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1. 发明授权

US06643075B2 Reentrant-walled optical system template and process for optical system fabrication using same 有权
公开(公告)号：US06643075B2
公开(公告)日：2003-11-04
申请号：US09878800
申请日：2001-06-11
申请人： Xiaomei Wang , Peter S. Whitney , Steven F. Nagle , Dale C. Flanders
发明人： Xiaomei Wang , Peter S. Whitney , Steven F. Nagle , Dale C. Flanders
IPC分类号： G02B702
CPC分类号： G02B6/423
摘要： An optical system assembly technique utilizes a templating system for locating optical components 200 on optical benches 150. Specifically, the template system comprises a template substrate 102 that is placed over the optical bench. The substrate 102 has at least one alignment slot 104 that is formed through the substrate. This alignment slot 104 has an alignment feature 120, against which an optical component 200 is registered. In order to improve the accuracy of the alignment of the optical component on the optical bench, the slot 104 has a reentrant, such as a smooth or step, sidewall 106 extending from the alignment feature 120 into the template substrate 102. This way, there is a single point or near single point of contact between the optical component 200 and the template 102, to thereby improve the placement precision for the optical component on the optical bench 150.

2. 发明授权

US06768756B2 MEMS membrane with integral mirror/lens 有权
标题翻译：集成镜/透镜的MEMS膜
公开(公告)号：US06768756B2
公开(公告)日：2004-07-27
申请号：US09804618
申请日：2001-03-12
申请人： Dale C. Flanders , Steven F. Nagle , Margaret B. Stern
发明人： Dale C. Flanders , Steven F. Nagle , Margaret B. Stern
IPC分类号： H01S313
CPC分类号： G02B26/001 , G02B5/1828 , G02B26/02 , G02B26/0833 , G02B26/0875
摘要： An optical membrane device and method for making such a device are described. This membrane is notable in that it comprises an optically curved surface. In some embodiments, this curved optical surface is optically concave and coated, for example, with a highly reflecting (HR) coating to create a curved mirror. In other embodiments, the optical surface is optically convex and coated with, preferably, an antireflective (AR) coating to function as a refractive or diffractive lens.
摘要翻译：对光学膜装置及其制造方法进行说明。该膜是显着的，因为它包括光学曲面。在一些实施例中，该弯曲的光学表面是光学凹入的并且例如用高反射（HR）涂层涂覆以形成弯曲的镜。在其它实施例中，光学表面是光学凸起的并且涂覆有优选抗反射（AR）涂层，用作折射或衍射透镜。

3. 发明授权

US07208333B2 Process for fabricating MEMS membrane with integral mirror/lens 有权
标题翻译：用于制造具有整体镜/透镜的MEMS膜的工艺
公开(公告)号：US07208333B2
公开(公告)日：2007-04-24
申请号：US10840814
申请日：2004-05-08
申请人： Dale C. Flanders , Steven F. Nagle , Margaret B. Stern
发明人： Dale C. Flanders , Steven F. Nagle , Margaret B. Stern
IPC分类号： H01L21/00
CPC分类号： G02B26/001 , G02B5/1828 , G02B26/02 , G02B26/0833 , G02B26/0875
摘要： An optical membrane device and method for making such a device are described. This membrane is notable in that it comprises an optically curved surface. In some embodiments, this curved optical surface is optically concave and coated, for example, with a highly reflecting (HR) coating to create a curved mirror. In other embodiments, the optical surface is optically convex and coated with, preferably, an antireflective (AR) coating to function as a refractive or diffractive lens.
摘要翻译：对光学膜装置及其制造方法进行说明。该膜是显着的，因为它包括光学曲面。在一些实施例中，该弯曲的光学表面是光学凹入的并且例如用高反射（HR）涂层涂覆以形成弯曲的镜。在其它实施例中，光学表面是光学凸起的并且涂覆有优选抗反射（AR）涂层，用作折射或衍射透镜。

