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1. 发明申请

US20070108387A1 Tunable x-ray fluorescence imager for multi-element analysis 审中-公开
标题翻译：可调谐X射线荧光成像仪用于多元素分析
公开(公告)号：US20070108387A1
公开(公告)日：2007-05-17
申请号：US11273639
申请日：2005-11-14
申请人： Wenbing Yun , Yuxin Wang , Michael Feser , Srivatsan Seshadri
发明人： Wenbing Yun , Yuxin Wang , Michael Feser , Srivatsan Seshadri
IPC分类号： G01J5/02
CPC分类号： G01N23/223 , G01N2223/076
摘要： A full-field x-ray fluorescence imager capable of recording high resolution maps of elemental concentrations with high signal to background in one image is described. Furthermore the methodology to have the same instrument record maps of different elements in series and how to register and overlay these maps properly is discussed.
摘要翻译：描述了一种全场X射线荧光成像器，其能够在一个图像中记录高信号到背景的元素浓度的高分辨率图。此外，讨论了具有相同仪器记录不同元素序列映射的方法，以及如何正确注册和覆盖这些映射。

2. 发明授权

US07443953B1 Structured anode X-ray source for X-ray microscopy 有权
标题翻译：用于X射线显微镜的结构阳极X射线源
公开(公告)号：US07443953B1
公开(公告)日：2008-10-28
申请号：US11609266
申请日：2006-12-11
申请人： Wenbing Yun , Frederick W. Duewer , Michael Feser , Andrei Tkachuk , Srivatsan Seshadri
发明人： Wenbing Yun , Frederick W. Duewer , Michael Feser , Andrei Tkachuk , Srivatsan Seshadri
IPC分类号： G21K5/04
CPC分类号： G21K7/00 , H01J35/08 , H01J2235/088
摘要： An x-ray source comprises a structured anode that has a thin top layer made of the desired target material and a thick bottom layer made of low atomic number and low density materials with good thermal properties. In one example, the anode comprises a layer of copper with an optimal thickness deposited on a layer of beryllium or diamond substrate. This structured target design allows for the use of efficient high energy electrons for generation of characteristic x-rays per unit energy deposited in the top layer and the use of the bottom layer as a thermal sink. This anode design can be applied to substantially increase the brightness of stationary, rotating anode or other electron bombardment-based sources where brightness is defined as number of x-rays per unit area and unit solid angle emitted by a source and is a key figure of merit parameter for a source.
摘要翻译： X射线源包括具有由所需目标材料制成的薄顶层的结构化阳极和由具有良好热性能的低原子序数和低密度材料制成的厚底层。在一个实例中，阳极包括沉积在铍或金刚石基底层上的最佳厚度的铜层。该结构化目标设计允许使用高效的高能电子来产生沉积在顶层中的每单位能量的特征x射线，以及使用底层作为散热器。该阳极设计可以应用于基本上增加固定的，旋转的阳极或其他基于电子轰击的源的亮度，其中亮度被定义为每单位面积的x射线数量和由源发射的单位立体角的数量，并且是来源的优点参数。

3. 发明授权

US07365909B2 Fabrication methods for micro compounds optics 有权
标题翻译：微复合光学制造方法
公开(公告)号：US07365909B2
公开(公告)日：2008-04-29
申请号：US10688187
申请日：2003-10-17
申请人： Wenbing Yun , Yuxin Wang , Michael Feser , Alan Lyon
发明人： Wenbing Yun , Yuxin Wang , Michael Feser , Alan Lyon
IPC分类号： G02B27/44
CPC分类号： G02B27/4211 , G02B3/08 , G02B27/4272 , G03F7/0005 , Y10S438/975
摘要： Methods for fabricating refractive element(s) and aligning the elements in a compound optic, typically to a zone plate element. The techniques are used for fabricating micro refractive, such as Fresnel, optics and compound optics including two or more optical elements for short wavelength radiation. One application is the fabrication of the Achromatic Fresnel Optic (AFO). Techniques for fabricating the refractive element generally include: 1) ultra-high precision mechanical machining, e.g,. diamond turning; 2) lithographic techniques including gray-scale lithography and multi-step lithographic processes; 3) high-energy beam machining, such as electron-beam, focused ion beam, laser, and plasma-beam machining; and 4) photo-induced chemical etching techniques. Also addressed are methods of aligning the two optical elements during fabrication and methods of maintaining the alignment during subsequent operation.
摘要翻译：用于制造折射元件并将复合光学元件中的元件对准的方法，通常与区域板元件对准。这些技术用于制造微折射，例如菲涅尔，光学和复合光学器件，包括用于短波长辐射的两个或更多个光学元件。一种应用是制造消色差菲涅耳光（AFO）。用于制造折射元件的技术通常包括：1）超高精度机械加工，例如钻石车削 2）光刻技术，包括灰阶光刻和多步光刻工艺; 3）高能束加工，如电子束，聚焦离子束，激光和等离子束加工; 和4）光诱导化学蚀刻技术。还涉及在制造期间对准两个光学元件的方法以及在随后的操作期间维持对准的方法。

