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1. 发明申请

US20120154951A1 METHOD FOR MANUFACTURING A PERPENDICULAR MAGNETIC WRITE POLE HAVING A WRITE POLE AND TRAILING SHIELD WITH A TAPERED TRAILING GAP 审中-公开
标题翻译：用于制作具有写入轨迹的具有写入点和跟踪屏蔽的贯通磁性写入点的方法
公开(公告)号：US20120154951A1
公开(公告)日：2012-06-21
申请号：US12975010
申请日：2010-12-21
申请人： Wen-Chien D. Hsiao , Fenglin Liu , Aron Pentek , Yi Zheng
发明人： Wen-Chien D. Hsiao , Fenglin Liu , Aron Pentek , Yi Zheng
IPC分类号： G11B5/187 , G11B5/255 , G11B5/127
CPC分类号： G11B5/3116 , G11B5/1278 , G11B5/3146 , G11B5/3163
摘要： A method for manufacturing a magnetic write head having a that has a write pole with a tapered trailing edge in a pole tip region, and a trailing shield that has a leading edge that tapers away from the write pole at an angle that is greater than that taper angle of the trailing edge of the write pole. The magnetic head has a step feature with a front edge that is recessed from the ABS. In one embodiment a magnetic wedge is formed over the tapered surface of the write pole. In another embodiment, a non-magnetic bump is formed over a first tapered portion of the write pole adjacent to the front edge of the step feature, and a non-magnetic wedge is formed over a second tapered portion of the write pole and extends from the non-magnetic bump to the air bearing surface.
摘要翻译：一种用于制造具有在磁极尖端区域具有锥形后缘的写入极的磁性写入头的方法，以及具有与所述写入磁极成角度大于所述磁极尖端的角度的前缘从所述写入磁极分离的前缘的后挡板。写极后缘的锥角。磁头具有台阶特征，其前缘从ABS凹入。在一个实施例中，磁楔形成在写极的锥形表面上。在另一个实施例中，非磁性凸块形成在与步极特征的前边缘相邻的写磁极的第一锥形部分上方，并且非磁性楔形成在写极的第二锥形部分之上并且从非磁性凸块到空气轴承表面。

2. 发明申请

US20110151279A1 MAGNETIC WRITE HEAD MANUFACTURED BY AN ENHANCED DAMASCENE PROCESS PRODUCING A TAPERED WRITE POLE WITH A NON-MAGNETIC SPACER AND NON-MAGNETIC BUMP 有权
标题翻译：通过增强的大面积工艺制造的磁性写头，用非磁性间隔器和非磁性块形成带状写入点
公开(公告)号：US20110151279A1
公开(公告)日：2011-06-23
申请号：US12641251
申请日：2009-12-17
申请人： Donald G. Allen , Amanda Baer , Yingjian Chen , Andrew Chiu , Liubo Hong , Wen-Chien D. Hsiao , Edward H.P. Lee , Fenglin Liu , Aron Pentek , Katalin Pentek , Kyusik Shin , Yi Zheng , Qiping Zhong , Honglin Zhu
发明人： Donald G. Allen , Amanda Baer , Yingjian Chen , Andrew Chiu , Liubo Hong , Wen-Chien D. Hsiao , Edward H.P. Lee , Fenglin Liu , Aron Pentek , Katalin Pentek , Kyusik Shin , Yi Zheng , Qiping Zhong , Honglin Zhu
IPC分类号： G11B5/33
CPC分类号： G11B5/3163 , G11B5/112 , G11B5/1278 , G11B5/3116 , G11B5/314 , G11B5/3143 , G11B5/3146 , G11B5/315 , Y10T428/11 , Y10T428/1171
摘要： A magnetic write head having a tapered trailing edge and having a magnetic layer formed over a trailing edge of the write pole at a location recessed from the ABS, the magnetic layer being separated from the trailing edge of the write pole by a thin non-magnetic layer. The thin non-magnetic layer is preferably sufficiently thin that the magnetic layer can function as a portion of the write pole in a region removed from the ABS. A trailing magnetic shield is formed over the write pole and is separated from the write pole by a non-magnetic trailing gap layer. A non-magnetic spacer layer can be formed over the magnetic layer to provide additional separation between the magnetic layer and the trailing magnetic shield.
摘要翻译：一种具有锥形后缘并具有磁性层的磁性写头，该磁性层形成在从ABS的凹陷处的写入极的后缘上，该磁性层通过薄的非磁性的方式与写入极的后缘分离层。薄的非磁性层优选地足够薄，使得磁性层可以在从ABS去除的区域中用作写入极的一部分。尾磁屏蔽形成在写极上，并且通过非磁性拖尾间隙层与写极分离。可以在磁性层之上形成非磁性间隔层，以在磁性层和尾部磁屏蔽之间提供额外的间隔。