4. 发明授权

US06790698B2 Process for integrating dielectric optical coatings into micro-electromechanical devices 有权
标题翻译：将介电光学涂层集成到微机电装置中的工艺
公开(公告)号：US06790698B2
公开(公告)日：2004-09-14
申请号：US09954861
申请日：2001-09-18
申请人： Michael F. Miller , Minh Van Le , Christopher C. Cook , Dale C. Flanders , Steven F. Nagle
发明人： Michael F. Miller , Minh Van Le , Christopher C. Cook , Dale C. Flanders , Steven F. Nagle
IPC分类号： H01L2100
CPC分类号： B81B3/0083 , B81B2201/042 , B81B2201/047 , B81C1/0038 , B81C2201/0159 , B81C2201/053 , B81C2201/056 , G02B26/001
摘要： A process for patterning dielectric layers of the type typically found in optical coatings in the context of MEMS manufacturing is disclosed. A dielectric coating is deposited over a device layer, which has or will be released, and patterned using a mask layer. In one example, the coating is etched using the mask layer as a protection layer. In another example, a lift-off process is shown. The primary advantage of photolithographic patterning of the dielectric layers in optical MEMS devices is that higher levels of consistency can be achieved in fabrication, such as size, location, and residual material stress. Competing techniques such as shadow masking yield lower quality features and are difficult to align. Further, the minimum feature size that can be obtained with shadow masks is limited to ˜100 &mgr;m, depending on the coating system geometry, and they require hard contact with the surface of the wafer, which can lead to damage and/or particulate contamination.
摘要翻译：公开了一种用于在MEMS制造的上下文中通常在光学涂层中发现的类型的介电层图案的工艺。电介质涂层沉积在器件层上，器件层已经或将被释放，并使用掩模层进行图案化。在一个实例中，使用掩模层作为保护层来蚀刻涂层。在另一示例中，示出了剥离过程。光学MEMS器件中电介质层的光刻图案的主要优点是可以在诸如尺寸，位置和残余材料应力的制造中实现更高水平的稠度。诸如阴影掩蔽的竞争技术产生较低的质量特征并且难以对准。此外，根据涂层系统的几何形状，使用荫罩可获得的最小特征尺寸限制在〜100μm，并且它们需要与晶片的表面硬接触，这可能导致损坏和/或微粒污染。

5. 发明授权

US08515221B2 Silicon optical bench OCT probe for medical imaging 有权
标题翻译：硅光学台用于医学成像的OCT探针
公开(公告)号：US08515221B2
公开(公告)日：2013-08-20
申请号：US12693181
申请日：2010-01-25
申请人： Dale C. Flanders , James W. Getz , Walid A. Atia , Peter S. Whitney , Mark E. Kuznetsov
发明人： Dale C. Flanders , James W. Getz , Walid A. Atia , Peter S. Whitney , Mark E. Kuznetsov
IPC分类号： G02B6/26
CPC分类号： G01Q60/22 , A61B5/0066 , A61B5/0084 , A61B5/02007 , A61B2562/12 , G02B23/2469
摘要： An optical probe for emitting and/or receiving light within a body comprises an optical fiber that transmits and/or receives an optical signal, a silicon optical bench including a fiber groove running longitudinally that holds an optical fiber termination of the optical fiber and a reflecting surface that optically couples an endface of the optical fiber termination to a lateral side of the optical bench. The fiber groove is fabricated using silicon anisotropic etching techniques. Some examples use a housing around the optical bench that is fabricated using LIGA or other electroforming technology. A method for forming lens structure is also described that comprises forming a refractive lens in a first layer of a composite wafer material, such as SOI (silicon on insulator) wafers and forming an optical port through a backside of the composite wafer material along an optical axis of the refractive lens. the refractive lens is preferably formed using grey-scale lithography and dry etching the first layer.
摘要翻译：用于在体内发射和/或接收光的光学探针包括传输和/或接收光信号的光纤，包括纵向延伸的光纤槽的硅光学台，其保持光纤的光纤端接和反射表面，其将光纤端接件的端面光学耦合到光学平台的侧面。使用硅各向异性蚀刻技术制造纤维槽。一些例子使用使用LIGA或其他电铸技术制造的光学平台周围的外壳。还描述了一种用于形成透镜结构的方法，其包括在诸如SOI（绝缘体上硅）晶片的复合晶片材料的第一层中形成折射透镜，并且沿着光学器件通过复合晶片材料的背面形成光学端口折射透镜的轴线。折射透镜优选使用灰度光刻形成并且对第一层进行干蚀刻。

