会员体验
专利管家(专利管理)
工作空间(专利管理)
风险监控(情报监控)
数据分析(专利分析)
侵权分析(诉讼无效)
联系我们
交流群
官方交流:
QQ群: 891211   
微信请扫码    >>>
现在联系顾问~
热词
    • 5. 发明授权
    • Growth of silicon single crystal having uniform impurity distribution
along lengthwise or radial direction
    • 长度方向或径向均匀杂质分布的硅单晶的生长
    • US5700320A
    • 1997-12-23
    • US620391
    • 1996-03-22
    • Koji IzunomeSouroku KawanishiShinji TogawaAtsushi IkariHitoshi SasakiShigeyuki Kimura
    • Koji IzunomeSouroku KawanishiShinji TogawaAtsushi IkariHitoshi SasakiShigeyuki Kimura
    • C30B15/00C30B15/04
    • C30B29/06C30B15/00
    • When a B or P-doped Si single crystal is pulled up from a B or P-doped melt by the Czochralski method, an element such as Ga, Sb or In having the effect to reduce the heat expansion coefficient of said melt at a temperature near the melting point is added to said melt. The additive element stabilizes the temperature condition of crystal growth so as to control the generation of eddy flows just below the interface of crystal growth. When a Ga or Sb-doped Si single crystal is pulled up from a Ga or Sb-doped melt, an element such as B or P having the effect to increase the heat expansion coefficient of said melt at a temperature near the melting point is added. The agitation of the melt just below the interface of crystal growth is accelerated by the addition of B or P, so as to assure the growth of a Si single crystal from the melt having impurity distribution made uniform along the radial direction. Accordingly, a Si single crystal is formed having a uniform impurity distribution along its lengthwise or radial direction.
    • 当通过Czochralski方法从B或P掺杂的熔体中提取B或P掺杂的Si单晶时,可以使用诸如Ga,Sb或In的元素,其具有在温度下降低所述熔体的热膨胀系数 在熔点附近加入熔融物。 添加元素稳定了晶体生长的温度条件,从而控制刚好低于晶体生长界面的涡流的产生。 当从Ga或Sb掺杂的熔体中提取Ga或Sb掺杂的Si单晶时,添加诸如B或P的元素,其在熔点附近的温度下增加所述熔体的热膨胀系数, 。 通过添加B或P来促进刚好低于晶体生长界面的熔体的搅拌,以确保Si单晶从具有沿径向方向均匀的杂质分布的熔体生长。 因此,形成沿着其长度方向或径向方向具有均匀杂质分布的Si单晶。