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    • 1. 发明申请
    • POWER SUPPLY APPARATUS HAVING MULTIPLE POWER OUTPUT DEVICES
    • 具有多个电力输出装置的电源装置
    • US20070270003A1
    • 2007-11-22
    • US11534104
    • 2006-09-21
    • Wen-Hsiang LinSzu-Lu HuangHung-Chang Hsieh
    • Wen-Hsiang LinSzu-Lu HuangHung-Chang Hsieh
    • H01R13/648
    • H01R13/6272H01R13/639
    • A power supply apparatus includes a main body, a power input device, a first power output device and a second power output device. The power input device is coupled to an input terminal of the main body. The first power output device includes a first cable and a first connector. The first cable is interconnected between a first output terminal of the main body and a first surface of the first connector. An extension part is extended from the first surface of the first connector. The second power output device includes a second cable and a second connector. A first surface of the second connector is suppressed by the extension part of the first connector to facilitate securely fixing the first connector and the second connector in a power socket, so that a regulated output voltage is outputted from the first and second output devices to the power socket.
    • 电源装置包括主体,电源输入装置,第一电力输出装置和第二电力输出装置。 电源输入装置耦合到主体的输入端子。 第一电力输出装置包括第一电缆和第一连接器。 第一电缆在主体的第一输出端子和第一连接器的第一表面之间互连。 延伸部分从第一连​​接器的第一表面延伸。 第二电力输出装置包括第二电缆和第二连接器。 第二连接器的第一表面被第一连接器的延伸部分抑制,以便将第一连接器和第二连接器牢固地固定在电源插座中,使得稳定的输出电压从第一和第二输出装置输出到 电源插座。
    • 7. 发明授权
    • Method of in line intra-field correction of overlay alignment
    • 在线校正叠加对齐的方法
    • US5894350A
    • 1999-04-13
    • US097143
    • 1998-06-12
    • Hung-Chang HsiehShinn-Sheng Yu
    • Hung-Chang HsiehShinn-Sheng Yu
    • G03F7/20G03F9/00G01B11/00
    • G03F7/70633G03F9/70
    • This invention describes a method of making intra-field corrections to the alignment of a step and repeat projection system used to expose image fields on an integrated circuit wafer. A first pattern having first image fields and first alignment marks is formed on a wafer. A mask having a second image field and second alignment marks is projected on the wafers, having a layer of photoresist formed thereon, using light which will not expose the photoresist. The relative location of the second alignment marks to the second image field is the same as the relative location of the first alignment marks to the first image field. A detectors, comprising an interferometer, determines the displacement vector between the first alignment marks and the corresponding second alignment marks. The displacement vectors are fed to a computer which computes a translation correction, a rotation correction, and a magnification correction for the alignment of the mask to the wafer. After the corrections are made the photoresist is exposed by projecting light which will expose the photoresist.
    • 本发明描述了对用于在集成电路晶片上曝光图像场的步骤和重复投影系统的对准进行场内校正的方法。 具有第一图像场和第一对准标记的第一图案形成在晶片上。 具有第二图像场和第二对准标记的掩模使用不会暴露光致抗蚀剂的光而投影在具有形成在其上的光致抗蚀剂层的晶片上。 第二对准标记与第二图像场的相对位置与第一对准标记与第一图像场的相对位置相同。 包括干涉仪的检测器确定第一对准标记和对应的第二对准标记之间的位移矢量。 位移矢量被馈送到计算机,该计算机计算平移校正,旋转校正和用于掩模对晶片对准的倍率校正。 在进行校正之后,光致抗蚀剂通过投射将暴露光致抗蚀剂的光曝光。