6. 发明授权

US06559464B1 Optical system active alignment process including alignment structure attach, position search, and deformation 有权
标题翻译：光学系统主动对准过程包括对准结构连接，位置搜索和变形
公开(公告)号：US06559464B1
公开(公告)日：2003-05-06
申请号：US09648148
申请日：2000-08-25
申请人： Dale C. Flanders , Peter S. Whitney
发明人： Dale C. Flanders , Peter S. Whitney
IPC分类号： G01N2186
CPC分类号： G02B27/62 , G02B6/32 , G02B6/327 , G02B6/3586 , G02B6/3636 , G02B6/3644 , G02B6/3656 , G02B6/3692 , G02B6/4201 , G02B6/4225 , G02B6/4226 , G02B6/4237 , G02B6/4238 , G02B6/4243 , G02B6/4249 , G02B6/4256 , G02B7/003
摘要： Mounting and alignment structures for optical components allow optical components to be connected to an optical bench and then subsequently aligned, i.e., either passively or actively, in a manufacturing or subsequent calibration or recalibration, alignment or realignment processes. The structures comprise quasi-extrusion portions. This portion is “quasi-extrusion” in the sense that it has a substantially constant cross section in a z-axis direction as would be yielded in an extrusion manufacturing process. The structures further comprise at least one base, having a laterally-extending base surface, and an optical component interface. At least one armature connects the optical component interface with the base. In the preferred embodiment, the base surface is securable to an optical bench.
摘要翻译：用于光学部件的安装和对准结构允许光学部件连接到光学平台，然后在制造或随后的校准或重新校准，对准或重新对准过程中随后对准，即被动地或主动地对准。该结构包括准挤压部分。在挤出制造过程中将产生在z轴方向上具有基本恒定的横截面的意义上，该部分是“准挤压”。所述结构还包括至少一个具有横向延伸的基面的基座和光学部件接口。至少一个电枢将光学部件接口与基座连接。在优选实施例中，基座表面可固定到光学平台。

7. 发明授权

US06416937B1 Optical component installation process 有权
标题翻译：光学元件安装过程
公开(公告)号：US06416937B1
公开(公告)日：2002-07-09
申请号：US09648349
申请日：2000-08-25
申请人： Dale C. Flanders , Peter S. Whitney
发明人： Dale C. Flanders , Peter S. Whitney
IPC分类号： C25D100
CPC分类号： G02B6/32 , G02B6/327 , G02B6/3636 , G02B6/3644 , G02B6/3656 , G02B6/3692 , G02B6/4225 , G02B6/4226 , G02B6/4237 , G02B6/4238 , G02B6/4244 , G02B6/4249 , G02B7/003 , G02B27/62
摘要： Mounting and alignment structures for optical components allow optical components to be connected to an optical bench and then subsequently aligned, i.e., either passively or actively, in a manufacturing or subsequent calibration or recalibration, alignment or realignment processes. The structures comprise quasi-extrusion portions. This portion is “quasi-extrusion” in the sense that it has a substantially constant cross section in a z-axis direction as would be yielded in an extrusion manufacturing process. The structures further comprise at least one base, having a laterally-extending base surface, and an optical component interface. At least one armature connects the optical component interface with the base. In the preferred embodiment, the base surface is securable to an optical bench.
摘要翻译：用于光学部件的安装和对准结构允许光学部件连接到光学平台，然后在制造或随后的校准或重新校准，对准或重新对准过程中随后对准，即被动地或主动地对准。该结构包括准挤压部分。在挤出制造过程中将产生在z轴方向上具有基本恒定的横截面的意义上，该部分是“准挤压”。所述结构还包括至少一个具有横向延伸的基面的基座和光学部件接口。至少一个电枢将光学部件接口与基座连接。在优选实施例中，基座表面可固定到光学平台。

8. 发明授权

US06407376B1 Optical channel monitoring system with self-calibration 有权
标题翻译：光通道监控系统具有自校准功能
公开(公告)号：US06407376B1
公开(公告)日：2002-06-18
申请号：US09648267
申请日：2000-08-25
申请人： Jeffrey Korn , Dale C. Flanders , Peter S. Whitney
发明人： Jeffrey Korn , Dale C. Flanders , Peter S. Whitney
IPC分类号： H04B1008
CPC分类号： G02B6/29358 , G02B6/29361 , G02B6/29395 , G02B6/4226 , G02B6/4246 , H04B10/077 , H04B10/07955 , H04B2210/078
摘要： An optical monitoring system provides for out-of-band calibration. As a result, calibration can be performed simultaneously with monitoring. This can be used to accomplish faster and/or more accurate scanning. In addition, the need for complex switching and/or multiplexing capabilities can be avoided. The system comprises a signal source of an optical signal having spectrally separated channels, which are distributed within a spectral band, such as a WDM signal. A reference source generates a reference signal outside of the spectral band. A tunable filter filters the optical signal and the reference signal. A reference signal detector then detects the filtered reference signal, while an optical signal detector detects the filtered optical signal.
摘要翻译：光学监控系统提供带外校准。因此，可以同时监视校准。这可以用于实现更快和/或更准确的扫描。此外，可以避免对复杂的开关和/或复用能力的需要。该系统包括具有频谱分离的信道的光信号的信号源，其分布在诸如WDM信号的频谱带内。参考源在频谱带外产生参考信号。可调谐滤波器对光信号和参考信号进行滤波。参考信号检测器然后检测滤波的参考信号，而光信号检测器检测滤波的光信号。