3. 发明授权

US08547660B2 Magnetic write head manufactured by an enhanced damascene process producing a tapered write pole with a non-magnetic spacer and non-magnetic bump 有权
标题翻译：通过增强的镶嵌工艺制造的磁性写头，其产生具有非磁性间隔物和非磁性凸块的锥形写柱
公开(公告)号：US08547660B2
公开(公告)日：2013-10-01
申请号：US12641251
申请日：2009-12-17
申请人： Donald G. Allen , Amanda Baer , Yingjian Chen , Andrew Chiu , Liubo Hong , Wen-Chien D. Hsiao , Edward H. P. Lee , Fenglin Liu , Aron Pentek , Katalin Pentek , Kyusik Shin , Yi Zheng , Qiping Zhong , Honglin Zhu
发明人： Donald G. Allen , Amanda Baer , Yingjian Chen , Andrew Chiu , Liubo Hong , Wen-Chien D. Hsiao , Edward H. P. Lee , Fenglin Liu , Aron Pentek , Katalin Pentek , Kyusik Shin , Yi Zheng , Qiping Zhong , Honglin Zhu
IPC分类号： G11B5/127
CPC分类号： G11B5/3163 , G11B5/112 , G11B5/1278 , G11B5/3116 , G11B5/314 , G11B5/3143 , G11B5/3146 , G11B5/315 , Y10T428/11 , Y10T428/1171
摘要： A magnetic write head having a tapered trailing edge and having a magnetic layer formed over a trailing edge of the write pole at a location recessed from the ABS, the magnetic layer being separated from the trailing edge of the write pole by a thin non-magnetic layer. The thin non-magnetic layer is preferably sufficiently thin that the magnetic layer can function as a portion of the write pole in a region removed from the ABS. A trailing magnetic shield is formed over the write pole and is separated from the write pole by a non-magnetic trailing gap layer. A non-magnetic spacer layer can be formed over the magnetic layer to provide additional separation between the magnetic layer and the trailing magnetic shield.
摘要翻译：一种具有锥形后缘并具有磁性层的磁性写头，该磁性层形成在从ABS的凹陷处的写入极的后缘上，该磁性层通过薄的非磁性的方式与写入极的后缘分离层。薄的非磁性层优选地足够薄，使得磁性层可以在从ABS去除的区域中用作写入极的一部分。尾磁屏蔽形成在写极上，并且通过非磁性拖尾间隙层与写极分离。可以在磁性层之上形成非磁性间隔层，以在磁性层和尾部磁屏蔽之间提供额外的间隔。

4. 发明授权

US08201320B2 Method for manufacturing a magnetic write head having a wrap around shield that is magnetically coupled with a leading magnetic shield 有权
标题翻译：一种用于制造具有与领先磁屏蔽磁耦合的围绕屏蔽的磁性写入头的方法
公开(公告)号：US08201320B2
公开(公告)日：2012-06-19
申请号：US12641242
申请日：2009-12-17
申请人： Donald G. Allen , Yingjian Chen , Andrew Chiu , Liubo Hong , Wen-Chien D. Hsiao , Edward H. P. Lee , Fenglin Liu , Katalin Pentek , Kyusik Shin , Yi Zheng , Qiping Zhong , Honglin Zhu
发明人： Donald G. Allen , Yingjian Chen , Andrew Chiu , Liubo Hong , Wen-Chien D. Hsiao , Edward H. P. Lee , Fenglin Liu , Katalin Pentek , Kyusik Shin , Yi Zheng , Qiping Zhong , Honglin Zhu
IPC分类号： H04R31/00 , G11B5/127
CPC分类号： G11B5/11 , G11B5/1278 , G11B5/3116 , G11B5/3146 , G11B5/315 , G11B5/3163 , Y10T29/49039 , Y10T29/49043 , Y10T29/49044 , Y10T29/49046 , Y10T29/49048 , Y10T29/49052
摘要： A method for manufacturing a magnetic write head having a leading magnetic shield and a trailing magnetic shield that are arranged to prevent the lost of magnetic write field to the trailing magnetic shield. The write head includes a non-magnetic step layer that provides additional spacing between the trailing magnetic shield and the write pole at a region removed from the air bearing surface.
摘要翻译：一种用于制造具有前磁屏蔽和后磁屏蔽的磁写头的方法，该方法被布置为防止向后磁屏蔽的磁写磁场的损失。写头包括非磁性阶梯层，其在从空气轴承表面移除的区域处在后磁屏蔽和写极之间提供额外的间隔。