4. 发明授权

US07813475B1 X-ray microscope with switchable x-ray source 有权
标题翻译：具有可切换x射线源的X射线显微镜
公开(公告)号：US07813475B1
公开(公告)日：2010-10-12
申请号：US12401740
申请日：2009-03-11
申请人： Ziyu Wu , Wenbing Yun , Peiping Zhu , Yuxin Wang , Qingxi Yuan , Andrei Tkachuk , Wanxia Huang , Michael Feser
发明人： Ziyu Wu , Wenbing Yun , Peiping Zhu , Yuxin Wang , Qingxi Yuan , Andrei Tkachuk , Wanxia Huang , Michael Feser
IPC分类号： G01N23/04
CPC分类号： G21K7/00 , H01J2235/00
摘要： An x-ray imaging system uses a synchrotron radiation beam to acquire x-ray images and at least one integrated x-ray source. The system has an imaging system including sample stage controlled by linear translation stages, objective x-ray lens, and x-ray sensitive detector system, placed on a fixed optical table and a mechanical translation stage system to switch x-ray sources when synchrotron radiation beam is not available.
摘要翻译： X射线成像系统使用同步加速器辐射束来获取x射线图像和至少一个集成的x射线源。该系统具有成像系统，包括由线性平移台控制的样本台，物镜X射线透镜和x射线敏感探测器系统，放置在固定的光学平台和机械平移台系统上以在同步加速器辐射时切换x射线源光束不可用。

5. 发明申请

US20080094694A1 Fabrication Methods for Micro Compound Optics 审中-公开
标题翻译：微复合光学制造方法
公开(公告)号：US20080094694A1
公开(公告)日：2008-04-24
申请号：US11958544
申请日：2007-12-18
申请人： Wenbing Yun , Yuxin Wang , Michael Feser , Alan Lyon
发明人： Wenbing Yun , Yuxin Wang , Michael Feser , Alan Lyon
IPC分类号： G02B27/44
CPC分类号： G02B27/4211 , G02B3/08 , G02B27/4272 , G03F7/0005 , Y10S438/975
摘要： Methods for fabricating refractive element(s) and aligning the elements in a compound optic, typically to a zone plate element. The techniques are used for fabricating micro refractive, such as Fresnel, optics and compound optics including two or more optical elements for short wavelength radiation. One application is the fabrication of the Achromatic Fresnel Optic (AFO). Techniques for fabricating the refractive element generally include: 1) ultra-high precision mechanical machining, e.g,. diamond turning; 2) lithographic techniques including gray-scale lithography and multi-step lithographic processes; 3) high-energy beam machining, such as electron-beam, focused ion beam, laser, and plasma-beam machining; and 4) photo-induced chemical etching techniques. Also addressed are methods of aligning the two optical elements during fabrication and methods of maintaining the alignment during subsequent operation.
摘要翻译：用于制造折射元件并将复合光学元件中的元件对准的方法，通常与区域板元件对准。这些技术用于制造微折射，例如菲涅尔，光学和复合光学器件，包括用于短波长辐射的两个或更多个光学元件。一种应用是制造消色差菲涅耳光（AFO）。用于制造折射元件的技术通常包括：1）超高精度机械加工，例如钻石车削 2）光刻技术，包括灰阶光刻和多步光刻工艺; 3）高能束加工，如电子束，聚焦离子束，激光和等离子束加工; 和4）光诱导化学蚀刻技术。还涉及在制造期间对准两个光学元件的方法以及在随后的操作期间维持对准的方法。

