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    • 3. 发明授权
    • SOI device with charging protection and methods of making same
    • 具有充电保护的SOI器件及其制造方法
    • US07727835B2
    • 2010-06-01
    • US12194006
    • 2008-08-19
    • David D. WuJingrong Zhou
    • David D. WuJingrong Zhou
    • H01L21/00
    • H01L27/1203H01L21/84H01L27/0251H01L29/78603H01L29/78639
    • The present invention is directed to an SOI device with charging protection and methods of making same. In one illustrative embodiment, a device is formed on an SOI substrate including a bulk substrate, a buried insulation layer and an active layer. The device includes a transistor formed in an isolated portion of the active layer, the transistor including a gate electrode and a source region. The device further includes a first conductive bulk substrate contact extending through the active layer and the buried insulation layer, the first conductive bulk substrate contact being conductively coupled to the source region and the bulk substrate, and a second conductive bulk substrate contact extending through the active layer and the buried insulation layer, the second conductive bulk substrate being conductively coupled to the gate electrode and the bulk substrate.
    • 本发明涉及具有充电保护的SOI器件及其制造方法。 在一个说明性实施例中,在包括体基板,掩埋绝缘层和有源层的SOI衬底上形成器件。 该器件包括形成在有源层的隔离部分中的晶体管,晶体管包括栅电极和源极区。 该器件还包括延伸穿过有源层和掩埋绝缘层的第一导电体衬底接触件,第一导电体衬底接触件导电耦合到源极区域和本体衬底,以及延伸穿过有源层的第二导电体衬底触点 层和所述掩埋绝缘层,所述第二导电体基板导电耦合到所述栅电极和所述块体基板。
    • 4. 发明授权
    • SOI Device with charging protection and methods of making same
    • 具有充电保护的SOI器件及其制造方法
    • US07414289B2
    • 2008-08-19
    • US11457927
    • 2006-07-17
    • David D. WuJingrong Zhou
    • David D. WuJingrong Zhou
    • H01L27/01
    • H01L27/1203H01L21/84H01L27/0251H01L29/78603H01L29/78639
    • The present invention is directed to an SOI device with charging protection and methods of making the same. In one illustrative embodiment, a device is formed on an SOI substrate including a bulk substrate, a buried insulation layer and an active layer. The device includes a transistor formed in an isolated portion of the active layer, the transistor including a gate electrode and a source region. The device further includes a first conductive bulk substrate contact extending through the active layer and the buried insulation layer, the first conductive bulk substrate contact being conductively coupled to the source region and the bulk substrate, and a second conductive bulk substrate contact extending through the active layer and the buried insulation layer, the second conductive bulk substrate being conductively coupled to the gate electrode and the bulk substrate.
    • 本发明涉及具有充电保护的SOI器件及其制造方法。 在一个说明性实施例中,在包括体基板,掩埋绝缘层和有源层的SOI衬底上形成器件。 该器件包括形成在有源层的隔离部分中的晶体管,晶体管包括栅电极和源极区。 该器件还包括延伸穿过有源层和掩埋绝缘层的第一导电体衬底接触件,第一导电体衬底接触件导电耦合到源极区域和本体衬底,以及延伸穿过有源层的第二导电体衬底触点 层和所述掩埋绝缘层,所述第二导电体基板导电耦合到所述栅电极和所述块体基板。
    • 6. 发明授权
    • Semiconductor device with transistor-based fuses and related programming method
    • 具有晶体管保险丝和相关编程方法的半导体器件
    • US08050077B2
    • 2011-11-01
    • US12392645
    • 2009-02-25
    • Ruigang LiDavid Donggang WuJames F. BullerJingrong Zhou
    • Ruigang LiDavid Donggang WuJames F. BullerJingrong Zhou
    • G11C17/18G11C17/16G11C17/14G11C17/08G11C17/00
    • H01L27/112G11C17/16G11C17/18H01H9/50H01H35/24H01H77/101H01L27/11206
    • A transistor-based fuse structure is realized in a semiconductor device having a semiconductor substrate, transistor devices formed on the semiconductor substrate, and the transistor-based fuse structure formed on the semiconductor substrate. The transistor-based fuse structure includes a plurality of transistor-based fuses, and the method begins by selecting, from the plurality of transistor-based fuses, a first target fuse to be programmed for operation in a low-resistance/high-current state, the first target fuse having a first source, a first gate, a first drain, and a first gate insulator layer between the first gate and the semiconductor substrate. The method applies a first set of program voltages to the first source, the first gate, and the first drain to cause breakdown of the first gate insulator layer such that current can flow from the first source to the first gate through the first gate insulator layer, and from the first gate to the first drain through the first gate insulator layer.
