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1. 发明授权

US07522650B2 Gas discharge laser chamber improvements 有权
公开(公告)号：US07522650B2
公开(公告)日：2009-04-21
申请号：US10815387
申请日：2004-03-31
申请人： William N. Partlo , Yoshiho Amada , James A. Carmichael , Timothy S. Dyer , Walter D. Gillespie , Bryan G. Moosman , Richard G. Morton , Curtis L. Rettig , Brian D. Strate , Thomas D. Steiger , Fedor Trintchouk , Richard C. Ujazdowski
发明人： William N. Partlo , Yoshiho Amada , James A. Carmichael , Timothy S. Dyer , Walter D. Gillespie , Bryan G. Moosman , Richard G. Morton , Curtis L. Rettig , Brian D. Strate , Thomas D. Steiger , Fedor Trintchouk , Richard C. Ujazdowski
IPC分类号： H01S3/22
CPC分类号： H01S3/036 , H01S3/0384 , H01S3/041 , H01S3/0971 , H01S3/225
摘要： A method and apparatus if disclosed which may comprise a high power high repetition rate gas discharge laser UV light source which may comprise: a gas discharge chamber comprising an interior wall comprising a vertical wall and an adjacent bottom wall; a gas circulation fan creating a gas flow path adjacent the interior vertical wall and the adjacent bottom wall; an in-chamber dust trap positioned a region of low gas flow, which may be along an interior wall and may comprise at least one meshed screen, e.g., a plurality of meshed screens, which may comprise at least two different gauge meshed screens. The dust trap may extend along the bottom interior wall of the chamber and/or a vertical portion of the interior wall. The dust trap may comprise a first meshed screen having a first gauge; a second meshed screen having a second gauge smaller than the first gauge; and the second meshed screen intermediate the first meshed screen and the interior wall. The chamber may comprise a plurality of dust collecting recesses in at least one of the vertical interior wall and the bottom wall of the chamber which may be selected from a group comprising a one-part recess and a multi-part recess, which may comprise two sections angled with respect to each other. The dust trap may comprise a pressure trap positioned between a portion of a main insulator and an interior wall of the chamber. The chamber may comprise a gas circulating fan comprising a cross-flow fan with a fan cutoff that may comprise a vortex control pocket. The chamber may comprise a preionization mechanism comprising a preionization tub containing a ground rod within an elongated opening in the preionization tube that may comprise a compliant member, an automatic preionization shut-off mechanism, a preionization onset control mechanism and/or a focusing element. The chamber may comprise an elongated baffle plate that may comprise a plurality of pyramidal structures including varying numbers of generally pyramidal elements and oriented in groups of varying numbers of generally pyramidal elements and oriented along and transverse to the longitudinal axis. Acoustic resonances within the chamber may also be reduced by introducing an artificial jitter into the timing of the laser discharges varying the inter-pulse period randomly or in a repeating pattern from pulse to pulse within a burst.

2. 发明授权

US07706424B2 Gas discharge laser system electrodes and power supply for delivering electrical energy to same 有权
标题翻译：气体放电激光系统电极和用于将电能传递到相同的电源
公开(公告)号：US07706424B2
公开(公告)日：2010-04-27
申请号：US11241850
申请日：2005-09-29
申请人： Yoshiho Amada , James A. Carmichael , Richard G. Morton , Richard M. Ness
发明人： Yoshiho Amada , James A. Carmichael , Richard G. Morton , Richard M. Ness
IPC分类号： H01S3/22 , H02G3/04
CPC分类号： H01S3/03 , H01S3/0381 , H01S3/0388 , H01S3/225
摘要： A apparatus and method are disclosed which may comprise a fluorine gas discharge laser system and electrode support system which may comprise a first electrode electrically connected to a source of high voltage; a first insulating mechanism insulating the first electrode from ground; a second electrode electrically insulated from the source of high voltage and together with the first electrode forming an elongated discharge region between portions of the first and second electrodes respectively extending along a longitudinal axis of each of the first and second electrodes, defining electrode discharge receiving region end portions; a plurality of current return tines electrically connected to the second electrode and to ground, the tines distributed along the longitudinal extent of the elongated discharge region; a second insulating mechanism electrically isolating the second electrode from ground except through the plurality of current return tines.
摘要翻译：公开了一种可以包括氟气放电激光器系统和电极支撑系统的装置和方法，该系统可以包括电连接到高电压源的第一电极; 将第一电极与地绝缘的第一绝缘机构; 与第一电极电绝缘的第二电极，与第一电极一起形成分别沿第一和第二电极的纵向轴线延伸的第一和第二电极的部分之间的细长放电区，限定电极放电接收区域端部; 多个电流返回齿电连接到第二电极并接地，所述尖齿沿着细长放电区域的纵向范围分布; 除了通过多个电流返回齿之外，第二绝缘机构将第二电极与地电隔离。