6. 发明申请

US20050282300A1 Back-end-of-line metallization inspection and metrology microscopy system and method using x-ray fluorescence 审中-公开
标题翻译：后端金属化检测和计量显微镜系统和使用X射线荧光的方法
公开(公告)号：US20050282300A1
公开(公告)日：2005-12-22
申请号：US11177227
申请日：2005-07-08
申请人： Wenbing Yun , Yuxin Wang , Michael Feser , Kenneth Nill
发明人： Wenbing Yun , Yuxin Wang , Michael Feser , Kenneth Nill
IPC分类号： G01N23/225 , G01R31/26 , G06F19/00 , H01L21/44 , H01L21/66
CPC分类号： G01N23/2252
摘要： Systems and methods for performing inspection and metrology operations on metallization processes such as on back-end-of-line (BEOL) metallization thickness and step coverage are disclosed. Specific examples include measurements of thickness and uniformity of barrier layers, including tantalum for example, and seed layers, including copper for example, in Damascene, including dual-Damascene, trenches during the interconnect fabrication steps of integrated circuit production. The invention also relates to the detection and measurement of void formation during and after copper electroplating. The invention utilizes x-ray fluorescence to measure the absolute thicknesses and the thickness uniformity of the barrier layers in the trenches, the copper seed layers for electroplating, and the final copper interconnects.
摘要翻译：公开了用于对金属化过程进行检查和计量操作的系统和方法，例如在后端（BEOL）金属化厚度和台阶覆盖。具体实例包括例如包括钽的阻挡层的厚度和均匀性的测量，以及例如在镶嵌中的包括铜的种子层（包括双镶嵌），在集成电路生产的互连制造步骤期间的沟槽。本发明还涉及在铜电镀期间和之后的空隙形成的检测和测量。本发明利用x射线荧光来测量沟槽中的势垒层的绝对厚度和厚度均匀性，用于电镀的铜籽晶层和最终的铜互连。

7. 发明授权

US07406151B1 X-ray microscope with microfocus source and Wolter condenser 有权
标题翻译：具有微焦源和Wolter冷凝器的X射线显微镜
公开(公告)号：US07406151B1
公开(公告)日：2008-07-29
申请号：US11533863
申请日：2006-09-21
申请人： Wenbing Yun , Yuxin Wang , Michael Feser , Frederick W. Duewer
发明人： Wenbing Yun , Yuxin Wang , Michael Feser , Frederick W. Duewer
IPC分类号： G21K7/00
CPC分类号： G21K7/00 , G21K1/06
摘要： An x-ray microscope uses a microfocus x-ray source with a focus spot of less than 10 micrometers and a Wolter condenser having a magnification of about four or more for concentrating x-rays from the source onto a sample. A detector is provided for detecting the x-rays after interaction with the sample, and an x-ray objective is used to form an image of the sample on the detector. The use of the Wolter optic addresses a problem with microfocus sources that arise when the size of the focal spot that must then be imaged onto the sample with the condenser is smaller than the field of view.
摘要翻译： x射线显微镜使用聚焦点小于10微米的微焦点X射线源和具有约四或更大的放大倍数的Wolter冷凝器，用于将来自源的x射线集中到样品上。提供检测器，用于在与样品相互作用之后检测x射线，并且使用x射线物镜在检测器上形成样品的图像。使用Wolter光学器件解决了当聚焦器必须成像到样品上的焦点的尺寸小于视场时产生的微焦点源的问题。

8. 发明授权

US07796725B1 Mechanism for switching sources in x-ray microscope 有权
标题翻译： x射线显微镜切换源的机制
公开(公告)号：US07796725B1
公开(公告)日：2010-09-14
申请号：US12401750
申请日：2009-03-11
申请人： Ziyu Wu , Wenbing Yun , Peiping Zhu , Yuxin Wang , Qingxi Yuan , Andrei Tkachuk , Wanxia Huang , Michael Feser
发明人： Ziyu Wu , Wenbing Yun , Peiping Zhu , Yuxin Wang , Qingxi Yuan , Andrei Tkachuk , Wanxia Huang , Michael Feser
IPC分类号： G21K7/00
CPC分类号： G21K7/00 , H01J2235/00
摘要： An x-ray imaging system uses a synchrotron radiation beam to acquire x-ray images and at least one integrated x-ray source. The system has an imaging system including sample stage controlled by linear translation stages, objective x-ray lens, and x-ray sensitive detector system, placed on a fixed optical table and a mechanical translation stage system to switch x-ray sources when synchrotron radiation beam is not available.
摘要翻译： X射线成像系统使用同步加速器辐射束来获取x射线图像和至少一个集成的x射线源。该系统具有成像系统，包括由线性平移台控制的样本台，物镜X射线透镜和x射线敏感探测器系统，放置在固定的光学平台和机械平移台系统上以在同步加速器辐射时切换x射线源光束不可用。