5. 发明申请

US20110146062A1 METHOD FOR MANUFACTURING A MAGNETIC WRITE HEAD HAVING A WRAP AROUND SHIELD THAT IS MAGNETICALLY COUPLED WITH A LEADING MAGNETIC SHIELD 有权
标题翻译：用于制造磁性写头的方法，该磁头具有与磁带的磁屏蔽磁耦合的磁带
公开(公告)号：US20110146062A1
公开(公告)日：2011-06-23
申请号：US12641242
申请日：2009-12-17
申请人： Donald G. Allen , Yingjian Chen , Andrew Chiu , Liubo Hong , Wen-Chien D. Hsiao , Edward H.P. Lee , Fenglin Liu , Katalin Pentek , Kyusik Shin , Yi Zheng , Qiping Zhong , Honglin Zhu
发明人： Donald G. Allen , Yingjian Chen , Andrew Chiu , Liubo Hong , Wen-Chien D. Hsiao , Edward H.P. Lee , Fenglin Liu , Katalin Pentek , Kyusik Shin , Yi Zheng , Qiping Zhong , Honglin Zhu
IPC分类号： G11B5/127
CPC分类号： G11B5/11 , G11B5/1278 , G11B5/3116 , G11B5/3146 , G11B5/315 , G11B5/3163 , Y10T29/49039 , Y10T29/49043 , Y10T29/49044 , Y10T29/49046 , Y10T29/49048 , Y10T29/49052
摘要： A method for manufacturing a magnetic write head having a leading magnetic shield and a trailing magnetic shield that are arranged to prevent the lost of magnetic write field to the trailing magnetic shield. The write head includes a non-magnetic step layer that provides additional spacing between the trailing magnetic shield and the write pole at a region removed from the air bearing surface.
摘要翻译：一种用于制造具有前磁屏蔽和后磁屏蔽的磁写头的方法，该方法被布置为防止向后磁屏蔽的磁写磁场的损失。写头包括非磁性阶梯层，其在从空气轴承表面移除的区域处在后磁屏蔽和写极之间提供额外的间隔。

6. 发明申请

US20110120878A1 METHOD FOR MANUFACTURING A PERPENDICULAR MAGNETIC WRITE HEAD HAVING A TAPERED WRITE POLE AND NON-MAGNETIC BUMP STRUCTURE 有权
标题翻译：用于制造具有锥形写入点和非磁性结构的贯通磁头写头的方法
公开(公告)号：US20110120878A1
公开(公告)日：2011-05-26
申请号：US12623206
申请日：2009-11-20
申请人： Liubo Hong , Wen-Chien D. Hsiao , Yimin Hsu , Yi Zheng
发明人： Liubo Hong , Wen-Chien D. Hsiao , Yimin Hsu , Yi Zheng
IPC分类号： C23C14/34 , C25D5/34
CPC分类号： G11B5/1278 , G11B5/3116 , G11B5/3143 , G11B5/315 , G11B5/3163 , Y10T29/49048
摘要： A method for manufacturing a magnetic write head having a write pole and a trailing wrap around magnetic shield, and having a non-magnetic step layer and a non-magnetic bump to provide additional spacing between the write pole and the trailing wrap around shield at a location removed from the air bearing surface. A magnetic write pole material is deposited on a substrate and a non-magnetic step layer is deposited over the write pole. A reactive ion milling can he used to pattern the non-magnetic step layer to have a front edge that is located a desired distance from an air hearing surface. A patterning and ion milling process is then performed to define a write pole, and then a layer of alumina is deposited and ion milled to from a tapered, non-magnetic bump at the front the non-magnetic step layer.
摘要翻译：一种用于制造磁性写入头的方法，该写入磁头在磁屏蔽周围具有写入磁极和尾部缠绕，并且具有非磁性阶跃层和非磁性凸起，以在写入磁极和屏蔽之间的后续缠绕在一个位置从空气轴承表面移除。磁性写入极材料沉积在衬底上，非磁性步骤层沉积在写入极上。他可以使用反应离子研磨来对非磁性阶梯层进行图案化以具有位于距离空气听力表面所需距离的前边缘。然后进行图形化和离子研磨处理以限定写入极，然后沉积氧化铝层，并从非磁性阶梯层前面的锥形非磁性凸块离子研磨。

