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    • 3. 发明授权
    • Method of producing an optical information recording medium
    • 光信息记录介质的制造方法
    • US4663008A
    • 1987-05-05
    • US885738
    • 1986-07-21
    • Yoshikatsu TakeokaNorio OzawaNobuaki Yasuda
    • Yoshikatsu TakeokaNorio OzawaNobuaki Yasuda
    • C23C14/00G11B7/243C23C14/40
    • G11B7/243C23C14/0036G11B2007/24308G11B2007/24314G11B2007/24316
    • An optical information recording medium is produced by introducing a plasma-generation gas comprising hydrocarbon into a plasma-generating region provided with a metal target and a substrate. The pressure of the plasma-generating gas is maintained within a predetermined range within the plasma-generating region. Electrical power is applied to the plasma-generating gas to dissociate the gas thereby forming a plasma. The generated plasma sputters the metal target, thereby allowing the sputtered metal to be deposited on the substrate in the form of a film containing the metal and the carbon liberated from the hydrocarbon. During sputtering, the product between the density of the power applied to the electrode and the average residence time of the plasma-generating gas within the plasma-generating region is controlled within such that the product falls within the range of more than 0.5 W-sec/cm.sup.2 and less than 50 W-sec/cm.sup.2, and the partial pressure of a secondary hydrocarbon, which is different from the introduced hydrocarbon, present during the dissociation to the secondary hydrocarbon before the dissociation and after the introduction is set to range between 2 and 12.
    • 通过将包含烃的等离子体产生气体引入设置有金属靶和基板的等离子体产生区域来制造光学信息记录介质。 等离子体产生气体的压力保持在等离子体产生区域内的预定范围内。 对等离子体产生气体施加电力以解离气体,从而形成等离子体。 产生的等离子体溅射金属靶,从而允许溅射的金属以包含从烃释放的金属和碳的膜的形式沉积在基底上。 在溅射期间,施加到电极的功率的密度与等离子体产生区域内的等离子体产生气体的平均停留时间之间的乘积被控制为使得产品落在大于0.5Wsec的范围内 / cm 2且小于50Wsec / cm 2,并且在解离之前和引入之后解离成二级烃期间存在的与引入的烃不同的仲烃的分压设定为2 和12。