9. 发明授权

US08068579B1 Process for examining mineral samples with X-ray microscope and projection systems 有权
标题翻译：用X射线显微镜和投影系统检查矿物样品的方法
公开(公告)号：US08068579B1
公开(公告)日：2011-11-29
申请号：US12421380
申请日：2009-04-09
申请人： Wenbing Yun , Michael Feser , Andrei Tkachuk , Thomas A. Case , Frederick W. Duewer , Hauyee Chang
发明人： Wenbing Yun , Michael Feser , Andrei Tkachuk , Thomas A. Case , Frederick W. Duewer , Hauyee Chang
IPC分类号： G01N23/00
CPC分类号： G01N23/046 , G01N2223/419
摘要： A process to determine the porosity and/or mineral content of mineral samples with an x-ray CT system is described. Based on the direct-projection techniques that use a spatially-resolved x-ray detector to record the x-ray radiation passing through the sample, 1 micrometer or better resolution is achievable. Furthermore, by using an x-ray objective lens to magnify the x-ray image in a microscope configuration, a higher resolution of up to 50 nanometers or more is achieved with state-of-the-art technology. These x-ray CT techniques directly obtain the 3D structure of the sample with no modifications to the sample being necessary. Furthermore, fluid or gas flow experiments can often be conducted during data acquisition so that one may perform live monitoring of the physical process in 3D.
摘要翻译：描述了使用X射线CT系统确定矿物样品的孔隙率和/或矿物质含量的方法。基于使用空间分辨的X射线检测器记录通过样品的x射线辐射的直接投影技术，可以实现1微米或更好的分辨率。此外，通过使用x射线物镜以显微镜配置放大X射线图像，通过最先进的技术实现高达50纳米或更高的分辨率。这些X射线CT技术直接获得样品的3D结构，而不需要对样品进行修改。此外，流体或气体流动实验通常可以在数据采集期间进行，以便可以对3D中的物理过程进行实时监测。

10. 发明授权

US07787588B1 System and method for quantitative reconstruction of Zernike phase-contrast images 有权
标题翻译： Zernike相位对比图像的定量重建系统和方法
公开(公告)号：US07787588B1
公开(公告)日：2010-08-31
申请号：US12506946
申请日：2009-07-21
申请人： Wenbing Yun , Michael Feser , Benjamin Hornberger
发明人： Wenbing Yun , Michael Feser , Benjamin Hornberger
IPC分类号： G21K7/00 , G01N23/00
CPC分类号： G21K7/00 , G01N23/046 , G01N2223/419
摘要： The principle of reciprocity states that full-field and scanning microscopes can produce equivalent images by interchanging the roles of condenser and detector. Thus, the contrast transfer function inversion previously used for images from scanning systems can be applied to Zernike phase contrast images. In more detail, a full-field x-ray imaging system for quantitatively reconstructing the phase shift through a specimen comprises a source that generates x-ray radiation, a condenser x-ray lens for projecting the x-ray radiation onto the specimen, an objective x-ray lens for imaging the x-ray radiation transmitted through the specimen, a phase-shifting device to shift the phase of portions of x-ray radiation by a determined amount, and an x-ray detector that detects the x-ray radiation transmitted through the specimen to generate a detected image. An image processor then determines a Fourier filtering function and reconstructs the quantitative phase shift through the specimen by application of the Fourier filtering function to the detected image. As a result, artifacts due to absorption contrast can be removed from the detecting image. This corrected image can then be used in generating three dimensional (3D) images using computed tomography.
摘要翻译：互惠原则指出，全场和扫描显微镜可以通过交换冷凝器和检测器的作用来产生等效的图像。因此，先前用于来自扫描系统的图像的对比度传递函数反演可以应用于Zernike相位对比图像。更详细地，用于定量重建通过样本的相移的全场x射线成像系统包括产生x射线辐射的源，用于将X射线辐射投射到样本上的聚光器x射线透镜，用于对通过样本透射的x射线辐射进行成像的物镜X射线透镜，将X射线辐射部分的相位偏移确定量的相移装置，以及检测x射线的X射线检测器透射通过样品的辐射以产生检测到的图像。然后，图像处理器确定傅里叶滤波函数，并通过对检测图像应用傅里叶滤波函数来重建通过样本的定量相移。结果，可以从检测图像中去除由吸收对比度引起的假象。然后可以使用计算机断层扫描来将该校正后的图像用于生成三维（3D）图像。

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