7. 发明授权

US08349197B2 Method for manufacturing a perpendicular magnetic write head having a tapered write pole and non-magnetic bump structure 有权
标题翻译：具有锥形写磁极和非磁性凸块结构的垂直写磁头的制造方法
公开(公告)号：US08349197B2
公开(公告)日：2013-01-08
申请号：US12623206
申请日：2009-11-20
申请人： Liubo Hong , Wen-Chien D. Hsiao , Yimin Hsu , Yi Zheng
发明人： Liubo Hong , Wen-Chien D. Hsiao , Yimin Hsu , Yi Zheng
IPC分类号： B44C1/22
CPC分类号： G11B5/1278 , G11B5/3116 , G11B5/3143 , G11B5/315 , G11B5/3163 , Y10T29/49048
摘要： A method for manufacturing a magnetic write head having a write pole and a trailing wrap around magnetic shield, and having a non-magnetic step layer and a non-magnetic bump to provide additional spacing between the write pole and the trailing wrap around shield at a location removed from the air bearing surface. A magnetic write pole material is deposited on a substrate and a non-magnetic step layer is deposited over the write pole. A reactive ion milling can he used to pattern the non-magnetic step layer to have a front edge that is located a desired distance from an air hearing surface. A patterning and ion milling process is then performed to define a write pole, and then a layer of alumina is deposited and ion milled to from a tapered, non-magnetic bump at the front the non-magnetic step layer.
摘要翻译：一种用于制造磁性写入头的方法，该写入磁头在磁屏蔽周围具有写入磁极和尾部缠绕，并且具有非磁性阶跃层和非磁性凸起，以在写入磁极和屏蔽之间的后续缠绕在一个位置从空气轴承表面移除。磁性写入极材料沉积在衬底上，非磁性步骤层沉积在写入极上。他可以使用反应离子研磨来对非磁性步骤层进行图案化以具有位于距离空气听力表面所需距离的前边缘。然后进行图形化和离子研磨处理以限定写入极，然后沉积氧化铝层，并从非磁性阶梯层前面的锥形非磁性凸块离子研磨。

8. 发明申请

US20130022840A1 METHOD FOR MANUFACTURING A MAGNETIC WRITE HEAD WITH A FLOATING LEADING SHIELD 审中-公开
标题翻译：用浮动导线制造磁头写头的方法
公开(公告)号：US20130022840A1
公开(公告)日：2013-01-24
申请号：US13187355
申请日：2011-07-20
申请人： Wen-Chien D. Hsiao , Ning Shi , Yi Zheng
发明人： Wen-Chien D. Hsiao , Ning Shi , Yi Zheng
IPC分类号： G11B5/33 , C25D5/02 , B05D5/12
CPC分类号： C25D5/022 , G11B5/3116 , G11B5/315 , G11B5/3163 , Y10T428/1186
摘要： A method for manufacturing a magnetic write head having a write pole with a tapered leading edge formed on a substrate having a tapered surface and a wrap-around, trailing magnetic shield. The method uses a multi-layer anti-reflective coating prior to formation of the shield so that reflection from the tapered surface of the substrate does not affect the lithography of the mask used to form the trailing shield. The multi-layer antireflective coating is constructed of materials that can be left in the finished head, thereby eliminating problems associated with removal of the anti-reflective coating.
摘要翻译：一种用于制造具有形成在具有锥形表面的基底上的锥形前缘的写入极和缠绕的磁性磁屏蔽的磁性写入头的制造方法。该方法在形成屏蔽之前使用多层抗反射涂层，使得来自衬底的锥形表面的反射不影响用于形成后屏蔽的掩模的光刻。多层抗反射涂层由可以留在成品头中的材料构成，从而消除与去除抗反射涂层有关的问题。