9. 发明申请

US20120257210A1 Method and System for Avoiding Package Induced Failure in Swept Semiconductor Source 有权
标题翻译：扫描半导体源避免封装引发故障的方法和系统
公开(公告)号：US20120257210A1
公开(公告)日：2012-10-11
申请号：US13428826
申请日：2012-03-23
申请人： Peter S. Whitney , Dale C. Flanders
发明人： Peter S. Whitney , Dale C. Flanders
IPC分类号： G01B9/02 , H01S5/026
CPC分类号： H01S5/026 , G01B9/02091 , H01S5/022 , H01S5/02216 , H01S5/0222 , H01S5/02224 , H01S5/02248 , H01S5/02284 , H01S5/02415 , H01S5/02438 , H01S5/068 , H01S5/06825 , H01S5/141 , H01S5/183
摘要： Dry oxygen, dry air, or other gases such as ozone are hermetically sealed within the package of the external cavity laser or ASE swept source to avoid packaging-induced failure or PIF. PIF due to hydrocarbon breakdown at optical interfaces with high power densities is believed to occur at the SLED and/or SOA facets as well as the tunable Fabry-Perot reflector/filter elements and/or output fiber. Because the laser is an external cavity tunable laser and the configuration of the ASE swept sources, the power output can be low while the internal power at surfaces can be high leading to PIF at output powers much lower than the 50 mW.
摘要翻译：干氧，干燥空气或其他气体（如臭氧）密封在外腔激光器或ASE扫描源的封装内，以避免包装引起的故障或PIF。相信在SLED和/或SOA面以及可调谐法布里 - 珀罗反射器/滤波器元件和/或输出光纤处发生由于在具有高功率密度的光学接口处的烃破坏引起的PIF。因为激光器是外部可调谐激光器和ASE扫频源的配置，所以功率输出可能很低，而表面的内部功率可能很高，导致PIF的输出功率远低于50 mW。

10. 发明申请

US20110182550A1 Silicon Optical Bench OCT Probe for Medical Imaging 有权
标题翻译：硅光学台面OCT医用成像探头
公开(公告)号：US20110182550A1
公开(公告)日：2011-07-28
申请号：US12693181
申请日：2010-01-25
申请人： Dale C. Flanders , James W. Getz , Walid A. Atia , Peter S. Whitney , Mark E. Kuznetsov
发明人： Dale C. Flanders , James W. Getz , Walid A. Atia , Peter S. Whitney , Mark E. Kuznetsov
IPC分类号： G02B6/26 , B29C65/72 , B29D11/00
CPC分类号： G01Q60/22 , A61B5/0066 , A61B5/0084 , A61B5/02007 , A61B2562/12 , G02B23/2469
摘要： An optical probe for emitting and/or receiving light within a body comprises an optical fiber that transmits and/or receives an optical signal, a silicon optical bench including a fiber groove running longitudinally that holds an optical fiber termination of the optical fiber and a reflecting surface that optically couples an endface of the optical fiber termination to a lateral side of the optical bench. The fiber groove is fabricated using silicon anisotropic etching techniques. Some examples use a housing around the optical bench that is fabricated using LIGA or other electroforming technology. A method for forming lens structure is also described that comprises forming a refractive lens in a first layer of a composite wafer material, such as SOI (silicon on insulator) wafers and forming an optical port through a backside of the composite wafer material along an optical axis of the refractive lens. the refractive lens is preferably formed using grey-scale lithography and dry etching the first layer.
摘要翻译：用于在体内发射和/或接收光的光学探针包括透射和/或接收光信号的光纤，包括纵向延伸的光纤槽的硅光学台，其保持光纤的光纤终端和反射表面，其将光纤端接件的端面光学耦合到光学平台的侧面。使用硅各向异性蚀刻技术制造纤维槽。一些例子使用使用LIGA或其他电铸技术制造的光学平台周围的外壳。还描述了一种用于形成透镜结构的方法，其包括在诸如SOI（绝缘体上硅）晶片的复合晶片材料的第一层中形成折射透镜，并沿着光学器件通过复合晶片材料的背面形成光学端口折射透镜的轴线。折射透镜优选使用灰度光刻形成并且对第一层进行干蚀刻。

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