3. 发明授权

US07339973B2 Electrodes for fluorine gas discharge lasers 有权
标题翻译：氟气放电激光电极
公开(公告)号：US07339973B2
公开(公告)日：2008-03-04
申请号：US10672182
申请日：2003-09-26
申请人： Richard G. Morton , Bryan Moosman , Timothy S. Dyer , James A. Carmichael , Jiping Zhang
发明人： Richard G. Morton , Bryan Moosman , Timothy S. Dyer , James A. Carmichael , Jiping Zhang
IPC分类号： H01S3/097 , H01S3/22
CPC分类号： H01S3/0385 , H01S3/036 , H01S3/038 , H01S3/0381 , H01S3/0382 , H01S3/0384 , H01S3/0388 , H01S3/097 , H01S3/09702 , H01S3/0971 , H01S3/225 , H01S3/2251
摘要： Fluorine gas discharge laser electrodes and electrode systems that may comprise a plurality of current return tangs extending for less than the respective length of the second elongated gas discharge electrode. In addition electrodes may comprise a first discharge shaping magnet mounted in a first elongated gas discharge electrode and a second discharge shaping magnet mounted in a second elongated gas discharge electrode. Also is an electrode may comprise a crown straddling the centerline axis between the pair of side walls and the pair of end walls, comprising a first material, forming at least a portion of the discharge region of the electrode and a pair of elongated high erosion regions on either side of the crown comprising a second material with a relatively higher erosion rate during gas discharge than that of the first material.
摘要翻译：氟气放电激光电极和电极系统，其可以包括延伸小于第二细长气体放电电极的相应长度的多个电流返回脚。此外，电极可以包括安装在第一细长气体放电电极中的第一放电成形磁体和安装在第二细长气体放电电极中的第二放电成形磁体。电极还可以包括跨越一对侧壁和一对端壁之间的中心线轴线的冠，包括形成电极的放电区域的至少一部分的第一材料和一对细长的高侵蚀区域在冠的任一侧包括在气体放电期间具有比第一材料的侵蚀速率更高的侵蚀速率的第二材料。

4. 发明授权

US06963595B2 Automatic gas control system for a gas discharge laser 失效
标题翻译：气体放电激光器自动气体控制系统
公开(公告)号：US06963595B2
公开(公告)日：2005-11-08
申请号：US10356168
申请日：2003-01-31
申请人： John A. Rule , Richard C. Morton , Vladimir V. Fleurov , Fedor Trintchouk , Toshihiko Ishihara , Alexander I. Ershov , James A. Carmichael
发明人： John A. Rule , Richard C. Morton , Vladimir V. Fleurov , Fedor Trintchouk , Toshihiko Ishihara , Alexander I. Ershov , James A. Carmichael
IPC分类号： H01L21/027 , G03F7/20 , H01S20060101 , H01S3/036 , H01S3/041 , H01S3/08 , H01S3/134 , H01S3/22 , H01S3/223 , H01S3/225 , H01S3/23
CPC分类号： H01S3/225 , G03F7/70025 , H01S3/036 , H01S3/041 , H01S3/08009 , H01S3/09702 , H01S3/2258 , H01S3/2333
摘要： An automatic F2 laser gas control, for a modular high repetition rate ultraviolet gas discharge laser. The laser gas control includes techniques, monitors, and processor for monitoring the F2 consumption rates through the operating life of the laser system. These consumption rates are used by a processor programmed with an algorithm to determine F2 injections needed to maintain laser beam quality within a delivery range. Preferred embodiments include F2 controls for a two-chamber MOPA laser system.
摘要翻译：用于模块化高重复率紫外线气体放电激光器的自动F 2激光气体控制。激光气体控制包括技术，监视器和处理器，用于在激光系统的使用寿命期间监视F 2消耗率。这些消耗速率由用算法编程的处理器用于确定在输送范围内保持激光束质量所需的F 2注射。优选实施例包括用于两室MOPA激光系统的F 2控制。

5. 发明授权

US5457430A Method and apparatus for reduction of light intensity decay in optical pumping devices 失效
标题翻译：用于减少光泵浦装置中的光强度衰减的方法和装置
公开(公告)号：US5457430A
公开(公告)日：1995-10-10
申请号：US337287
申请日：1994-11-10
申请人： Thomas C. English , Funming Li , Ronald E. White , James A. Carmichael
发明人： Thomas C. English , Funming Li , Ronald E. White , James A. Carmichael
IPC分类号： H03L7/26 , H01S1/06
CPC分类号： H03L7/26
摘要： Optical pumping devices use light reflected from reflecting surfaces to provide a portion of the light incident on the photodetector. Conventional optical pumping devices experience a decay, over time, of the initial light intensity incident on the photodetector. The optical pumping device of the invention experiences reduced light intensity decay. The invention passivates the reflecting surfaces to eliminate tarnish and oxidation by pretarnishing the surfaces or covering the surfaces with a material whose reflectivity does not vary over time, such as gold.
摘要翻译：光泵装置使用从反射表面反射的光以提供入射在光电检测器上的光的一部分。传统的光泵装置经历了入射到光电探测器上的初始光强度的衰减。本发明的光泵装置经受减少的光强衰减。本发明钝化了反射表面以通过预处理表面或用反射率不随时间变化的材料（例如金）覆盖表面来消除晦暗和氧化。

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