9. 发明申请

US20100157475A1 STEPPED MAIN POLE FOR PERPENDICULAR WRITE HEADS IN HARD DISK DRIVES AND METHOD OF MAKING SAME 有权
标题翻译：硬盘驱动器中的普通写入头的步进主要步骤及其制作方法
公开(公告)号：US20100157475A1
公开(公告)日：2010-06-24
申请号：US12342647
申请日：2008-12-23
申请人： Wen-Chien D. Hsiao , Ming Jiang , Sue S. Zhang , Yi Zheng
发明人： Wen-Chien D. Hsiao , Ming Jiang , Sue S. Zhang , Yi Zheng
IPC分类号： G11B5/127 , G03F7/20 , B44C1/22 , B32B37/14
CPC分类号： G11B5/3116 , G11B5/1278 , G11B5/3163 , Y10T156/10 , Y10T428/1171 , Y10T428/1186
摘要： A stepped main pole for a perpendicular write head and methods of making the stepped main pole. The stepped main pole has a main pole tip and a base portion. The main pole tip has a surface that forms part of the ABS and a first thickness. The base portion extends from the main pole tip and has a thickness that varies from the first thickness to a second thickness to form a slanted surface with an apex angle adjacent the main pole tip. By placing the base portion away from the ABS and providing a thickness that increases in a direction away from the ABS, the stepped pole can provide the necessary magnetic flux for writing, while avoiding undesired leakage and fringing. To form embodiments of the stepped main pole of the invention, a fluorine-based reactive ion etch (RIE) may be used. By using an RIE to define the stepped main pole, the apex angle can be better controlled and tight edge control can be achieved.
摘要翻译：用于垂直写头的梯级主极和制作阶梯式主极的方法。阶梯式主极具有主极尖和基部。主极尖具有形成ABS的一部分的表面和第一厚度。基部从主极尖延伸，并且具有从第一厚度变化到第二厚度的厚度，以形成邻近主极尖的顶角的倾斜表面。通过将基座部分远离ABS并且提供沿离开ABS的方向增加的厚度，台阶极可以提供必要的写入磁通量，同时避免不期望的泄漏和边缘。为了形成本发明的阶梯式主极的实施例，可以使用氟基反应离子蚀刻（RIE）。通过使用RIE来定义阶梯式主极，可以更好地控制顶角，并且可以实现紧密的边缘控制。

10. 发明授权

US08233234B2 Stepped main pole for perpendicular write heads in hard disk drives and method of making same 有权
标题翻译：用于硬盘驱动器中的垂直写入头的步进主极及其制造方法
公开(公告)号：US08233234B2
公开(公告)日：2012-07-31
申请号：US12342647
申请日：2008-12-23
申请人： Wen-Chien D. Hsiao , Ming Jiang , Sue S. Zhang , Yi Zheng
发明人： Wen-Chien D. Hsiao , Ming Jiang , Sue S. Zhang , Yi Zheng
IPC分类号： G11B5/127 , H01F10/08 , H01L43/12
CPC分类号： G11B5/3116 , G11B5/1278 , G11B5/3163 , Y10T156/10 , Y10T428/1171 , Y10T428/1186
摘要： A stepped main pole for a perpendicular write head and methods of making the stepped main pole. The stepped main pole has a main pole tip and a base portion. The main pole tip has a surface that forms part of the ABS and a first thickness. The base portion extends from the main pole tip and has a thickness that varies from the first thickness to a second thickness to form a slanted surface with an apex angle adjacent the main pole tip. By placing the base portion away from the ABS and providing a thickness that increases in a direction away from the ABS, the stepped pole can provide the necessary magnetic flux for writing, while avoiding undesired leakage and fringing. To form embodiments of the stepped main pole of the invention, a fluorine-based reactive ion etch (RIE) may be used. By using an RIE to define the stepped main pole, the apex angle can be better controlled and tight edge control can be achieved.
摘要翻译：用于垂直写头的梯级主极和制作阶梯式主极的方法。阶梯式主极具有主极尖和基部。主极尖具有形成ABS的一部分的表面和第一厚度。基部从主极尖延伸，并且具有从第一厚度变化到第二厚度的厚度，以形成邻近主极尖的顶角的倾斜表面。通过将基座部分远离ABS并且提供沿离开ABS的方向增加的厚度，台阶极可以提供必要的写入磁通量，同时避免不期望的泄漏和边缘。为了形成本发明的阶梯式主极的实施例，可以使用氟基反应离子蚀刻（RIE）。通过使用RIE来定义阶梯式主极，可以更好地控制顶角，并且可以实现紧密的边缘控制。

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