    • 在具有半导体衬底的半导体器件,形成在半导体衬底上的晶体管器件和形成在半导体衬底上的基于晶体管的熔丝结构的半导体器件中实现基于晶体管的熔丝结构。 基于晶体管的熔丝结构包括多个基于晶体管的熔丝,并且该方法开始于从多个基于晶体管的熔丝中选择待编程的第一目标熔丝,以在低电阻/高电流状态下工作 所述第一靶保险丝在所述第一栅极和所述半导体衬底之间具有第一源极,第一栅极,第一漏极和第一栅极绝缘体层。 该方法将第一组编程电压施加到第一源极,第一栅极和第一漏极,以引起第一栅极绝缘体层的击穿,使得电流可以通过第一栅极绝缘体层从第一源极流到第一栅极 ,并且通过第一栅极绝缘体层从第一栅极到第一漏极。
    • 7. 发明授权
    • Method of forming transistor devices with different threshold voltages using halo implant shadowing
    • 使用光晕植入物阴影形成具有不同阈值电压的晶体管器件的方法
    • US07598161B2
    • 2009-10-06
    • US11861534
    • 2007-09-26
    • Jingrong ZhouMark MichaelDonna Michael, legal representativeDavid WuJames F. BullerAkif Sultan
    • Jingrong ZhouMark MichaelDavid WuJames F. BullerAkif Sultan
    • H01L21/425
    • H01L21/26513H01L21/26586H01L21/823807H01L29/1083
    • The halo implant technique described herein employs a halo implant mask that creates a halo implant shadowing effect during halo dopant bombardment. A first transistor device structure and a second transistor device structure are formed on a wafer such that they are orthogonally oriented to each other. A common halo implant mask is created with features that prevent halo implantation of the diffusion region of the second transistor device structure during halo implantation of the diffusion region of the first transistor device structure, and with features that prevent halo implantation of the diffusion region of the first transistor device structure during halo implantation of the diffusion region of the second transistor device structure. The orthogonal orientation of the transistor device structures and the pattern of the halo implant mask obviates the need to create multiple implant masks to achieve different threshold voltages for the transistor device structures.
    • 本文描述的光晕植入技术采用在光晕掺杂剂轰击期间产生晕轮植入物阴影效应的光晕注入掩模。 第一晶体管器件结构和第二晶体管器件结构形成在晶片上,使得它们彼此正交地取向。 创建了常见的光晕注入掩模,其特征在于,在第一晶体管器件结构的扩散区域的晕圈注入期间防止第二晶体管器件结构的扩散区域的光晕注入,并且具有防止第 在第二晶体管器件结构的扩散区的晕圈注入期间的第一晶体管器件结构。 晶体管器件结构的正交取向和光晕注入掩模的图案消除了创建多个注入掩模以实现晶体管器件结构的不同阈值电压的需要。
    • 9. 发明申请
    • SOI DEVICE WITH CHARGING PROTECTION AND METHODS OF MAKING SAME
    • 具有充电保护的SOI器件及其制造方法
    • US20080012072A1
    • 2008-01-17
    • US11457927
    • 2006-07-17
    • David D. WuJingrong Zhou
    • David D. WuJingrong Zhou
    • H01L27/12
    • H01L27/1203H01L21/84H01L27/0251H01L29/78603H01L29/78639
    • The present invention is directed to an SOI device with charging protection and methods of making the same. In one illustrative embodiment, a device is formed on an SOI substrate including a bulk substrate, a buried insulation layer and an active layer. The device includes a transistor formed in an isolated portion of the active layer, the transistor including a gate electrode and a source region. The device further includes a first conductive bulk substrate contact extending through the active layer and the buried insulation layer, the first conductive bulk substrate contact being conductively coupled to the source region and the bulk substrate, and a second conductive bulk substrate contact extending through the active layer and the buried insulation layer, the second conductive bulk substrate being conductively coupled to the gate electrode and the bulk substrate.
    • 本发明涉及具有充电保护的SOI器件及其制造方法。 在一个说明性实施例中,在包括体基板,掩埋绝缘层和有源层的SOI衬底上形成器件。 该器件包括形成在有源层的隔离部分中的晶体管,晶体管包括栅电极和源极区。 该器件还包括延伸穿过有源层和掩埋绝缘层的第一导电体衬底接触件,第一导电体衬底接触件导电耦合到源极区域和本体衬底,以及延伸穿过有源层的第二导电体衬底触点 层和所述掩埋绝缘层,所述第二导电体基板导电耦合到所述栅电极和所述块体基板。