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    • 3. 发明授权
    • Switching structure and method of fabrication
    • 开关结构和制造方法
    • US06188301B1
    • 2001-02-13
    • US09192103
    • 1998-11-13
    • William Paul KornrumpfRobert John Wojnarowski
    • William Paul KornrumpfRobert John Wojnarowski
    • H01P110
    • H01H1/0036H01H61/0107H01H2001/0042H01H2001/0073H01H2001/0084H01H2061/006Y10T29/49105Y10T29/49128Y10T29/49155
    • A switch structure having a base surface; a first high density interconnect (HDI) plastic interconnect layer overlying the base surface layer; a cavity within the HDI plastic interconnect layer; at least one patterned shape memory alloy (SMA) layer overlying the HDI plastic interconnect layer and the cavity, and at least one patterned conductive layer over the at least one patterned SMA layer; a fixed contact pad within the cavity and attached to the base surface and a movable contact pad attached to a portion of the first patterned SMA layer within the cavity such that when the first and second patterned SMA layers and the first and second patterned metallized layers are in a first stable position, the movable contact pad touches the fixed contact pad, thereby providing an electrical connection and forming a closed switch. The structure has a second stable position in which the SMA and metallized layers are flexed away from the cavity so that the contact pads are not in contact and form an open switch.
    • 具有基面的开关结构; 覆盖基底表面层的第一高密度互连(HDI)塑料互连层; HDI塑料互连层内的空腔; 覆盖HDI塑料互连层和空腔的至少一个图案形状记忆合金(SMA)层,以及至少一个图案化的SMA层上的至少一个图案化导电层; 空腔内的固定接触焊盘并附接到基体表面,以及可移动接触垫,其附接到空腔内的第一图案化SMA层的一部分,使得当第一和第二图案化SMA层和第一和第二图案化金属化层为 在第一稳定位置,可动接触垫接触固定接触垫,由此提供电连接并形成闭合的开关。 该结构具有第二稳定位置,其中SMA和金属化层从空腔弯曲,使得接触焊盘不接触并形成开放的开关。
    • 4. 发明授权
    • Method for fabricating a switch structure
    • 开关结构的制造方法
    • US06655011B1
    • 2003-12-02
    • US09677718
    • 2000-10-02
    • William Paul KornrumpfRobert John Wojnarowski
    • William Paul KornrumpfRobert John Wojnarowski
    • H01H1100
    • H01H1/0036H01H61/0107H01H2001/0042H01H2001/0073H01H2001/0084H01H2061/006Y10T29/49105Y10T29/49128Y10T29/49155
    • A switch structure having a base surface; a first high density interconnect (HDI) plastic interconnect layer overlying the base surface layer; a cavity within the HDI plastic interconnect layer; at least one patterned shape memory alloy (SMA) layer overlying the HDI plastic interconnect layer and the cavity, and at least one patterned conductive layer over the at least one patterned SMA layer; a fixed contact pad within the cavity and attached to the base surface and a movable contact pad attached to a portion of the first patterned SMA layer within the cavity such that when the first and second patterned SMA layers and the first and second patterned metallized layers are in a first stable position, the movable contact pad touches the fixed contact pad, thereby providing an electrical connection and forming a closed switch. The structure has a second stable position in which the SMA and metallized layers are flexed away from the cavity so that the contact pads are not in contact and form an open switch.
    • 具有基面的开关结构; 覆盖基底表面层的第一高密度互连(HDI)塑料互连层; HDI塑料互连层内的空腔; 覆盖HDI塑料互连层和空腔的至少一个图案形状记忆合金(SMA)层,以及至少一个图案化的SMA层上的至少一个图案化导电层; 空腔内的固定接触焊盘并附接到基体表面,以及可移动接触垫,其附接到空腔内的第一图案化SMA层的一部分,使得当第一和第二图案化SMA层和第一和第二图案化金属化层为 在第一稳定位置,可动接触垫接触固定接触垫,由此提供电连接并形成闭合的开关。 该结构具有第二稳定位置,其中SMA和金属化层从空腔弯曲,使得接触焊盘不接触并形成开放的开关。
    • 8. 发明授权
    • Dicing saw alignment for array ultrasonic transducer fabrication
    • 切割锯对准阵列超声波换能器制造
    • US5865163A
    • 1999-02-02
    • US938795
    • 1997-09-26
    • Douglas Glenn WildesKenneth Brakeley Welles, IIWilliam Paul Kornrumpf
    • Douglas Glenn WildesKenneth Brakeley Welles, IIWilliam Paul Kornrumpf
    • B06B1/06H01L21/78B28D1/06
    • H01L21/78B06B1/0622Y10T29/42Y10T29/49016
    • An array ultrasonic transducer precursor includes a body of piezoelectric material with a dielectric substrate bonded to a surface of the body. Circuit elements supported on the dielectric substrate include, in an active region, physically parallel signal conductors arranged in a pattern with spaces between adjacent ones of the conductors. Dicing saw cuts made in these spaces define individual circuit elements within the piezoelectric body. The circuit elements outside the active region include a set of resistive alignment elements in predetermined positions with reference to the pattern of signal conductors. The transducer precursor is mounted in a dicing saw fixture, and initial cuts made with the dicing saw remove portions of the resistive alignment elements. Locations of the initial cuts with reference to the resistive alignment elements are determined by measuring resistances of the resistive alignment elements after the initial cuts.
    • 阵列超声波换能器前体包括压电材料体,其中电介质基底结合到主体的表面。 支撑在电介质基片上的电路元件在有源区域中包括物理上平行的信号导体,其布置成具有在相邻导体之间的间隔的图案。 在这些空间中制成的切割锯切口限定了压电体内的各个电路元件。 有源区域之外的电路元件包括参考信号导体图案的预定位置的一组电阻对准元件。 换能器前体安装在切割锯夹具中,用切割锯制成的初始切口去除电阻对准元件的部分。 参考电阻对准元件的初始切割的位置通过在初始切割之后测量电阻对准元件的电阻来确定。