预涂层。 第一步骤将第一和第二工艺气体供应到处理室中,从而在工作台上形成含有金属元素的分段薄膜。 第二步骤将不含金属元素的第二工艺气体供应到处理室中,从而从处理室排出除去除了形成段膜的部件之外的第一步骤中产生的副产物。
    • 7. 发明申请
    • SINKER ELECTRIC DISCHARGE MACHINING METHOD, AND SINKER ELECTRIC DISCHARGE MACHINING APPARATUS
    • SINKER电动放电加工方法和SINKER电动放电加工设备
    • US20100213176A1
    • 2010-08-26
    • US12672669
    • 2008-08-07
    • Tomoyuki YanagisawaTsuyoshi Hashimoto
    • Tomoyuki YanagisawaTsuyoshi Hashimoto
    • B23H1/02
    • B23H1/022
    • A sinker electric discharge machining apparatus for machining a workpiece by generating electric discharge in a work gap by applying a voltage having an OFF time, may include a discriminator for generating a first signal representing an abnormal state of the work gap, and a second signal representing a normal state of the work gap; and a pulse controller, in which a first extension factor and a second extension factor that is smaller than the first extension factor are set and a first reduction factor and a second reduction factor that is smaller than the first reduction factor are set. The pulse controller extends the OFF time using either the first or the second extension factor if the first signal is received. The pulse controller reduces the OFF time using either the first or the second reduction factor if the second signal is received.
    • 一种用于通过施加具有OFF时间的电压在工作间隙中产生放电来加工工件的沉降片放电加工装置可以包括用于产生表示工作间隙的异常状态的第一信号的鉴别器,以及表示 正常状态的工作差距; 以及脉冲控制器,其中设置小于第一扩展因子的第一扩展因子和第二扩展因子,并且设置小于第一缩减因子的第一缩减因子和第二缩减因子。 如果接收到第一个信号,则脉冲控制器使用第一或第二扩展因子来延长断开时间。 如果接收到第二个信号,则脉冲控制器使用第一或第二缩减因子来减少OFF时间。
    • 9. 发明申请
    • Evaluation system, method and program for evaluating ability
    • 评估体系,评价能力的方法和程序
    • US20050019737A1
    • 2005-01-27
    • US10875589
    • 2004-06-25
    • Hiroyuki IidaTsuyoshi Hashimoto
    • Hiroyuki IidaTsuyoshi Hashimoto
    • G09B7/04G06Q50/00G06Q50/10G06Q50/20G09B5/08G09B7/00G09B3/00
    • G09B7/00
    • An evaluation system for evaluating ability is provided. The system includes: a) storing part for storing a plurality of problem groups, which are rated as a plurality of ranks based on difficulty levels, with associated right answers therein; b) first presenting part for presenting two or more problems of the plurality of problem groups, which are rated as a first rank, in the storing part to a user; and c) determination part for receiving answers to said two or more problems presented, to determine whether or not said received answers are correct with reference to the right answers in the storing part, and to obtain a correct answer rate based on the determination result. The system further includes d) first control part for controlling said first presenting part to use a problem group which is rated as a second rank being higher than said first rank when said correct answer rate is greater than a first threshold; e) second control part for controlling said first presenting part to use a problem group which is rated as a third rank being lower than said first rank when said correct answer rate is less than a second threshold; f) third control part for controlling said first presenting part to use problem groups rated as a plurality of ranks by repeating the control operation in the first and/or second control part twice or more; and g) an ability evaluation part for evaluating ability of said user based on said correct answer rate, which are obtained by each rank of problem group by the determination part, of the received answers.
    • 提供评估能力评估系统。 该系统包括:a)存储部分,用于存储根据难度等级被评为多个等级的多个问题组,其中具有相应的正确答案; b)首先呈现部分,用于在存储部分中向用户呈现被评为第一等级的多个问题组的两个或多个问题; 以及c)确定部分,用于接收所呈现的所述两个或多个问题的答案,以参考存储部分中的正确答案来确定所接收的答案是否正确,并且基于确定结果获得正确的答复率。 该系统还包括:d)第一控制部分,用于控制所述第一呈现部分,以使用当所述正确答案率大于第一阈值时被评级为高于所述第一等级的第二等级的问题组; e)第二控制部分,用于当所述正确答案率小于第二阈值时,控制所述第一呈现部分使用被评定为第三等级的问题组低于所述第一等级; f)第三控制部分,用于通过在第一和/或第二控制部分中重复执行两次或更多次的控制操作来控制所述第一呈现部分以使用被评定为多个等级的问题组; 以及g)能力评估部分,用于根据由所述确定部分的每个问题组等级获得的所述正确答案率来评估所述用户的能力。